CN103626381A - 一种用于烧结玻璃松散体的石墨炉 - Google Patents
一种用于烧结玻璃松散体的石墨炉 Download PDFInfo
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- CN103626381A CN103626381A CN201210307819.3A CN201210307819A CN103626381A CN 103626381 A CN103626381 A CN 103626381A CN 201210307819 A CN201210307819 A CN 201210307819A CN 103626381 A CN103626381 A CN 103626381A
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- graphite
- graphite furnace
- quartz tube
- furnace body
- sealing
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 173
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 169
- 239000010439 graphite Substances 0.000 title claims abstract description 169
- 239000011521 glass Substances 0.000 title claims abstract description 24
- 238000005245 sintering Methods 0.000 title claims abstract description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 104
- 239000010453 quartz Substances 0.000 claims abstract description 100
- 238000007789 sealing Methods 0.000 claims abstract description 52
- 238000010438 heat treatment Methods 0.000 claims description 16
- 238000001816 cooling Methods 0.000 claims description 14
- 239000000498 cooling water Substances 0.000 claims description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- 238000003825 pressing Methods 0.000 claims description 6
- 239000002775 capsule Substances 0.000 claims description 4
- 238000012544 monitoring process Methods 0.000 claims description 4
- 229920001296 polysiloxane Polymers 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 6
- 230000001681 protective effect Effects 0.000 abstract description 6
- 230000002035 prolonged effect Effects 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 17
- 230000018044 dehydration Effects 0.000 description 8
- 238000006297 dehydration reaction Methods 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000004017 vitrification Methods 0.000 description 6
- 239000013307 optical fiber Substances 0.000 description 5
- 239000000741 silica gel Substances 0.000 description 4
- 229910002027 silica gel Inorganic materials 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- GALOTNBSUVEISR-UHFFFAOYSA-N molybdenum;silicon Chemical compound [Mo]#[Si] GALOTNBSUVEISR-UHFFFAOYSA-N 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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CN201210307819.3A CN103626381B (zh) | 2012-08-27 | 2012-08-27 | 一种用于烧结玻璃松散体的石墨炉 |
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CN201210307819.3A CN103626381B (zh) | 2012-08-27 | 2012-08-27 | 一种用于烧结玻璃松散体的石墨炉 |
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CN103626381A true CN103626381A (zh) | 2014-03-12 |
CN103626381B CN103626381B (zh) | 2015-12-02 |
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Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103771697A (zh) * | 2012-10-22 | 2014-05-07 | 浙江富通光纤技术有限公司 | 一种大尺寸光纤预制棒松散体的烧结方法及装置 |
CN104198069A (zh) * | 2014-08-26 | 2014-12-10 | 安徽蓝德仪表有限公司 | 一种空压机用热电偶 |
