CN103743947B - Linear capacitance type micro-wave power sensor based on MEMS structure - Google Patents
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Abstract
本发明公开了一种基于MEMS结构的线性电容式微波功率传感器，包括衬底、在衬底上依次排列设置的悬臂梁锚区、微带线、传感电极，以及设置在微带线上方的不规则形状悬臂梁，悬臂梁的一端与悬臂梁锚区连接，另一端对应悬空在感应电极的上方。本发明利用悬空于微带线上方的悬臂梁感应微波功率并产生弯曲，通过悬臂梁与感应电极接触形成的电容大小实现微波功率的测量。同时，本发明通过采用不规则的悬臂梁形状以及悬臂梁的自由端与感应电极之间接触的“拉链式”运动，实现接触电容值与微波功率之间线性化的输出。本发明实现了线性化输出，降低了对后续处理电路和标定测试要求，拓展了传感器的应用范围。
The invention discloses a linear capacitive microwave power sensor based on a MEMS structure, which comprises a substrate, a cantilever beam anchor area arranged in sequence on the substrate, a microstrip line, a sensing electrode, and a microstrip line arranged above the microstrip line. An irregular-shaped cantilever beam, one end of the cantilever beam is connected to the anchor area of the cantilever beam, and the other end is correspondingly suspended above the sensing electrode. The invention uses the cantilever beam suspended above the microstrip line to induce microwave power and generate bending, and realizes the measurement of the microwave power through the capacitance formed by the contact between the cantilever beam and the induction electrode. At the same time, the present invention realizes the linearized output between the contact capacitance value and the microwave power by adopting the irregular shape of the cantilever beam and the "zipper" movement between the free end of the cantilever beam and the sensing electrode. The invention realizes the linearized output, reduces the requirement for subsequent processing circuit and calibration test, and expands the application range of the sensor.
Description
技术领域technical field
本发明属于微电子器件技术领域，涉及一种测量微带线上传输的微波功率的结构。The invention belongs to the technical field of microelectronic devices, and relates to a structure for measuring microwave power transmitted on a microstrip line.
背景技术Background technique
在微波技术研究中，微波功率是表征微波信号特征的一个重要参数。在微波无线应用和测量技术中，微波功率的探测是一个非常重要的部分。传统的测量微波功率的技术是基于热敏电阻、热偶或二极管实现，而这些均为终端器件，微波信号将会在功率测量中被完全消耗掉。近年来，国内外提出了三类基于MEMS（中文）技术的在线式微波功率传感器结构：一种是利用共面波导信号线上的欧姆损耗，通过放置在附近的热堆将其转化为热电势输出；第二种是在共面波导的上方放置MEMS膜，通过测量膜因共面波导上传输的微波功率对其的吸引产生的位移实现微波功率的测量；第三种是在共面波导的上方放置MEMS膜，通过膜与信号线之间的耦合电容将一小部分微波功率耦合出来并引入热电堆实现微波功率的测量。这三种类型的在线式微波功率传感器在对微波信号的功率进行测量后，微波信号仍然可以使用，而且具有结构简单、体积小、与Si工艺或GaAs工艺相兼容等优点。In microwave technology research, microwave power is an important parameter to characterize microwave signal characteristics. In microwave wireless application and measurement technology, the detection of microwave power is a very important part. The traditional technology for measuring microwave power is based on thermistors, thermocouples or diodes, and these are terminal devices, and the microwave signal will be completely consumed in the power measurement. In recent years, three types of online microwave power sensor structures based on MEMS (Chinese) technology have been proposed at home and abroad: one is to use the ohmic loss on the coplanar waveguide signal line, and convert it into thermoelectric potential by placing a nearby thermal pile output; the second is to place a MEMS film above the coplanar waveguide, and measure the microwave power by measuring the displacement of the film due to the attraction of the microwave power transmitted on the coplanar waveguide; the third is to place the MEMS film on the coplanar waveguide A MEMS film is placed on the top, and a small part of the microwave power is coupled out through the coupling capacitance between the film and the signal line and introduced into the thermopile to realize the measurement of the microwave power. These three types of online microwave power sensors can still use the microwave signal after measuring the power of the microwave signal, and have the advantages of simple structure, small size, and compatibility with Si process or GaAs process.
