CN103763899B - Orthogonal circle ring array electromagnetic shielding optical window with two groups of circumscribed annulus and sub- annulus - Google Patents

Abstract

Orthogonal circle ring array electromagnetic shielding optical window with two groups of circumscribed annulus and sub- annulus belongs to electromangnetic spectrum field, and the basic annulus of different-diameter, connection annulus and filling annulus contiguity are arranged to make up metallic mesh and load on optical window transparent substrate surface；Basic annulus press two-dimensional quadrature arrange and in orientation at equal intervals from, connection unit is made up of the two circumscribed connections of connection annulus and is arranged by vertical alternately two-dimensional quadrature, adjacent basic annulus is connected by connection unit, and basic annulus has filling annulus with the space of connection unit；Basic annulus, connection annulus are with filling annulus by the circumscribed basic structure for connecting composition metallic mesh；It is provided with basic annulus and sub- annulus is connected with its inscribe；In the junction of the tangent connection of annulus, the metal reliably electrically connected between overlapping or setting guarantee metal ring tangent point by lines, it is ensured that all annulus are mutually conductive.Metallic mesh of the invention can significantly reduce the inhomogeneities of the spuious light distribution that grid level diffraction high is caused.

Description

Orthogonal circle ring array electromagnetic shielding optical window with two groups of circumscribed annulus and sub- annulus

Technical field

It is more particularly to a kind of that there is two groups of circumscribed annulus and sub- annulus the invention belongs to optical clear part electromagnetic shielding field Orthogonal circle ring array electromagnetic shielding optical window.

Background technology

With the increase of the broadening and intensity of electromagnetic wave application frequency spectrum, to space flight and aviation equipment, advanced optical instrument, communication The requirement more and more higher of the electromagnetic shielding optical window of the fields such as equipment, medical diagnostic equipment and secured facilities application, mainly requires While optical window has superpower broadband electromagnetic shielding capability, also with high light transmittance, to optical imagery, observation, visit The influence of survey is the smaller the better.Such as, in space flight and aviation equipment field aircraft optical window, it is necessary to high-quality is realized inside and outside cabin Electromagnetic signal is isolated, on the one hand shielding external electromagnetic interference and harmful electromagnetic signal, in order to avoid cause cabin inner electronic equipment to fail, one Electromagnetic signal appears optical window and causes electromagnetic leakage when aspect prevents cabin inner electronic equipment from working, but the translucency of optical window is that it is indispensable Function, electromagnetic shielding is carried out to optical window should as far as possible reduce influence to its transparency, not influence as far as possible particularly Optical detection or optical imagery function；Similar, the optical window of advanced optical instrument will also have light transmittance as high as possible and use up Image quality that may be low influences, to realize the detection and measurement of high-quality, while to prevent electromagnetic interference to instrument internal light The influence of electric explorer part；For Party and government offices, military commanding place, important R＆D institution secrecy Architectural Equipment, it is necessary to right The glass pane in its house carries out design of Electromagnetic Shielding, to prevent the electronic equipment work such as indoor electric brain while daylighting is ensured Important information causes to divulge a secret in electromagnetic radiation form to propagation outside window when making；Medical electric Magnetic isolation room optical window will ensure interior The electromagnetic wave overwhelming majority is shielded and prevents field operation personnel from being damaged health, etc. by electromagenetic wave radiation for a long time.At present this The electromagnetic shielding of class optical window is mainly using transparent conductive film, metal inducement transmission-type multi-layer film structure, the frequency selection of band resistance type Surface and the metallic mesh with the millimeter submillimeter cycle etc..

Transparent conductive film is a kind of transparent metal oxide film with tin indium oxide as main material, and being commonly applied to can See the transparent occasion of optical band, transmission region wider can not be taken into account, though with micro-wave screening wave band wider but shielding It is indifferent.Metal inducement transmission-type multi-layer film structure is realized to electromagnetism using multilayer thin metal film and deielectric-coating composite construction The shielding of ripple, stronger to low frequency microwave screening ability, transmission region is mainly visible ray and ultraviolet light, but light transmittance is not high.Frequently Rate selection surface band logical or bandstop filter function are realized using periodicity resonant element structure, due to its metal coverage rate compared with Height, interference electromagnetic wave that can well beyond reflective operation frequency band, but optics light transmittance is relatively low, reduces optical detection Image quality, difficulty is brought to optical image security, pattern-recognition, target search and tracking.In sum, while meeting light The broadband high transmission rate and wide-band of window are electromagnetically shielded two requirements, and above-mentioned each technical scheme exists substantially not enough.Compare For, the metallic mesh with the millimeter submillimeter cycle, because its period ratio interference electromagnetic wavelength is much smaller, it is possible to achieve stronger Low frequency broadband electromagnetic shielding；And the metallic mesh cycle is much larger than optical wavelength, it is ensured that the light transmittance of optical region. Therefore, the metallic mesh in millimeter submillimeter cycle has good electrically conducting transparent performance, can meet optical window to high transmission rate and width The requirement of frequency range electromagnetic shielding, is widely used in optical window electromangnetic spectrum field：

1. patent 03135313.5 " a kind of electromagnetic shielding observation window " substance or multi-metal silk screen and based semiconductor Quantum well structure is combined into electromagnetic armouring structure, the shield effectiveness within achievable 10GHz more than 50dB, and the structure is in visible ray The light transmittance in highly transmissive region reaches more than 50%.

2. patent 93242068.0 " electromagnetic shielding glass " presss from both sides conductive metal mesh between layer glass, is used in glass outer side Conductive transparent film is allowed to be bonded in constitute electromagnetic armouring structure on window frame of metal, and the structure has certain daylighting.

3. patent 94231862.5 " without Moire fringe electromagnetic shielding observation window " is using by the different wire netting of two number of layers It is placed in parallel, and their warps or parallel have certain angle, and Moire fringe phenomenon is overcome to reach, and realize apparent regarding It is wild.

4. patent 02157954.7 " high shielding effect Tempest glass " respectively has a strata carbonic ether in woven wire both sides Film, film outside respectively attaches one layer of glass, and last hot pressing forms electromagnetic armouring structure, and the structure reaches 60% in light transmittance In the case of, with stronger shield effectiveness.

