CN103625881A - Closed self-cleaning transporting system - Google Patents
Closed self-cleaning transporting system Download PDFInfo
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- CN103625881A CN103625881A CN201310015101.1A CN201310015101A CN103625881A CN 103625881 A CN103625881 A CN 103625881A CN 201310015101 A CN201310015101 A CN 201310015101A CN 103625881 A CN103625881 A CN 103625881A
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- cabin
- handling system
- carrying cabin
- cleaning
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Abstract
The invention discloses a closed self-cleaning transporting system. The closed self-cleaning transporting system comprises a movable device and a transporting cabin, wherein the movable device can move in a reciprocating mode between designated spots, and the transporting cabin is installed on the movable device. The closed self-cleaning transporting system further comprises a clean air source, a blowing and sweeping device, a cleanliness detector, a mechanical arm and a rotatable tray, wherein the clean air source is installed on the movable device, the blowing and sweeping device is connected to the clean air source through a pipeline, the cleanliness detector is installed at a cabin door of the transporting cabin, the mechanical arm is installed inside the transporting cabin and can extend out of the transporting cabin, and the rotatable tray is installed on the mechanical arm and used for carrying goods.
Description
Technical field
The present invention relates to a kind of workpiece handling system, relate in particular to and be suitable for base material carrying technical field in FPD and microelectronics processing.
Background technology
Along with fast development and the further technical requirements of FPD industry, automated handling technology is constantly promoted.FPD is at present produced in portage process, exist such objective fact, portage between accumulator (Stocker) adopts the non-airtight handling systems such as AGV or RGV, because substrate directly contacts with surrounding environment, therefore to the clean level of environment, require high, the chemical substance that last process remains on substrate simultaneously easily directly diffuses in the environment of opening wide, and forms cross pollution, reduces yields.
Meanwhile, along with the requirement of skill upgrading, the finish size of substrate constantly increases, and maintains equipment investment and the also jumbo increase of operation and maintenance expenses of high clean level.Therefore, the auto purification technology of automated handling system in FPD production is proposed to revolutionary requirement.
Therefore, be badly in need of in the industry addressing the problem: the portage of take between accumulator is example, utilize hermetic type self-cleaning handling system to substitute open type handling system, to reduce the lustration class requirement to surrounding environment, cut down initial outlay and the operation and maintenance expenses use of cleanup system, reduce the productive costs of product; Utilize airtight handling system simultaneously, avoid chemical substance residual on substrate to spread to environment, avoid cross pollution, improve yields.
Summary of the invention
For the deficiencies in the prior art, primary and foremost purpose of the present invention is: a kind of hermetic type self-cleaning handling system is provided, under lower clean level environment, carry out the portage between accumulator, avoid residual chemical substance to diffuse in environment simultaneously, thereby realize, avoid cross pollution, improve the object of yields.
The technical solution adopted for the present invention to solve the technical problems is: utilize a kind of closed auto purification handling system; by the portage in accumulator in the carrying cabin of micro-purification; by the gas shield in carrying cabin and the purification blow device carrying; form Local Purification microenvironment; guarantee the purification requirement in carrying path; thereby reduce the clean level of whole production environment, utilize the closure property of this handling system simultaneously, the chemical substance that prevents from remaining on substrate spreads to environment.
According to the present invention, a kind of hermetic type self-cleaning handling system is provided, it comprises: can and be installed on the carrying cabin on movable fixture at the movable fixture moving back and forth between assigned address.This hermetic type self-cleaning handling system further comprise the clean gas source that is loaded on movable fixture, by pipeline be connected in clean gas source blow device, be installed on the hatch door place in carrying cabin clean detector, be arranged in carrying cabin and can stretch out the manipulator in carrying cabin and be arranged on the rotatable tray for bearing goods on manipulator.
Selectively, can further be provided with for controlling the door-down switch device of the hatch door automatic shutter in carrying cabin.
Preferably, blow device can be arranged on carrying cabin hatch door outside and be positioned at the top of hatch door.
The invention has the beneficial effects as follows: utilize hermetic type self-cleaning handling system to substitute open type handling system, to reduce the lustration class requirement to surrounding environment, realize to the full extent initial outlay and the operation and maintenance expenses use of cutting down cleanup system, reduce the productive costs of product; Utilize airtight handling system simultaneously, avoid chemical substance residual on substrate to spread to environment, avoid cross pollution, improve yields.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, the present invention is further described.
Fig. 1 is schematic diagram of the present invention.
