CN103579267B - 含有具有三角形截面的金属栅格的图像传感器 - Google Patents
含有具有三角形截面的金属栅格的图像传感器 Download PDFInfo
- Publication number
- CN103579267B CN103579267B CN201310163899.4A CN201310163899A CN103579267B CN 103579267 B CN103579267 B CN 103579267B CN 201310163899 A CN201310163899 A CN 201310163899A CN 103579267 B CN103579267 B CN 103579267B
- Authority
- CN
- China
- Prior art keywords
- metal
- metal grate
- color filter
- imageing sensor
- substrate layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 114
- 239000002184 metal Substances 0.000 title claims abstract description 114
- 239000000758 substrate Substances 0.000 claims abstract description 38
- 239000000463 material Substances 0.000 claims abstract description 25
- 230000003287 optical effect Effects 0.000 claims abstract description 19
- 238000000034 method Methods 0.000 claims description 19
- 238000005530 etching Methods 0.000 claims description 18
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 230000008878 coupling Effects 0.000 claims description 5
- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- 238000001259 photo etching Methods 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims 4
- 238000012856 packing Methods 0.000 claims 4
- 238000005286 illumination Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 43
- 238000005516 engineering process Methods 0.000 description 10
- 238000009792 diffusion process Methods 0.000 description 9
- 238000003384 imaging method Methods 0.000 description 8
- 238000007667 floating Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000006870 function Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 230000011514 reflex Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052774 Proactinium Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 208000024754 bloodshot eye Diseases 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000000708 deep reactive-ion etching Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 201000005111 ocular hyperemia Diseases 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14623—Optical shielding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
- H01L27/14629—Reflectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1464—Back illuminated imager structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14621—Colour filter arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
- H01L27/14627—Microlenses
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Abstract
Description
Claims (21)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/552,330 US8530266B1 (en) | 2012-07-18 | 2012-07-18 | Image sensor having metal grid with a triangular cross-section |
US13/552,330 | 2012-07-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103579267A CN103579267A (zh) | 2014-02-12 |
CN103579267B true CN103579267B (zh) | 2016-04-13 |
Family
ID=49084083
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310163899.4A Active CN103579267B (zh) | 2012-07-18 | 2013-05-07 | 含有具有三角形截面的金属栅格的图像传感器 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8530266B1 (zh) |
CN (1) | CN103579267B (zh) |
HK (1) | HK1190826A1 (zh) |
TW (1) | TWI515880B (zh) |
Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9041140B2 (en) | 2012-03-15 | 2015-05-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Grids in backside illumination image sensor chips and methods for forming the same |