5. patent 200610084149.8 " electromagnetic shielded film and its manufacture method " describes one kind by photoetching process The high transparency electromagnetic wave shield film with metal mesh pattern for being formed, the main purpose of the invention is to reduce metal consumption And overcome the environmental pollution caused using solidification glue between metal level and film substrate.

6. United States Patent (USP) US4871220 " Short wavelength pass filter having a metal mesh On a semiconducting substrate " describe a kind of metallic mesh with square structure, for realizing optical window Electromagnetism interference performance.

7. patent 201010239355.8 " a kind of electromagnetic shielding conformal optical window with longitude and latitude shape grid structure " description A kind of conformal electromagnetism with longitude and latitude shape metallic mesh structure realized by metallic mesh technology and conformal optics window setting technique Shielding optical window, mainly solves the Structure Designing Problem of conformal optics window metallic mesh, improves the electromagnetic shielding of conformal optics window Performance.

8. patent 200610010066.4 " having the electromagnetic shielding optical window of annulus metallic mesh structure " describes one kind Metallic mesh unit with annulus profile, the electro-magnetic screen function for realizing optical window；Compared to individual layer grid metallic mesh, Light transmittance and screening ability are improved, and the veiling glare that level diffraction high is caused also has obtained certain homogenizing.

9. patent 200810063988.0 " a kind of electromagnetic shielding optical window with double-layer pane metallic mesh structure " is retouched One kind is stated and optical window or transparent substrates both sides has been placed in parallel in by structural parameters identical grid metallic mesh or woven wire The electromagnetic shielding optical window of composition, while light transmittance is not reduced, is greatly improved electromagnetic shielding efficiency.

10. patent 200810063987.6 " a kind of electromagnetic shielding optical window with double-layer circular ring metallic mesh structure " is retouched Stated it is a kind of load on the electromagnetic shielding optical window that optical window both sides are constituted by two-layer annulus metallic mesh, solve high transmission rate and The problem that forceful electric power magnetic shield efficiency can not be taken into account simultaneously.

Hub-the spoke based on annulus unit of 11. Battelle research institutes of U.S. Jennifer I.Halman et al. exploitation Perceptual metallic mesh (Jennifer I.Halman etc., " Predicted and of type structure and many annulus overlapping configurations Measured transmission and diffraction by a metallic mesh coating " .Proc.SPIE, 2009,7302：73020Y-1~73020Y-8), and think, the structure may be such that grid level Diffraction fringe distribution homogenizing high, realize Low sidelobe, it is favourable to being imaged.

The Ian B.Murray of 12. Exotic Electro-Optics companies of the U.S., Arizona, USA university Victor Densmore and Vaibhav Bora et al. is reported to hub-spoke type arrangement and many annulus overlapping configurations jointly Perceptual grid introduces influence (the Ian B.Murray, Victor to diffraction characteristic after stochastic parameter distribution is designed Densmore, Vaibhav Bora et al., " Numerical comparision of grid pattern diffraction Effects through measurement and modeling with OptiScan software ", Proc.SPIE, 2011,8016：80160U-1~80160U-15), it is indicated that each annulus spacing and diameter random value within the specific limits, favorably In the uniformity for improving level Diffraction fringe distribution high.

Above-mentioned each scheme is due to using metallic mesh (or woven wire) as the core devices of shielding, it is possible to achieve preferably Effectiveness and certain light transmittance.But using metallic mesh (or woven wire) as electromagnetic armouring structure, just not It is evitable to be influenceed in optical region diffraction by grid.Because the cycle of metallic mesh is in millimeter or submillimeter magnitude, To realize light transmittance higher, its metal wire width is general in micron and sub-micrometer scale, and such structural parameters are in optics Wave band has very strong diffraction effect.Incident light overwhelming majority energy is transmitted by metallic mesh, and transmissive portion is spread out comprising zero level Light and level diffraction light high are penetrated, generally, zero level time diffraction light is the useful information for being imaged and observing, and level diffraction light high is then Veiling glare is constituted, interference is produced to being imaged and detecting.Therefore, the proportion shared by zero level time diffraction light should be as far as possible improved, together When, on the premise of level diffraction light high unavoidably occurs, level diffraction light distribution high is made as far as possible than more uniform, its formation Veiling glare turn into than more uniform background or noise.

Current metallic mesh is mainly traditional grid grid structure, such as the structure (patent that above-mentioned patent 1-6 is mainly used 7 structure, due to processing on curved surface, is a species grid structure), grid grid structure transmittancy is deposited with screening ability In intrinsic contradiction, it is difficult to while taking into account the level diffraction high of high transmission rate and forceful electric power magnetic shield efficiency, particularly grid grid Energy is concentrated mainly on mutually perpendicular two axle, and image quality is had a certain impact, or even in high imaging quality requirement Occasion is difficult to apply.Change grid diffraction characteristic is generally required and changes its architectural feature, " the tool of above-mentioned patent 200610010066.4 Having the electromagnetic shielding optical window of annulus metallic mesh structure " proposition metal ring is built into annulus metallic mesh, the side of improving The shortcoming of lattice metallic mesh level diffraction energy integrated distribution high, it is possible to alleviate the contradiction of its transmittancy and screening ability. In above-mentioned document 11 and 12, Jennifer I.Halman et al. and Ian B.Murray et al. are also proposed based on annulus list The metallic mesh structure of unit improves the uniformity of level Diffraction fringe distribution high, but Jennifer I.Halman et al. research It is monocycle circle arrangement structure, and orientation determines, its effect and patent to senior diffraction of regulation 200610010066.4 structures for proposing quite, although and the research of Ian B.Murray et al. further, propose random friendship Folded circular ring structure, makes circle diameter and spacing random distribution value within the specific limits, and realization further improves level diffraction high Distributing homogeneity, but the random distribution of circle diameter and spacing changes the uniformity that mesh is distributed, will infringement electromagnetic shielding effect Rate.

