CN106032014A - Mechanical arm - Google Patents
Mechanical arm Download PDFInfo
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- CN106032014A CN106032014A CN201510110505.8A CN201510110505A CN106032014A CN 106032014 A CN106032014 A CN 106032014A CN 201510110505 A CN201510110505 A CN 201510110505A CN 106032014 A CN106032014 A CN 106032014A
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- mechanical arm
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Abstract
The invention provides a mechanical arm used to transmit a substrate into a functional cavity. The mechanical arm is an integrated body machined integrally, and is arranged on a moving platform. The mechanical arm comprises a bearing portion, and a root portion. The part of the lower surface of the root portion, contacting with the moving platform, is a fixed contact surface. The root portion comprises a root reinforcing portion which is on the upper side of the root portion, and the cross section of the root reinforcing portion along a mechanical arm direction is in an upright trapezoidal shape. The length range of the upper edge of the upright trapezoid is larger than or equal to the length of the fixed contact surface, and is smaller than or equal to the length of the lower edge of the upright trapezoid. The thickness of the root reinforcing portion is larger than or equal to 1.5 times of the thickness of the bearing portion, and is smaller than or equal to 2 times of the thickness of the bearing portion. The mechanical arm can improve rigidity and stability of a cantilever structure, and reduces sag amount, and realizes normal transmission operation of a substrate under condition of satisfying strict transmission conditions of dimension and quality increasing, motion space reduction, and transmission speed accelerating.
Description
Technical field:
The present invention relates to board transport field, particularly relate to a kind of mechanical arm.
Background technology:
In the production process of solaode, flat pannel display and semiconductor applications, complete set manufacturing process generally includes a lot of operation, substrate needs to flow through multiple different function chamber and completes film-forming process, how substrate movement between these chambers and location, completed by the mechanical arm of responsible transmission substrate.
Fig. 1 is that in prior art, a kind of common mechanical arm delivery substrate enters, go out the situation of chamber, as shown in Figure 1, can be to be provided with the mechanical arm 102 of bearing substrate 103 in reciprocating mobile station 101, its quantity is 3, mechanical arm 102 is for transmitting substrate 103 to function chamber 104, this function chamber 104 has the opening of certain size, the height dimension of its opening is H, by moving back and forth before and after mobile station 101 and the cooperation of other mechanism being correlated with, mechanical arm 102 just can complete substrate is sent into chamber and the work of taking-up from chamber through this opening.Can be seen that, in Fig. 1 example, mobile station 101 and mechanical arm 102 constitute typical cantilever design: the limited part of mechanical arm 102 only root is fixed in mobile station 101, remaining major part material together with carrying substrate all cantilevers outside mobile station, this mode inevitably results in arm front end and substrate produces certain sag of chain Δ, can be found in shown in Fig. 2.
Along with the development of technology and produce the continuous renewal of line and regenerate, the development of current equipment has following trend:
1, motion allows space to diminish: in order to improve the work efficiency that functional chamber is indoor, such as improve the rate of film build of PECVD deposit cavity, the opening size H of industrial function chamber has ever-reduced trend, so mechanical arm bearing substrate becomes more and more narrower, compact into and out of the space of chamber, substrate easily collides with chamber wall, adds the biggest difficulty to moving back and forth.
2, substrate size and quality increase considerably: substrate size is the biggest, arm is accomplished by longer length to place substrate, the i.e. length of cantilever cannot shorten, and the most also to lengthen, and substrate size is the biggest simultaneously, quality is also the biggest, these changes the most directly show, it is simply that sag of chain Δ shown in Fig. 2 will significantly increase, and will affect the stability that substrate transmits.
In addition, in a lot of equipment, the work that transmits of substrate is required in the temperature environment more than 200 DEG C carrying out, now, the performance of a lot of materials can change, and the rigidity of material, even includes the rigidity of substrate itself, will reduce, the sag of chain of cantilever bearing substrate, is just more difficult to ensure, the most just further increases the difficulty transmitting work.
Some content of summary, easily learn, fast development along with technology, the difficulty of substrate transmission work increases increasingly, the substrate size and the quality that are mainly reflected in arm carrying are increasing, but transmit the space that work allows, more and more narrower, compact, if the rigidity of cantilever design bearing substrate now can not be effectively improved, reduce sag of chain Δ, just it is easy to that friction occurs, clash into, the even serious conditions of damage equipment interior arrangement, cause the breakage of substrate and the stability of equipment can be affected, safety, the bottleneck that in these problems prior art just, mechanical arm is faced.
