CN205229289U - Radio frequency voltage current detection device - Google Patents

Radio frequency voltage current detection device Download PDF

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Publication number
CN205229289U
CN205229289U CN201521027111.8U CN201521027111U CN205229289U CN 205229289 U CN205229289 U CN 205229289U CN 201521027111 U CN201521027111 U CN 201521027111U CN 205229289 U CN205229289 U CN 205229289U
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China
Prior art keywords
buffer cell
electric capacity
voltage
radio
pin
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Withdrawn - After Issue
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CN201521027111.8U
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Chinese (zh)
Inventor
李冬
王弘毅
秦斌
陈德智
刘开锋
余调琴
赵鹏
王晓敏
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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Abstract

The utility model discloses a radio frequency voltage current detection device, main being directed against in intermediate frequency tremendously high frequency within range double conductor transmission system medium voltage and current detection. This method adopts places a sheetmetal between the transmission line double conductor, the sheetmetal meets through condenser and outer conductor, and the sheetmetal forms equivalent capacitance with the inner conductor, through the partial pressure effect of two above -mentioned electric capacity, and the outer conductor sampling signal of voltage within a definite time obtaining on the sheetmetal in, place an air core coil in transmission line same position, its induced voltage is promptly to locating the transmission line current size. Adopt the radiofrequency signal of a set of given frequency and power to and the load of a set of known impedance, mark sampling signal's amplitude and phase difference, can obtain accurate voltage, electric current and phase difference information after revising. The utility model discloses a characteristics be: the installation is adjusted and make things convenient for, can to measure arbitrary load, the output mode flexibility, have better practical value and application prospect.

Description

A kind of radio-frequency voltage current sensing means
Technical field
The utility model relates to radio-frequency voltage, the current detecting in radio-frequency ion source and accelerator field, more specifically, relates to the pick-up unit of voltage, electric current in two-conductor transmission system within the scope of a kind of intermediate frequency tremendously high frequency.
Background technology
Radio-frequency voltage main at present, electric current detecting method are as follows:
The voltage and current of radio frequency transmission line is sampled respectively, then carries out subsequent calculations process.Specifically, between transmission line two-conductor, be connected in series some quantity capacitors, dividing potential drop sampling is carried out to transmission-line voltage; Adopt the endless solenoid with magnetic core to be enclosed within the inner wire of transmission line, transmission line choke is sampled.This detection method needs to weld electric capacity between two conductors of two conductor transmission line, allows inner wire pass endless solenoid simultaneously, and can damage the radio-frequency transmission line structure of integrated installation in radio system, installment and debugging is inconvenient; Actual capacitance is subject to the impact of dead resistance, and cause the intrinsic standoff ratio of voltage sampling to change with the change of frequency, the error brought thus can not be ignored, and is also difficult to eliminate, need revises the detection signal under different frequency; There is the nonlinear characteristic such as magnetic hysteresis loss and eddy current loss in wound core material, its equivalent resistance changes with the difference of frequency, power, brings impact to the measuring accuracy of size of current and phase place.In addition, the frequency span of this detection scheme is subject to the restriction of magnetic core frequency of operation.
Utility model content
For the defect of prior art, the purpose of this utility model is to provide a kind of radio-frequency voltage current sensing means, be intended to solve that existing radio-frequency voltage pick-up unit is installed, debugging and the limited problem of accuracy of detection, and the frequency of operation that causes due to wound core material behavior of existing radio-frequency current pick-up unit and the limited problem of accuracy of detection.
The utility model provides a kind of radio-frequency voltage current sensing means, comprises voltage sampling unit, current sampling unit, buffer cell and signal processing unit; Described voltage sampling unit is used for gathering the voltage in two conductor transmission line between conductor; Described current sampling unit for responding to the magnetic field intensity around transmission line inner wire, and obtains the electric current of described inner wire according to the induced voltage at air core coil two ends; The first input end of described buffer cell connects described voltage sampling unit, and the second input end of described buffer cell connects described current sampling unit, for carrying out buffered to the sampled signal of voltage and current; The first input end of described signal processing unit is connected to the first output terminal of described buffer cell, second input end of described signal processing unit is connected to the second output terminal of described buffer cell, and the signal for exporting described buffer cell processes rear acquisition radio-frequency voltage to be detected, the amplitude of electric current, frequency and phase differential.