本发明中的微波功率传感器也是基于MEMS技术，采用悬臂梁感应微带线上传输的微波信号产生位移，并通过感应电极测量悬臂梁和感应电极之间电容的变化实现微波功率的测试。该结构采用电容式的原理，但是不同于上述的在线式微波功率传感器，本结构的悬臂梁采用不规则的形状和“拉链式”运动实现电容变化量与微波功率大小的线性化输出。相比而言，本发明中的微波功率传感器具有以下主要特点：一、悬臂梁结构对微波信号更加敏感，且悬臂梁感应微波信号产生位移实现了悬臂梁自由端与感应电极之间的接触大电容变化，因此可以提高灵敏度；二、悬臂梁几乎不消耗微波功率；三、不规则形状的悬臂梁结构和“拉链式”运动能够实现电容量与微波功率之间的线性化输出，降低了对后续处理电路和标定测试要求；四、整个微波功率传感器的制作无需特殊的材料并且与Si或GaAs工艺完全兼容。The microwave power sensor in the present invention is also based on MEMS technology, using a cantilever beam to sense the microwave signal transmitted on the microstrip line to generate displacement, and measuring the capacitance change between the cantilever beam and the sensing electrode through the sensing electrode to realize the microwave power test. This structure adopts the principle of capacitive, but different from the above-mentioned online microwave power sensor, the cantilever beam of this structure adopts irregular shape and "zipper" movement to realize the linear output of capacitance change and microwave power. In comparison, the microwave power sensor in the present invention has the following main features: 1. The cantilever beam structure is more sensitive to microwave signals, and the displacement of the cantilever beam induced by the microwave signal realizes a large contact between the free end of the cantilever beam and the sensing electrode. The capacitance changes, so the sensitivity can be improved; second, the cantilever beam consumes almost no microwave power; third, the irregular shape of the cantilever beam structure and the "zipper" movement can realize the linear output between the capacitance and the microwave power, reducing the impact on the Subsequent processing circuit and calibration test requirements; Fourth, the fabrication of the entire microwave power sensor does not require special materials and is fully compatible with Si or GaAs processes.
基于以上线性电容式微波功率传感器结构的特点，很明显的可以看出本发明与其它在线式微波功率传感器相比提高了性能，简化了后续处理电路，易于测量和标定，并具有体积小、与Si或GaAsMMIC工艺兼容、高重复性、低生产成本等优点，很好的满足了集成电路对器件的基本要求。因此，线性电容式微波功率传感器具有较好的应用价值和广阔的市场潜力。Based on the characteristics of the above linear capacitive microwave power sensor structure, it can be clearly seen that the present invention improves performance compared with other on-line microwave power sensors, simplifies subsequent processing circuits, is easy to measure and calibrate, and has small volume, The advantages of Si or GaAs MMIC process compatibility, high repeatability, and low production cost well meet the basic requirements of integrated circuits for devices. Therefore, the linear capacitive microwave power sensor has good application value and broad market potential.
发明内容Contents of the invention
发明目的：本发明的目的是提供一种可以获得线性化输出，简化后续处理电路和标定测量工作量的线性电容式微波功率传感器。Purpose of the invention: The purpose of the invention is to provide a linear capacitive microwave power sensor that can obtain linearized output, simplify subsequent processing circuits and calibrate the measurement workload.
技术方案：为实现上述目的，本发明采用的方案为：一种基于MEMS结构的线性电容式微波功率传感器，该传感器包括衬底、在所述衬底上依次间隔设置的悬臂梁锚区、微带线、传感电极，以及设置在微带线上方的悬臂梁，悬臂梁的一端与悬臂梁锚区连接，另一端对应悬空在感应电极的上方。Technical solution: In order to achieve the above object, the solution adopted by the present invention is: a linear capacitive microwave power sensor based on a MEMS structure, the sensor includes a substrate, cantilever beam anchorage areas arranged at intervals on the substrate, micro The strip line, the sensing electrode, and the cantilever beam arranged above the microstrip line, one end of the cantilever beam is connected to the anchor area of the cantilever beam, and the other end is correspondingly suspended above the sensing electrode.
优选的，所述悬臂梁采用不规则形状。Preferably, the cantilever beam adopts an irregular shape.
优选的，感应电极包括设置在衬底的感应电极金属和设在感应电极金属上的感应电极绝缘层，悬臂梁的自由端与感应电极之间采用“拉链式”运动，悬臂梁的自由端与感应电极之间采用”拉链式“运动，即悬臂梁的自由端与传感电极采用由悬臂梁自由端顶端向悬臂梁锚区方向与感应电极逐步接触的运动方式。Preferably, the sensing electrode includes the sensing electrode metal disposed on the substrate and the sensing electrode insulating layer disposed on the sensing electrode metal, a "zipper" movement is adopted between the free end of the cantilever beam and the sensing electrode, and the free end of the cantilever beam is connected to the sensing electrode. The "zipper" movement is adopted between the sensing electrodes, that is, the free end of the cantilever beam and the sensing electrode adopt a movement method that gradually contacts the sensing electrode from the top of the free end of the cantilever beam to the direction of the anchorage area of the cantilever beam.