Summary of the invention:
In order to solve the problems referred to above, the invention provides a kind of mechanical arm, by changing the structure of mechanical arm root, it is effectively improved rigidity and the kinetic stability of cantilever design bearing substrate, reduce its sag of chain, realize, under the conditions of substrate meets the strictly transmission such as size and quality increase, space reduction, transfer rate quickening, still ensuring that and transmitting work normally.
In order to achieve the above object, the invention provides a kind of mechanical arm, indoor for substrate is sent to functional chamber, described mechanical arm is integrated an entirety of processing, being arranged in the mobile station of its transport of carrying, described mechanical arm includes: for the supporting part of bearing substrate；Root for the described mobile station of fixing connection, the part contacted with each other with mobile station in described root lower surface is fixing contact surface, described root includes being positioned on the upside of root and is upright trapezoidal root rib along cross section, mechanical arm direction, the length range of described upright trapezoidal top is more than or equal to the length of described fixing contact surface and less than or equal to described upright trapezoidal following length, and the thickness of described root rib is more than or equal to 1.5 times of described supporting part thickness and is less than or equal to 2 times of supporting part thickness.
Alternatively, described root also includes being positioned on the downside of root and is the trapezoidal root supporting part that stands upside down along cross section, mechanical arm direction, now, described fixing contact surface is a part for described root supporting part lower surface, the stand upside down trapezoidal following length range length more than or equal to described fixing contact surface and the length less than or equal to the trapezoidal top of described handstand of described root supporting part, the thickness of described root supporting part is more than or equal to 1 times of described supporting part thickness and is less than or equal to 2 times of supporting part thickness.
Preferably, the length range of the upright trapezoidal top of described root rib is more than or equal to the trapezoidal following length of standing upside down of described root supporting part.
Alternatively, described mechanical arm is used for transmitting area more than 1m2Substrate.
Alternatively, described mechanical arm is for transmitting the quality substrate more than 10Kg.
Alternatively, described mechanical arm is used for transmitting area more than 1m2, the quality solar panel more than 10Kg.
Alternatively, described function chamber is PECVD reaction chamber.
Compared with prior art, the present invention has a following technique effect:
1, the present invention can effectively reduce the sag of chain of mechanical arm, improves the rigidity of cantilever design, meets in equipment of new generation, the more harsh transmission stability requirement reducing because of substrate size and quality increase, space and producing.
2, the transmission of substrate, through whole workflow, has been connected equipment various piece, if the speed of transmission work can be improved, will very effectively accelerate the beat of equipment, directly enhance the production capacity of equipment.And in the industrial production, the transmission speed improving substrate often makes the bad stability of arm motion, thus limit the raising of transmission speed.Mechanical arm disclosed in the present invention can be effectively improved the rigidity of cantilever design so that it is is maintained to excellent arm motion stability while improving board transport speed, thus improves the production capacity of equipment.
3, in general, the athletic meeting during transmission makes the mechanical arm of cantilever design and substrate produce certain forced vibration, and along with the quickening of movement velocity, this forced vibration can be increasingly severe, the design of the present invention, it is possible to effectively strengthens the capacity of resisting disturbance of cantilever design.
4, in addition to transmitting the motion of work self, Factory Building, produce around line, equipment, the work etc. of the many moving components of device interior, also can produce the random and vibration of complexity, resonance time serious, can be produced, namely amplitude reaches maximum.Now it is possible to the problem occurring arm, substrate or equipment are caused damage, the present invention can reduce the amplitude that mechanical arm and substrate are caused by these random disturbances, thus decrease substrate shift, shake off, the generation of the situation such as percussion device miscellaneous part.
Accompanying drawing illustrates:
Fig. 1 is the schematic diagram of mechanical arm delivery substrate turnover chamber in prior art.
Fig. 2 is the depending condition schematic diagram of the mechanical arm of bearing substrate in prior art.
Fig. 3 (a) is the axonometric chart of mechanical arm in prior art.
Fig. 3 (b) is the profile in Fig. 3 (a) along XX ' direction.
Fig. 4 (a) is the axonometric chart of the mechanical arm of first embodiment of the invention.