Further, described voltage sampling unit comprises sheet metal, and described sheet metal forms equivalent capacity with inner wire, outer conductor respectively.
Further, described voltage sampling unit also comprises electric capacity C10, and one end of described electric capacity C10 connects with outer conductor, and the other end of described electric capacity C10 connects described sheet metal.
Further, the compressive resistance between sheet metal and inner wire, demand fulfillment is more than or equal to the requirement of voltage twice between transmission line two conductor.
Further, described sheet metal placement parallel with inner wire.
Further, dielectric substance is inserted in the air gap between sheet metal and inner wire.
Further, described current sampling unit is air core coil, and a pin of described air core coil connects with outer conductor, and another pin of described air core coil is as the output terminal of described current sampling unit.
Further, described air core coil is planar coil or air core solenoid coil.
Further, buffer cell comprises the first buffer cell and the second buffer cell, and the input end of described first buffer cell is as the first input end of described buffer cell, and the output terminal of described first buffer cell is as the first output terminal of described buffer cell; The input end of described second buffer cell is as the second input end of described buffer cell, and the output terminal of described second buffer cell is as the second output terminal of described buffer cell.
Further, described first buffer cell is identical with the structure of described second buffer cell, includes operational amplifier U1, electric capacity C1, electric capacity C2, electric capacity C3, electric capacity C4, electric capacity C7, electric capacity C8, electric capacity C9, resistance R1, resistance R3 and resistance R4; Described operational amplifier U1 comprises 8 pins, 1st pin is unsettled, 2nd pin is connected to the 6th pin by described resistance R1,3rd pin is as the input end of buffer cell, 4th pin connects-5V power supply, 5th pin connects-5V power supply, and the 6th pin is as the output terminal of buffer cell, and the 7th pin and the 8th pin all connect+5V power supply; One end ground connection after described electric capacity C1, electric capacity C2 and electric capacity C3 parallel connection, another termination+5V power supply; One end ground connection after described electric capacity C7, electric capacity C8 and electric capacity C9 parallel connection, another termination-5V power supply; One end ground connection of described resistance R3, the other end is connected to the 3rd pin of described U1; Described resistance R4 and described electric capacity C4 is connected in parallel rear one end ground connection, and the other end is connected to the 5th pin of described operational amplifier U1.
By the above technical scheme that the utility model is conceived, compared with prior art, between transmission line two-conductor, one piece of sheet metal is placed owing to adopting, sheet metal connects with outer conductor by means of only capacitor, sheet metal does not contact with inner wire, but can equivalent capacity be formed between sheet metal and inner wire, by the connect dividing potential drop of CSET with equivalent capacity, sheet metal obtains the sampled signal of voltage between transmission line conductors, achieves the radio-frequency voltage that in radio-frequency (RF) transmission system, diverse location place, precision are comparatively good and detect; Adopt air core coil sampling current radio frequency signal simultaneously, avoid the non-linear of core material and frequency of operation restriction, good radio-frequency current measurement bandwidth scope and accuracy of detection can be obtained.
Accompanying drawing explanation
Fig. 1 is the theory diagram of the radio-frequency voltage current sensing means that the utility model embodiment provides;
Fig. 2 is the concrete layout of the radio-frequency voltage current sensing means that the utility model embodiment provides;
Fig. 3 (a) is the topology layout schematic diagram of voltage sampling unit in the radio-frequency voltage current sensing means that provides of the utility model embodiment;
Fig. 3 (b) is the derided capacitors schematic diagram of voltage sampling unit in the radio-frequency voltage current sensing means that provides of the utility model embodiment;
Fig. 4 is the topology layout schematic diagram of current sampling unit in the radio-frequency voltage current sensing means that provides of the utility model embodiment;
Fig. 5 is a concrete buffer circuit figure in road of buffer cell in the radio-frequency voltage current sensing means that provides of the utility model embodiment.
In all of the figs, identical Reference numeral is used for representing identical element or structure, and wherein: 1 is voltage sampling unit, 2 is current sampling unit, and 3 is buffer cell, and 4 is signal processing unit.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the utility model, and be not used in restriction the utility model.
