CN103576672B - Lpcvd设备的温控系统自校正方法与装置 - Google Patents
Lpcvd设备的温控系统自校正方法与装置 Download PDFInfo
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- CN103576672B CN103576672B CN201310504946.7A CN201310504946A CN103576672B CN 103576672 B CN103576672 B CN 103576672B CN 201310504946 A CN201310504946 A CN 201310504946A CN 103576672 B CN103576672 B CN 103576672B
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- lpcvd equipment
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/1927—Control of temperature characterised by the use of electric means using a plurality of sensors
- G05D23/193—Control of temperature characterised by the use of electric means using a plurality of sensors sensing the temperaure in different places in thermal relationship with one or more spaces
- G05D23/1932—Control of temperature characterised by the use of electric means using a plurality of sensors sensing the temperaure in different places in thermal relationship with one or more spaces to control the temperature of a plurality of spaces
- G05D23/1934—Control of temperature characterised by the use of electric means using a plurality of sensors sensing the temperaure in different places in thermal relationship with one or more spaces to control the temperature of a plurality of spaces each space being provided with one sensor acting on one or more control means
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- Engineering & Computer Science (AREA)
- Remote Sensing (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Feedback Control In General (AREA)
- Control Of Temperature (AREA)
Abstract
Description
Claims (8)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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CN201310504946.7A CN103576672B (zh) | 2013-10-23 | 2013-10-23 | Lpcvd设备的温控系统自校正方法与装置 |
PCT/CN2014/089059 WO2015058676A1 (en) | 2013-10-23 | 2014-10-21 | Heat treatment apparatus and auto-turning temperature control method therefor |
Applications Claiming Priority (1)
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CN201310504946.7A CN103576672B (zh) | 2013-10-23 | 2013-10-23 | Lpcvd设备的温控系统自校正方法与装置 |
Publications (2)
Publication Number | Publication Date |
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CN103576672A CN103576672A (zh) | 2014-02-12 |
CN103576672B true CN103576672B (zh) | 2016-03-02 |
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CN201310504946.7A Active CN103576672B (zh) | 2013-10-23 | 2013-10-23 | Lpcvd设备的温控系统自校正方法与装置 |
Country Status (2)
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CN (1) | CN103576672B (zh) |
WO (1) | WO2015058676A1 (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103576672B (zh) * | 2013-10-23 | 2016-03-02 | 北京七星华创电子股份有限公司 | Lpcvd设备的温控系统自校正方法与装置 |
CN106292785A (zh) * | 2015-05-18 | 2017-01-04 | 广东兴发铝业有限公司 | 基于神经网络的铝棒加热炉燃烧温度自动控制装置 |
CN115963730B (zh) * | 2023-03-16 | 2023-06-02 | 广州市景泰科技有限公司 | 一种喷射点胶阀腔液温度的选择性控制方法 |
CN116571190B (zh) * | 2023-07-14 | 2023-09-12 | 昆明理工大学 | 一种木质素改性酚醛树脂的反应釜控制系统及方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6461979B1 (en) * | 2002-02-13 | 2002-10-08 | Taiwan Semiconductor Manufacturing Company | LPCVD furnace uniformity improvement by temperature ramp down deposition system |
CN101949009A (zh) * | 2010-09-07 | 2011-01-19 | 理想能源设备(上海)有限公司 | 等离子体化学气相沉积基座温度控制方法 |
CN202543323U (zh) * | 2012-04-26 | 2012-11-21 | 汉能科技有限公司 | 一种lpcvd预热腔控温系统 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0786783B2 (ja) * | 1989-11-04 | 1995-09-20 | 勝久 古田 | 調整入力による炉温制御装置 |
US5867384A (en) * | 1997-07-08 | 1999-02-02 | Johnson Services Company | Feedback controller |
JP2002108408A (ja) * | 2000-09-29 | 2002-04-10 | Hitachi Kokusai Electric Inc | 半導体製造装置の温度制御方法 |
JP2007123643A (ja) * | 2005-10-31 | 2007-05-17 | Matsushita Electric Ind Co Ltd | 成膜装置、成膜方法、成膜装置のモニタリングプログラムおよびその記録媒体 |
CN100565413C (zh) * | 2008-01-30 | 2009-12-02 | 北京英华达电力电子工程科技有限公司 | 一种温度调节的方法和装置 |
CN101962708B (zh) * | 2010-10-19 | 2012-07-11 | 西安石油大学 | 大型板材真空退火炉多温区均温性控制系统及其控制方法 |
CN103123460A (zh) * | 2011-11-21 | 2013-05-29 | 才秀君 | 温度控制系统和温度控制方法 |
CN103076826A (zh) * | 2012-12-11 | 2013-05-01 | 光垒光电科技(上海)有限公司 | 多温区温度控制系统及其控制方法 |
CN103576672B (zh) * | 2013-10-23 | 2016-03-02 | 北京七星华创电子股份有限公司 | Lpcvd设备的温控系统自校正方法与装置 |
CN103543742B (zh) * | 2013-10-23 | 2016-08-17 | 北京七星华创电子股份有限公司 | Lpcvd设备的温控时滞系统自校正方法与装置 |
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2013
- 2013-10-23 CN CN201310504946.7A patent/CN103576672B/zh active Active
-
2014
- 2014-10-21 WO PCT/CN2014/089059 patent/WO2015058676A1/en active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6461979B1 (en) * | 2002-02-13 | 2002-10-08 | Taiwan Semiconductor Manufacturing Company | LPCVD furnace uniformity improvement by temperature ramp down deposition system |
CN101949009A (zh) * | 2010-09-07 | 2011-01-19 | 理想能源设备(上海)有限公司 | 等离子体化学气相沉积基座温度控制方法 |
CN202543323U (zh) * | 2012-04-26 | 2012-11-21 | 汉能科技有限公司 | 一种lpcvd预热腔控温系统 |
Non-Patent Citations (1)
Title |
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LPVCD设备的高精度串级温度控制系统;宋玲等;《电子工业专用设备》;20060430(第135期);第35-38页 * |
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Publication number | Publication date |
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CN103576672A (zh) | 2014-02-12 |
WO2015058676A1 (en) | 2015-04-30 |
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Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100015 Jiuxianqiao Chaoyang District, East Beijing Road, building M2, floor 1, No. 2 Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
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Effective date of registration: 20180319 Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: North China Science and technology group Limited by Share Ltd. |