Fig. 2 is handling system workflow diagram.
Fig. 3 A, 3B, 3C, 3D, 3E are handling system work schematic diagrams.
In figure: 1. movable fixture, 2. clean gas source, 3. carrying cabin, 4. blow device, 5. clean detector, 6. door-down switch device, 7. manipulator, 8. rotatable tray, 9. goods
The specific embodiment
The present invention proposes a kind of hermetic type self-cleaning handling system, comprising: the movable fixture 1 that can move back and forth between assigned address and be installed on carrying cabin 3 on movable fixture 1, be loaded into clean gas source 2 on movable fixture 1, by pipeline be connected in clean gas source 2 blow device 4, be installed on the hatch door place in carrying cabin 3 clean detector 5, be arranged in carrying cabin 3 and can stretch out and carry the manipulator 7 in cabin and be arranged on the rotatable tray 8 for bearing goods 9 on manipulator 7.
For example, movable fixture 1 can be various types of vehicles.Hermetic type self-cleaning handling system can further be provided with for controlling the door-down switch device 6 of the hatch door automatic shutter in carrying cabin 3.Blow device 4 can preferably be arranged on the outside of the hatch door of carrying cabin 3 and be positioned at the top of hatch door.
As a kind of non-limiting example embodiment, in Fig. 1, can be clearly seen that system of the present invention comprises: clean gas source 2, carrying cabin 3, blow device 4, door-down switch device 6 and manipulator 7.
First, when movable fixture 1 arrives after assigned address, system sends start signal to blow device 4.Blow device 4 receives after start signal, opens near 2 pairs of clean gas sources environment and carries out cleaning and purge.Near clean detector 5 is surveyed, environment meets after purification requirement, sends start signal to door-down switch device 6.Door-down switch device 6 receives after start signal, and clean carrying cabin 3 hatch doors are opened, and manipulator 7 stretches out carrying cabin 3 simultaneously.Receive after goods 9, manipulator 7 is regained in carrying cabin 3, sends closing signal to door-down switch device 6 simultaneously.Door-down switch device 6 receives after closing signal, and hatch door is closed, and makes to carry cabin 3 and seals completely.Wait carrying after cabin 3 seals completely, send closing signal to blow device 4.Blow device 4 receives after closing signal, cuts off clean gas source 2, completes handling process.
In Fig. 2, can see workflow of the present invention, portage is mainly divided into 8 step S10-S80.In step S10, system sends start signal to blow device.In step S20, blow device receives after start signal, opens clean gas source near environment is carried out to cleaning purging.In step S30, near clean detector is surveyed, environment meets after purification requirement, sends start signal to door-down switch device.In step S40, door-down switch device receives after start signal, and carrying cabin door is opened, the cabin of Arm expanding carrying simultaneously.In step S50, receive after goods, in robot arm retrieves carrying cabin, send closing signal to door-down switch device simultaneously.In step S60, door-down switch device receives after closing signal, and hatch door is closed, and makes to carry cabin and seals completely.In step S70, wait carrying after cabin seals completely, send closing signal to blow device.In step S80, blow device receives after closing signal, cuts off clean gas source.
In Fig. 3, can see handling process of the present invention.First, when movable fixture 1 arrives after assigned address, system sends start signal to blow device 4.Blow device 4 utilization carries near 2 pairs of clean gas sources environment carries out cleaning and purges, and guarantees to carry cabin 3 and ambient environment clean level.Carrying cabin 3 internal gas pressures are a little more than ambient environment, but are slightly less than accumulator room pressure, and to guarantee to carry, in handling process, to carry cabin not contaminated, do not pollute Storker simultaneously.Near clean detector 5 is surveyed, environment meets after purification requirement, sends start signal to door-down switch device 6.Door-down switch device 6 receives after start signal, and clean carrying cabin 3 hatch doors are opened, and manipulator 7 stretches out carrying cabin 3 simultaneously, and the rotatable tray 8 of installing on manipulator 7 can be adjusted goods 9 angles.Receive after goods 9, manipulator 7 is regained in carrying cabin 3, sends closing signal to door-down switch device 6 simultaneously.Door-down switch device 6 receives after closing signal, and hatch door is closed, and makes to carry cabin 3 and seals completely.Wait carrying after cabin 3 seals completely, send closing signal to blow device 4.Blow device 4 receives after closing signal, cuts off clean gas source 2, completes handling process.