JP2014011304A (ja) * | 2012-06-29 | 2014-01-20 | Toshiba Corp | 固体撮像装置 |
US9502453B2 (en) * | 2013-03-14 | 2016-11-22 | Visera Technologies Company Limited | Solid-state imaging devices |
KR102211968B1 (ko) * | 2013-12-02 | 2021-02-05 | 삼성디스플레이 주식회사 | 터치 패널, 표시 장치 및 터치 패널의 제조 방법 |
US9543352B2 (en) * | 2013-12-12 | 2017-01-10 | Taiwan Semiconductor Manufacturing Co., Ltd. | CMOS image sensor with embedded micro-lenses |
US9293490B2 (en) * | 2014-03-14 | 2016-03-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Deep trench isolation with air-gap in backside illumination image sensor chips |
US20160307942A1 (en) * | 2015-04-16 | 2016-10-20 | Taiwan Semiconductor Manufacturing Co., Ltd. | Deeply buried color filter array (cfa) by stacked grid structure |
US9570493B2 (en) | 2015-04-16 | 2017-02-14 | Taiwan Semiconductor Manufacturing Co., Ltd. | Dielectric grid bottom profile for light focusing |
US9853076B2 (en) | 2015-04-16 | 2017-12-26 | Taiwan Semiconductor Manufacturing Co., Ltd. | Stacked grid for more uniform optical input |
US9991307B2 (en) | 2015-04-16 | 2018-06-05 | Taiwan Semiconductor Manufacturing Co., Ltd. | Stacked grid design for improved optical performance and isolation |
US9911773B2 (en) * | 2015-06-18 | 2018-03-06 | Omnivision Technologies, Inc. | Virtual high dynamic range large-small pixel image sensor |
CN105185800B (zh) * | 2015-08-19 | 2017-08-25 | 启芯瑞华科技(武汉)有限公司 | 互补金属氧化物半导体图像传感器及其制造方法 |
US9786704B2 (en) * | 2015-09-10 | 2017-10-10 | Taiwan Semiconductor Manufacturing Co., Ltd. | CMOS image sensor structure with crosstalk improvement |
CN106601759B (zh) * | 2015-10-16 | 2020-03-10 | 中芯国际集成电路制造(上海)有限公司 | 一种半导体器件及其制造方法和电子装置 |
KR102605626B1 (ko) * | 2016-07-28 | 2023-11-24 | 에스케이하이닉스 주식회사 | 그리드패턴을 구비한 이미지 센서 |
US10121809B2 (en) | 2016-09-13 | 2018-11-06 | Omnivision Technologies, Inc. | Backside-illuminated color image sensors with crosstalk-suppressing color filter array |
US9985072B1 (en) * | 2016-11-29 | 2018-05-29 | Taiwan Semiconductor Manufacturing Co., Ltd. | CMOS image sensor with dual damascene grid design having absorption enhancement structure |
EP3566029A1 (en) * | 2017-01-05 | 2019-11-13 | Koninklijke Philips N.V. | Imaging sensor with filter and lens array |
CN208781840U (zh) * | 2017-01-17 | 2019-04-23 | 苏州晶方半导体科技股份有限公司 | 一种指纹识别芯片的封装结构 |
JP6987529B2 (ja) * | 2017-05-15 | 2022-01-05 | ソニーセミコンダクタソリューションズ株式会社 | 撮像素子、撮像素子の製造方法、電子機器、及び、撮像モジュール |
CN107845624A (zh) * | 2017-11-02 | 2018-03-27 | 德淮半导体有限公司 | 一种图像传感器及其形成方法 |
NL2020615B1 (en) | 2017-12-26 | 2019-07-02 | Illumina Inc | Image sensor structure |
CN108281447A (zh) * | 2018-01-30 | 2018-07-13 | 德淮半导体有限公司 | 半导体装置及其制作方法 |
CN108321167A (zh) * | 2018-04-04 | 2018-07-24 | 德淮半导体有限公司 | 图像传感器及形成图像传感器的方法 |
CN108428711A (zh) * | 2018-04-25 | 2018-08-21 | 德淮半导体有限公司 | 图像传感器及其形成方法 |
CN108878464B (zh) * | 2018-05-24 | 2020-12-18 | 德淮半导体有限公司 | 图像传感器及其形成方法 |
KR102558828B1 (ko) * | 2018-10-10 | 2023-07-24 | 삼성전자주식회사 | 차광 패턴을 포함하는 이미지 센서 |
JP2020126961A (ja) * | 2019-02-06 | 2020-08-20 | ソニーセミコンダクタソリューションズ株式会社 | 撮像装置および撮像システム |
CN110010634B (zh) * | 2019-02-27 | 2021-07-06 | 德淮半导体有限公司 | 隔离结构及其形成方法,图像传感器及其制造方法 |
