CN103758734A - Fermat solenoid valveless piezoelectric pump - Google Patents
Fermat solenoid valveless piezoelectric pump Download PDFInfo
- Publication number
- CN103758734A CN103758734A CN201310555460.6A CN201310555460A CN103758734A CN 103758734 A CN103758734 A CN 103758734A CN 201310555460 A CN201310555460 A CN 201310555460A CN 103758734 A CN103758734 A CN 103758734A
- Authority
- CN
- China
- Prior art keywords
- pipe
- pump
- horns
- ram
- fermat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention discloses a Fermat solenoid valveless piezoelectric pump. A pump body is provided with an inlet cushion chamber, an outlet cushion chamber, an inlet flow pipe, an outlet flow pipe and the lower half part of a pump chamber; the inlet flow pipe and the outlet flow pipe are respectively formed by communicating a Fermat helical flow tube with shunt tubes symmetrically arranged relating to the center line of the Fermat helical flow tube; a second shunt tube and a third shunt tube are direct current tubes with the same geometric construction size, which are symmetrical relating to the center line of the Fermat helical flow tube and have central axes in parallel with the central axis of the Fermat helical flow tube; a first shunt tube and the third shunt tube are semicircular tubes with the same geometric construction size, which are symmetrical relating to the center line of the Fermat helical flow tube; the Fermat helical flow tube has good nature of linear transition of curvature radius, applies uniform transverse acting force to fluid when the fluid flows therein, and has the advantages of stable flowing, small vibration, low energy consumption and high efficiency.
Description
Technical field
The present invention relates to microfluid transmission and control and micro mechanical technology field, specifically refer to a kind of novel fermat spiral pipe Valveless piezoelectric pump.
Background technique
Piezoelectric pump is the one of mechanical type Micropump, belongs to displacement pump, is widely used in the conveying of medicine trace, cell separation, electronic product cooling, the injection of fuel trace, chemical microanalysis, Flows and turns fields such as twisting control.Piezoelectric pump is mainly divided at present valve piezoelectric pump and Valveless piezoelectric pump two classes, Valveless piezoelectric pump is without movable valve block, simple in structure, be more suitable in miniaturization and microminiaturization, can meet the job requirement under high frequency, overcome the shortcoming that has valve piezoelectric pump cutout to have noise, anti-fatigue behaviour is good, avoids some sensitive medias to be affected.Most of Valveless piezoelectric pumps are that two special construction stream pipes are connected with pump chamber, differences in flow resistance while utilizing fluid to flow along special construction stream pipe different direction produces pumping effect, common special construction stream pipe has conical pipe, tesla pipe, vortex tube, three-way pipe etc.
Conical pipe is simple in structure, be easy to design and processing, but its forward and reverse differences in flow resistance is less, causes the efficiency of Micropump very low; Tesla pipe is also referred to as steel tubing in different shapes, its main structure is formed with straight channel collocation curved channel, fluid when back and forth flowing due to the difference of flow channel length and the inertia effect of fluid, produce the net flow of Way out, but its forward and reverse differences in flow resistance is equally very little, the net flow that Micropump obtains within an operation cycle is limited; Vortex tube essence is the whirlpool region that has increased a series of triangles or circular arc at two dimensional surface conical pipe wall, these triangle vortex districts have formed vortex passage together with conical flow pipe, but the existence of vortex face has strengthened the manufacture difficulty of runner, and forward and reverse flow resistance of this stream pipe is all very large, make Micropump energy consumption large, efficiency is low; Three-way pipe comprises " Y " type pipe and " V " type pipe etc., " Y " type Guan Youyi collecting fitting and two ram's horns composition " Y " fonts, its collecting fitting and ram's horns are uniform section rectangular tube, " V " type Guan Youyi uniform section rectangular tube is collecting fitting and two diffusions (contraction) ram's horns composition, three-way pipe has reduced forward flow resistance to a certain extent, improved reverse flow resistance, make Micropump along