For convenience of describe, the utility model for two conductor transmission line system in, the conductor being in reference potential is referred to as outer conductor, it might as well be connected with " greatly " in the utility model embodiment; Another root conductor is called inner wire.
For solving the part limitation problem of above-mentioned detection method, the utility model proposes and place one piece of sheet metal between transmission line two-conductor, sheet metal is connected by capacitor with outer conductor, sheet metal and inner wire form equivalent capacity, by above-mentioned two capacitances in series dividing potential drop effects, sheet metal obtains the sampled signal of voltage between transmission line conductors; Place a planar coil at the same position of voltage sampling, the induced voltage at coil two ends is namely to locating transmission line inner wire size of current.By the process of follow-up buffering and signal processing unit, the amplitude of voltage and current, frequency and the phase differential between them can be obtained.Adopt the radiofrequency signal of one group of given frequency and power, and the load of one group of known impedance, measurement result being demarcated, voltage, electric current and phase information accurately after correction, can be obtained, also can obtain input impedance, meritorious and reactive power by calculating further.Because the utility model adopts sheet metal sampling voltage, only need and between outer conductor, weld a capacitor, directly not contacting with inner wire, therefore install, debugging more convenient, decreasing the number of capacitor compared to existing technology, improve accuracy of detection.In addition, by regulating the distance between sheet metal and conductor, the compressive resistance of sampling unit can conveniently be changed.The utility model adopts planar coil sampling current signal, avoids the non-linear of core material and frequency of operation restriction, installs also more convenient in addition.
A kind of radio-frequency voltage electric current detecting method theory diagram that the utility model proposes as shown in Figure 1, comprises voltage sampling unit 1, current sampling unit 2, buffer cell 3, signal processing unit 4.Voltage sampling unit 1 adopts the voltage between sheet metal sampling inner wire and outer conductor, and current sampling unit 2 adopts the magnetic field intensity around planar coil induction transmission line inner wire, the induced voltage at planar coil two ends and corresponding transmission line inner wire electric current.Buffer cell 3, for cushioning the sampled signal of voltage and current, makes the sampling of voltage sampling unit 1 and current sampling unit 2 export respectively by voltage follower structure, thus improves load capacity and accuracy of detection; Signal processing unit 4 stores for the signal exported buffer cell, computation and analysis process, obtains radio-frequency voltage to be detected, the amplitude of electric current, frequency and phase differential.
In the utility model embodiment, voltage sampling unit 1 comprises sheet metal, and sheet metal is used for forming equivalent capacity respectively with inner wire, outer conductor, is followed successively by C20, C30.In order to improve intrinsic standoff ratio, reduce the output impedance of voltage sampling unit 1, described voltage sampling unit introduces electric capacity C10 simultaneously.One end of electric capacity C10 connects with outer conductor, other end connection metal sheet.The equivalent capacity C40 capacitance of C10 and C30 parallel connection is much larger than C20.When circuit design, usual C10 much larger than C30, therefore calculating partial pressure than time can ignore C30.
As an embodiment of the present utility model, can be placed on immediately below inner wire by sheet metal, the compressive resistance that the distance of sheet metal and inner wire is formed in atmosphere, demand fulfillment is more than or equal to the requirement of voltage twice between internal and external conductor; The physical dimension of sheet metal will much smaller than the wavelength of radiofrequency signal to be detected.
In the utility model embodiment, described current sampling unit 2 is planar coil, and two pins one of planar coil connect with outer conductor, and another is as the output terminal of current sampling unit 2.The radio-frequency current flowing through inner wire produces the magnetic field of same frequency change in the space around it, the magnetic field of this change produces the induced voltage of same frequency between two pins of planar coil, and the amplitude of induced voltage and phase place also strictly follow the change of radio-frequency current.Sample owing to adopting the structure radio frequency electric current of planar coil, instead of the solenoid structure with magnetic core adopted in traditional scheme, substantially reduce by nonlinear characteristics such as the magnetic hysteresis loss of core material and eddy current losses the impact of current sampling accuracy of detection, also avoid the restriction being subject to core material frequency of operation simultaneously, substantially increase the working band width of the utility model current sampling unit 2.According to inner wire size of current, the amplitude size requirements of sampling output and the requirement of device compressive resistance, the planar coil sampling of respective shapes, the number of turn, live width and distance between centers of tracks can be adopted; Particularly, can according to inner wire size of current determination coil turn and distance between centers of tracks, detection sampling output current size determination live width as requested, according to being more than or equal to the compressive resistance that between two times of internal and external conductors, voltage is corresponding, determine the placement distance between coil outer and inner wire, in addition, the physical dimension of coil need meet the requirement much smaller than radiofrequency signal wavelength to be detected.
