CN103791053B - Transverse movement is converted into the device of up and down motion - Google Patents
Transverse movement is converted into the device of up and down motion Download PDFInfo
- Publication number
- CN103791053B CN103791053B CN201210430388.XA CN201210430388A CN103791053B CN 103791053 B CN103791053 B CN 103791053B CN 201210430388 A CN201210430388 A CN 201210430388A CN 103791053 B CN103791053 B CN 103791053B
- Authority
- CN
- China
- Prior art keywords
- guide rail
- driving
- driving block
- block
- down motion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H21/00—Gearings comprising primarily only links or levers, with or without slides
- F16H21/46—Gearings comprising primarily only links or levers, with or without slides with movements in three dimensions
- F16H21/54—Gearings comprising primarily only links or levers, with or without slides with movements in three dimensions for conveying or interconverting oscillating or reciprocating motions
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Transmission Devices (AREA)
Abstract
The invention belongs to puddle development and the technical field of semiconductor wafer processing, be specially the device that transverse movement is converted into up and down motion.Including driving means, driving block, driving block guide rail, driven sliding block and up and down motion guide rail, wherein driving block guide rail is arranged on driving block and arranges horizontal by angle, the two ends of described driven sliding block are slidably connected with driving block guide rail and upper/lower guide respectively, described driving block is connected with driving means and passes through driving means driving transverse movement, and driven sliding block is slided up and down along driving block guide rail and up and down motion guide rail respectively by the drive of driving block, two ends.The present invention solves to need cylinder to move up and down but limited space problem in prior art.
Description
Technical field
The invention belongs to puddle development and the technical field of semiconductor wafer processing, be specially transverse movement
It is converted into the device of up and down motion.
Background technology
At present, puddle development (TRACK) equipment of advanced technology mainly by loading and unloading chunk, technique chunk,
Three kinds of chunks such as interface chunk are constituted, wherein: loading and unloading chunk is mainly by upper and lower magazine, box station machine
The compositions such as people's (or claiming CS-R)；Technique chunk mainly have cover painting unit (or claim COT/BAC/TAC) and/
Or developing cell (or claim DEV), process machinery people (or claiming PS-R), process heat treating column (or claim OVEN
The composition such as RACK), be loaded with in process heat treating column cold dish (or claiming CP), hot plate (or claiming HP and HHP),
Thickening unit (or claiming AD), compound hot plate, centering unit, conversion equipment (TP) etc.；Interface chunk master
If by interface input and output material carrier (or claiming IFS), interface machine people (or claiming IF-R), edge exposure dress
Put the compositions such as (or claiming WEE), input and output material buffer storage (or claiming IFB), conversion equipment (TP).
Wafer is sent to the centering unit of technique chunk by He Zhan robot from the wafer case of loading and unloading chunk
Or intermediate carrier, then delivered to each technique unit by process machinery people；Wafer after PROCESS FOR TREATMENT is by technique
Robot is sent to IFS, TP of interface chunk, then is delivered to the slide holder of another equipment by interface machine people
On.
Due to the requirement of some special process, wafer to have lifting or unit to need inside a technique unit
Wanting the actions such as door switch up and down, traditional way is directly to drive it to move up and down with cylinder or motor etc.,
So the thickness of the volume of driver part often determining means, can only increase when lowering element thickness
Robot stroke or sacrifice element number solve, and so will certainly lower production capacity and increase equipment cost.As
Really in PROCESS FOR TREATMENT tower, each unit excessive height will affect stroke and the element number of robot, if single
Unit is highly compressed just can multi-configuration technique unit, just representative under the robot environment of unit height
The raising (robot speed's permission) further production capacity maybe can carry out more operation item process.
Summary of the invention
For the problems referred to above, it is an object of the invention to provide a kind of transverse movement being converted into and transport up and down
Dynamic device, solves to need cylinder to move up and down but limited space problem in prior art.