Although described the preferred embodiment of the present invention in detail at this, but should be understood that the present invention is not limited to the concrete structure of describing in detail and illustrating here, in the situation that not departing from the spirit and scope of the invention, can be realized by those skilled in the art other modification and variant.
Claims (3)
1. a hermetic type self-cleaning handling system, comprise: can and be installed on the carrying cabin on described movable fixture at the movable fixture moving back and forth between assigned address, it is characterized in that, described hermetic type self-cleaning handling system further comprises the clean gas source being loaded on described movable fixture, by pipeline, be connected in the blow device of described clean gas source, be installed on the clean detector at the hatch door place in described carrying cabin, be arranged in described carrying cabin and can stretch out the manipulator in described carrying cabin, and be arranged on the rotatable tray for bearing goods on described manipulator.
2. hermetic type self-cleaning handling system as claimed in claim 1, is characterized in that, is further provided with for controlling the door-down switch device of the hatch door automatic shutter in described carrying cabin.
3. hermetic type self-cleaning handling system as claimed in claim 1 or 2, is characterized in that, described blow device be arranged on described carrying cabin hatch door outside and be positioned at the top of described hatch door.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310015101.1A CN103625881B (en) | 2013-01-16 | 2013-01-16 | Closed self-cleaning transporting system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310015101.1A CN103625881B (en) | 2013-01-16 | 2013-01-16 | Closed self-cleaning transporting system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103625881A true CN103625881A (en) | 2014-03-12 |
| CN103625881B CN103625881B (en) | 2017-02-15 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201310015101.1A Active CN103625881B (en) | 2013-01-16 | 2013-01-16 | Closed self-cleaning transporting system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109264441A (en) * | 2018-09-26 | 2019-01-25 | 北京威力清矿山控制技术有限公司 | Comb equipment |
| CN109491342A (en) * | 2018-11-30 | 2019-03-19 | 山东师范大学 | A kind of multi-process intelligence RGV dynamic dispatching method, apparatus and system |
Citations (6)
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| JPH11263437A (en) * | 1998-03-18 | 1999-09-28 | Sanyo Electric Co Ltd | Low temperature classification system |
| JP2000161735A (en) * | 1998-11-24 | 2000-06-16 | Sharp Corp | Cleaning device |
| JP2004200669A (en) * | 2002-12-02 | 2004-07-15 | Rorze Corp | Minienvironment equipment, sheet-like object manufacturing system, and method of replacing atmosphere in sanitized vessel |
| CN101271836A (en) * | 2002-07-01 | 2008-09-24 | 三菱电机株式会社 | Transfer cart, manufacturing apparatus, and transfer system |
| CN102310971A (en) * | 2010-07-01 | 2012-01-11 | 苏州工业园区鸿基洁净科技有限公司 | Cleaning working chamber and cleanness monitoring system |
| CN202470244U (en) * | 2012-02-28 | 2012-10-03 | 钱禧昱 | Automatic air purifier |
-
2013
- 2013-01-16 CN CN201310015101.1A patent/CN103625881B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11263437A (en) * | 1998-03-18 | 1999-09-28 | Sanyo Electric Co Ltd | Low temperature classification system |
| JP2000161735A (en) * | 1998-11-24 | 2000-06-16 | Sharp Corp | Cleaning device |
| CN101271836A (en) * | 2002-07-01 | 2008-09-24 | 三菱电机株式会社 | Transfer cart, manufacturing apparatus, and transfer system |
| JP2004200669A (en) * | 2002-12-02 | 2004-07-15 | Rorze Corp | Minienvironment equipment, sheet-like object manufacturing system, and method of replacing atmosphere in sanitized vessel |
| CN102310971A (en) * | 2010-07-01 | 2012-01-11 | 苏州工业园区鸿基洁净科技有限公司 | Cleaning working chamber and cleanness monitoring system |
| CN202470244U (en) * | 2012-02-28 | 2012-10-03 | 钱禧昱 | Automatic air purifier |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109264441A (en) * | 2018-09-26 | 2019-01-25 | 北京威力清矿山控制技术有限公司 | Comb equipment |
| CN109491342A (en) * | 2018-11-30 | 2019-03-19 | 山东师范大学 | A kind of multi-process intelligence RGV dynamic dispatching method, apparatus and system |
| CN109491342B (en) * | 2018-11-30 | 2019-09-24 | 山东师范大学 | A kind of multi-process intelligence RGV dynamic dispatching method, apparatus and system |
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| Publication number | Publication date |
|---|---|
| CN103625881B (en) | 2017-02-15 |
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