CN103708130B - Panel mounting support - Google Patents
Panel mounting support Download PDFInfo
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- CN103708130B CN103708130B CN201210567926.XA CN201210567926A CN103708130B CN 103708130 B CN103708130 B CN 103708130B CN 201210567926 A CN201210567926 A CN 201210567926A CN 103708130 B CN103708130 B CN 103708130B
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- panel
- limiting portion
- movement limiting
- circumference
- support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
- B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68728—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Nonlinear Science (AREA)
- Mechanical Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
- Pallets (AREA)
- Buffer Packaging (AREA)
- Warehouses Or Storage Devices (AREA)
Abstract
A kind ofly the panel mounting support being mounted in the movement in the horizontal direction of panel on support with horizontality also can be stoped when acting on and having vibration or other external force even if the invention provides.In panel mounting support, bear the circumference of carried panel and multiple supports panel being supported to level along this panel surrounding and be provided with multilayer in the vertical direction, panel mounting support possesses panel movement limiting portion, this panel movement limiting portion stretches out from the circumference foreign side of panel towards the lower surface of panel, and oliquely downward arrange obliquely, and the springiness that there is elastic deformation under the effect of the load of panel and the circumference of panel is pushed back and this panel is slided the flatness of movement, when being supported on the panel on support and moving in the horizontal direction during occurrence positions skew, the circumference of this panel flexibly pushes back and this panel adipping is slided and moves by panel movement limiting portion, make panel return thus and remain on correct loading position.
Description
Technical field
The present invention relates to a kind of panel mounting support, even if when effect has vibration or other external force, the panel be mounted on support with horizontality also can be stoped to move in the horizontal direction.
Background technology
When producing the glass substrate etc. of plasma display device, there will be a known the panel mounting support that loader mechanisms such as utilizing the shift fork be arranged on mechanical arm etc. by automatically controlling will become horizontality as the housing panels of process material or will take out as the panel of process material.In this panel mounting support, bear the circumference of the panel carried by loader mechanism and the multiple supports this panel being supported to level are arranged to multilayer in the vertical direction along the surrounding of panel.The example of fixed panel mounting support has been shown in patent documentation 1 ~ 4.
The problem of " the substrate reception box body " of patent documentation 1 is to provide a kind of substrate reception box body that also can prevent being out of shape when receiving large-area mother substrate and standby time is long, wherein said mother substrate is formed by making the large each display panels of product size, described substrate reception box body is configured to possess framework and the multiple back plates outstanding to the inside from the two sides of this framework, described back plate has and each substrate can be carried out enough width of supporting and length in unbending mode, and the space that the mechanical arm transferring described substrate is extracted out from described framework is provided.
The problem of " substrate support structure and its loading attachment and mechanical hand " of patent documentation 2 is to provide flexure when significantly reducing heat treatment and the substrate support structure of the quality after improving heat treatment and its container and mechanical hand, substrate support structure comprises: cabin body (gondola), multilayer is arranged to and with the substrate support of two dot point substrates in this cabin body, mechanical hand etc., this mechanical hand possesses main part and extension, extend to the middle body at the interval of substrate support along direction of insertion when this main part is in the interval being inserted into substrate, this extension is positioned at this compartment in the mode of not interfering with substrate support in an insertion direction and extends transversely the position to substrate.Described substrate support structure can support to bend all very little mode in any one in the extension of substrate support overlapping in the X direction and mechanical hand.Mechanical hand can carry out plugging and being elevated.Reduce effect according to flexure, can intervals be maintained.
The problem of " manufacture method of read out instrument " of patent documentation 3 is to suppress cause the generation of the back side of thin film transistor base plate and the damage of supporting member for substrate because of vertical annealing furnace and avoid the pollution of other thin film transistor base plate and obtain the read out instrument of high-quality, the part contacted with glass substrate utilize the supporting member for substrate formed by the material of alumina series or zirconia system glass substrate is supported to approximate horizontal while heat-treat.Or, use swivel insulated substrate is supported to approximate horizontal while heat-treat, this swivel at least the part contacted with insulated substrate to deform because of the heat of insulated substrate produced power effect under rotate.Now, the foreign matter arranged on the insulated substrate for preventing the foreign matter produced along with the rotation of swivel from dropping to below it accepts component.