Conveniently measurement result is demarcated, can on measurement mechanism integrated one section of transmission line, the geometric configuration of this transmission line, and immobilizing with the relative position of voltage sampling unit 1 and current sampling unit 2.Complete the demarcation of measurement result with one group of known power source and load, whole measurement mechanism is inserted in the middle of circuit under test and measure.
In the utility model embodiment, the buffer circuit in described buffer cell 3 can adopt the voltage follower formed for main body with the amplifier of broadband, low distortion to be formed.This buffer unit can by the resistance size of setting with the resistance of the connection of amplifier reverse input end, complete the impedance matching to a certain degree with prime sampling unit, improve the load capacity to the post-module connected, sampling unit and follow-up data processing module are kept apart preferably simultaneously.
In the utility model embodiment, signal processing unit 4 can be placed on measure field, the output of buffer cell 3 is sampled, stores, analysis and calculation process, obtain voltage, the amplitude of electric current, frequency and phase differential, can be calculated input impedance, meritorious and reactive power further.
In the utility model embodiment, signals collecting part wherein can be placed on measure field by signal processing unit 4, the output of buffer cell 3 is sampled, then sampled result transferred to the storage of signal processing unit 4, analysis and computing unit by electric signal or light signal, obtain voltage, the amplitude of electric current, frequency and phase differential, can be calculated input impedance, meritorious and reactive power further.
In the utility model embodiment, signal processing unit 4 can be placed on the place outside scene, and the output of buffer cell 3 is connected with signal processing unit 4 by modes such as cables.The signal that signal processing unit 4 pairs of buffer cells 3 transmit is sampled, store, analysis and calculation process, obtains voltage, the amplitude of electric current, frequency and phase differential, can be calculated input impedance, meritorious and reactive power further.
In the utility model embodiment, buffer cell 3 and signal processing unit 4 can adopt and the DC power supply of outer conductor with reference potential.
In the utility model embodiment, buffer cell 3 and signal processing unit 4 can adopt powered battery, and signal processing unit 4 adopts optical fiber solutions to export, to realize effective electrical isolation.
In the utility model embodiment, signal processing unit 4 can select high-speed A/D converter (ADC), the two-way of buffer cell 3 is exported and samples, then the digital signal result of sampling is stored, by using Matlab on host computer, the digital sampled signal stored is read and matching, restore initial radio-frequency voltage to be detected, current analog signal, and then the amplitude of radio-frequency voltage to be detected and electric current, frequency and phase differential can be calculated very easily by the electric current and voltage simulating signal restored.
Outstanding feature of the present utility model is, the sampling of voltage and current on conductor in two-conductor transmission system is completed by voltage sampling that is custom-designed, that do not destroy transmission line inner wire and current sampling unit, do not need to weld some electric capacity between two-conductor, do not need to use core material yet.Due to the ingehious design of voltage sampling and current sampling unit, the installation site of the pick-up unit corresponding to the utility model in radio system is very flexible, to the characteristic impedance not requirement of transmission line, to loaded impedance also not requirement.In addition, buffer cell and signal processing unit can adopt powered battery, optical fiber solutions to export, and also make this detection method can be applied to the place of electrical isolation requirement, have expanded range of application.
In order to the radio-frequency voltage current sensing means that further description the utility model provides, existing details are as follows with specific embodiment by reference to the accompanying drawings:
The scheme of a specific embodiment of the present utility model as shown in Figure 2.In this embodiment, inner wire cross section is circular.When inner wire horizontal positioned, a distance horizontal positioned voltage sampling unit 1 immediately below it; At distance a distance, inner wire side horizontal positioned current sampling unit 2.The geometric center of voltage sampling unit 1 and current sampling unit 2 is in the same position of inner wire length direction.Voltage sampling unit 1 is connected with the two-way input of buffer cell 3 respectively with the output of current sampling unit 2, and the output of buffer cell 3 is connected to signal processing unit 4.