forward, obtain higher net flow within an operation cycle, but the frictional loss when design of straight line type tube wall is flowed fluid is larger, and energy consumption is higher.Publication number is that the Chinese invention patent application of CN102330662A discloses a kind of Valvless piezoelectric pump employing fermat helical flow pipe, on the pump chamber of this Valveless piezoelectric pump, be provided with the first Fermat spiral flow pipe and the first DC tube, first described Fermat spiral flow pipe one end is connected with pump chamber, and the other end is connected with the fluid inlet being arranged on the pump housing; Described first DC tube one end is connected with pump chamber, and the other end is connected with the fluid output being arranged on the pump housing; The first described Fermat spiral flow pipe be take fluid inlet as starting point dextrorotation to stream pipe.This kind of structural flow pipe used overall fermat spiral structure stream pipe, runner is long, fluid is all very large along the loss of positive and negative direction while flowing in bent flowtube, simultaneously owing to being subject to the effect of centrifugal force, forms Secondary Flow on cross section, local resistance is increased, cause secondary flow loss, and DC tube used is without flow resistance characteristic, thereby the efficiency of Micropump is lower, structure is relatively complicated in addition, is unfavorable for integrated and microminiaturized.
Ancient Greek Mathematics man and mechanics scientist Archimedes have just done detailed discussion to the geometric properties of the equidistant helical of plane in his treatise < < opinion helical > >, people are referred to as " Archimedes spiral ", and mathematicians had found again fermat spiral, lituus, logarithmic spiral, hyperbolic conchoid, cylindrical spiral, conical etc. afterwards.Helical flow pipe has superior structural characteristics and good hydrodynamics, is conducive to integrated arrangement, be widely used in the energy, warship, submarine, space station, ship power, petrochemical industry, space flight and aviation, for electronics cooling with the field such as cryogenic technique.
Summary of the invention
The object of the invention is the deficiency for fear of above-mentioned technology, be mainly for the existing problem of existing Valveless piezoelectric pump, as movement disorder, the ill effect such as viscous resistance is large, boundary layer is easily separated, propose a kind of yardstick little, flow stable, energy consumption is low, efficiency is high, vibrate little novel fermat spiral pipe Valveless piezoelectric pump, has expanded the application area of spiral flow tube technology in microfluid machinery field simultaneously.
The technical solution used in the present invention is: comprise the pump housing and pump cover, pump cover is provided with upper half part of pump inlet, pump discharge and pump chamber, the pump housing is provided with lower half portion of import buffer cavity, outlet buffer cavity, inlet flow tube, outlet stream pipe and pump chamber, and inlet flow tube is identical and coaxially arranged and equidistant with the pump chamber center of circle with outlet tube flowing structure, inlet flow tube one end is communicated with import buffer cavity, the other end is communicated with pump chamber, outlet stream pipe one end is communicated with pump chamber, the other end is communicated with outlet buffer cavity, import buffer cavity and outlet buffer cavity are communicated with respectively pump inlet and pump discharge, the ram's horns that inlet flow tube and outlet stream pipe are arranged symmetrically with by a Fermat spiral flow pipe with respect to Fermat spiral flow pipe center line is communicated with composition, the second ram's horns and the 3rd ram's horns are the measure-alike DC tube of geometrical construction, both are parallel with the central axis of Fermat spiral flow pipe with respect to Fermat spiral flow pipe center line symmetry and central axis, the first ram's horns and the 3rd ram's horns are the measure-alike semicircular pipe of geometrical construction, and both are with respect to Fermat spiral flow pipe center line symmetry, second ram's horns one end is communicated with the first ram's horns, and the other end is communicated with pump chamber, and the 3rd ram's horns one end is communicated with the 4th ram's horns, and the other end is communicated with pump chamber, and the first ram's horns and the 4th ram's horns connect with the large end of Fermat spiral flow pipe respectively.