有益效果：本发明与现有技术相比，具有以下优点：Beneficial effect: compared with the prior art, the present invention has the following advantages:
1、线性化输出，对后续处理电路和标定测试要求低；2、结构简单，可靠性高；3、采用金属-绝缘层-金属电容，灵敏度高；4、具有很宽的工作频率范围；5、制作工艺与Si或GaAs工艺兼容。1. Linearized output, low requirements for subsequent processing circuits and calibration tests; 2. Simple structure, high reliability; 3. Metal-insulating layer-metal capacitors, high sensitivity; 4. Wide operating frequency range; 5. , The manufacturing process is compatible with Si or GaAs process.
现有技术通过检测悬臂梁结构与微波传输线之间的电容变化量实现微波功率的测量，由于有空气层的存在，因此电容变化量小，灵敏度不高，而本发明是通过测量悬臂梁与感应电极之间的接触电容实现微波功率的检测。本发明的传感器可以提高功率传感器的灵敏度，并通过线性化输出降低了对后续处理电路和标定测试要求，拓展了传感器的应用范围。线性电容式微波功率传感器结构为真正实现基于MEMS技术的功率测量结构在集成电路中的产业化应用提供了支持和保证。The existing technology realizes the measurement of microwave power by detecting the capacitance change between the cantilever beam structure and the microwave transmission line. Due to the existence of the air layer, the capacitance change is small and the sensitivity is not high. However, the present invention measures the cantilever beam and the induction The contact capacitance between electrodes enables the detection of microwave power. The sensor of the invention can improve the sensitivity of the power sensor, reduce the requirements for subsequent processing circuits and calibration tests through the linearized output, and expand the application range of the sensor. The linear capacitive microwave power sensor structure provides support and guarantee for the real realization of the industrial application of the power measurement structure based on MEMS technology in integrated circuits.
长期以来由于基于MEMS技术的微波功率传感器结构的特殊性，对该类器件的研究开发仅局限于科研领域。基于MEMS结构的微波功率传感器应用于集成电路的大规模生产存在着与主流工艺不兼容、可重复性差、生产成本高等一系列障碍。本发明中的线性电容式微波功率传感器结构，突破了传统的非线性输出的功率传感器的思维限制，寻找到了基于Si或GaAs工艺的实现方法，兼容性和可重复性都有较大的提高。同时，线性电容式微波功率传感器结构具有结构简单、输出线性、频率范围宽、微波性能好、灵敏度高等优点。For a long time, due to the particularity of the structure of microwave power sensors based on MEMS technology, the research and development of this type of device has been limited to the field of scientific research. There are a series of obstacles in the mass production of integrated circuits based on microwave power sensors based on MEMS structures, such as incompatibility with mainstream processes, poor repeatability, and high production costs. The structure of the linear capacitive microwave power sensor in the present invention breaks through the thinking limitation of the traditional nonlinear output power sensor, finds a realization method based on Si or GaAs technology, and greatly improves the compatibility and repeatability. At the same time, the structure of the linear capacitive microwave power sensor has the advantages of simple structure, linear output, wide frequency range, good microwave performance, and high sensitivity.
附图说明Description of drawings
图1a是线性电容式微波功率传感器结构俯视图。Figure 1a is a top view of the structure of a linear capacitive microwave power sensor.
图1b是线性电容式微波功率传感器结构剖视图。Fig. 1b is a cross-sectional view of the structure of a linear capacitive microwave power sensor.
图中有：微带线1，悬臂梁锚区2，悬臂梁3，感应电极4，包括感应电极金属41，感应电极绝缘层42，GaAs或Si衬底5。In the figure there are: microstrip line 1 , cantilever beam anchor region 2 , cantilever beam 3 , sensing electrode 4 , including sensing electrode metal 41 , sensing electrode insulating layer 42 , and GaAs or Si substrate 5 .
具体实施方式detailed description
下面结合附图对本发明作更进一步的说明。The present invention will be further described below in conjunction with the accompanying drawings.