With the increasingly complexity of electromagnetic environment, exist to being electromagnetically shielded the requirement of transmittancy and electromagnetic shielding capability of optical window Improve constantly, especially equip field and advanced optical instrument field in Aero-Space, itd is required that optical window reaches 95% even While light transmittance higher, also influenceed with extremely low image quality, 30dB is realized in the microwave frequency range less than 20GHz Shield effectiveness above, this causes that existing technology is difficult to.Patent 200810063988.0 and patent 200810063987.6 employ the both sides composition that double-level-metal grid is placed in parallel in optical window transparent substrate or substrate, two-layer Metallic mesh has identical unit profile and structural parameters, and by optimizing the spacing of two-layer grid, realization does not reduce light transmittance While, electromagnetic shielding efficiency is greatly improved.But this double-deck grid structure spuious light distribution of level diffraction high still with Light transmittance identical individual layer grid quite, not exclusively meet the fields such as following Aero-Space equipment and advanced optical instrument to it is low into As the requirement of quality influence.

The content of the invention

It is an object of the invention to overcome the shortcomings of above-mentioned existing optical window electromangnetic spectrum scheme, especially for existing With the presence of the veiling glare that individual layer grid metallic mesh, individual layer annulus grid, double-layer pane and annulus grid level diffraction high are caused The problem of Relatively centralized is distributed, a kind of orthogonal circle ring array electromagnetic screen with two groups of circumscribed annulus and sub- annulus is researched and developed opacus Window, reaches the purpose for realizing that the depth homogenizing and extremely low image quality of level diffraction high influence.

The technical solution adopted by the present invention is：Using a kind of orthogonal circle ring array with two groups of circumscribed annulus and sub- annulus Electromagnetic shielding optical window, the metallic mesh in electromagnetic shielding optical window is by the metal ring of different-diameter respectively as basic annulus, company Connect annulus and filling annulus contiguity is arranged to make up and loads on optical window transparent substrate surface；Basic annulus presses two-dimensional quadrature arrangement simultaneously In orientation at equal intervals from；Connection unit is constituted by vertical alternately two-dimensional quadrature by the connection annulus of two circumscribed connections Arrangement；Adjacent basic annulus is connected by connection unit, and the two-dimensional quadrature orientation of connection unit is with the two dimension of basic annulus just Hand over orientation identical；The array spacings of connection unit are identical with basic circle ring array interval, each basic annulus with four One connection circumscribed connection of annulus of adjacent connection unit, of each connection unit connects the annulus base adjacent with two The circumscribed connection of this annulus；In space of the connection unit with basic annulus have one filling annulus, the filling annulus be connected Two connections annulus and two basic circumscribed connections of annulus of unit；Be provided with each basic annulus connected with its inscribe, The sub- annulus of metal, the sub- annulus that described basic annulus is connected with its inscribe collectively forms the basic of two-dimensional metallic grid structure Unit；A diameter of millimeter and submillimeter magnitude of described basic annulus, connection annulus, filling annulus and sub- annulus, it is described Basic annulus, connection annulus, filling annulus and the metal wire width of sub- annulus are micron and sub-micrometer scale；Described is vertical Alternately two-dimensional quadrature arrangement refers to that connection unit is arranged by two-dimensional quadrature, two connection annulus circle center line connecting directions of connection unit Two-dimensional quadrature orientation with connection unit is identical, and two of the adjacent connection unit connections in two-dimensional quadrature orientation Annulus circle center line connecting direction is orthogonal；Described circumscribed connection includes：1. two annulus are circumscribed and circumscribed point of contact at set two The connection metal of annulus connection, 2. two annulus are in seamless overlapping configuration in junction lines, and 3. two annulus are in junction lines While seamless overlapping configuration, the connection metal that two annulus are connected is set at overlapping place；Described inscribe connection includes：1. two The connection metal that two annulus are connected is set at annulus inscribe and inscribe point of contact, and 2. two annulus are overlapped in junction lines in seamless Structure, 3. two annulus the connection for connecting two annulus is set at overlapping place while junction lines are in seamless overlapping configuration Metal.

The above-mentioned electromagnetic shielding optical window of the orthogonal circle ring array with two groups of circumscribed annulus and sub- annulus, each described base Sub- annulus number is more than or equal to 2 in this unit, and diameter is identical or different, and the center of circle of adjacent sub- annulus and basic annulus are justified The angle that heart line is constituted is arbitrarily angled, and sub- annulus in different elementary cells is equal diameter or non-equal diameter annulus, individual Number is identical or different.

The above-mentioned electromagnetic shielding optical window of the orthogonal circle ring array with two groups of circumscribed annulus and sub- annulus, described is substantially single Adjacent sub- annulus circumscribed connection or intersecting in first.

As a kind of preferred structure, the above-mentioned electromagnetic shielding of the orthogonal circle ring array with two groups of circumscribed annulus and sub- annulus Optical window, the diameter of described elementary cell neutron annulus is identical, the center of circle of adjacent sub- annulus and basic annulus circle center line connecting institute group Into angle it is equal.

As a kind of preferred structure, the above-mentioned electromagnetic shielding of the orthogonal circle ring array with two groups of circumscribed annulus and sub- annulus Optical window, the sub- annulus number in described different elementary cells is identical, equal diameters.

As a kind of preferred structure, the above-mentioned electromagnetic shielding of the orthogonal circle ring array with two groups of circumscribed annulus and sub- annulus Optical window, the sub- annulus relative position in described different elementary cells is identical, and by pressing two dimension just after an elementary cell duplication Hand over arrangement.

As a kind of preferred structure, the above-mentioned electromagnetic shielding of the orthogonal circle ring array with two groups of circumscribed annulus and sub- annulus Optical window, the sub- annulus relative position in described neighboring unit cells is different, and and basic by one in two-dimensional mesh grid array Unit replicate after by two-dimensional quadrature arrange, wherein any one elementary cell relative to its neighboring unit cells in two dimensional surface Rotated to an angle around itself basic annulus center of circle.

As a kind of preferred structure, the above-mentioned electromagnetic shielding of the orthogonal circle ring array with two groups of circumscribed annulus and sub- annulus Optical window, described is identical relative to the angle that neighboring unit cells rotate with any elementary cell in a line.