The profile line of described Fermat spiral flow pipe is by Fermat helix equation
definite cornerite is the Fermat helical segment of 45 °, polar angle
it is 0 ° ~ 4050 °; The length of Fermat spiral flow pipe is 1200 μ m ~ 3000 μ m, is highly 80 μ m ~ 150 μ m, and the smallest cross-sectional width of small end is 120 μ m ~ 170 μ m, and small end mouth of pipe fillet radius is 40 μ m ~ 80 μ m.
The invention has the beneficial effects as follows: the present invention organically combines helical flow Manifold technology and piezoelectric pump technology, adopting profile line is the helical flow pipe of Fermat helix and the tube flowing structure of ram's horns combination, compared with conventional diffusion/collapsible tube Valveless piezoelectric pump and three-way pipe Valveless piezoelectric pump, Fermat spiral flow pipe has the good nature of radius of curvature linear transitions, fluid is subject to uniform horizontal force while flowing therein, flows stable, vibrates little, energy consumption is low, and efficiency is high; Fluid is during along inlet flow tube (outlet stream pipe) forward flow, and ram's horns is to a certain degree playing pumping action, thereby boundary layer separation is controlled, and prevents flow separation, reduces loss, and forward flow resistance is reduced, and the flow of logical flow tube increases; Fluid is during along inlet flow tube (outlet stream pipe) reverse flow, with respect to flow direction and wall, there is the reasonable application of the ram's horns at certain tilt angle, can generate discrete longitudinal Vortex, main flow is played to certain flow-disturbing effect, reverse flow resistance is increased, the flow of logical flow tube reduces, and an operation cycle, along forward flow direction, can obtain higher net flow, has improved the efficiency of Valveless piezoelectric pump; Meanwhile, this pump can be worked under upper frequency, and anti-electromagnetic interference capability is strong, and flow is easy to control, and can be applicable to Biological Chip, micro-fluidic chip, the fields such as micro-full analytical system and clinical medicine trace transfusion system.
Accompanying drawing explanation
Fig. 1 is the overall structure sectional view of a kind of fermat spiral pipe Valveless piezoelectric pump of the present invention;
Fig. 2 is that the A-A of Fig. 1 is to sectional drawing;
Fig. 3 is the I partial enlarged drawing of inlet flow tube 7 or outlet stream pipe 9 in Fig. 2;
Fig. 4 is the geometrical construction enlarged view of inlet flow tube 7 or outlet stream pipe 9 in Fig. 2;
Fig. 5 is that the B-B of Fig. 2 is to sectional drawing;
Fig. 6 is M partial enlarged drawing in Fig. 5;
Fig. 7 is the Fermat helix schematic diagram under the present invention's polar coordinate system used;
Fig. 8 is the fundamental diagram of inlet flow tube 7 suction processes in the present invention;
Fig. 9 is the fundamental diagram of inlet flow tube 7 discharge processes in the present invention;
The fundamental diagram of Figure 10 suction process of the present invention;
The fundamental diagram of Figure 11 discharge process of the present invention;
In figure: 1. pump inlet; 2. pump cover; 3. piezoelectric vibrator; 4. pump chamber; 5. pump discharge; 6. import buffer cavity; 7. inlet flow tube; 8. the pump housing; 9. outlet stream pipe; 10. outlet buffer cavity; 11. fermat spiral pipes; 12,13,14,15. ram's hornss.
Embodiment
With reference to Fig. 1, Fig. 2 and Fig. 5, the present invention includes the pump housing 8, pump cover 2 and piezoelectric vibrator 3, the material of the pump housing 8 is silicon chip, the material of pump cover 2 is glass, on pump cover 2, utilize laser processing technology to process upper half part of pump inlet 1, pump discharge 5 and pump chamber 4, on the pump housing 8, utilize dry etch process to process lower half portion of import buffer cavity 6, outlet buffer cavity 10, inlet flow tube 7, outlet stream pipe 9 and pump chamber 4, inlet flow tube 7 is identical and coaxially arranged with outlet stream pipe 9 structures, and equidistant with pump chamber 4 centers of circle; Inlet flow tube 7 one end are communicated with import buffer cavity 6, the other end is communicated with pump chamber 4, outlet stream pipe 9 one end are communicated with pump chamber 4, the other end is communicated with outlet buffer cavity 10, and import buffer cavity 6 and outlet buffer cavity 10 are communicated with respectively pump inlet 1 and pump discharge 5, together with the pump housing 8 fits tightly by anode linkage technique with pump cover 2, piezoelectric vibrator 3 is fixedly bonded in directly over pump cover 2 with binder.