To achieve these goals, the present invention is by the following technical solutions:
A kind of device that transverse movement is converted into up and down motion, including driving means, driving block,
Driving block guide rail, driven sliding block and up and down motion guide rail, wherein driving block guide rail is arranged at transmission cunning
On block and horizontal by angle arrange, the two ends of described driven sliding block respectively with driving block guide rail and
The up and down motion slide being arranged at driving block side connects, and described driving block is with driving means even
Connecing and pass through driving means and drive transverse movement, driven sliding block is divided by the drive of driving block, two ends
Do not slide up and down along driving block guide rail and up and down motion guide rail.
Described driving block is triangular structure of right angle, wherein a right-angle side and plane-parallel, and another is straight
The arm of angle is connected with driving means, and described driving block guide rail is arranged on the hypotenuse of driving block.
Being connected with driving block slide below one end of described driven sliding block, the other end is provided with through hole,
In described up and down motion guide rail is inserted in this through hole and it is slidably connected with through hole.
Described driving means uses cylinder or motor.
Advantages of the present invention and providing the benefit that:
1. the present invention, breaches the unit internal mechanism up and down motion mode structure that glue-spreading development equipment is traditional,
Reduce robot and strengthen the cost increase that stroke brings, increase element number in unit height, improve equipment
Disposal ability.
2. present invention offers the leap of device structure, it is high that this device structure meets large-scale high production capacity
The production requirement of clean quality puddle development technique.
3. the structural device of the present invention, can be applied not only to glue-spreading development equipment, and can be widely
On the equipment such as application monolithic wet processing apparatus, there is extremely strong versatility.
Accompanying drawing explanation
Fig. 1 is the perspective view of the present invention；
Fig. 2 is the action schematic diagram of the present invention；
Fig. 3 is the top view of Fig. 2.
Wherein: 1 is driving block guide rail；2 is driving means；3 is up and down motion guide rail；4 is transmission
Slide block；5 is driven sliding block.
Detailed description of the invention
The present invention is described in detail below in conjunction with the accompanying drawings.
As Figure 1-3, the present invention include driving means 2, driving block 4, driving block guide rail 1,
Driven sliding block 5 and up and down motion guide rail 3, wherein driving block guide rail 1 be arranged on driving block 4 and
Arrange horizontal by angle, the two ends of driven sliding block 5 respectively with driving block guide rail 1 and be arranged at biography
The up and down motion guide rail 3 of movable slider 4 side is slidably connected, driving block 4 is connected with driving means 2,
And drive transverse movement by driving means 2, drive driven sliding block about 5 by driving block guide rail 1
Motion, i.e. the two ends of driven sliding block 5 are made along driving block guide rail 1 and up and down motion guide rail 3 respectively up and down
Slide.
The present embodiment driving block 4 is triangular structure of right angle, wherein a right-angle side and plane-parallel,
Another right-angle side is connected with driving means 2, and driving block guide rail 1 is arranged on the hypotenuse of driving block 4.
Being slidably connected with driving block guide rail 1 below one end of driven sliding block 5, the other end is provided with through hole, up and down
In motion guide rail 3 is inserted in this through hole and it is slidably connected with through hole.Described driving means use cylinder or
Motor.
The work process of the present invention is:
Driving block 4 does the transverse movement of left and right under the drive of driving means 2, because driving block is led
Rail 1 links together with driving block 4, when driving block 4 side-to-side movement, and the one of driven sliding block 5
End does relative motion with driving block guide rail 1, because driving block 4 and the installation of driving block guide rail 1
Face is the hypotenuse of a right angled triangle, thus driving block guide rail 1 connect driven sliding block 5 relative to
Driving block guide rail 1 has the motion of X, Y both direction.Again because the other end of driven sliding block 5 is with upper and lower
Motion guide rail 3 is slidably connected, so one end of driven sliding block 5 is when Y-direction is moved, the other end is along upper
Lower motion guide rail also does Y-direction motion.In sum, driving means 2 laterally driven is converted into driven
The up and down motion of slide block 5, is arranged on the parts in driven sliding block 5 and just can work in this direction.