The above-mentioned electromagnetic shielding optical window of the orthogonal circle ring array with two groups of circumscribed annulus and sub- annulus, described justifies substantially Ring, connection annulus, filling annulus, sub- annulus are constituted with metal is connected by the good alloy of electric conductivity, and alloy thickness is big In 100nm.

Novelty of the invention and good result are：

Novelty of the invention is：Metallic mesh in electromagnetic shielding optical window is made respectively by the metal ring of different-diameter For basic annulus, connection annulus and filling annulus contiguity are arranged to make up and load on optical window transparent substrate surface；Basic annulus is pressed Two-dimensional quadrature arrange and in orientation at equal intervals from；Connection unit is constituted by vertical by the connection annulus of two circumscribed connections Orthogonal is arranged for two-dimensional quadrature；Adjacent basic annulus is by connection unit connection, the two-dimensional quadrature orientation of connection unit and base The two-dimensional quadrature orientation of this annulus is identical；The array spacings of connection unit are identical with basic circle ring array interval, each base One connection circumscribed connection of annulus of this annulus connection unit adjacent with four, a connection annulus of each connection unit The basic annulus circumscribed connection adjacent with two；There is a filling between connected two basic annulus of connection unit Annulus, the filling annulus is connected annulus and two basic circumscribed connections of annulus with two of connection unit；Justify substantially at each Be provided with ring connected with its inscribe, the sub- annulus of metal, the sub- annulus that described basic annulus is connected with its inscribe collectively forms The elementary cell of two-dimensional metallic grid structure；A diameter of milli of described basic annulus, connection annulus, filling annulus and sub- annulus Rice and submillimeter magnitude, the metal wire width of described basic annulus, connection annulus, filling annulus and sub- annulus for micron and Sub-micrometer scale；Described vertical alternately two-dimensional quadrature arrangement refers to that connection unit is arranged by two-dimensional quadrature, the two of connection unit Individual connection annulus circle center line connecting direction is identical with the two-dimensional quadrature orientation of connection unit, and in two-dimensional quadrature orientation Two connection annulus circle center line connecting directions of adjacent connection unit are orthogonal；Described circumscribed connection includes：1. outside two annulus The connection metal for connecting two annulus is cut and is set at circumscribed point of contact, 2. two annulus are in seamless overlapping configuration in junction lines, 3. two annulus set the connection metal for connecting two annulus at overlapping place while junction lines are in seamless overlapping configuration； Described inscribe connection includes：1. the connection metal for connecting two annulus is set at two annulus inscribes and inscribe point of contact, 2. two circles Ring is in seamless overlapping configuration in junction lines, and 3. two annulus are being overlapped while junction lines are in seamless overlapping configuration Place sets the connection metal for connecting two annulus.The good result that novelty of the invention is produced focuses primarily upon homogenizing wire netting The level diffraction energy high distribution of grid, it is specific as follows：

Basic annulus is arranged as basic arrangement mode, and the connection that connection annulus is constituted with two-dimensional quadrature in metallic mesh The vertical alternately two-dimensional quadrature arrangement of unit, the level diffraction energy high that traditional grid metallic mesh can be overcome to exist is concentrated The shortcoming of distribution, the characteristic with good homogenizing level diffraction energy distribution high, basic annulus is pressed two-dimensional quadrature arrangement and is connected The vertical alternately two-dimensional quadrature arrangement of order unit collectively constitutes the basic structure of metallic mesh by circumscribed connection contiguity arrangement, When ensureing that light transmittance is identical, it is necessary to increase the diameter of each annulus compared with the structure of only single diameter circle ring array, each annulus The level diffraction energy high of array is reduced；Meanwhile, the circle diameter of each circle ring array can be adjusted, can effectively to wire netting The level diffraction energy high distribution of grid array structure is adjusted, and reaches the purpose of homogenizing level diffraction energy distribution high, and this is One of the reason for metallic mesh homogenizing of the present invention level diffraction energy high is distributed.

The basic knot of two-dimensional quadrature arrangement and connection unit array contiguity arrangement composition metallic mesh is pressed in basic annulus On the basis of structure, filling annulus is introduced, when ensureing that light transmittance is identical, compared with the structure of only single diameter circle ring array, needed Increase the diameter of each annulus, the level diffraction energy high of each circle ring array is reduced；Filling annulus, basic annulus and connection circle The diameter of ring meets certain relation, can carry out synthesis to the distribution of level diffraction high by zooming in or out for each circle diameter Regulation, reaches the purpose of homogenizing level diffraction energy distribution high, and this is that metallic mesh of the present invention is homogenized level diffraction energy point high The two of the reason for cloth.

Sub- annulus composition elementary cell is added in basic annulus, because sub- annulus number in each elementary cell, The difference of diameter and position relationship, makes its short texture, arranges spuious, therefore level diffraction energy high is than relatively low and senior Secondary Diffraction fringe distribution is more uniform, it is to avoid the feelings of the level diffraction energy integrated distribution high existed as traditional grid metallic mesh occur Condition；Meanwhile, when ensureing that light transmittance is identical, it is necessary to further increase basic annulus, the diameter of connection annulus, reduce on the whole The level diffraction energy high of each array；Again because sub- circle ring array structure produce level diffraction high and basic annulus, be connected The probability that annulus, the level diffraction high of filling circle ring array structure are superimposed is very low；After especially further Optimal Parameters, they Energy level diffraction high higher is not superimposed, so as to be homogenized level diffraction energy distribution high, this is wire netting of the present invention Grid are homogenized three the reason for level diffraction energy high is distributed.

Each elementary cell can be rotated to an angle centered on the center of circle of its corresponding basic annulus, not change gold The aperture ratio for belonging to grid enters without influence light transmittance, but level order of diffraction Energy distribution high further can be modulated, can Level diffraction energy high distribution is further homogenized, this is that metallic mesh of the present invention is homogenized the reason for level diffraction energy high is distributed it Four.