The substrate storing apparatus that the problem of " substrate storing apparatus " of patent documentation 4 is to provide a kind of flexure of the substrate that can suppress in substrate storing apparatus and expands the storage gap of substrate as much as possible, substrate storing apparatus possesses multilayer and loads by the shelf of the substrate of the substrate conveyer robot carrying-in/carrying-out of conveying substrate and receive described substrate, be provided with in described substrate storing apparatus: air supply source, the shelf of the mounting substrate of described substrate storing apparatus is provided with peristome, described air supply source sprays the air for making described substrate floating from described peristome, air intake source, described air intake source sucks air to adsorb described substrate and described peristome from described peristome, pipe arrangement, described pipe arrangement makes described peristome be communicated with described air supply source and air intake source.
On the other hand, free-standing has been shown in patent documentation 5 and with the state being equipped with panel under carry out the panel mounting support of movement of walking.In " air discharge trolley and the forced convection type car-type continuous processing apparatus " of patent documentation 5, air discharge trolley is at least equipped with exhaust gear, and possess the retaining member of the flat plate panel keeping multiple microarray strip pipe and the heat insulating component of inaccessible siege peristome, process continuously in stove at forced convection type car-type and to move and to being exhausted in described flat plate panel, in described air discharge trolley, the partition component being arranged on and forming specified gap in stove between the roof of process chamber and sidewall is erect at the leading section of described heat insulating component or rearward end, the containment member in inaccessible described gap is set at the circumference of the partition component of described air discharge trolley.
Prior art document
Patent documentation
Patent documentation 1: Japanese Unexamined Patent Publication 2003-335390 publication
Patent documentation 2: Japanese Unexamined Patent Publication 2004-26426 publication
Patent documentation 3: Japanese Unexamined Patent Publication 2004-294591 publication
Patent documentation 4: Japanese Unexamined Patent Publication 2007-96027 publication
Patent documentation 5: Japanese Patent No. 4745539 specification sheets
The problem that invention will solve
In the introduction, to when the panel be equipped on support blows and sprays the process of hot blast etc. or makes support-moving etc. with horizontality, panel may be caused to move in the horizontal direction from the loading position carried to support because of the impact of the force and velocity of a current of vibration time mobile or hot blast.If panel moves, then there is the problem that the mechanical arm that carries out action by automatically controlling or shift fork mounted thereto cannot be utilized to be taken out from support by panel.
Summary of the invention
The present invention is the scheme of making in view of above-mentioned existing problem, even if its object is to provide a kind of effect to have vibration or other external force also can stop the panel mounting support being mounted in the movement in the horizontal direction of panel on support with horizontality.
For the method for dealing with problems
In panel mounting support involved in the present invention, bear the circumference of carried panel and the multiple supports this panel being supported to level along this panel surrounding and be provided with multilayer in the vertical direction, the feature of described panel mounting support is, possesses panel movement limiting portion, this panel movement limiting portion stretches out from the circumference foreign side of described panel towards the lower surface of this panel, and oliquely downward arrange obliquely, and the springiness that there is elastic deformation under the effect of the load of this panel and the circumference of this panel is pushed back and this panel is slided the flatness of movement, being supported on this panel on described support and moving in the horizontal direction during occurrence positions skew, the circumference of this panel flexibly pushes back and this panel adipping is slided and moves by panel movement limiting portion, thus this panel is returned and remains on correct loading position.
Feature of the present invention is also, described panel movement limiting portion possesses dip plane, this dip plane has springiness and flatness and towards the circumference of described panel, this dip plane to be formed for described support towards the through breakthrough part of the circumference of described panel, described panel movement limiting portion assembles described support integratedly.
Feature of the present invention is also, is provided with the deformation restricting portions elastic deformation mode of this panel movement limiting portion being constrained to convex mode downwards in the below of described panel movement limiting portion.
Invention effect
In panel mounting support involved in the present invention, even if effect has vibration or other external force, the panel be mounted on support with horizontality also can be stoped to move in the horizontal direction.
Accompanying drawing explanation
Fig. 1 is the front view representing the example can applying panel mounting support of the present invention.
Fig. 2 is that the A-A alignment in Fig. 1 looks cutaway view.