Cross force is converted into the size of the power of up and down motion and can be calculated by trigonometric function, the big I of displacement
Determine with the bevel angle of change driving block 4.According to right angled triangle formula, we can calculate institute
Need upper and lower stroke to need the driving stroke of coupling, driver part can be calculated according to the requirement of the power driven
The size of required power.Such as, the hypotenuse of right angled triangle and the right-angle side b being parallel to horizontal plane
Angle is A, and the opposite side of included angle A is a.Laterally driven power in known included angle A and adjacent side b, according to just
Cut formula
The power of the up and down motion of conversion on opposite side a can be calculated.In like manner driving stroke can also
In like manner draw.
Claims (2)
1. the device that transverse movement is converted into up and down motion, it is characterised in that: include driving dress
Put (2), driving block (4), driving block guide rail (1), driven sliding block (5) and up and down motion guide rail
(3), wherein driving block guide rail (1) is arranged on driving block (4) and horizontal by angle
Arrange, the two ends of described driven sliding block (5) respectively with driving block guide rail (1) and be arranged at transmission cunning
The up and down motion guide rail (3) of block (4) side is slidably connected, described driving block (4) and driving means
(2) connecting and drive transverse movement by driving means (2), driven sliding block (5) is sliding by transmission
The drive of block (4), two ends glide along driving block guide rail (1) and up and down motion guide rail (3) are upper respectively
Dynamic；It is slidably connected with driving block guide rail (1) below one end of described driven sliding block (5), the other end
It is provided with through hole, in described up and down motion guide rail (3) is inserted in this through hole and is slidably connected with through hole；
Described driving block (4) is triangular structure of right angle, wherein a right-angle side and plane-parallel, separately
One right-angle side is connected with driving means (2), and described driving block guide rail (1) is arranged at driving block (4)
Hypotenuse on.
2. the device that transverse movement is converted into up and down motion as described in claim 1, its feature exists
In: described driving means uses cylinder or motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210430388.XA CN103791053B (en) | 2012-11-01 | 2012-11-01 | Transverse movement is converted into the device of up and down motion |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210430388.XA CN103791053B (en) | 2012-11-01 | 2012-11-01 | Transverse movement is converted into the device of up and down motion |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103791053A CN103791053A (en) | 2014-05-14 |
| CN103791053B true CN103791053B (en) | 2016-09-14 |
Family
ID=50666999
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210430388.XA Expired - Fee Related CN103791053B (en) | 2012-11-01 | 2012-11-01 | Transverse movement is converted into the device of up and down motion |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103791053B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021077652A1 (en) * | 2019-10-23 | 2021-04-29 | 广东美的制冷设备有限公司 | Driving mechanism for air outlet frame, air outlet frame assembly of air conditioner and air conditioner |
| CN110595037A (en) * | 2019-10-23 | 2019-12-20 | 广东美的制冷设备有限公司 | Driving mechanism of air outlet frame, air outlet frame assembly of air conditioner and air conditioner |
| CN112067414A (en) * | 2020-08-31 | 2020-12-11 | 李顺兰 | Cosmetic detection device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2663074Y (en) * | 2003-10-16 | 2004-12-15 | 陈良明 | Planing device for planing type radiator |
| CN201913482U (en) * | 2011-03-01 | 2011-08-03 | 吴国富 | Pneumatic flat tongs |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3850499B2 (en) * | 1996-12-02 | 2006-11-29 | 株式会社サクション瓦斯機関製作所 | Crank device |
| KR20110036207A (en) * | 2009-10-01 | 2011-04-07 | (주)와이티에스 | Conveyer unit up and down apparatus for transfer glass |
-
2012
- 2012-11-01 CN CN201210430388.XA patent/CN103791053B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2663074Y (en) * | 2003-10-16 | 2004-12-15 | 陈良明 | Planing device for planing type radiator |
| CN201913482U (en) * | 2011-03-01 | 2011-08-03 | 吴国富 | Pneumatic flat tongs |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103791053A (en) | 2014-05-14 |
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| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160914 Termination date: 20171101 |
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| CF01 | Termination of patent right due to non-payment of annual fee |