Fig. 4 (c) is the partial enlarged drawing in Fig. 4 (b) in dotted line frame.
Fig. 4 (b) is the profile in Fig. 4 (a) along XX ' direction.
Fig. 5 (a) is the axonometric chart of the mechanical arm of second embodiment of the invention.
Fig. 5 (b) is the profile in Fig. 5 (a) along XX ' direction.
Fig. 5 (c) is the partial enlarged drawing in Fig. 5 (b) in dotted line frame.
Fig. 6 is the mechanical arm schematic diagram when bearing substrate in the case of prior art, first embodiment of the invention, second embodiment of the invention three kinds.
Fig. 7 is the common arm of the prior art deformation map when bearing substrate.
Fig. 8 is L5=L3, first embodiment mechanical arm deformation map during T2=1.5T.
Fig. 9 is L5=L3, T2=1.5T and L4=L3, the second embodiment mechanical arm deformation map during T1=T.
Figure 10 is L5=L1, first embodiment mechanical arm deformation map during T2=2T.
Figure 11 is L5=L1, T2=2T and L4=L1, the second embodiment mechanical arm deformation map during T1=2T.
Figure 12 is L5=1.3L3, first embodiment mechanical arm deformation map during T2=1.67T.
Figure 13 is L5=1.3L3, T2=1.67T and L4=1.2L3, the second embodiment mechanical arm deformation map during T1=1.67T.
Detailed description of the invention:
Understandable for enabling the above-mentioned purpose of the present invention, feature and advantage to become apparent from, below in conjunction with the accompanying drawings the detailed description of the invention of the present invention is described in detail.
Elaborating a lot of detail in the following description so that fully understanding the present invention, but the present invention can also use other to be different from additive method described here to be implemented, therefore the present invention is not limited by following public specific embodiment.
It is pointed out that the substrate that the mechanical arm that present document relates to is provided both had included the substrate of overlay film, such as thin-film solar cell panel, also include the support plate carrying some substrates, such as crystal silicon solar batteries plate.
Mechanical arm involved by Ben Wen is used for bearing substrate, it is achieved substrate movement between multiple different function chambers and location, described function chamber can be process cavity, transmission cavity, enter sheet chamber, slice chamber, etch chamber etc., can be such as PECVD reaction chamber.Described mechanical arm is integrated an entirety of processing, is arranged in the mobile station of its transport of carrying.
The axonometric chart of mechanical arm in prior art shown in Fig. 3 (a), the width of mechanical arm 102 is W, Fig. 3 (b) is the profile in Fig. 3 (a) along XX ' direction, in figure, the thickness of mechanical arm 102 is T, mechanical arm 102 includes the supporting part 106 for bearing substrate, with the root 105 for the described mobile station of fixing connection, the part contacted with each other with mobile station in described root lower surface is fixing contact surface 107, clearer in order to state, see shown in Fig. 3 (b): supporting part 106 is CD section, a length of L2；Root 105 is AC section, a length of L1；Fixing contact surface 107 is AB section, a length of L3.
Fig. 4 (a) is the axonometric chart of the mechanical arm of first embodiment of the invention, and Fig. 4 (b) is the profile in Fig. 4 (a) along XX ' direction, and Fig. 4 (c) is the partial enlarged drawing in Fig. 4 (b) in dotted line frame.nullIn conjunction with Fig. 4 (a)、(b) and (c)，The width of mechanical arm 102 is W，The thickness of mechanical arm supporting part 106 is T，In this first embodiment for the prior art of Fig. 3，In mechanical arm 102, the cross section for the fixing root 105 connecting described mobile station is polygon AHJKC，Described root 105 further comprises and is positioned on the upside of root and along the root rib 108 that cross section, mechanical arm direction is upright trapezoidal GHJK，The a length of L5 of described upright trapezoidal GHJK top HJ，The a length of L1 of GK below，The thickness HG of described root rib 108 is T2，Length AB of the fixing contact surface 107 contacted with mobile station in the lower surface of described root 105 is L3，In the present embodiment，L3≤L5≤L1，1.5T≤T2≤2 T.