Circuit board corresponding to voltage sampling unit 1 is specifically arranged with principle of work as shown in Fig. 3 (a), (b).Circuit board has one piece of rectangular copper foil, Copper Foil is connected with " greatly " by capacitor C10, and the equivalent capacity between Copper Foil and transmission line inner wire is C20, and the equivalent capacity between Copper Foil and transmission line outer conductor is C30.The equivalent capacity of C10 and C30 parallel connection is C40, by the series connection dividing potential drop of C40 and C20, Copper Foil obtains the sampled signal of transmission line inner wire voltage, is the output of voltage sampling unit 1.
Circuit board corresponding to current sampling unit 2 is specifically arranged as shown in Figure 4.Rectangle plane coil on circuit board is the planar coil of current sampling unit 2, by the changes of magnetic field around the coil-induced inner wire of rectangle plane, can obtain and the voltage signal corresponding to inner wire electric current at planar coil two ends, exit (the i.e. ungrounded end) signal of planar coil is as the output of current sampling unit 2.
As shown in Figure 5, one end of resistance R3 is connected with the output of voltage sampling unit 1 No. one buffer circuit figure of buffer cell 3, and the other end is connected with 3 pin of amplifier chip.7 pin of chip are connected with 8 pin, and 8 pin are connected with+5V level simultaneously.Electric capacity C1, electric capacity C2 and electric capacity C3 three parallel connection, one end of three's parallel connection is connected with+5V level, other end ground connection.4 pin of chip are connected with 5 pin, and 4 pin are connected with-5V level simultaneously.Electric capacity C7, electric capacity C8 and electric capacity C9 three parallel connection, one end of three's parallel connection is connected with-5V level, other end ground connection.One end of resistance R1 is connected with 2 pin of chip, and the other end is connected with 6 pin of chip.The unsettled not line of 1 pin of chip.6 pin of chip are connected with one end of electric capacity C4, the other end ground connection of electric capacity C4.Resistance R4 and electric capacity C4 is in parallel.R4 does not have one end of ground connection as output terminal, is connected with a road input of signal processing unit 4.
Another road buffer circuit of buffer cell 3 is connected with the output terminal of current sampling unit 2, and shown in its circuit with Fig. 5, circuit is identical.
Signal processing unit 4 adopts high-speed AD converter (ADC) to export the two-way of buffer cell 3 and samples, and then the digital signal result of sampling is stored.By using Matlab on host computer, the digital sampled signal stored is read and matching, restore initial radio-frequency voltage to be detected, current analog signal, and then the electric current and voltage simulating signal by restoring, the amplitude of radio-frequency voltage to be detected and electric current, frequency and phase information can be calculated very easily.Adopt the radio-frequency power of known dimensions and standard termination to demarcate the amplitude of sampled signal and phase differential, voltage, electric current and phase information accurately after correction, can be obtained.
The principle of work of the radio-frequency voltage current sensing means that the utility model embodiment provides is as follows: the sampling voltage signal being obtained radio-frequency voltage to be detected by voltage sampling unit 1; The sampling voltage signal of radio-frequency current to be detected is obtained by current sampling unit 2; The two-way sampling voltage signal obtained is cushioned by buffer cell 3; Carry out analog to digital conversion and storage to the two-way analog sample signal that impact damper exports, then read the digital sample data of storage by PC control signal processing unit 4, matching restores radio-frequency voltage to be measured and current analog signal.After the radio-frequency power of known dimensions and standard termination are demarcated the amplitude of sampled signal and phase differential, the amplitude of radio-frequency voltage to be detected and electric current, frequency and phase information can be obtained.
Those skilled in the art will readily understand; the foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all do within spirit of the present utility model and principle any amendment, equivalent to replace and improvement etc., all should be included within protection domain of the present utility model.