Fig. 3 is the instruction diagram of the preferred embodiment that panel mounting support involved in the present invention is described.
Fig. 4 is the main portion amplification stereogram representing support on the pillar being arranged on the panel mounting support shown in Fig. 3 and panel movement limiting portion.
Fig. 5 is the main portion amplification plan view representing support on the pillar being arranged on the panel mounting support shown in Fig. 3 and panel movement limiting portion.
Fig. 6 is the main portion enlarged side view representing support on the pillar being arranged on the panel mounting support shown in Fig. 3 and panel movement limiting portion.
Fig. 7 is the instruction diagram of the position skew of the panel illustrated on the support of panel mounting support.
Fig. 8 is the block diagram of the first variation representing panel mounting support involved in the present invention.
Fig. 9 is the block diagram of the second variation representing panel mounting support involved in the present invention.
Figure 10 is the block diagram of the 3rd variation representing panel mounting support involved in the present invention.
Figure 11 is the block diagram of the 4th variation representing panel mounting support involved in the present invention.
Description of reference numerals is as follows:
1 panel mounting support
2 base stations
3 tracks
4 wheels
5 pillars
6 supports
6a large diameter part
6b bolt part
7 panel movement limiting portions
7a dip plane
8 nuts
9 shift forks
10 sheet materials
11 deformation restricting portions
12 assemblies
13 slit-shaped breakthrough parts
14 beams
The mode that M is convex downwards
P panel
The panel that P ' position offset by
The panel side leading section of T panel movement limiting portion
W hot blast
The circumference of X panel
Detailed description of the invention
Below, panel mounting support involved in the present invention is explained preferred embodiment with reference to accompanying drawing.Fig. 1 is the front view representing the example can applying panel mounting support 1 of the present invention, and Fig. 2 is that the A-A alignment in Fig. 1 looks cutaway view.Panel mounting support 1 roughly possesses base station 2, be arranged on base station 2 times and the wheel 4 of walking on the track 3, erect upward the many pillars 5 of setting from base station 2.Described pillar 5 is to surround being arranged on base station 2 of the surrounding of panel P of carrying.
Fig. 3 represent the panel mounting support 1, Fig. 3 (A) involved by present embodiment be from top view to birds-eye view, Fig. 3 (B) is the lateral plan observed from side.Fig. 4 represents the main portion amplification stereogram being arranged on support 6 on the pillar 5 of panel mounting support 1 and panel movement limiting portion 7, Fig. 5 is the main portion amplification plan view of support 6 and panel movement limiting portion 7, and Fig. 6 is the main portion enlarged side view of support 6 and panel movement limiting portion 7.
Be arranged on identical height and position and bear the circumference X of carried panel P thus panel P be supported to the support 6 of level being arranged at the many pillars 5 on base station 2 are respectively arranged with.Therefore, support 6 is provided with multiple relative to a panel P along the surrounding of this panel P.In addition, support 6 is vertically disposed with multilayer along its short transverse on each pillar 5.Therefore, each support 6 that pillar 5 utilizes height and position different separately supporting faceplate P, thus, panel mounting support 1 is formed as carrying multiple panels P in the mode of multilayer in the vertical direction.
Support 6 is formed as having the shaft-like of large diameter part 6a in front end.Large diameter part 6a is utilized to make the contact between support 6 and panel P reach Min..Support 6 is installed with horizontality by screwing togather nut 8 (with reference to Fig. 5 and Fig. 6) on the bolt part 6b of the cardinal extremity of through pillar 5 and is bearing on pillar 5.Support 6 is can the appropriate size of the stably circumference X of supporting faceplate P from the length setting that pillar 5 is outstanding.Thus, the multiple supports 6 phase co-altitude is arranged on multiple pillar 5 bear the circumference X of carried panel P and this panel P are supported to level.
In accompanying drawing example, pillar 5 is respectively arranged with 4 around with being configured in of the both sides towards carried panel P, support 6 be arranged to towards the mode clipping panel P and relative pillar 5 to the right and left give prominence to.Further, utilize the described support 6 of being arranged to multilayer on the above-below direction of pillar 5 and carry multiple panels P in the mode of multilayer on panel mounting support 1.
