CN103572342A - Shielding method for local surface treatment - Google Patents

Shielding method for local surface treatment Download PDF

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Publication number
CN103572342A
CN103572342A CN201210254278.2A CN201210254278A CN103572342A CN 103572342 A CN103572342 A CN 103572342A CN 201210254278 A CN201210254278 A CN 201210254278A CN 103572342 A CN103572342 A CN 103572342A
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China
Prior art keywords
workpiece
tool
treatment
surface treatment
screen method
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CN201210254278.2A
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CN103572342B (en
Inventor
刘维林
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APONE TECHNOLOGY Co Ltd
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APONE TECHNOLOGY Co Ltd
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  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)

Abstract

The invention provides a shielding method for local surface treatment, which is used for shielding a work-piece and carrying out local surface treatment of the work-piece; the work-piece is provided with a target treatment region and a non-treatment region; and the shielding method comprises the following steps of: covering a jig in the non-treatment region of the work-piece, and exposing the target treatment region of the work-piece; and enabling the jig and the non-treatment region of the work-piece to be appressed with each other by utilizing adsorption force between the jig and the work-piece, and sticking an open edge of the jig at the edge of the target treatment region of the work-piece, wherein adsorption force is vacuum adsorption force or electrostatic adsorption force, therefore, the influence range of surface treatment cannot be beyond the boundary of the target treatment region; and the generation possibility of processing defects is reduced.