KR102658571B1 (ko) * | 2019-06-11 | 2024-04-19 | 에스케이하이닉스 주식회사 | 이미지 센싱 장치 및 그 제조 방법 |
US11538840B2 (en) * | 2019-08-15 | 2022-12-27 | Vanguard International Semiconductor Corporation | Color filters disposed in holes of a light collimator, manufacturing method of the same and biometric identification apparatus using the same |
TWI707465B (zh) | 2019-10-09 | 2020-10-11 | 晶相光電股份有限公司 | 影像感測裝置及其形成方法 |
US11367743B2 (en) | 2019-10-28 | 2022-06-21 | Omnivision Technologies, Inc. | Image sensor with shared microlens between multiple subpixels |
US11515437B2 (en) * | 2019-12-04 | 2022-11-29 | Omnivision Technologies, Inc. | Light sensing system and light sensor with polarizer |
US11367744B2 (en) | 2019-12-05 | 2022-06-21 | Omnivision Technologies, Inc. | Image sensor with shared microlens and polarization pixel |
US11252381B2 (en) | 2019-12-11 | 2022-02-15 | Omnivision Technologies, Inc. | Image sensor with shared microlens |
US11469264B2 (en) | 2020-01-30 | 2022-10-11 | Omnivision Technologies, Inc. | Flare-blocking image sensor |
US11393861B2 (en) | 2020-01-30 | 2022-07-19 | Omnivision Technologies, Inc. | Flare-suppressing image sensor |
US11362124B2 (en) | 2020-01-30 | 2022-06-14 | Omnivision Technologies, Inc. | Image sensors with quantum efficiency enhanced by inverted pyramids |
US11862651B2 (en) * | 2020-01-30 | 2024-01-02 | Omnivision Technologies, Inc. | Light-trapping image sensors |
KR20210112034A (ko) * | 2020-03-04 | 2021-09-14 | 에스케이하이닉스 주식회사 | 이미지 센서 |
CN116603700A (zh) * | 2022-02-08 | 2023-08-18 | 成都拓米双都光电有限公司 | 一种支撑栅板的制备方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101246896A (zh) * | 2007-02-13 | 2008-08-20 | 三星电子株式会社 | 具有光阻挡层的图像传感器装置及其制造方法 |
CN101740586A (zh) * | 2008-11-13 | 2010-06-16 | 上海华虹Nec电子有限公司 | 紫外光图像传感器及其制作方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5952645A (en) | 1996-08-27 | 1999-09-14 | California Institute Of Technology | Light-sensing array with wedge-like reflective optical concentrators |
US6765276B2 (en) | 2001-08-23 | 2004-07-20 | Agilent Technologies, Inc. | Bottom antireflection coating color filter process for fabricating solid state image sensors |
US7189957B2 (en) | 2005-02-25 | 2007-03-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | Methods to improve photonic performances of photo-sensitive integrated circuits |
US7315014B2 (en) | 2005-08-30 | 2008-01-01 | Micron Technology, Inc. | Image sensors with optical trench |
US7973380B2 (en) * | 2005-11-23 | 2011-07-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for providing metal extension in backside illuminated sensor for wafer level testing |
US20070187787A1 (en) | 2006-02-16 | 2007-08-16 | Ackerson Kristin M | Pixel sensor structure including light pipe and method for fabrication thereof |
US20070238035A1 (en) | 2006-04-07 | 2007-10-11 | Micron Technology, Inc. | Method and apparatus defining a color filter array for an image sensor |
US7524690B2 (en) | 2006-08-10 | 2009-04-28 | United Microelectronics Corp. | Image sensor with a waveguide tube and a related fabrication method |
JP2008153427A (ja) * | 2006-12-18 | 2008-07-03 | Hitachi Displays Ltd | 高感度光センサ素子及びそれを用いた光センサ装置 |
US7800192B2 (en) | 2008-02-08 | 2010-09-21 | Omnivision Technologies, Inc. | Backside illuminated image sensor having deep light reflective trenches |