To sum up, metallic mesh structure of the invention can realize the depth homogenizing of grid level diffraction energy distribution high, and this is Most prominent effect of the invention.In addition, by basic annulus, connection annulus, filling annulus contiguity arrangement metal ring structure and Sub- circular ring structure collective effect effectively improves the uniformity of metal ring grid structure, particularly fills annulus and effectively reduces Space between basic annulus and connection annulus, it is favourable to improving electromagnetic shielding efficiency, and elementary cell is with its corresponding base When being rotated to an angle centered on the center of circle of this annulus, while effectively being modulated to level order of diffraction Energy distribution high, Effectiveness is had substantially no effect on, or even effectiveness can be improved in some preferred schemes.

Brief description of the drawings

Fig. 1 is a kind of preferred structure of the orthogonal circle ring array electromagnetic shielding optical window with two groups of circumscribed annulus and sub- annulus Generalized section.

Fig. 2 is the vertical alternately two-dimensional quadrature distribution schematic diagram of connection unit.

Fig. 3 is that basic annulus, connection annulus and filling annulus contiguity arrangement constitute metallic mesh basic structure schematic diagram.

The elementary cell preferred structure schematic diagram that Fig. 4 is made up of basic annulus with sub- annulus.

Fig. 5 is the circumscribed mode of communicating schematic diagram of two annulus.

Fig. 6 is two annulus inscribe mode of communicating schematic diagrames.

Fig. 7 is a kind of rotation mode schematic diagram of elementary cell of the invention.

Fig. 8 is existing grid grid structural representation.

Fig. 9 is senior diffraction of existing grid grid and its relative intensity distribution schematic diagram.

Figure 10 is existing annulus grid structural representation.

Figure 11 is senior diffraction of existing annulus grid and its relative intensity distribution schematic diagram.

Figure 12 is the metallic mesh structural representation of preferred scheme A in the present invention.

Figure 13 is the metallic mesh level diffraction high and its relative intensity distribution schematic diagram of preferred scheme A in the present invention.

Figure 14 is the metallic mesh structural representation of preferred scheme B in the present invention.

Figure 15 is the metallic mesh level diffraction high and its relative intensity distribution schematic diagram of preferred scheme B in the present invention.

Figure 16 is four kinds of grid structure level diffraction maximum relative intensity comparison diagrams high.

Piece number explanation in figure：1. 2. protective layer of adhesive linkage, 3. anti-reflection film, 4. transparent substrate, 5. metallic meshes 6. are basic The connection sub- connection of annulus 10. metal of the filling annulus 9. of annulus 8. of annulus 7.

Specific embodiment

With reference to the accompanying drawings with preferred embodiment to further description of the present invention：

Orthogonal circle ring array electromagnetic shielding optical window with two groups of circumscribed annulus and sub- annulus, the gold in electromagnetic shielding optical window Category grid 5 is arranged to make up by the metal ring of different-diameter respectively as basic annulus 6, connection annulus 7 and the filling contiguity of annulus 8 And load on optical window transparent substrate surface；Basic annulus 6 press two-dimensional quadrature arrange and in orientation at equal intervals from；By two The composition connection unit of connection annulus 7 of individual circumscribed connection is by vertical alternately two-dimensional quadrature arrangement；Adjacent basic annulus 6 is single by connection Unit's connection, the two-dimensional quadrature orientation of connection unit is identical with the two-dimensional quadrature orientation of basic annulus 6；Connection unit Array spacings are identical with basic circle ring array interval, a connection of each basic annulus 6 connection unit adjacent with four The circumscribed connection of annulus 7, of each connection unit connects the basic annulus 6 circumscribed connection adjacent with two of annulus 7；In connection There is a filling annulus 8 in unit and the space of basic annulus 6, the filling annulus 8 is connected annulus 7 with two of connection unit It is circumscribed with two basic annulus 6 to connect；Be provided with each basic annulus 6 connected with its inscribe, the sub- annulus 9 of metal, institute The sub- annulus 9 that the basic annulus 6 stated is connected with its inscribe collectively forms the elementary cell of two-dimensional metallic grid structure；Described base A diameter of millimeter and submillimeter magnitude of this annulus 6, connection annulus 7, filling annulus 8 and sub- annulus 9, described basic annulus 6, Connection annulus 7, filling annulus 8 are micron and sub-micrometer scale with the metal wire width of sub- annulus 9；Described vertically replaces two Orthogonal dimension arrangement refers to that connection unit is arranged by two-dimensional quadrature, two connections the circle center line connecting direction of annulus 7 and companies of connection unit The two-dimensional quadrature orientation of order unit is identical, and two of the adjacent connection unit connection annulus in two-dimensional quadrature orientation 7 circle center line connecting directions are orthogonal；Described circumscribed connection includes：1. two annulus are circumscribed and circumscribed point of contact at set two annulus The connection metal 10 of connection, 2. two annulus are in seamless overlapping configuration in junction lines, and 3. two annulus are in nothing in junction lines While seam overlapping configuration, the connection metal 10 that two annulus are connected is set at overlapping place；Described inscribe connection includes：1. two The connection metal 10 that two annulus are connected is set at annulus inscribe and inscribe point of contact, and 2. two annulus are in seamless friendship in junction lines Stack structure, 3. two annulus the company for connecting two annulus is set at overlapping place while junction lines are in seamless overlapping configuration Connect metal 10；Described transparent substrate 4 can be any transparent material, as long as it can be used as meeting the transparent of use occasion requirement Light window material, while metallic mesh 5 can be processed thereon by certain technological process；According to technological process, metallic mesh 5 The surface of transparent substrate 4 can be carried in by adhesive linkage 1；Individual layer or multi-layered antireflection coating 3 strengthen the transmittancy of optical window, individual layer or The protective layer 2 of person's multilayer, it is therefore an objective to prevent metal part from causing to corrode and aoxidizing in air for a long time, reduce screening energy Power, while be also prevented from metallic mesh 5 being scratched.