The shift fork (fork) 9 that counter plate P on the robotic arm carries out manipulating is installed advance towards panel mounting support 1 with the state that remain panel P when receiving panel P by automatically controlling, then decline, retreat after panel P is placed on support 6.In addition, when taking out panel P, shift fork 9 advances towards panel mounting support 1, retreats after support 6 lifts panel P in rising.
As shown in the birds-eye view (Fig. 7 (A)) of Fig. 7 and lateral plan (Fig. 7 (B)), when the force and velocity of a current etc. because of vibration or hot blast W impact and the panel P be bearing on support 6 is moved in the horizontal direction and has carried out position skew from the correct loading position determined by shift fork 9 time (figure, represented by P '), may utilize based on the shift fork 9 automatically controlled when taking out and panel P is taken out.
In the present embodiment, the counter plate P process due to shift fork 9 forward-reverse, even if therefore panel P there occurs position skew and also can not there is obstacle on this forward-reverse direction, if but there is right position skew in the horizontal direction, then exist and produce the situation of obstacle.Therefore, in the present embodiment, be configured to the restriction panel P position towards left and right in the horizontal direction as described below offset.
Panel mounting support 1 involved by present embodiment possesses panel movement limiting portion 7, and this panel movement limiting portion 7 limits the panel P movement towards left and right in the horizontal direction by the support 6 of the pillar 5 at left-right situs from left and right directions supporting.As shown in Fig. 3 ~ Fig. 6, pillar 5 is provided with the assembly 12 that entirety topples over hollow triangular prism shape transversely, and this assembly 12 comprises: the sheet material 10 engaged with pillar 5, the panel movement limiting portion 7 be obliquely installed obliquely from the upper end of sheet material 10 and the deformation restricting portions 11 be obliquely installed obliquely from the lower end of sheet material 10.This assembly 12 is arranged to toward each other respectively accordingly with each support 6 on pillar 5 relative in left-right direction.
Panel movement limiting portion 7 is the dip plane 7a of surface smoothing, is formed by the thin plate of the stainless steel with flexural resilience etc.Panel movement limiting portion 7 stretches out from the circumference X foreign side of panel P towards the lower surface of panel P and oliquely downward arranges obliquely.
The pillar side base end part of panel movement limiting portion 7 engages with sheet material 10 in the position higher than support 6 (with reference to Fig. 6), and panel side leading section T is set in the low position of the bearing position of ratio panels P, thus, panel movement limiting portion 7 is arranged downwards from pillar 5 skew back.The dip plane 7a of panel movement limiting portion 7 configures towards the circumference X of panel P.
Panel movement limiting portion 7 has springiness, and when on the dip plane 7a that panel P gets over top panel movement limiting portion 7, panel movement limiting portion 7 is elastic bending deflection because of the load of panel P, is pushed back by the circumference X of panel P thus.In addition, panel movement limiting portion 7 has flatness, and when on the dip plane 7a that panel P gets over top panel movement limiting portion 7, panel movement limiting portion 7 makes panel P oliquely downward slide movement.And, panel movement limiting portion 7 is configured to, when being supported on the impact of the panel P on support 6 because of vibration or hot blast W etc. and moving in the horizontal direction during occurrence positions skew, panel movement limiting portion 7 makes the adipping slid underneath while being pushed back by elasticity such as the edge of the circumference X of panel P or bight move, and makes panel P return thus and remains on correct loading position.
In the present embodiment, the deformation restricting portions 11 elastic deformation mode of panel movement limiting portion 7 being constrained to convex mode (in Fig. 6, with reference to dotted line M) is downwards provided with in the below of laminal panel movement limiting portion 7.The cardinal extremity of deformation restricting portions 11 engages with sheet material 10, and front end engages with the panel side leading section T of panel movement limiting portion 7, and between pillar 5 and the panel side leading section T of panel movement limiting portion 7, deformation restricting portions 11 is arranged to inclination obliquely.Deformation restricting portions 11 also thin plate by have flexural resilience same with panel movement limiting portion 7 is formed.
