CN103562774B - 用于扩宽激光射束的装置和方法 - Google Patents

用于扩宽激光射束的装置和方法 Download PDF

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Publication number
CN103562774B
CN103562774B CN201280024784.0A CN201280024784A CN103562774B CN 103562774 B CN103562774 B CN 103562774B CN 201280024784 A CN201280024784 A CN 201280024784A CN 103562774 B CN103562774 B CN 103562774B
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China
Prior art keywords
laser beam
sphere
refrative mirror
lens
light path
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CN201280024784.0A
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English (en)
Chinese (zh)
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CN103562774A (zh
Inventor
K·瓦尔梅罗特
C·蒂尔科恩
I·扎维沙
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Trumpf Laser GmbH
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Trumpf Laser GmbH
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0028—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0804—Catadioptric systems using two curved mirrors
    • G02B17/0812—Catadioptric systems using two curved mirrors off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0095—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with ultraviolet radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0977—Reflective elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Lasers (AREA)
CN201280024784.0A 2011-03-21 2012-03-15 用于扩宽激光射束的装置和方法 Active CN103562774B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102011005835A DE102011005835A1 (de) 2011-03-21 2011-03-21 Vorrichtung und Verfahren zur Aufweitung eines Laserstrahls
DE102011005835.4 2011-03-21
PCT/EP2012/054575 WO2012126804A1 (de) 2011-03-21 2012-03-15 Vorrichtung und verfahren zur aufweitung eines laserstrahls

Publications (2)

Publication Number Publication Date
CN103562774A CN103562774A (zh) 2014-02-05
CN103562774B true CN103562774B (zh) 2017-07-04

Family

ID=45932292

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201280024784.0A Active CN103562774B (zh) 2011-03-21 2012-03-15 用于扩宽激光射束的装置和方法

Country Status (7)

Country Link
US (1) US9638907B2 (enExample)
EP (1) EP2689285B1 (enExample)
JP (1) JP6049683B2 (enExample)
KR (1) KR101837232B1 (enExample)
CN (1) CN103562774B (enExample)
DE (1) DE102011005835A1 (enExample)
WO (1) WO2012126804A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10502965B2 (en) * 2014-09-17 2019-12-10 Corning Incorporated High-efficiency multiwavelength beam expander employing dielectric-enhanced mirrors
DE102015105673B4 (de) * 2015-04-14 2018-03-08 Asphericon Gmbh Reflexiver Strahlformer
CN105116555B (zh) * 2015-09-08 2017-06-30 上海嘉强自动化技术有限公司 一种基于多面棱镜超高匀速扫描的均匀线光斑光路系统
CN112255812A (zh) * 2020-11-06 2021-01-22 北京卓镭激光技术有限公司 一种小型红外激光器扩束准直装置
CN113433528B (zh) * 2021-07-19 2022-06-24 雷神等离子科技(杭州)有限公司 垂直扩散式单光束全方位激光雷达
CN115597483B (zh) * 2022-09-30 2024-02-06 南京理工大学 一种干涉仪扩束准直装置

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US3836256A (en) 1972-05-08 1974-09-17 Perkin Elmer Corp Interferometer for testing telescope optics
US4205902A (en) * 1978-10-12 1980-06-03 The Perkin-Elmer Corporation Laser beam expander
US4475793A (en) * 1982-06-01 1984-10-09 Texas Instruments Incorporated Integrated optical beam expander
JPS59154415A (ja) * 1983-02-22 1984-09-03 Asahi Optical Co Ltd 反射型のビ−ムエキスバンダ−光学系
GB2178866B (en) * 1985-08-07 1989-11-01 Anthony John Benbow Robinson Holographic display means
US4691999A (en) * 1986-04-04 1987-09-08 Hughes Aircraft Company Afocal beam expansion apparatus and method
JPH01134981A (ja) 1987-11-19 1989-05-26 Mitsubishi Electric Corp レーザビーム形状可変機構
US5321718A (en) * 1993-01-28 1994-06-14 Sdl, Inc. Frequency converted laser diode and lens system therefor
JPH07144291A (ja) * 1993-11-25 1995-06-06 Mitsubishi Electric Corp レーザ加工装置の非点収差低減方法
JP2001293588A (ja) * 2000-04-11 2001-10-23 Matsushita Electric Ind Co Ltd レーザビーム径の制御装置
JP2002026395A (ja) * 2000-07-13 2002-01-25 Nec Eng Ltd 光集光装置
US6842293B1 (en) * 2002-04-13 2005-01-11 Yusong Yin Beam expander
JP4699874B2 (ja) * 2005-11-16 2011-06-15 株式会社ブイ・テクノロジー レーザ発生装置
JP4691166B2 (ja) * 2005-12-23 2011-06-01 トルンプフ ヴェルクツォイクマシーネン ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディートゲゼルシャフト スキャナヘッド及び当該スキャナヘッドを用いた加工機器
US7729199B2 (en) * 2006-10-17 2010-06-01 Hnu-Photonics External beam expander
DE102007009318B4 (de) 2007-02-22 2010-04-15 Coherent Gmbh Laseranordnung mit einem Laser zur Erzeugung eines hochenergetischen Laserstrahls
EP2115518B1 (en) * 2007-03-02 2016-11-09 Dean B. Koenig Light collimating system for schmidt-cassegrain telescope
US20090257118A1 (en) * 2008-04-15 2009-10-15 Jean-Marc Heritier Beam-shaping telescope
CN101620317B (zh) 2008-06-30 2011-06-22 富士迈半导体精密工业（上海）有限公司 一种具有长焦深的激光装置

Also Published As

Publication number Publication date
JP6049683B2 (ja) 2016-12-21
EP2689285B1 (de) 2018-12-19
DE102011005835A1 (de) 2012-09-27
CN103562774A (zh) 2014-02-05
KR20140045346A (ko) 2014-04-16
KR101837232B1 (ko) 2018-03-09
JP2014508972A (ja) 2014-04-10
US9638907B2 (en) 2017-05-02
US20140293406A1 (en) 2014-10-02
WO2012126804A1 (de) 2012-09-27
EP2689285A1 (de) 2014-01-29

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Address after: German Schramberg

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Applicant before: Trumpf Laser GmbH. & Co. KG

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