With reference to Fig. 2, Fig. 3, the ram's horns that inlet flow tube 7 and outlet stream pipe 9 are arranged symmetrically with by a Fermat spiral flow pipe 11 with respect to Fermat spiral flow pipe 11 center lines is communicated with composition, ram's horns 13 and ram's horns 14 are DC tube, both are arranged symmetrically with respect to Fermat spiral flow pipe 11 center lines, and the central axis of ram's horns 13 and ram's horns 14 is parallel with the central axis of Fermat spiral flow pipe 11; Ram's horns 12 and ram's horns 15 are semicircular pipe, and both are arranged symmetrically with respect to Fermat spiral flow pipe 11 center lines; Ram's horns 13 one end are communicated with ram's horns 12, and the other end is communicated with pump chamber 4, and ram's horns 14 one end are communicated with ram's horns 15, and the other end is communicated with pump chamber 4, and ram's horns 12 and ram's horns 15 connect with the large end of Fermat spiral flow pipe 11 respectively; The geometrical construction of ram's horns 13 and ram's horns 14 is measure-alike, and the geometrical construction of ram's horns 12 and ram's horns 15 is measure-alike.
With reference to Fig. 4, Fig. 6 and Fig. 7, the profile line of Fermat spiral flow pipe 11 is by Fermat helix equation
definite cornerite φ is the Fermat helical segment MN of 45 °, wherein polar angle
it is 0 ° ~ 4050 °; The length of Fermat spiral flow pipe 11
be 1200 μ m ~ 3000 μ m, highly
be 80 μ m ~ 150 μ m, the smallest cross-sectional width of small end
be 120 μ m ~ 170 μ m, small end mouth of pipe fillet radius
be 40 μ m ~ 80 μ m; The distance of the central axis of ram's horns 13 and ram's horns 14 and Fermat spiral flow pipe 11 central axis
be 430 μ m ~ 980 μ m, length
be 400 μ m ~ 1000 μ m, width
be
, highly
all identical with the height of Fermat spiral flow pipe 11; The center of circle of ram's horns 12 and ram's horns 15 is to the distance of Fermat spiral flow pipe 11 central axis
be 290 μ m ~ 630 μ m, interior half circle radius
be 110 μ m ~ 270 μ m, outer half circle radius
be 180 μ m ~ 440 μ m.