本发明的线性电容式微波功率传感器以GaAs或Si材质作为衬底5，在衬底5上设有微带线1、悬臂梁锚区2、悬臂梁3、感应电极4，感应电极4由感应电极金属41和感应电极绝缘层42构成。悬臂梁锚区2和感应电极4分别设置在微带线的两侧，感应电极金属41上方有一层感应电极绝缘层42，微带线1的上方设置有不规则形状悬臂梁3，悬臂梁3的一端设置在悬臂梁锚区2上，另一端对应悬空在感应电极4的上方。该微波功率传感器通过悬臂梁3感应在微带线1上传输的微波信号功率水平并产生位移，在悬臂梁3自由端下方放置接触用的感应电极4，通过检测悬臂梁3与感应电极4接触形成的电容大小实现微波功率的测量。但是，规则的悬臂梁形状会使其接触电容值变化与微波功率的大小之间呈现出非线性关系，因此，通过采用不规则的悬臂梁形状以及悬臂梁的自由端与感应电极之间接触的“拉链式”运动，即可实现接触电容值与微波功率之间线性化的输出。感应电极（4）包括设置在衬底（5）的感应电极金属（41）和设在感应电极金属（41）上的感应电极绝缘层（42），悬臂梁（3）的自由端与感应电极（4）之间采用“拉链式”运动，即悬臂梁3的自由端与传感电极4采用由悬臂梁3自由端顶端向悬臂梁锚区2方向与感应电极4逐步接触的运动方式。The linear capacitive microwave power sensor of the present invention uses GaAs or Si material as substrate 5, and is provided with microstrip line 1, cantilever beam anchor region 2, cantilever beam 3, sensing electrode 4 on substrate 5, and sensing electrode 4 is formed by sensing The electrode metal 41 and the sensing electrode insulating layer 42 are formed. The cantilever beam anchor area 2 and the sensing electrode 4 are respectively arranged on both sides of the microstrip line. There is a layer of sensing electrode insulating layer 42 above the sensing electrode metal 41. An irregular shape cantilever beam 3 is arranged above the microstrip line 1. The cantilever beam 3 One end of the cantilever is set on the anchor area 2 of the cantilever beam, and the other end is correspondingly suspended above the sensing electrode 4 . The microwave power sensor senses the power level of the microwave signal transmitted on the microstrip line 1 through the cantilever beam 3 and generates a displacement. The sensing electrode 4 for contact is placed under the free end of the cantilever beam 3, and the contact between the cantilever beam 3 and the sensing electrode 4 is detected. The magnitude of the formed capacitance realizes the measurement of the microwave power. However, the regular shape of the cantilever will present a nonlinear relationship between the change of the contact capacitance and the magnitude of the microwave power. The "zipper" movement can realize the linearized output between the contact capacitance value and the microwave power. The sensing electrode (4) includes the sensing electrode metal (41) set on the substrate (5) and the sensing electrode insulating layer (42) set on the sensing electrode metal (41), the free end of the cantilever beam (3) and the sensing electrode (4) The "zipper" movement is adopted, that is, the free end of the cantilever beam 3 and the sensing electrode 4 adopt a movement method that gradually contacts the sensing electrode 4 from the top of the free end of the cantilever beam 3 to the anchor area 2 of the cantilever beam.
本发明的基于MEMS结构的线性电容式微波功率传感器的制作工艺与标准Si工艺或GaAs工艺完全兼容。The manufacturing process of the MEMS structure-based linear capacitive microwave power sensor of the present invention is fully compatible with the standard Si process or GaAs process.
本发明的基于MEMS结构的线性电容式微波功率传感器不同于以往的在线式微波功率传感器，该结构利用不规则形状的悬臂梁感应微带线上传输的微波信号，并通过悬臂梁的自由端与感应电极之间接触的“拉链式”运动实现接触电容值与微波功率之间的线性化关系。相比而言，线性电容式微波功率传感器具有以下主要特点：一、悬臂梁结构对微波信号更加敏感，且悬臂梁感应微波信号产生位移实现了悬臂梁自由端与感应电极之间的接触大电容变化，因此可以提高灵敏度；二、悬臂梁几乎不消耗微波功率；三、不规则形状的悬臂梁结构和“拉链式”运动能够实现电容量与微波功率之间的线性化输出，降低了对后续处理电路和标定测试要求；四、整个微波功率传感器的制作无需特殊的材料并且与Si或GaAs工艺完全兼容。除此以外，线性电容式微波功率传感器为功率传感器件的小型化、智能化、集成化提供了基础和保证，同时为进一步在线精确测量微波功率提供了支持。The linear capacitive microwave power sensor based on the MEMS structure of the present invention is different from the previous on-line microwave power sensor. The "zipper" movement of the contact between the sensing electrodes achieves a linearized relationship between the contact capacitance value and the microwave power. In contrast, the linear capacitive microwave power sensor has the following main characteristics: 1. The structure of the cantilever beam is more sensitive to microwave signals, and the displacement of the cantilever beam induced by the microwave signal realizes the large contact capacitance between the free end of the cantilever beam and the sensing electrode. change, so the sensitivity can be improved; second, the cantilever beam consumes almost no microwave power; third, the irregular shape of the cantilever beam structure and the "zipper" movement can realize the linear output between the capacitance and the microwave power, reducing the need for subsequent Processing circuit and calibration test requirements; Fourth, the fabrication of the entire microwave power sensor does not require special materials and is fully compatible with Si or GaAs processes. In addition, the linear capacitive microwave power sensor provides the foundation and guarantee for the miniaturization, intelligence, and integration of power sensor devices, and at the same time provides support for further online accurate measurement of microwave power.