Fig. 5 (a) is the axonometric chart of the mechanical arm of second embodiment of the invention, and Fig. 5 (b) is the profile in Fig. 5 (a) along XX ' direction, and Fig. 5 (c) is the partial enlarged drawing in Fig. 5 (b) in dotted line frame.nullIn conjunction with Fig. 5 (a)、(b) and (c)，The width of mechanical arm 102 is W，The thickness of mechanical arm supporting part 106 is T，Second embodiment is for the first embodiment in Fig. 4，In mechanical arm 102, the cross section for the fixing root 105 connecting described mobile station is polygon AHJKCE，Described root 105 further comprises and is positioned on the upside of root and along the root rib 108 that cross section, mechanical arm direction is upright trapezoidal GHJK be positioned on the downside of root and be the root supporting part 109 of trapezoidal AFCE of standing upside down along cross section, mechanical arm direction，The a length of L5 of described upright trapezoidal GHJK top HJ，The a length of L1 of GK below，The thickness HG of described root rib 108 is T2，The a length of L1 of described handstand trapezoidal AFCE top FC，The a length of L4 of AE below，Thickness A F of described root supporting part 109 is T1，Length AB of the fixing contact surface 107 contacted with mobile station in the lower surface of described root 105 is L3，Now，Described fixing contact surface 107 should be a part for described root supporting part 109 lower surface，In the present embodiment，L3≤L4≤L1， T≤T1≤2 T.
In the present invention, the rigidity of root rib 108 and root 109 two parts cantilever design to improving mechanical arm 102 has the most useful effect: from the point of view of qualitative from structure, root supporting part 109 adds the thickness of root material, improve the enabling capabilities of root, play supporting role from the bottom up；Root rib 108 then by increasing the material of root top half, reaches the effect carrying out lifting from above.These two parts act on and can play the effect of " under support pull-up " jointly, thus preferably improve the rigidity of cantilever design so that sag of chain Δ during arm cantilever bearing substrate effectively reduces.
The mechanical arm schematic diagram when bearing substrate in the case of prior art, first embodiment of the invention, second embodiment of the invention these three it is respectively shown in Fig. 6.In order to further illustrate the technique effect of the present invention, embodiments of the invention are simulated with prior art by we by finite element method, thus the technique effect of quantam of proof the present patent application.nullDuring being simulated，In the case of setting three shown in Fig. 6 kind, length L1+L2 of mechanical arm 102 is 1500mm，Width W is 80mm，The thickness T of mechanical arm supporting part 106 is 15mm，Length L1 of mechanical arm root is 350mm，Mechanical arm is fixed length L3 of contact surface and is 250mm，The substrate of mechanical arm 102 carrying is identical substrate，Substrate size is: 1100mm*1300mm*5mm，The material of substrate is glass，The position that substrate is positioned on supporting part 106 is the most identical，It is suspended in the zig outside arm and is 200mm，In order to carry above-mentioned glass substrate，The mechanical arm quantity used is 3，And the material of mechanical arm is 6 series alloys，Serial No. 6061-T6.
Fig. 7 show the common arm of the prior art deformation map when bearing substrate in Fig. 6, and now substrate sag of chain Δ foremost is about 22.7mm.
Fig. 8 show L5=L3, deformation map during mechanical arm bearing substrate in first embodiment during T2=1.5T, Fig. 9 show L5=L3, T2=1.5T and L4=L3, deformation map during mechanical arm bearing substrate in second embodiment during T1=T, wherein each length value of mechanical arm ingredient refers to table 1, can be seen that, under these conditions, in first embodiment of the invention, mechanical arm sag of chain Δ foremost is about 18.3mm, in second embodiment, mechanical arm sag of chain Δ foremost is about 17.7mm, obviously, common arm droop amount relative to 22.7mm, in the present invention, the sag of chain of the mechanical arm of two kinds of structures all obtains a certain degree of improvement, and second the improvement effect of embodiment be better than first embodiment.
Table 1 (unit: mm)
| L1 | L2 | L3 | L4 | L5 | T1 | T2 | T | W | Δ foremost | |
| Conventional arm (Fig. 7) | 350 | 1150 | 250 | Nothing | Nothing | Nothing | Nothing | 15 | 80 | 22.7 |
| First embodiment (Fig. 8) | 350 | 1150 | 250 | 0 | 250 | 0 | 22.5 | 15 | 80 | 18.3 |
| Second embodiment (Fig. 9) | 350 | 1150 | 250 | 250 | 250 | 15 | 22.5 | 15 | 80 | 17.7 |
Figure 10 show L5=L1, deformation map during mechanical arm bearing substrate in first embodiment during T2=2T, Figure 11 show L5=L1, T2=2T and L4=L1, deformation map during mechanical arm bearing substrate in second embodiment during T1=2T, wherein each length value of mechanical arm ingredient refers to table 2, can be seen that, under these conditions, in first embodiment of the invention, mechanical arm sag of chain Δ foremost is about 17.2mm, in second embodiment, mechanical arm sag of chain Δ foremost is about 16.81mm, obviously, common arm droop amount relative to 22.7mm, in the present invention, the sag of chain of the mechanical arm of two kinds of structures all obtains a certain degree of improvement.