With reference to Fig. 9, Figure 10, Figure 11, working principle of the present invention is: after piezoelectric vibrator 3 two ends load alternating voltage signals (sine or square-wave signal), piezoelectric vibrator 3 can occur bending and deformation and with electric voltage frequency up-down vibration, this vibration drives the fluid in pump chamber 4 to flow; The motion of piezoelectric vibrator 3 can be divided into upwards displacement movement and downwards displacement movement, the interior flow process of pump chamber 4 is just divided into suction process and discharge process accordingly.When piezoelectric vibrator 3 upwards vibrates, pump chamber 4 volumes increase, pressure decreased in pump chamber 4 and be less than outside pressure, thereby fluid flows into pump chamber 4 by pump inlet 1 and pump discharge 5 through inlet flow tube 7 and outlet stream pipe 9, at this moment piezoelectric pump is in suction condition, because inlet flow tube 7 is different with the flow resistance coefficient on outlet stream pipe 9 positive and negative direction, make to be flow to through inlet flow tube 7 by pump inlet 1 flow of pump chamber 4
be greater than the flow that is flow to pump chamber 4 by pump discharge 5 through outlet stream pipe 9
, because inlet flow tube 7 all adopts profile line with outlet stream pipe 9, be helical flow pipe 11 and the ram's horns 12 of Fermat helix, 13, 14, the tube flowing structure of 15 combinations, therefore in this suction process, when flowing through Fermat spiral flow pipe 11 by import buffer cavity 6, fluid flows stable, energy loss is little, and be communicated with the ram's horns 12 of Fermat spiral flow pipe 11 and pump chamber 4, 13, 14, 15 can enter pump chamber 4 the fluid conduction of Fermat spiral flow pipe 11 walls wish stagnation, played to a certain extent pumping action, this pumping action can make the fluid in Fermat spiral flow pipe 11 boundary layers overcome the effect of reverse differential pressure and continue to flow to pump chamber 4, thereby prevented to a certain extent boundary layer separation, reach the effect that reduces viscous friction drag, make to flow into by inlet flow tube 7 flow of pump chamber 4
increase, because acting on a pair of whirlpool that Fermat spiral flow pipe 11 goes out interruption-forming, sudden expansion to pump chamber 4 centers, moves under the effect by through ram's horns 12,13,14,15 fluids simultaneously, in moving process, the dissipation in whirlpool becomes slow, vorticity diminishes, effective range increases, thereby further suppresses or delay the generation of flow separation, same, fluid is when exporting buffer cavity 10 and flow through Fermat spiral flow pipe 11, than straight wall flow pipe (diffusion/collapsible tube), Fermat spiral flow pipe 11 flow resistances are larger, and fluid flows through ram's horns can generate discrete longitudinal Vortex at 12,13,14,15 o'clock, main flow is played to certain agitation, reverse flow resistance is increased, the flow of logical flow tube
further reduce, the flow to amount total at suction process piezoelectric pump is
, when piezoelectric vibrator 3 vibration downwards, pump chamber 4 volumes reduce, pressure in pump chamber 4 increases and is greater than outside pressure, thereby fluid flows out pump chamber 4 through inlet flow tube 7 and the outlet stream pipe 9 of pump chamber 4 both sides by pump inlet 1 and pump discharge 5, at this moment piezoelectric pump is in discharge state, this process is contrary with pump suction process, the flow that pump chamber 4 is discharged by pump inlet 1 through inlet flow tube 7
be less than by pump chamber 4 through outlet stream pipe 9 flows of being discharged by pump discharge 5
, in total discharge of discharge process piezoelectric pump, be
, the amplitude of the present invention's piezoelectric vibrator 3 in suction process and discharge process is certain, flows into the flow of pump chamber 4 equal with the flow of outflow pump chamber 4, is designated as
, have
, discharge process and suction process composition one-period, the pump discharge of one-period is the difference that flow pipe 9 and flowed out the flow of pump chambers 4 and the flow of inflow pump chamber 4 by outlet
, or flow into pump chamber 4 flows and the difference of flow that flows out pump chamber 4 by inlet flow tube 7
, pump discharge in one-period
for:
This value is greater than zero, therefore Valveless piezoelectric pump is within an operation cycle, the flow that flows into pump chamber 4 by inlet flow tube 7 in suction process is greater than the flow of discharging in discharge process, outlet stream pipe 9 is just in time contrary, the flow that flows into pump chamber 4 in suction process is less than the flow of discharging in discharge process, the one-way flow that has finally realized fluid, has completed pump function.