US7858921B2 (en) | 2008-05-05 | 2010-12-28 | Aptina Imaging Corporation | Guided-mode-resonance transmission color filters for color generation in CMOS image sensors |
US7859033B2 (en) | 2008-07-09 | 2010-12-28 | Eastman Kodak Company | Wafer level processing for backside illuminated sensors |
US8269264B2 (en) | 2009-11-09 | 2012-09-18 | Omnivision Technologies, Inc. | Image sensor having waveguides formed in color filters |
US8373243B2 (en) * | 2011-01-06 | 2013-02-12 | Omnivision Technologies, Inc. | Seal ring support for backside illuminated image sensor |
-
2012
- 2012-07-18 US US13/552,330 patent/US8530266B1/en active Active
-
2013
- 2013-04-10 TW TW102112727A patent/TWI515880B/zh active
- 2013-05-07 CN CN201310163899.4A patent/CN103579267B/zh active Active
-
2014
- 2014-04-23 HK HK14103901.6A patent/HK1190826A1/zh unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101246896A (zh) * | 2007-02-13 | 2008-08-20 | 三星电子株式会社 | 具有光阻挡层的图像传感器装置及其制造方法 |
CN101740586A (zh) * | 2008-11-13 | 2010-06-16 | 上海华虹Nec电子有限公司 | 紫外光图像传感器及其制作方法 |
Also Published As
Publication number | Publication date |
---|---|
HK1190826A1 (zh) | 2014-07-11 |
TW201405782A (zh) | 2014-02-01 |
US8530266B1 (en) | 2013-09-10 |
CN103579267A (zh) | 2014-02-12 |
TWI515880B (zh) | 2016-01-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN103579267B (zh) | 含有具有三角形截面的金属栅格的图像传感器 | |
US8884391B2 (en) | Photoelectric conversion device and photoelectric conversion system with boundary region | |
KR102600673B1 (ko) | 이미지 센서 | |
CN101800233B (zh) | 固态成像装置及其制造方法以及电子设备 | |
TWI387101B (zh) | 固態攝影裝置及其製造方法 | |
CN105489623B (zh) | 图像传感器、成像系统及图像传感器制作的方法 | |
CN104517982B (zh) | 固态摄像装置、固态摄像装置的制造方法以及电子设备 | |
US20120019695A1 (en) | Image sensor having dark sidewalls between color filters to reduce optical crosstalk | |
US9130072B1 (en) | Backside illuminated image sensor and method of manufacturing the same | |
CN101335284A (zh) | 固态成像器件及摄像模块 | |
CN109003995A (zh) | 图像传感器、电子装置及其制造方法 | |
CN104347648A (zh) | 固体摄像装置的制造方法以及固体摄像装置 | |
WO2006135720A1 (en) | Reduced imager crosstalk and pixel noise using extended buried contacts | |
CN104934453A (zh) | 固体摄像装置 | |
CN109273471A (zh) | 图像传感器及其制造方法 | |
KR100829378B1 (ko) | 이미지 센서 및 이의 제조 방법 | |
TW202145546A (zh) | 操作裝置的方法、半導體結構以及互補式金屬氧化物半導體影像感測器 | |
US8680454B2 (en) | Backside-illuminated (BSI) pixel including light guide | |
CN107578990A (zh) | 图像传感器的形成方法 | |
US11750906B2 (en) | Fully buried color filter array of image sensor | |
CN110061025A (zh) | 图像传感器及其制造方法 | |
KR20150089650A (ko) | 이미지 센서 및 그 제조 방법 | |
TWI804785B (zh) | 具有偏光器之光感測系統及光感測器 | |
WO2023021758A1 (ja) | 光検出装置及び電子機器 | |
CN115579368A (zh) | 图像传感器结构、电子设备及制备方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
REG | Reference to a national code |
Ref country code: HK Ref legal event code: DE Ref document number: 1190826 Country of ref document: HK |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: American California Patentee after: OmniVision Technologies, Inc. Address before: American California Patentee before: Omnivision Tech Inc. |
|
REG | Reference to a national code |
Ref country code: HK Ref legal event code: GR Ref document number: 1190826 Country of ref document: HK |