Claims (10)

1. a radio-frequency voltage current sensing means, is characterized in that, comprises voltage sampling unit (1), current sampling unit (2), buffer cell (3) and signal processing unit (4);
Described voltage sampling unit (1) is for gathering the voltage in two conductor transmission line between conductor;
Described current sampling unit (2) for responding to the magnetic field intensity around transmission line inner wire, and obtains the electric current of described transmission line inner wire according to the induced voltage at air core coil two ends;
The first input end of described buffer cell (3) connects described voltage sampling unit (1), second input end of described buffer cell (3) connects described current sampling unit (2), for carrying out buffered to the sampled signal of voltage and current;
The first input end of described signal processing unit (4) is connected to the first output terminal of described buffer cell (3), second input end of described signal processing unit (4) is connected to the second output terminal of described buffer cell (3), and the signal for exporting described buffer cell (3) processes rear acquisition radio-frequency voltage to be detected, the amplitude of electric current, frequency and phase differential.
2. radio-frequency voltage current sensing means as claimed in claim 1, it is characterized in that, described voltage sampling unit (1) comprises sheet metal, and described sheet metal forms equivalent capacity with inner wire, outer conductor respectively.
3. radio-frequency voltage current sensing means as claimed in claim 2, it is characterized in that, described voltage sampling unit (1) also comprises electric capacity C10, and one end of described electric capacity C10 connects with outer conductor, and the other end of described electric capacity C10 connects described sheet metal.
4. radio-frequency voltage current sensing means as claimed in claim 2 or claim 3, it is characterized in that, the compressive resistance between sheet metal and inner wire, demand fulfillment is more than or equal to the requirement of voltage twice between transmission line two conductor.
5. radio-frequency voltage current sensing means as claimed in claim 4, is characterized in that, insert dielectric substance in the air gap between sheet metal and inner wire.
6. radio-frequency voltage current sensing means as claimed in claim 5, is characterized in that, the placement parallel with inner wire of described sheet metal.
7. radio-frequency voltage current sensing means as claimed in claim 1, it is characterized in that, described current sampling unit (2) is air core coil, a pin of described air core coil connects with outer conductor, and another pin of described air core coil is as the output terminal of described current sampling unit (2).
8. radio-frequency voltage current sensing means as claimed in claim 7, it is characterized in that, described air core coil is planar coil or air core solenoid coil.
9. radio-frequency voltage current sensing means as claimed in claim 1, it is characterized in that, buffer cell (3) comprises the first buffer cell and the second buffer cell, the input end of described first buffer cell is as the first input end of described buffer cell, and the output terminal of described first buffer cell is as the first output terminal of described buffer cell; The input end of described second buffer cell is as the second input end of described buffer cell, and the output terminal of described second buffer cell is as the second output terminal of described buffer cell.
10. radio-frequency voltage current sensing means as claimed in claim 9, it is characterized in that, described first buffer cell is identical with the structure of described second buffer cell, includes operational amplifier U1, electric capacity C1, electric capacity C2, electric capacity C3, electric capacity C4, electric capacity C7, electric capacity C8, electric capacity C9, resistance R1, resistance R3 and resistance R4;
Described operational amplifier U1 comprises 8 pins, 1st pin is unsettled, 2nd pin is connected to the 6th pin by described resistance R1,3rd pin is as the input end of buffer cell, 4th pin connects-5V power supply, 5th pin connects-5V power supply, and the 6th pin is as the output terminal of buffer cell, and the 7th pin and the 8th pin all connect+5V power supply;
One end ground connection after described electric capacity C1, electric capacity C2 and electric capacity C3 parallel connection, another termination+5V power supply;
One end ground connection after described electric capacity C7, electric capacity C8 and electric capacity C9 parallel connection, another termination-5V power supply;
One end ground connection of described resistance R3, the other end is connected to the 3rd pin of described U1;
Described resistance R4 and described electric capacity C4 is connected in parallel rear one end ground connection, and the other end is connected to the 5th pin of described operational amplifier U1.
CN201521027111.8U 2015-12-10 2015-12-10 Radio frequency voltage current detection device Withdrawn - After Issue CN205229289U (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
CN201521027111.8U CN205229289U (en) 2015-12-10 2015-12-10 Radio frequency voltage current detection device

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105372483A (en) * 2015-12-10 2016-03-02 华中科技大学 Radio frequency voltage and current detection device
CN113396335A (en) * 2018-11-21 2021-09-14 华为技术有限公司 Probe, array probe, detector and method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105372483A (en) * 2015-12-10 2016-03-02 华中科技大学 Radio frequency voltage and current detection device
CN113396335A (en) * 2018-11-21 2021-09-14 华为技术有限公司 Probe, array probe, detector and method

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