Claims (3)
1. a fermat spiral pipe Valveless piezoelectric pump, comprise the pump housing (8) and pump cover (2), pump cover (2) is provided with upper half part of pump inlet (1), pump discharge (5) and pump chamber (4), the pump housing (8) is provided with lower half portion of import buffer cavity (6), outlet buffer cavity (10), inlet flow tube (7), outlet stream pipe (9) and pump chamber (4), and inlet flow tube (7) is identical and coaxially arranged and equidistant with pump chamber (4) center of circle with outlet stream pipe (9) structure, inlet flow tube (7) one end is communicated with import buffer cavity (6), the other end is communicated with pump chamber (4), outlet stream pipe (9) one end is communicated with pump chamber (4), the other end is communicated with outlet buffer cavity (10), import buffer cavity (6) and outlet buffer cavity (10) are communicated with respectively pump inlet (1) and pump discharge (5), it is characterized in that: the ram's horns that inlet flow tube (7) and outlet stream pipe (9) are arranged symmetrically with by a Fermat spiral flow pipe (11) with respect to Fermat spiral flow pipe (11) center line is communicated with composition, the second ram's horns (13) and the 3rd ram's horns (14) are the measure-alike DC tube of geometrical construction, both are parallel with the central axis of Fermat spiral flow pipe (11) with respect to Fermat spiral flow pipe (11) center line symmetry and central axis, the first ram's horns (12) and the 3rd ram's horns (15) are the measure-alike semicircular pipe of geometrical construction, and both are with respect to Fermat spiral flow pipe (11) center line symmetry, the second ram's horns (13) one end is communicated with the first ram's horns (12), the other end is communicated with pump chamber (4), the 3rd ram's horns (14) one end is communicated with the 4th ram's horns (15), the other end is communicated with pump chamber (4), and the first ram's horns (12) and the 4th ram's horns (15) connect with the large end of Fermat spiral flow pipe (11) respectively.
2. a kind of fermat spiral pipe Valveless piezoelectric pump according to claim 1, is characterized in that: the profile line of described Fermat spiral flow pipe (11) is by Fermat helix equation
definite cornerite is the Fermat helical segment of 45 °, polar angle
it is 0 ° ~ 4050 °; The length of Fermat spiral flow pipe (11) is 1200 μ m ~ 3000 μ m, is highly 80 μ m ~ 150 μ m, and the smallest cross-sectional width of small end is 120 μ m ~ 170 μ m, and small end mouth of pipe fillet radius is 40 μ m ~ 80 μ m.
3. a kind of fermat spiral pipe Valveless piezoelectric pump according to claim 2, is characterized in that: the distance of the central axis of second, third ram's horns (13,14) and the central axis of Fermat spiral flow pipe (11) is 430 μ m ~ 980 μ m, length
be 400 μ m ~ 1000 μ m, width is
, highly all identical with the height of Fermat spiral flow pipe (11); The first, the center of circle of the 4th ram's horns (12,15) is 290 μ m ~ 630 μ m to the distance of Fermat spiral flow pipe (11) central axis, and interior half circle radius is 110 μ m ~ 270 μ m, and outer half circle radius is 180 μ m ~ 440 μ m.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310555460.6A CN103758734B (en) | 2013-11-11 | 2013-11-11 | A kind of fermat spiral pipe Valveless piezoelectric pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310555460.6A CN103758734B (en) | 2013-11-11 | 2013-11-11 | A kind of fermat spiral pipe Valveless piezoelectric pump |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103758734A true CN103758734A (en) | 2014-04-30 |
CN103758734B CN103758734B (en) | 2016-01-20 |
Family
ID=50526028
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310555460.6A Expired - Fee Related CN103758734B (en) | 2013-11-11 | 2013-11-11 | A kind of fermat spiral pipe Valveless piezoelectric pump |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN103758734B (en) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2013308C1 (en) * | 1991-03-04 | 1994-05-30 | Товарищество с ограниченной ответственностью "Рондо" | Vortex propeller |
