CN103619770A - 制造方法及其所用设备 - Google Patents

制造方法及其所用设备 Download PDF

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Publication number
CN103619770A
CN103619770A CN201280031693.XA CN201280031693A CN103619770A CN 103619770 A CN103619770 A CN 103619770A CN 201280031693 A CN201280031693 A CN 201280031693A CN 103619770 A CN103619770 A CN 103619770A
Authority
CN
China
Prior art keywords
substrate
scale
machine
described substrate
substrate processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201280031693.XA
Other languages
English (en)
Chinese (zh)
Inventor
科里·威廉·迈克尔·费伦
杰弗里·麦克法兰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
Original Assignee
Renishaw PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw PLC filed Critical Renishaw PLC
Publication of CN103619770A publication Critical patent/CN103619770A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0838—Devices involving movement of the workpiece in at least one axial direction by using an endless conveyor belt
    • B23K26/0846—Devices involving movement of the workpiece in at least one axial direction by using an endless conveyor belt for moving elongated workpieces longitudinally, e.g. wire or strip material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0869—Devices involving movement of the laser head in at least one axial direction
    • B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B23K26/355—Texturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/361—Removing material for deburring or mechanical trimming
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P25/00—Auxiliary treatment of workpieces, before or during machining operations, to facilitate the action of the tool or the attainment of a desired final condition of the work, e.g. relief of internal stress
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49764—Method of mechanical manufacture with testing or indicating
    • Y10T29/49771—Quantitative measuring or gauging

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
CN201280031693.XA 2011-07-06 2012-07-05 制造方法及其所用设备 Pending CN103619770A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP11250638 2011-07-06
EP11250638.1 2011-07-06
PCT/GB2012/000569 WO2013004992A1 (en) 2011-07-06 2012-07-05 Method of manufacture and apparatus therefor

Publications (1)

Publication Number Publication Date
CN103619770A true CN103619770A (zh) 2014-03-05

Family

ID=44511797

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201280031693.XA Pending CN103619770A (zh) 2011-07-06 2012-07-05 制造方法及其所用设备

Country Status (7)

Country Link
US (1) US20140123458A1 (https=)
EP (1) EP2729427A1 (https=)
JP (1) JP2014526140A (https=)
KR (1) KR20140039245A (https=)
CN (1) CN103619770A (https=)
TW (1) TWI502672B (https=)
WO (1) WO2013004992A1 (https=)

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CN104112689A (zh) * 2013-04-18 2014-10-22 Ap系统股份有限公司 横梁和用于处理衬底的设备
CN106488819B (zh) 2014-06-20 2018-06-22 维洛3D公司 用于三维打印的设备、系统和方法
KR101720574B1 (ko) * 2014-12-12 2017-03-29 주식회사 이오테크닉스 레이저 가공 장치 및 그 구동 방법
WO2016131021A1 (en) * 2015-02-12 2016-08-18 Glowforge Inc. Safety and reliability guarantees for laser fabrication
US9676145B2 (en) 2015-11-06 2017-06-13 Velo3D, Inc. Adept three-dimensional printing
US10071422B2 (en) 2015-12-10 2018-09-11 Velo3D, Inc. Skillful three-dimensional printing
CN108883575A (zh) 2016-02-18 2018-11-23 维洛3D公司 准确的三维打印
US10286452B2 (en) 2016-06-29 2019-05-14 Velo3D, Inc. Three-dimensional printing and three-dimensional printers
US11691343B2 (en) 2016-06-29 2023-07-04 Velo3D, Inc. Three-dimensional printing and three-dimensional printers
WO2018064349A1 (en) 2016-09-30 2018-04-05 Velo3D, Inc. Three-dimensional objects and their formation
WO2018128695A2 (en) 2016-11-07 2018-07-12 Velo3D, Inc. Gas flow in three-dimensional printing
US10611092B2 (en) 2017-01-05 2020-04-07 Velo3D, Inc. Optics in three-dimensional printing
US20180250744A1 (en) 2017-03-02 2018-09-06 Velo3D, Inc. Three-dimensional printing of three-dimensional objects
CN106938371A (zh) * 2017-03-16 2017-07-11 广东工业大学 一种高精度激光切割机及其横梁
US10449696B2 (en) 2017-03-28 2019-10-22 Velo3D, Inc. Material manipulation in three-dimensional printing
US10272525B1 (en) 2017-12-27 2019-04-30 Velo3D, Inc. Three-dimensional printing systems and methods of their use
US10144176B1 (en) 2018-01-15 2018-12-04 Velo3D, Inc. Three-dimensional printing systems and methods of their use
CN110508948A (zh) * 2018-05-22 2019-11-29 佛山市嘉实和生物科技有限公司 一种多功能组合激光设备
KR20230047214A (ko) 2019-07-26 2023-04-06 벨로3디, 인크. 3차원 물체 형상화에 대한 품질 보증
TWI866681B (zh) * 2023-12-08 2024-12-11 均華精密工業股份有限公司 同向式多軸作業設備