Table 2(unit: mm)
| L1 | L2 | L3 | L4 | L5 | T1 | T2 | T | W | Δ foremost | |
| Conventional arm (Fig. 7) | 350 | 1150 | 250 | Nothing | Nothing | Nothing | Nothing | 15 | 80 | 22.7 |
| First embodiment (Figure 10) | 350 | 1150 | 250 | 0 | 350 | 0 | 30 | 15 | 80 | 17.2 |
| Second embodiment (Figure 11) | 350 | 1150 | 250 | 350 | 350 | 30 | 30 | 15 | 80 | 16.81 |
Figure 12 show L5=1.3L3, deformation map during mechanical arm bearing substrate in first embodiment during T2=1.67T, Figure 13 show L5=1.3L3, T2=1.67T and L4=1.2L3, deformation map during mechanical arm bearing substrate in second embodiment during T1=1.67T, wherein each length value of mechanical arm ingredient refers to table 3, can be seen that, under these conditions, in first embodiment of the invention, mechanical arm sag of chain Δ foremost is about 17.4mm, in second embodiment, mechanical arm sag of chain Δ foremost is about 11.82mm, obviously, common arm droop amount relative to 22.7mm, in the present invention, the sag of chain of the mechanical arm of two kinds of structures all obtains a certain degree of improvement.
Table 3(unit: mm)
| L1 | L2 | L3 | L4 | L5 | T1 | T2 | T | W | Δ foremost | |
| Conventional arm (Fig. 7) | 350 | 1150 | 250 | Nothing | Nothing | Nothing | Nothing | 15 | 80 | 22.7 |
| First embodiment (Figure 12) | 350 | 1150 | 250 | 0 | 325 | 0 | 25 | 15 | 80 | 17.4 |
| Second embodiment (Figure 13) | 350 | 1150 | 250 | 300 | 325 | 25 | 25 | 15 | 80 | 11.82 |
Being found by simulation, the technique effect acquired when mechanical arm includes root rib and root supporting part two parts and meets condition L3≤L4≤L5, T≤T1≤2 T is more preferable, for the preferred version of the present invention.
Generally speaking, the present invention can effectively reduce the sag of chain of the mechanical arm caused because of bearing substrate by arranging root rib at the root of mechanical arm, improves rigidity and the kinetic stability of cantilever design, is particularly well-suited to transmit area > 1m2Or quality > substrate of 10Kg, such as solar panel.In order to reduce the sag of chain of mechanical arm further, in alternative, rigidity and the kinetic stability of cantilever design bearing substrate can be improved further by the method increasing root supporting part, realize, under the conditions of substrate meets the strictly transmission such as size and quality increase, space reduction, transfer rate quickening, still ensuring that and transmitting work normally.
Mechanical arm disclosed in the present invention can be effectively improved rigidity and the kinetic stability of cantilever design so that mechanical arm is maintained to transmission speed faster when transmitting the substrate of the heavier quality of larger area, improves the production capacity of equipment.
Mechanical arm disclosed in the present invention has preferable kinetic stability, it is possible to reduces the forced vibration making because of motion mechanical arm and substrate produce during transmitting, can effectively strengthen the capacity of resisting disturbance of cantilever design.Meanwhile, the present invention can reduce mechanical arm and substrate by Factory Building, produce around line, equipment, the random disturbances of device interior moving component and the vibration that causes, decrease substrate shift, shake off, the generation of the situation such as percussion device miscellaneous part.
It is to be understood that, although this specification is been described by according to embodiment, but the most each embodiment only comprises an independent technical scheme, this narrating mode of description is only for clarity sake, those skilled in the art should be using description as an entirety, technical scheme in each embodiment can also form, through appropriately combined, other embodiments that it will be appreciated by those skilled in the art that.The a series of detailed description of those listed above is only for illustrating of the possible embodiments of the present invention; they also are not used to limit the scope of the invention, and all Equivalent embodiments or changes made without departing from skill of the present invention spirit should be included within the scope of the present invention.