Description

The screen method of topical surface treatment
Technical field
The present invention system is about a kind of screen method, particularly about a kind of screen method that is applied to topical surface treatment.
Background technology
In a lot of situations, processing object (hereinafter referred to as workpiece) all can not carry out surface treatments such as plating, coating, exposure before being fabricated to finished product.When workpiece is carried out to certain surface treatment; if this kind of processing must not be accepted in the some of them region of workpiece; usually use a tool that those non-treatment zones are covered to protection, in order to avoid it is affected, and surface treatment is only affected in need region to be processed.
While utilizing tool to cover the non-treatment zone of protection; must notice the matching relationship between tool and workpiece; for example the opening of tool and the correspondence for the treatment of zone, so that treatment zone is not masked really, be positively protected and must not accept surface-treated region.
Yet in known techniques, the opening of tool is often corresponding not good with target treatment, and cause the range of influence of plated material, coating material or exposure light etc. to surpass treatment zone, thereby produce processing flaw.
Summary of the invention
Main purpose of the present invention is to provide a kind of screen method of topical surface treatment, to improve the problem of known techniques, accepts surface-treated region, so that desired workpiece surface is formed to guarantee that surface treatment can must not have influence on.
The screen method that the technique means that the problem that the present invention is solution known techniques adopts is a kind of topical surface treatment, in order to shield a workpiece so that workpiece is carried out to topical surface treatment, workpiece has a target treatment and a non-treatment zone, screen method comprises the following steps: that (a) hides the non-treatment zone in workpiece by a tool, and exposes the target treatment of workpiece; (b) be used in the adsorptive power between tool and workpiece, and the non-treatment zone of tool and workpiece is close to mutually, and make an open edge of tool paste the edge of the neat target treatment in workpiece, adsorptive power is a vacuum adsorption force or an electrostatic adhesion power.
In one embodiment of this invention, tool is that a plastic material is made.
In one embodiment of this invention, adsorptive power is in the situation of electrostatic adhesion power, and step (a) also comprises the step of tool being carried out to Electrostatic Treatment before.
In one embodiment of this invention, step (a) comprises workpiece is positioned over to the step in tool, and between tool and workpiece, forms a clearance space.
In one embodiment of this invention, in the situation that is vacuum adsorption force in adsorptive power, step (a) comprises the step of the air in suction clearance space.
In one embodiment of this invention, tool has a sucker, is communicated in clearance space.
In one embodiment of this invention, step (b) also comprises the target treatment of workpiece is carried out to surface-treated step afterwards.
In one embodiment of this invention, surface treatment is that an exposure-processed, an etch processes, an electroplating processes or thunder carving are processed.
Via the technology used in the present invention means, by an adsorptive power, tool and workpiece are close to mutually.The benefit that tool and workpiece are close to is mutually that the open edge of tool can positively paste the edge of the neat target treatment in workpiece.So, surface-treated range of influence will can not surpass the border of target treatment, and then reduces the chance that processing flaw produces.
Particularly, the adsorptive power that the present invention utilizes is vacuum adsorption force or electrostatic adhesion power.The production process of vacuum adsorption force or electrostatic adhesion power is easy.And workpiece must detach when tool after surface treatment, vacuum adsorption force or electrostatic adhesion power can remove and the surface of survivable workpiece and tool easily.Therefore, screen method provided by the present invention not only screening effect is good, and easy to implement and destructive low, is quite suitable for being applied to topical surface treatment.
Accompanying drawing explanation
Fig. 1 is the schema of screen method that shows the topical surface treatment of the first embodiment of the present invention.
Fig. 2 A system shows the sectional view when tool of the first embodiment of the present invention and the non-treatment zone of workpiece are not close to.
Fig. 2 B system shows the sectional view when tool of the first embodiment of the present invention and the non-treatment zone of workpiece are close to.
Fig. 3 is the schema of screen method that shows the topical surface treatment of the second embodiment of the present invention.
Fig. 4 is the sectional view showing when the tool of the second embodiment of the present invention and the non-treatment zone of workpiece are close to.
Primary clustering nomenclature
1,1a tool
11,11a opening
111,111a open edge
12 suckers
13 suction tubes
2,2a workpiece
21,21a target treatment
211,211a edge
22, the non-treatment zone of 22a
A air
F1, F2 adsorptive power
V1 clearance space
Embodiment
Specific embodiment of the present invention, by the embodiment by following and be attachedly graphic and be further described.
The invention provides a kind of screen method, utilize a vacuum adsorption force or an electrostatic adhesion power between tool and workpiece, and tool and workpiece are close to mutually, further workpiece is carried out to topical surface treatment.The embodiment of vacuum adsorption force and electrostatic adhesion power is below provided respectively and is described explanation:
Consult shown in Fig. 1, it is the schema of screen method that shows the topical surface treatment of the first embodiment of the present invention.The present embodiment is to be provided in the situation that the adsorptive power between tool and workpiece is vacuum adsorption force.The screen method of topical surface treatment comprises the following steps: a tool to hide the non-treatment zone in workpiece, and exposes the target treatment (step S110) of workpiece; Be used in the adsorptive power between tool and workpiece, and the non-treatment zone of tool and workpiece is close to mutually, and make an open edge of tool paste the edge (step S120) of the neat target treatment in workpiece.