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0360437A (ja) * 1989-07-26 1991-03-15 Hitachi Ltd 切断マーク
CN101405838A (zh) * 2006-09-01 2009-04-08 株式会社尼康 移动体驱动方法及移动体驱动系统、图案形成方法及装置、曝光方法及装置、组件制造方法、以及校正方法
CN101490618A (zh) * 2006-05-19 2009-07-22 厄利肯鲍泽斯涂层（英国）有限公司 用于使移动的基板上的薄膜图案化的方法及工具

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GB8616240D0 (en) 1986-07-03 1986-08-13 Renishaw Plc Opto-electronic scale reading apparatus
US5279044A (en) 1991-03-12 1994-01-18 U.S. Philips Corporation Measuring device for determining an absolute position of a movable element and scale graduation element suitable for use in such a measuring device
JPH11281320A (ja) * 1998-03-30 1999-10-15 Jasco Corp 位置センス装置
GB0109057D0 (en) 2001-04-11 2001-05-30 Renishaw Plc Absolute postition measurement
EP1410305A4 (en) 2001-06-28 2009-10-21 Entelos Inc METHOD AND DEVICE FOR COMPUTER MODELING AN ADAPTIVE IMMUNE REACTION
JP4320560B2 (ja) * 2003-05-14 2009-08-26 セイコーエプソン株式会社 液滴吐出装置
JP2005326550A (ja) * 2004-05-13 2005-11-24 Sanee Giken Kk 露光装置
GB0413710D0 (en) 2004-06-21 2004-07-21 Renishaw Plc Scale reading apparatus
US7375795B2 (en) * 2004-12-22 2008-05-20 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method, and device manufactured thereby
JP2007012426A (ja) * 2005-06-30 2007-01-18 Optrex Corp 有機ｅｌ表示パネルとその製造方法および検査方法
TWI310326B (en) * 2005-10-11 2009-06-01 Gsi Group Corp Optical metrological scale and laser-based manufacturing method therefor
EP2095065A4 (en) * 2006-11-15 2010-11-24 Zygo Corp MEASURING SYSTEMS FOR DISTANCE MEASUREMENT INTERFEROMETER AND COORDINATOR FOR LITHOGRAPHY TOOL
US8294878B2 (en) * 2009-06-19 2012-10-23 Nikon Corporation Exposure apparatus and device manufacturing method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0360437A (ja) * 1989-07-26 1991-03-15 Hitachi Ltd 切断マーク
CN101490618A (zh) * 2006-05-19 2009-07-22 厄利肯鲍泽斯涂层（英国）有限公司 用于使移动的基板上的薄膜图案化的方法及工具
CN101405838A (zh) * 2006-09-01 2009-04-08 株式会社尼康 移动体驱动方法及移动体驱动系统、图案形成方法及装置、曝光方法及装置、组件制造方法、以及校正方法

Also Published As

Publication number Publication date
EP2729427A1 (en) 2014-05-14
KR20140039245A (ko) 2014-04-01
TW201312685A (zh) 2013-03-16
JP2014526140A (ja) 2014-10-02
US20140123458A1 (en) 2014-05-08
TWI502672B (zh) 2015-10-01
WO2013004992A1 (en) 2013-01-10

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Application publication date: 20140305