CN200955485Y (en) * | 2006-07-14 | 2007-10-03 | 北京工业大学 | Single-chip-type flow-pipe valve-free piezoelectric pump |
CN102135087A (en) * | 2011-04-12 | 2011-07-27 | 江苏大学 | Diffusion/contraction combined pipe valveless piezoelectric pump |
CN102330662A (en) * | 2011-06-21 | 2012-01-25 | 无锡长辉机电科技有限公司 | Fermat spiral flow pipe valveless piezoelectric pump |
CN102331255A (en) * | 2011-06-21 | 2012-01-25 | 无锡长辉机电科技有限公司 | Gyro based on Fermat helical flow pipe valveless piezoelectric pump |
CN102691648A (en) * | 2012-05-02 | 2012-09-26 | 江苏大学 | Valveless piezoelectric pump with axisymmetric logarithmic spiral pipe |
-
2013
- 2013-11-11 CN CN201310555460.6A patent/CN103758734B/en not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2013308C1 (en) * | 1991-03-04 | 1994-05-30 | Товарищество с ограниченной ответственностью "Рондо" | Vortex propeller |
CN200955485Y (en) * | 2006-07-14 | 2007-10-03 | 北京工业大学 | Single-chip-type flow-pipe valve-free piezoelectric pump |
CN102135087A (en) * | 2011-04-12 | 2011-07-27 | 江苏大学 | Diffusion/contraction combined pipe valveless piezoelectric pump |
CN102330662A (en) * | 2011-06-21 | 2012-01-25 | 无锡长辉机电科技有限公司 | Fermat spiral flow pipe valveless piezoelectric pump |
CN102331255A (en) * | 2011-06-21 | 2012-01-25 | 无锡长辉机电科技有限公司 | Gyro based on Fermat helical flow pipe valveless piezoelectric pump |
CN102691648A (en) * | 2012-05-02 | 2012-09-26 | 江苏大学 | Valveless piezoelectric pump with axisymmetric logarithmic spiral pipe |
Also Published As
Publication number | Publication date |
---|---|
CN103758734B (en) | 2016-01-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101975154B (en) | Valve-free piezoelectric pump of logarithmic spiral combined tube | |
CN103170265B (en) | A kind of Piezoelectric micro-mixer | |
CN106762566B (en) | Valve piezoelectric pump semi-flexible and its working method | |
CN101975153B (en) | Valveless piezoelectric pump of elliptical combined pipe | |
CN206448925U (en) | Semi-flexible valve piezoelectric pump | |
CN102135087B (en) | Diffusion/contraction combined pipe valveless piezoelectric pump | |
CN103016318B (en) | A kind of Valveless piezoelectric pump based on wall attachment effect | |
CN100338361C (en) | Valveless piezoelectric pump | |
CN103644105B (en) | A kind of Archimedes spiral pipe Valveless piezoelectric pump | |
CN103644104B (en) | A kind of logarithmic spiral tube Valveless piezoelectric pump | |
CN102230465B (en) | Valveless piezoelectric pump of Archimedes helical flow pipe | |
CN102900658B (en) | A kind of many cone shaped bodies Valveless piezoelectric pump | |
Li et al. | A review of recent studies on valve-less piezoelectric pumps | |
CN103644102B (en) | A kind of two-chamber valveless piezoelectric pump of three-port structure | |
CN103758734B (en) | A kind of fermat spiral pipe Valveless piezoelectric pump | |
CN103644103B (en) | A kind of lituus pipe Valveless piezoelectric pump | |
CN103629089B (en) | A kind of hyperbolic helical-tube Valveless piezoelectric pump | |
CN203525623U (en) | Piezoelectric micromixer | |
CN103016317B (en) | Three-cavity valveless piezoelectric pump based on wall-attachment effect | |
CN107035668B (en) | A kind of stop block formula wall-attached jet Valveless Piezoelectric Micropump | |
CN202165255U (en) | Interlocking spiral flow pipe valve-free piezoelectric pump | |
CN103644100B (en) | A kind of positive ring lock spool Valveless piezoelectric pump | |
CN203248339U (en) | Three-cavity valveless piezoelectric pump based on wall-attachment effect | |
CN102338066B (en) | Valveless piezoelectric pump with lituus flow pipes | |
CN202117898U (en) | Valveless piezoelectric pump with Achimedean spiral flow tube |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160120 Termination date: 20191111 |
|
CF01 | Termination of patent right due to non-payment of annual fee |