The orthogonal circle ring array with two groups of circumscribed annulus and sub- annulus of the invention is electromagnetically shielded optical window, circumscribed by two The composition connection unit of connection annulus 7 of connection is by vertical alternately two-dimensional quadrature arrangement, described vertical alternately two-dimensional quadrature arrangement Refer to that two of the connection unit connection circle center line connecting directions of annulus 7 are identical with the two-dimensional quadrature orientation of connection unit, and edge Two connection annulus 7 circle center line connecting directions of adjacent connection unit are orthogonal in two-dimensional quadrature orientation, connection unit It is vertical that alternately two-dimensional quadrature distribution schematic diagram such as Fig. 2, figure midpoint A, B, C, D are four symmetrical centres of connection unit, quadrangle ABCD is square.

The orthogonal circle ring array with two groups of circumscribed annulus and sub- annulus of the invention is electromagnetically shielded optical window, and described is basic A diameter of millimeter and submillimeter magnitude of annulus 6, connection annulus 7, filling annulus 8 and sub- annulus 9, described basic annulus 6, company It is micron and sub-micrometer scale to connect annulus 7, the metal wire width of filling annulus 8 and sub- annulus 9, to ensure high transmission rate and good Good effectiveness.Additionally, basic annulus 6, connection annulus 7, filling annulus 8, sub- annulus 9 be connected metal 10 by leading The good metal of electrical property is constituted, such as gold, silver, copper, aluminium simple metal and metal alloy, and metal thickness is more than 100nm.

The orthogonal circle ring array with two groups of circumscribed annulus and sub- annulus of the invention is electromagnetically shielded optical window, and electromagnetic screen is opacus Metallic mesh 5 in window is touched by the metal ring of different-diameter respectively as basic annulus 6, connection annulus 7 and filling annulus 8 It is arranged to make up；As shown in figure 3, basic annulus 6 presses two-dimensional quadrature arrangement and in orientation at equal intervals from adjacent to justify substantially Ring 6 is by connection unit connection, the two-dimensional quadrature orientation of connection unit and the two-dimensional quadrature orientation phase of basic annulus 6 Together, the array spacings of connection unit are identical with basic circle ring array interval；Each basic annulus 6 connection list adjacent with four One connection circumscribed connection of annulus 7 of unit, of each connection unit is connected outside the basic annulus 6 adjacent with two of annulus 7 Connection is cut, another of the connection unit connects the basic annulus 6 circumscribed connection adjacent with another two of annulus 7；In connection unit Gap between connected two basic annulus 6 has a filling annulus 8, the filling annulus 8 and connection unit Two connection annulus 7 are circumscribed with two basic annulus 6 to be connected.

The orthogonal circle ring array with two groups of circumscribed annulus and sub- annulus of the invention is electromagnetically shielded optical window, and each is substantially single The number of sub- annulus 9 is more than or equal to 2 in first, and diameter is identical or different, the center of circle of adjacent sub- annulus 9 and basic annulus 6 The angle that circle center line connecting is constituted is arbitrarily angled, and sub- annulus 9 in different elementary cells is equal diameter or non-equal diameter annulus, Number is identical or different；The adjacent circumscribed connection or intersecting of sub- annulus 9 in elementary cell.Fig. 4 is represented by basic annulus 6 and sub- annulus The elementary cell preferred structure schematic diagram of 9 compositions.In Fig. 4, the diameter of elementary cell neutron annulus 9 is identical, adjacent sub- annulus 9 The angle that the center of circle and the circle center line connecting of basic annulus 6 are constituted is equal.Fig. 4 (a) (b) is the sub- annulus of same diameter in elementary cell 9 circumscribed connections, Fig. 4 (c) (d) is the intersecting connection of sub- annulus 9 of same diameter in elementary cell.

Fig. 5, Fig. 6 represent the circumscribed connection of two annulus or inscribe connection respectively, (as covered) are overlapped or set by lines and is protected The metal reliably electrically connected between card metal ring tangent point, to ensure to touch connection conduction between tangent metal ring.Wherein, Fig. 5 Two annulus are in seamless overlapping configuration schematic diagram when () (b) (c) is illustrated respectively in circumscribed connection a：Fig. 5 (a) is the seamless friendship of two annulus The distance of center circle of folded ordinary circumstance, the i.e. distance of center circle of two annulus less than two annulus when circumscribed, and circle when circumscribed more than two annulus Away from the difference with two annulus line thickness sums, Fig. 5 (b) is a kind of seamless overlapping special circumstances to the heart, two annulus lines it is interior Outline is mutually circumscribed, and Fig. 5 (c) is seamless overlapping another special circumstances, and the distance of center circle of two annulus is circumscribed equal to two annulus When distance of center circle and two annulus line thickness sums difference, i.e. the Internal periphery of two annulus lines is circumscribed, and in Fig. 5 (d) due to Two annulus are circumscribed, it is therefore desirable to the metal reliably electrically connected between ensureing metal ring tangent point is set at point of contact.Fig. 6 (a) (b) is respectively Represent that two annulus are in seamless overlapping configuration schematic diagram when inscribe is connected：Fig. 6 (a) represents the seamless friendship of two annulus when inscribe is connected Folded ordinary circumstance, the i.e. distance of center circle of two annulus are more than distance of center circle during two annulus inscribes, and circle during less than two annulus inscribes The heart away from be relatively large in diameter annulus line thickness and, Fig. 6 (b) represents that two annulus are seamless overlapping a kind of special when inscribe is connected Situation, the distance of center circle when distance of center circle of two annulus is equal to two annulus inscribes be relatively large in diameter annulus line thickness and, i.e., two justify The outline inscribe of loop wire bar, and Fig. 6 (c) represent diameter compared with small circle ring lines outline be relatively large in diameter in annulus lines Profile inscribe, now needs the metal reliably electrically connected between guarantee metal ring tangent point is set at point of contact.If additionally, two annulus The overlapping area of two metal rings is smaller when seamless overlapping, is insufficient to assure that between two metal rings to have and reliably electrically connects, Need to set at the point of contact metal reliably electrically connected between ensureing metal ring point of contact, to ensure to realize the circumscribed connection of becket Or inscribe connection.And be metal connected mode at a kind of preferred point of contact shown in Fig. 5 (d) and Fig. 6 (c), the company covered at point of contact Metal 10 is connect for rectangle, the length of side of rectangle is more than becket line thickness, and the one of rectangle is made during rectangle covering point of contact junction Bar side is entirely fallen within a becket lines, and its opposite side will be entirely fallen within another tangent becket lines.Foundation Different processing methods and technological level, the connection metal that can also be taken other form at annulus point of contact, as long as phase can be made Two beckets cut have reliably electrically connect.