Furthermore, in the present embodiment, in (step S110), comprise the following steps: workpiece being positioned in tool, and between tool and workpiece, form a clearance space (step S111); Tool is hidden to the non-treatment zone (step S112) in workpiece.And in (step S120), comprise the following steps: to aspirate the air (step S121) in clearance space; Utilize the vacuum adsorption force between tool and workpiece, make the non-treatment zone of tool and workpiece mutually be close to (step S122).
Refer to Fig. 2 A and Fig. 2 B, and coordinate Fig. 1 to be described as rear the first embodiment of the present invention.
Tool 1 has an open edge 111, and open edge 111 is the edge that in tool 1, tool does not hide the part of effect.For example, in the present embodiment, tool 1 has an opening 11, and the edge of opening 11 is open edge 111.Yet the present invention is not as limit, open edge 111 can be also the edge of the perforation of tool, or tool comprises two plates that separate, and open edge 111 is two gaps between plate.
First, workpiece 2 is positioned over to (step S111) in tool 1.The chi footpath of workpiece 2 is that the internal diameter that is less than tool 1 obtains so that workpiece 2 is positioned in tool 1, so can form a clearance space V1 between tool 1 and workpiece 2.
Then, tool 1 is hidden to the non-treatment zone 22(step S112 in workpiece 2).The shape of opening 11 and area are identical with shape and the area of the target treatment 21 of workpiece 2.When by opening 11 corresponding to target treatment 21 treatment zone 21 that gives away one's position, the non-treatment zone 22 of workpiece 2 is hidden by tool 1.
Then, the air (step S121) in suction clearance space V1.In the present embodiment, tool 1 has a sucker 12, is communicated in clearance space V1.Sucker 12 communicative engagement have a suction tube 13 that is connected in a vacuum fan (not shown).When vacuum fan operates, the air A in clearance space V1 discharges via suction tube 13.So, the clearance space V1 between tool 1 and workpiece 2 will become vacuum state gradually.And in the present embodiment, tool 1 is that a plastic material is made, plastic materials such as PP, PVC or other analogous material.Plastic material has stressed rear yielding characteristic.By this, utilize the formed vacuum adsorption force F1 of air in suction clearance space V1, can make tool 1 be out of shape and be attached at workpiece 2, and making tool 1 and the non-treatment zone 22 of workpiece 2 mutually be close to (step S122), as shown in Figure 2 B.
Next, the target treatment 21 of workpiece 2 is carried out to surface treatment (step S130).In the present embodiment, surface treatment is an exposure-processed, and surface treatment also can be processed or other similar processing for an etch processes, an electroplating processes, a thunder carving.While being mutually close to the non-treatment zone 22 of workpiece 2 due to tool 1, the open edge 111 of the opening 11 of tool 1 can paste the edge 211 of the neat target treatment 21 in workpiece 2.Therefore surface treatment will can not have influence on the non-treatment zone 22 of workpiece 2, and desired workpiece surface is formed.
Consult shown in Fig. 3, it is the schema of screen method that shows the topical surface treatment of the second embodiment of the present invention.The present embodiment is that the adsorptive power being provided between tool and workpiece is the situation of electrostatic adhesion power.The screen method of the topical surface treatment of the present embodiment comprises the following steps: tool to carry out Electrostatic Treatment (step S200); Tool is hidden in the non-treatment zone (S210) of workpiece and utilizes the electrostatic adhesion power between tool and workpiece, make the non-treatment zone of tool and workpiece mutually be close to (S220); The target treatment of workpiece is carried out to surface treatment (S230).
Refer to Fig. 4, and coordinate Fig. 3 to be described as rear the second embodiment of the present invention.
First, tool 1a is carried out to Electrostatic Treatment (step S200).Then, tool 1a is hidden to the non-treatment zone 22a(step S210 in workpiece 2a).In the present embodiment, tool 1a has an opening 11a, and the shape of opening 11a and area are identical with shape and the area of the target treatment 21a of workpiece 2a.When by opening 11a corresponding to target treatment 21a the treatment zone 21a that gives away one's position, the non-treatment zone 22a of workpiece 2a is hidden by tool 1a.
If the tool 1a after Electrostatic Treatment is contacted with to workpiece 2a, between tool 1a and workpiece 2a, can there is an electrostatic adhesion power.So next, the tool 1a after Electrostatic Treatment is contacted with to workpiece 2a, and utilizes the electrostatic adhesion power F2 between tool 1a and workpiece 2a, make the non-treatment zone 22a of tool 1a and workpiece 2a mutually be close to (S220), as shown in Figure 4.And it is made that the tool 1a of the present embodiment and the tool 1 of the first embodiment are similarly plastic material, and have stressed rear yielding characteristic, so the effect of being close to is quite good.
Next, the target treatment 21a of workpiece 2a is carried out to surface treatment (step S230).In the present embodiment, surface treatment is an etch processes, and surface treatment also can be processed or other similar processing for an exposure-processed, an electroplating processes, a thunder carving.While being mutually close to due to the non-treatment zone 22a of tool 1a and workpiece 2a, the open edge 111a of the opening 11a of tool 1a can paste together in the edge 211a of the target treatment 21a of workpiece 2a.Therefore surface treatment can not have influence on the non-treatment zone 22a of workpiece 2a, and desired workpiece surface is formed.
From above embodiment, the utility value in the true tool industry of the screen method of topical surface treatment provided by the present invention.Yet above narration is only preferred embodiment of the present invention explanation, be allly skillful in this skill person when doing according to above-mentioned explanation other all improvement, yet these change in the scope of the claims that still belongs to invention spirit of the present invention and define.