As shown in Figure 6, deformation restricting portions 11 also can overcome this displacement panel side leading section T is intended to displacement downwards at panel movement limiting portion 7 elastic bending deflection and produce springiness, suppresses the panel side leading section T of panel movement limiting portion 7 to hang down.Consequently, the elastic deformation mode of panel movement limiting portion 7 is constrained to convex mode M downwards.So, owing to can utilize the elasticity at panel movement limiting portion 7 and these two positions of deformation restricting portions 11, therefore restoring force increases, and durability improves, thus can continue the effect of springiness for a long time.
And then, the dip plane 7a of panel movement limiting portion 7, deformation restricting portions 11 and above-mentioned sheet material 10 are formed respectively for shaft-like support 6 from pillar 5 side towards the through slit-shaped breakthrough part 13 of the circumference X of panel P and through hole (not shown).Therefore, can be configured to panel movement limiting portion 7 and support 6 are assembled into one.Thereby, it is possible to processed as unit by the assembly 12 comprising support 6 and panel movement limiting portion 7, they can be installed on pillar 5 in the lump.
In addition, by arranging the dip plane 7a of panel movement limiting portion 7 on the position abutted with the circumference X of the panel P being supported on support 6 at correct loading position, thus can with the dip plane 7a of the both sides of support 6 and this 3 point of support 6 (large diameter part 6a) (in Fig. 4, by black ● illustrated position) supporting faceplate P, can stably carry panel P.Now, by the elongated hole that the through hole of sheet material 10 is formed as growing in the vertical direction, thus according to the height and position of the oad adjustment dip plane 7a of panel P, can abut with dip plane 7a freely relative to the circumference X of panel P.
The effect of the panel mounting support 1 involved by present embodiment is described.When panel P is carried to panel mounting support 1, by automatically controlling to make shift fork 9 action, inserting panel P to panel mounting support 1, and making shift fork 9 decline and be mounted on support 6 by panel P, thus by support 6 supporting faceplate P.As required this operation is performed to each support 6 being arranged to multilayer in the vertical direction.
To be supported on support 6 and carry the panel P on panel mounting support 1 be intended to move left and right in the horizontal direction on support 6 because of the impact with mobile etc. the vibration of walking, the force and velocity of a current of hot blast W that blows etc. time, the edge of the circumference X of the panel P of movement or bight etc. are intended to get on the dip plane 7a of top panel movement limiting portion 7.
The dip plane 7a of panel movement limiting portion 7 plays relative to the mobile and load that is that be intended to the panel P more gone up of sliding the springiness that produced by elastic bending deflection and is pushed back by this panel P.To be slided obliquely downward under the effect of the sliding of the level and smooth dip plane 7a of panel movement limiting portion 6 movement by the panel P pushed back, return thus and remain on correct loading position.Such effect is guaranteed by whole panel movement limiting portion 7 of the surrounding surrounding panel P, and panel P remains on correct loading position.
Above, panel movement limiting portion 7 is possessed in the panel mounting support 1 involved by present embodiment, this panel movement limiting portion 7 stretches out from the circumference X foreign side of panel P towards the lower surface of panel P, and oliquely downward arrange obliquely, and the springiness that there is elastic bending deflection under the effect of the load of panel P and the circumference X of panel P is pushed back and panel P is slided the flatness of movement, and when be supported on the panel P on support 6 in the horizontal direction sway and occurrence positions skew time, the edge of the circumference X of this panel P or bight are pushed back and simultaneously adipping slid underneath moves by elasticity, thus panel P is returned and remains on correct loading position, owing to possessing this panel movement limiting portion 7, therefore when effect has vibration or other external force, also the panel P sway be in the horizontal direction mounted in horizontality on panel mounting support 1 can be stoped.Therefore, it is possible to by taking out panel P without barrier according to the shift fork 9 of automatic control action.
In addition, when playing springiness at panel movement limiting portion 7 elastic bending deflection, the below displacement of the panel side leading section T of panel movement limiting portion 7 is suppressed by deformation restricting portions 11, the elastic deformation mode of dip plane 7a is constrained to convex mode of texturing M downwards thus, therefore according to the action of the spring produced based on deformation restricting portions 11, the recovery of panel movement limiting portion 7 is stablized, the function pushed back swimmingly by panel P can be continued for a long time.