Claims (7)
1. a mechanical arm, indoor for substrate is sent to functional chamber, described mechanical arm is integrated an entirety of processing, is arranged in the mobile station of its transport of carrying, it is characterised in that: described mechanical arm includes:
Supporting part for bearing substrate；
Root for the described mobile station of fixing connection, the part contacted with each other with mobile station in described root lower surface is fixing contact surface, described root includes being positioned on the upside of root and is upright trapezoidal root rib along cross section, mechanical arm direction, the length range of described upright trapezoidal top is more than or equal to the length of described fixing contact surface and less than or equal to described upright trapezoidal following length, and the thickness of described root rib is more than or equal to 1.5 times of described supporting part thickness and is less than or equal to 2 times of supporting part thickness.
A kind of mechanical arm the most according to claim 1, it is characterized in that: described root also includes being positioned on the downside of root and is the trapezoidal root supporting part that stands upside down along cross section, mechanical arm direction, now, described fixing contact surface is a part for described root supporting part lower surface, the stand upside down trapezoidal following length range length more than or equal to described fixing contact surface and the length less than or equal to the trapezoidal top of described handstand of described root supporting part, the thickness of described root supporting part is more than or equal to 1 times of described supporting part thickness and is less than or equal to 2 times of supporting part thickness.
A kind of mechanical arm the most according to claim 2, it is characterised in that: the length range of the upright trapezoidal top of described root rib is more than or equal to the trapezoidal following length of standing upside down of described root supporting part.
4. according to a kind of mechanical arm according to any one of claim 1-3, it is characterised in that: described mechanical arm is used for transmitting area more than 1m2Substrate.
5. according to a kind of mechanical arm according to any one of claim 1-3, it is characterised in that: described mechanical arm is for transmitting the quality substrate more than 10Kg.
6. according to a kind of mechanical arm according to any one of claim 1-3, it is characterised in that: described mechanical arm is used for transmitting area more than 1m2, the quality solar panel more than 10Kg.
7. according to a kind of mechanical arm according to any one of claim 1-3, it is characterised in that: described function chamber is PECVD reaction chamber.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510110505.8A CN106032014A (en) | 2015-03-13 | 2015-03-13 | Mechanical arm |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510110505.8A CN106032014A (en) | 2015-03-13 | 2015-03-13 | Mechanical arm |
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| CN106032014A true CN106032014A (en) | 2016-10-19 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108593162A (en) * | 2018-05-23 | 2018-09-28 | 哈尔滨工业大学 | The heavy load flexibility torque sensor that partial structurtes are strengthened |
| CN114147702A (en) * | 2021-11-04 | 2022-03-08 | 合肥欣奕华智能机器有限公司 | Robot and finger tip position adjusting method |
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| CN203371550U (en) * | 2013-08-06 | 2014-01-01 | 东旭集团有限公司 | Gripping tool used for substrate handling robot |
| CN103708130A (en) * | 2012-10-02 | 2014-04-09 | 中外炉工业株式会社 | Panel mounting rack |
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| JP2006269951A (en) * | 2005-03-25 | 2006-10-05 | Shikibo Ltd | Transport device band |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108593162A (en) * | 2018-05-23 | 2018-09-28 | 哈尔滨工业大学 | The heavy load flexibility torque sensor that partial structurtes are strengthened |
| CN114147702A (en) * | 2021-11-04 | 2022-03-08 | 合肥欣奕华智能机器有限公司 | Robot and finger tip position adjusting method |
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| TA01 | Transfer of patent application right |
Effective date of registration: 20170527 Address after: 201620 Shanghai city Songjiang District Sixian Road No. 3255, building 3, Room 403 Applicant after: SHANGHAI LIXIANG WANLIHUI FILM EQUIPMENT CO., LTD. Address before: 201203 Pudong New Area Zhangjiang Road, Shanghai, No. 1 Curie Applicant before: SHANGHAI LIXIANG WANLIHUI FILM EQUIPMENT CO., LTD. Applicant before: Ideal Energy Equipment (Shanghai) Ltd. |
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Application publication date: 20161019 |