Claims (8)

1. a screen method for topical surface treatment, in order to shield a workpiece so that this workpiece is carried out to topical surface treatment, this workpiece has a target treatment and a non-treatment zone, it is characterized in that, and this screen method comprises the following steps:
(a) tool is hidden to the non-treatment zone in this workpiece, and expose the target treatment of this workpiece;
(b) be used in the adsorptive power between this tool and this workpiece, and the non-treatment zone of this tool and this workpiece is close to mutually, and an open edge that makes this tool pastes together in the edge of the target treatment of this workpiece, this adsorptive power is a vacuum adsorption force or an electrostatic adhesion power.
2. the screen method of topical surface treatment as claimed in claim 1, is characterized in that, this tool is that a plastic material is made.
3. the screen method of topical surface treatment as claimed in claim 1, is characterized in that, in this adsorptive power, is in the situation of electrostatic adhesion power, and step (a) also comprises the step of this tool being carried out to Electrostatic Treatment before.
4. the screen method of topical surface treatment as claimed in claim 1, is characterized in that, step (a) comprises this workpiece is positioned over to the step in this tool, and form a clearance space between this tool and this workpiece.
5. the screen method of topical surface treatment as claimed in claim 4, is characterized in that, in the situation that is vacuum adsorption force in this adsorptive power, step (b) comprises the step of the air in this clearance space of suction.
6. the screen method of topical surface treatment as claimed in claim 4, is characterized in that, this tool has a sucker, is communicated in this clearance space.
7. the screen method of topical surface treatment as claimed in claim 1, is characterized in that, step (b) also comprises the target treatment of this workpiece is carried out to surface-treated step afterwards.
8. the screen method of topical surface treatment as claimed in claim 7, is characterized in that, this surface treatment is that an exposure-processed, an etch processes, an electroplating processes or thunder carving are processed.
CN201210254278.2A 2012-07-23 2012-07-23 The screen method of topical surface treatment Expired - Fee Related CN103572342B (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106435458A (en) * 2015-08-12 2017-02-22 福特汽车公司 Metal part surface treatment method and device
CN107012489A (en) * 2016-01-06 2017-08-04 应用材料公司 System and method for covering workpiece features during electrochemical deposition
CN106086889B (en) * 2016-06-28 2018-10-19 姑苏源电子(苏州)有限公司 A kind of selection copper facing electroplating technology
CN111101163A (en) * 2020-01-13 2020-05-05 深圳市臻致金属科技有限公司 Black white nickel plating jig and black white nickel plating method
CN112644215A (en) * 2020-11-23 2021-04-13 安徽聚祥升酒类包装有限公司 High accuracy beverage bottle surface drawing die sleeve subassembly and drawing equipment
CN114632680A (en) * 2022-03-11 2022-06-17 重庆臻宝实业有限公司 Method for forming coating of helium hole of upper electrode

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US5844650A (en) * 1994-10-06 1998-12-01 Canon Kabushiki Kaisha Rubbing treating apparatus and rubbing treating method including suction passages to hold masking sheets in place
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CN101891143A (en) * 2009-05-18 2010-11-24 张刚 Method for manufacturing multilayer three-dimensional device or structure
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CN102568992A (en) * 2010-12-27 2012-07-11 东京毅力科创株式会社 Plasma processing apparatus
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Publication number Priority date Publication date Assignee Title
JPS5655042A (en) * 1979-10-11 1981-05-15 Nippon Telegr & Teleph Corp <Ntt> Positioning of mask and wafer
US5844650A (en) * 1994-10-06 1998-12-01 Canon Kabushiki Kaisha Rubbing treating apparatus and rubbing treating method including suction passages to hold masking sheets in place
CN1839463A (en) * 2003-07-09 2006-09-27 株式会社尼康 Exposure apparatus and method for manufacturing device
CN101005015A (en) * 2006-01-20 2007-07-25 株式会社东芝 Substrate processing method, substrate processing apparatus, and manufacturing method of semiconductor device
CN201084710Y (en) * 2007-09-20 2008-07-09 株洲南车时代电气股份有限公司 A semiconductor-device chip surface spray-up magnetic-adsorption local protector
CN101891143A (en) * 2009-05-18 2010-11-24 张刚 Method for manufacturing multilayer three-dimensional device or structure
CN102483578A (en) * 2009-08-20 2012-05-30 株式会社尼康 Object processing apparatus, exposure apparatus and exposure method, and device manufacturing method
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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106435458A (en) * 2015-08-12 2017-02-22 福特汽车公司 Metal part surface treatment method and device
CN106435458B (en) * 2015-08-12 2020-03-27 福特汽车公司 Method and device for surface treatment of metal parts
CN107012489A (en) * 2016-01-06 2017-08-04 应用材料公司 System and method for covering workpiece features during electrochemical deposition
CN107012489B (en) * 2016-01-06 2021-05-07 应用材料公司 System and method for masking workpiece features during electrochemical deposition
CN106086889B (en) * 2016-06-28 2018-10-19 姑苏源电子(苏州)有限公司 A kind of selection copper facing electroplating technology
CN111101163A (en) * 2020-01-13 2020-05-05 深圳市臻致金属科技有限公司 Black white nickel plating jig and black white nickel plating method
CN112644215A (en) * 2020-11-23 2021-04-13 安徽聚祥升酒类包装有限公司 High accuracy beverage bottle surface drawing die sleeve subassembly and drawing equipment
CN112644215B (en) * 2020-11-23 2023-10-31 南京幸云鹿网络科技有限公司 Winebottle surface drawing die sleeve assembly and drawing equipment
CN114632680A (en) * 2022-03-11 2022-06-17 重庆臻宝实业有限公司 Method for forming coating of helium hole of upper electrode
CN114632680B (en) * 2022-03-11 2023-01-24 重庆臻宝实业有限公司 Method for forming coating of helium hole of upper electrode

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