In addition, the dip plane 7a of panel movement limiting portion 7 is formed for support 6 towards the through slit-shaped breakthrough part 13 of the circumference X of panel P, support 6 is assembled into integratedly modularity on the assembly 12 comprising panel movement limiting portion 7 thus, therefore, it is possible to described support 6 and panel movement limiting portion 7 be arranged on together a position of pillar 5 and arrange in the short transverse of pillar 5, by very simple operation, panel movement limiting portion 7 can be arranged on panel mounting support 1.
And then, by carrying out modularity as described above, can by the dip plane 7a of panel movement limiting portion 7 and support 6 (large diameter part 6a) stably counter plate P carry out three point support.
The variation of above-mentioned embodiment shown in Fig. 8 ~ Figure 11.Fig. 8 is the block diagram representing the first variation.In this variation, support 6 is arranged at the assembly 12 comprising panel movement limiting portion 7 position be separated separately.In this case, the height and position of the supporting faceplate P of pillar 5 is provided with along the longitudinal direction by beam 14 connected to each other for adjacent pillar 5, this beam 14 is provided with support 6, assembly 12.
In this variation, due to support 6 is separated the relation of setting with assembly 12, beam 14 is preferably set, but on the other hand, support 6 and assembly 12, by by support 6 and assembly 12 modularity, can be only arranged on the advantage that pillar 5 has without the need to arranging beam 14 by above-mentioned embodiment.
Fig. 9 is the block diagram representing the second variation.In this variation, omit the sheet material 10 of constituent components 12 and deformation restricting portions 11 and the situation only arranging panel movement limiting portion 7 is shown.Figure 10 is the block diagram representing the 3rd variation.In this variation, replacement has the laminal panel movement limiting portion 7 of dip plane 7a and the shaft-like panel movement limiting portion 7 with springiness is shown.If be formed as shaft-like, then originally just little with the wipe contact area of panel P, therefore, it is possible to guarantee good sliding, and scar or dirt can be suppressed to be attached on panel P.Figure 11 is the block diagram representing the 4th variation.In this variation, the shaft-like panel movement limiting portion 7 of Figure 10 possesses above-mentioned deformation restricting portions 11.
In above-mentioned arbitrary variation, all can play the action effect same with above-mentioned embodiment is self-evident.In addition, in the above-described embodiment, although be illustrated the structure of the position to the left and right preventing the horizontal direction of panel P, it is self-evident for panel movement limiting portion 7 also can being made to be not limited only to left and right and configure along front and back thus prevent the position of left and right forwards, backwards in the horizontal direction from offseting.
Claims (2)
1. a panel mounting support, bear the circumference of carried panel and the multiple supports this panel being supported to level along this panel surrounding and be provided with multilayer in the vertical direction, it is characterized in that,
Described panel mounting support possesses panel movement limiting portion, this panel movement limiting portion stretches out from the circumference foreign side of described panel towards the lower surface of this panel, and oliquely downward arrange obliquely, and the springiness that there is elastic deformation under the effect of the load of this panel and the circumference of this panel is pushed back and this panel is slided the flatness of movement, when being supported on this panel on described support and being intended to move in the horizontal direction during occurrence positions skew, the circumference of this panel flexibly pushes back and this panel adipping is slided and moves by panel movement limiting portion, thus this panel is returned and remains on correct loading position,
Described panel movement limiting portion possesses dip plane, this dip plane has springiness and flatness and towards the circumference of described panel, this dip plane to be formed for described support towards the through breakthrough part of the circumference of described panel, described panel movement limiting portion assembles described support integratedly.