CN104556669A (zh) * | 2014-12-26 | 2015-04-29 | 中天科技精密材料有限公司 | 一种疏松体预制棒脱羟和玻璃化的控制方法及其控制装置 |
CN104761138A (zh) * | 2015-03-16 | 2015-07-08 | 江苏通鼎光棒有限公司 | 一种用于vad和ovd疏松体烧结的装置和方法 |
CN106007355A (zh) * | 2016-05-19 | 2016-10-12 | 中天科技精密材料有限公司 | 一种制备纯硅芯包层掺氟的超低损耗光纤预制棒的方法及其设备 |
CN106517118A (zh) * | 2016-11-08 | 2017-03-22 | 广东先导稀材股份有限公司 | 电子级红磷的制备装置及方法 |
CN107894397A (zh) * | 2017-12-18 | 2018-04-10 | 上海仪电分析仪器有限公司 | 自适应式石墨炉自锁装置 |
CN111394712A (zh) * | 2020-04-27 | 2020-07-10 | 青岛赛瑞达电子装备股份有限公司 | 双层石英工艺室结构 |
CN112592048A (zh) * | 2020-11-25 | 2021-04-02 | 通鼎互联信息股份有限公司 | 一种光纤拉丝炉用石墨件结构 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0450124A1 (en) * | 1988-12-29 | 1991-10-09 | Sumitomo Electric Industries, Ltd. | Furnace for producing high purity quartz glass preform |
CN1597581A (zh) * | 2004-09-08 | 2005-03-23 | 江苏法尔胜光子有限公司 | 一种疏松体光纤预制棒的烧结装置 |
CN101781087A (zh) * | 2010-02-09 | 2010-07-21 | 中天科技精密材料有限公司 | 一种疏松体光纤预制棒一体化烧结脱气的设备及其方法 |
CN202849232U (zh) * | 2012-08-27 | 2013-04-03 | 浙江富通光纤技术有限公司 | 一种用于烧结玻璃松散体的石墨炉 |
-
2012
- 2012-08-27 CN CN201210307819.3A patent/CN103626381B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0450124A1 (en) * | 1988-12-29 | 1991-10-09 | Sumitomo Electric Industries, Ltd. | Furnace for producing high purity quartz glass preform |
CN1597581A (zh) * | 2004-09-08 | 2005-03-23 | 江苏法尔胜光子有限公司 | 一种疏松体光纤预制棒的烧结装置 |
CN101781087A (zh) * | 2010-02-09 | 2010-07-21 | 中天科技精密材料有限公司 | 一种疏松体光纤预制棒一体化烧结脱气的设备及其方法 |
CN202849232U (zh) * | 2012-08-27 | 2013-04-03 | 浙江富通光纤技术有限公司 | 一种用于烧结玻璃松散体的石墨炉 |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103771697A (zh) * | 2012-10-22 | 2014-05-07 | 浙江富通光纤技术有限公司 | 一种大尺寸光纤预制棒松散体的烧结方法及装置 |
CN104198069A (zh) * | 2014-08-26 | 2014-12-10 | 安徽蓝德仪表有限公司 | 一种空压机用热电偶 |
CN104556669A (zh) * | 2014-12-26 | 2015-04-29 | 中天科技精密材料有限公司 | 一种疏松体预制棒脱羟和玻璃化的控制方法及其控制装置 |
CN104761138A (zh) * | 2015-03-16 | 2015-07-08 | 江苏通鼎光棒有限公司 | 一种用于vad和ovd疏松体烧结的装置和方法 |
CN106007355A (zh) * | 2016-05-19 | 2016-10-12 | 中天科技精密材料有限公司 | 一种制备纯硅芯包层掺氟的超低损耗光纤预制棒的方法及其设备 |
CN106007355B (zh) * | 2016-05-19 | 2019-02-15 | 中天科技精密材料有限公司 | 一种制备纯硅芯包层掺氟的超低损耗光纤预制棒的方法及其设备 |
CN106517118A (zh) * | 2016-11-08 | 2017-03-22 | 广东先导稀材股份有限公司 | 电子级红磷的制备装置及方法 |
CN107894397A (zh) * | 2017-12-18 | 2018-04-10 | 上海仪电分析仪器有限公司 | 自适应式石墨炉自锁装置 |
CN111394712A (zh) * | 2020-04-27 | 2020-07-10 | 青岛赛瑞达电子装备股份有限公司 | 双层石英工艺室结构 |
CN112592048A (zh) * | 2020-11-25 | 2021-04-02 | 通鼎互联信息股份有限公司 | 一种光纤拉丝炉用石墨件结构 |
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Effective date of registration: 20191213 Address after: Hangzhou City, Zhejiang Province, 311422 Silver Lake Science and technology of Fuyang Creative Industry Park of Fuyang Economic Development Zone Co-patentee after: Hangzhou Futong Communication Technology Co., Ltd. Patentee after: Zhejiang Futong Optical Fiber Technology Co., Ltd. Address before: Hangzhou City, Zhejiang province 311422 Fuyang City Economic Development Zone of Fuyang Lake Science and Technology Innovation Park Patentee before: Zhejiang Futong Optical Fiber Technology Co., Ltd. |