In the present invention, to reach the purpose of the veiling glare that homogenizing level diffraction high is caused, as a kind of preferred scheme, substantially The diameter of unit neutron annulus 9 is identical, and the angle that the center of circle of adjacent sub- annulus 9 and the circle center line connecting of basic annulus 6 are constituted is equal； On this basis, the number of sub- annulus 9 in different elementary cells is identical, equal diameters.As a spy of this preferred scheme Example, the relative position of sub- annulus 9 in different elementary cells is identical, and press after being replicated by an elementary cell two-dimensional quadrature arrangement and Connection unit and filling annulus constitute metallic mesh together.In order to realize the spuious light efficiency that good homogenizing level diffraction high is caused Really, as another special case of this preferred scheme, the son circle in the neighboring unit cells in the present invention in the array of metallic mesh 5 The relative position of ring 9 is different, and by two-dimensional quadrature arrangement is waited after being replicated by an elementary cell in two-dimensional metallic grid, wherein appointing One elementary cell of meaning rotates certain angle in two dimensional surface relative to its neighboring unit cells around itself center of circle of basic annulus 6 Degree, can be with identical relative to the angle that neighboring unit cells rotate with any elementary cell in a line；For example, Fig. 7 is the present invention Elementary cell with respect to a kind of rotation mode schematic diagram of neighboring unit cells, wherein in the elementary cell of metallic mesh 5 select 6 The circumscribed connection of sub- annulus 9 of same diameter, and adjacent sub- annulus 9 the center of circle and the angle that is constituted of the circle center line connecting of basic annulus 6 It is equal, 15 ° of angles are have rotated successively with respect to neighboring unit cells with each elementary cell in a line.

Fig. 8 and Fig. 9 are respectively the existing grid grid structural representations of United States Patent (USP) US4871220 and Qi Gao level diffraction And its relative intensity distribution schematic diagram, Figure 10 and Figure 11 is respectively the existing annulus grid structure of patent 200610010066.4 and shows It is intended to and its level diffraction high and its relative intensity distribution schematic diagram；Figure 12 and Figure 13 are respectively preferred scheme A in the present invention The structural representation of metallic mesh 5 and Qi Gao levels diffraction and its relative intensity distribution schematic diagram, the metallic mesh knot of preferred scheme A Structure selects the basic structure shown in Fig. 3 and 6 sub- annulus composition elementary cells is added in basic annulus, and each elementary cell Between do not rotate against.Figure 14 and Figure 15 are respectively the metallic mesh structural representation and Qi Gao of preferred scheme B in the present invention Level diffraction and its relative intensity distribution schematic diagram, from the neighboring unit cells of preferred scheme B unlike preferred scheme A according to Rotation mode shown in Fig. 7 is rotated, and the anglec of rotation is 15 °.

In order to illustrate that the present invention is being homogenized the active superiority of level diffraction energy distribution high, based on scalar diffraction reason By level diffraction energy distribution situation high and level diffraction high the maximum relative intensity to above-mentioned four kinds of structures carry out theoretical meter Calculate, make that the light transmittance of each structure is identical (being 95.4%) during calculating, its zero level relative intensity is 91%, that is, be imaged useful letter Breath ratio is identical.Metallic mesh structure of the invention is compared with grid, annulus grid, and level diffraction maximum relative intensity high is obvious Reduce, and substantially increase in the identical number for investigating level diffraction spot high in interval, thus avoid level diffraction energy collection high In problem in a small number of diffraction times, make level diffraction energy distribution high more uniform；Figure 16 is the height of above-mentioned four kinds of structures The concrete numerical value of level diffraction maximum relative intensity, it is seen then that the level diffraction high maximum relative intensity of grid metallic mesh structure Substantially higher relative to other structures, the level diffraction high of the metallic mesh structure corresponding to the solution of the present invention A is maximum relative Intensity is substantially reduced, and is dropped to from 0.0259% (the level diffraction high maximum relative intensity of existing annulus grid structure) 0.0109%, 58% is reduced, the homo-effect of level diffraction high is obvious；Preferred scheme B compared with option A, metallic mesh knot The level diffraction high maximum relative intensity of structure is further reduced, from 0.0109% (the level diffraction high of preferred scheme A grid structures Maximum relative intensity) drop to 0.0041%, 62% is reduced, the further homogenizing to level diffraction high is completed, so as to demonstrate,prove Homogenizing after bright each parameter of optimization to level diffraction high has remarkable result, not only existing better than United States Patent (USP) US4871220 Grid metallic mesh structure, also superior to the existing annulus metallic mesh structure of patent 200610010066.4.

Building form of the invention, while depth is homogenized level diffraction energy high and is distributed, still with preferable printing opacity Property, when double-level-metal grid structure is constructed, the contradictory problems of light transmittance and shield effectiveness can be improved, at the same time, by Be homogenized level diffraction energy high distribution in single layer structure depth of the present invention, can solve again in existing double-level-metal grid structure by The problem of level diffraction energy distribution high can not be further homogenized in the limitation of individual layer grid structure.

The wire netting having in the orthogonal circle ring array electromagnetic shielding optical window of two groups of circumscribed annulus and sub- annulus of the invention Grid 5 can use following processing method processing and fabricating：Mask is made by modes such as electron-beam direct writings, optical window transparent substrate 4 enters , used as adhesive linkage 1, metal-coated films, are then coated with photoresist thereon, are covered using manufactured for chromium plating or titanium after row cleaning Mould carries out photoetching, finally carries out dry method or wet etching, and grid pattern is obtained after removing photoresist.Mask manufacture ring can also be saved Section, and the metal of the orthogonal circle ring array with two groups of circumscribed annulus and sub- annulus is directly made using the method for laser direct-writing Grid pattern.Other microelectronic processing technology flows or binary optical elements Making programme etc. may also be used for making the present invention Metallic mesh structure.