2. a panel mounting support, bear the circumference of carried panel and the multiple supports this panel being supported to level along this panel surrounding and be provided with multilayer in the vertical direction, it is characterized in that,
Described panel mounting support possesses panel movement limiting portion, this panel movement limiting portion stretches out from the circumference foreign side of described panel towards the lower surface of this panel, and oliquely downward arrange obliquely, and the springiness that there is elastic deformation under the effect of the load of this panel and the circumference of this panel is pushed back and this panel is slided the flatness of movement, when being supported on this panel on described support and being intended to move in the horizontal direction during occurrence positions skew, the circumference of this panel flexibly pushes back and this panel adipping is slided and moves by panel movement limiting portion, thus this panel is returned and remains on correct loading position,
The deformation restricting portions elastic deformation mode of this panel movement limiting portion being constrained to convex mode is downwards provided with in the below of described panel movement limiting portion.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-220055 | 2012-10-02 | ||
| JP2012220055A JP5180403B1 (en) | 2012-10-02 | 2012-10-02 | Panel mounting rack |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103708130A CN103708130A (en) | 2014-04-09 |
| CN103708130B true CN103708130B (en) | 2016-01-06 |
Family
ID=48189461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210567926.XA Expired - Fee Related CN103708130B (en) | 2012-10-02 | 2012-12-24 | Panel mounting support |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5180403B1 (en) |
| KR (1) | KR101380993B1 (en) |
| CN (1) | CN103708130B (en) |
| TW (1) | TWI412476B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106032014A (en) * | 2015-03-13 | 2016-10-19 | 上海理想万里晖薄膜设备有限公司 | Mechanical arm |
| WO2019098066A1 (en) * | 2017-11-14 | 2019-05-23 | 株式会社瑞光 | Device replacement in wearable article manufacturing equipment |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5960960A (en) * | 1996-10-15 | 1999-10-05 | Nec Corporation | Wafer carrier |
| CN101872732A (en) * | 2009-04-23 | 2010-10-27 | 东京毅力科创株式会社 | Substrate holder, substrate transferring arm and base board delivery device |
| CN202219923U (en) * | 2011-08-24 | 2012-05-16 | 安徽鑫昊等离子显示器件有限公司 | Cassette provided with glass substrate |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3203794B2 (en) * | 1992-09-02 | 2001-08-27 | ソニー株式会社 | Method and apparatus for transporting disc-shaped parts |
| JP3986027B2 (en) * | 1997-08-29 | 2007-10-03 | 大日本印刷株式会社 | Glass plate cassette |
| TW563680U (en) * | 2002-03-12 | 2003-11-21 | Au Optronics Corp | Cartridge and carrier structure for transmitting glass substrate |
| JP2004146578A (en) * | 2002-10-24 | 2004-05-20 | Yodogawa Hu-Tech Kk | Substrate support member in cassette, and cassette for substrate |
| JP2005340480A (en) * | 2004-05-26 | 2005-12-08 | Nippon Oil Corp | Support bar for substrate cassettes |
| US20090194456A1 (en) * | 2006-07-07 | 2009-08-06 | Entegris, Inc. | Wafer cassette |
| KR20080049254A (en) * | 2006-11-30 | 2008-06-04 | 엘지디스플레이 주식회사 | Cassette for transferring plate |
| CN201614104U (en) * | 2009-12-18 | 2010-10-27 | 台湾淀川化成股份有限公司 | Glass substrate conveying box |
| KR101212021B1 (en) * | 2010-11-18 | 2012-12-13 | (주) 청심이엔지 | Cassette for loading substrate and substrate slimming apparatus having that |
| TWM418901U (en) * | 2011-08-11 | 2011-12-21 | Joghon Technology Co Ltd | Panel storage device |
-
2012
- 2012-10-02 JP JP2012220055A patent/JP5180403B1/en active Active
- 2012-12-10 TW TW101146345A patent/TWI412476B/en not_active IP Right Cessation
- 2012-12-24 CN CN201210567926.XA patent/CN103708130B/en not_active Expired - Fee Related
-
2013
- 2013-04-25 KR KR1020130045910A patent/KR101380993B1/en not_active IP Right Cessation
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5960960A (en) * | 1996-10-15 | 1999-10-05 | Nec Corporation | Wafer carrier |
| CN101872732A (en) * | 2009-04-23 | 2010-10-27 | 东京毅力科创株式会社 | Substrate holder, substrate transferring arm and base board delivery device |
| CN202219923U (en) * | 2011-08-24 | 2012-05-16 | 安徽鑫昊等离子显示器件有限公司 | Cassette provided with glass substrate |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2014069893A (en) | 2014-04-21 |
| TWI412476B (en) | 2013-10-21 |
| CN103708130A (en) | 2014-04-09 |
| JP5180403B1 (en) | 2013-04-10 |
| KR101380993B1 (en) | 2014-04-04 |
| TW201326008A (en) | 2013-07-01 |
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Granted publication date: 20160106 Termination date: 20191224 |