区分是否为该结构的标准如下：The criteria for distinguishing whether it is the structure are as follows:
（a）通过悬臂梁放置在微带线上方，(a) placed above the microstrip line by a cantilever beam,
（b）悬臂梁采用不规则形状，(b) The cantilever beam adopts an irregular shape,
（c）悬臂梁的自由端与感应电极之间采用“拉链式”运动。(c) "Zip-chain" movement between the free end of the cantilever beam and the sensing electrode.
满足以上三个条件的器件即应视为本发明的线性电容式微波功率传感器结构。A device satisfying the above three conditions should be regarded as the structure of the linear capacitive microwave power sensor of the present invention.
本发明利用微带线上传输的微波功率对悬臂梁的吸引导致梁的位移，通过测量悬臂梁与感应电极之间接触电容大小，实现微带线上传输的微波功率检测。应用本发明中的线性电容式微波功率传感器可以实现功率测量结构在集成电路中的产业化应用。The invention uses the attraction of the microwave power transmitted on the microstrip line to the cantilever beam to cause the displacement of the beam, and realizes the detection of the microwave power transmitted on the microstrip line by measuring the contact capacitance between the cantilever beam and the induction electrode. The application of the linear capacitive microwave power sensor in the present invention can realize the industrial application of the power measurement structure in the integrated circuit.
本发明的线性电容式微波功率传感器中，悬臂梁悬空于微带线的上方感应微波功率并产生弯曲，在悬臂梁自由端下方放置接触用的感应电极，通过检测悬臂梁与感应电极接触形成的电容大小实现微波功率的测量。因为悬臂梁对应弯曲的程度与所需要的微波功率水平不同，微波功率越大，悬臂梁弯曲程度越大，对应的接触电容越大。根据悬臂梁与感应电极接触的电容大小，即可确定出微波功率的大小。但是，由于如果是规则的悬臂梁形状，其接触电容值变化与微波功率的大小之间呈现出非线性关系，这就给后续处理电路以及传感器的标定测试带来了极大的不便，因此，通过采用不规则的悬臂梁形状以及悬臂梁的自由端与感应电极之间接触的“拉链式”运动，即可实现接触电容值与微波功率之间线性化的输出。In the linear capacitive microwave power sensor of the present invention, the cantilever beam is suspended above the microstrip line to induce microwave power and bend, and the sensing electrode for contact is placed under the free end of the cantilever beam to detect the contact between the cantilever beam and the sensing electrode. The size of the capacitance realizes the measurement of the microwave power. Because the bending degree of the cantilever beam is different from the required microwave power level, the greater the microwave power, the greater the bending degree of the cantilever beam, and the greater the corresponding contact capacitance. According to the capacitance between the cantilever beam and the sensing electrode, the microwave power can be determined. However, if it is a regular cantilever beam shape, there is a nonlinear relationship between the change of the contact capacitance value and the magnitude of the microwave power, which brings great inconvenience to the subsequent processing circuit and calibration test of the sensor. Therefore, By employing the irregular shape of the cantilever beam and the "zipper" movement of the contact between the free end of the cantilever beam and the sensing electrode, a linearized output between the contact capacitance value and the microwave power can be achieved.
整个技术方案中需要注意一些问题，其中包括：悬臂梁中应力的控制，悬臂梁不规则形状的精确计算和设计，悬臂梁长度和高度对器件灵敏度和反射系数的影响，这对于整个传感器的结构和指标实现都具有十分重要的意义。Some issues need to be paid attention to in the whole technical scheme, including: the control of the stress in the cantilever beam, the accurate calculation and design of the irregular shape of the cantilever beam, the influence of the length and height of the cantilever beam on the sensitivity and reflection coefficient of the device, which is very important for the structure of the whole sensor It is very important to realize the indicators.
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