Transparent substrate 4 involved in the present invention determines by practical application, can be simple glass, quartz glass, red Outer material, transparent resin material etc., basic annulus 6 of the invention, connection annulus 7, filling annulus 8 and the metal structure of sub- annulus 9 To take suitable processing process to be allowed to be completely covered by transparent substrate 4 according to transparent substrate 4, and can and window Frame etc. is realized reliably electrically connecting or sealing to ensure excellent electro-magnetic screen function.In practical application, with grid of the present invention The surface of transparent substrate 4 of structure can plate anti-reflection film to increase transmittancy, it is also possible in grid layer surface plating in case Only metal structure is positioned in air and is corroded or aoxidize and reduce screening ability for a long time, be also prevented from grid layer scratched, Abrasion or other destructions.

Claims (9)

1. there is the orthogonal circle ring array electromagnetic shielding optical window of two groups of circumscribed annulus and sub- annulus, it is characterised in that：Electromagnetic shielding Metallic mesh (5) in optical window is by the metal ring of different-diameter respectively as basic annulus (6), connection annulus (7) and filling Annulus (8) contiguity is arranged to make up and loads on optical window transparent substrate surface；Basic annulus (6) is arranged and in arrangement by two-dimensional quadrature On direction at equal intervals from；Connection unit is constituted by the connection annulus (7) of two circumscribed connections to be arranged by vertical alternately two-dimensional quadrature Row；Adjacent basic annulus (6) is connected by connection unit, the two-dimensional quadrature orientation of connection unit and the two of basic annulus (6) Orthogonal dimension orientation is identical；The array spacings of connection unit are identical with basic circle ring array interval, and each basic annulus (6) is One of the connection unit adjacent with four connection annulus (7) circumscribed connection, connection annulus (7) of each connection unit with Two adjacent basic annulus (6) circumscribed connections；There is a filling annulus in the space of connection unit with basic annulus (6) (8), the filling annulus (8) is connected annulus (7) and two basic circumscribed connections of annulus (6) with two of connection unit；Every Be provided with individual basic annulus (6) connected with its inscribe, the sub- annulus (9) of metal, described basic annulus (6) connects with its inscribe Sub- annulus (9) collectively form the elementary cell of two-dimensional metallic grid structure；Described basic annulus (6), connection annulus (7), Filling annulus (8) and a diameter of millimeter and submillimeter magnitude of sub- annulus (9), described basic annulus (6), connection annulus (7), Filling annulus (8) is micron and sub-micrometer scale with the metal wire width of sub- annulus (9)；Described vertical alternately two-dimensional quadrature Arrangement refers to that connection unit is arranged by two-dimensional quadrature, and two of connection unit connect annulus (7) circle center line connecting directions and are connected single The two-dimensional quadrature orientation of unit is identical, and two of adjacent connection unit connections annulus (7) in two-dimensional quadrature orientation Circle center line connecting direction is orthogonal；Described circumscribed connection includes：1. two annulus are circumscribed and circumscribed point of contact at set two annulus The connection metal (10) of connection, 2. two annulus are in seamless overlapping configuration in junction lines, and 3. two annulus are in junction lines While seamless overlapping configuration, the connection metal (10) that two annulus are connected is set at overlapping place；Described inscribe connection includes： 1. the connection metal (10) for connecting two annulus is set at two annulus inscribes and inscribe point of contact, 2. two annulus are in junction lines Seamless overlapping configuration, 3. two annulus set at overlapping place and connect two annulus while junction lines are in seamless overlapping configuration Logical connection metal (10).

2. the orthogonal circle ring array with two groups of circumscribed annulus and sub- annulus according to claim 1 is electromagnetically shielded optical window, It is characterized in that：Sub- annulus (9) number is more than or equal to 2 in each elementary cell, and diameter is identical or different, adjacent son circle The angle that the center of circle of ring (9) and basic annulus (6) circle center line connecting are constituted is arbitrarily angled, the sub- annulus in different elementary cells (9) it is equal diameter or non-equal diameter annulus, number is identical or different.

3. the orthogonal circle ring array electromagnetic screen with two groups of circumscribed annulus and sub- annulus according to claim 1 and 2 is opacus Window, it is characterised in that：Adjacent sub- annulus (9) circumscribed connection or intersecting in elementary cell.

4. the orthogonal circle ring array with two groups of circumscribed annulus and sub- annulus according to claim 2 is electromagnetically shielded optical window, It is characterized in that：The diameter of elementary cell neutron annulus (9) is identical, the center of circle and basic annulus (6) center of circle of adjacent sub- annulus (9) The angle that line is constituted is equal.

5. the orthogonal circle ring array with two groups of circumscribed annulus and sub- annulus according to claim 4 is electromagnetically shielded optical window, It is characterized in that：Sub- annulus (9) number in different elementary cells is identical, equal diameters.

6. the orthogonal circle ring array with two groups of circumscribed annulus and sub- annulus according to claim 5 is electromagnetically shielded optical window, It is characterized in that：Sub- annulus (9) relative position in different elementary cells is identical, and by pressing two dimension after an elementary cell duplication Orthogonally arrangement.

7. the orthogonal circle ring array with two groups of circumscribed annulus and sub- annulus according to claim 5 is electromagnetically shielded optical window, It is characterized in that：Sub- annulus (9) relative position in neighboring unit cells is different, and basic by one in two-dimensional mesh grid array Unit replicate after by two-dimensional quadrature arrange, wherein any one elementary cell relative to its neighboring unit cells in two dimensional surface Rotated to an angle around itself basic annulus (6) center of circle.

8. the orthogonal circle ring array with two groups of circumscribed annulus and sub- annulus according to claim 7 is electromagnetically shielded optical window, It is characterized in that：It is identical relative to the angle that neighboring unit cells rotate with any elementary cell in a line.

9. the orthogonal circle ring array with two groups of circumscribed annulus and sub- annulus according to claim 1 is electromagnetically shielded optical window, It is characterized in that：Basic annulus (6), connection annulus (7), filling annulus (8), sub- annulus (9) and metal (10) is connected by leading The good alloy of electrical property is constituted, and alloy thickness is more than 100nm.