DE102011005835A1 - Vorrichtung und Verfahren zur Aufweitung eines Laserstrahls - Google Patents

Vorrichtung und Verfahren zur Aufweitung eines Laserstrahls Download PDF

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Publication number
DE102011005835A1
DE102011005835A1 DE102011005835A DE102011005835A DE102011005835A1 DE 102011005835 A1 DE102011005835 A1 DE 102011005835A1 DE 102011005835 A DE102011005835 A DE 102011005835A DE 102011005835 A DE102011005835 A DE 102011005835A DE 102011005835 A1 DE102011005835 A1 DE 102011005835A1
Authority
DE
Germany
Prior art keywords
laser beam
lens
folding
spherical
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE102011005835A
Other languages
German (de)
English (en)
Inventor
Klaus Wallmeroth
Christoph Tillkorn
Dr. Zawischa Ivo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trumpf Laser GmbH
Original Assignee
Trumpf Laser GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trumpf Laser GmbH filed Critical Trumpf Laser GmbH
Priority to DE102011005835A priority Critical patent/DE102011005835A1/de
Priority to PCT/EP2012/054575 priority patent/WO2012126804A1/de
Priority to CN201280024784.0A priority patent/CN103562774B/zh
Priority to US14/006,334 priority patent/US9638907B2/en
Priority to KR1020137026820A priority patent/KR101837232B1/ko
Priority to JP2014500331A priority patent/JP6049683B2/ja
Priority to EP12712604.3A priority patent/EP2689285B1/de
Publication of DE102011005835A1 publication Critical patent/DE102011005835A1/de
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0028—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0804—Catadioptric systems using two curved mirrors
    • G02B17/0812—Catadioptric systems using two curved mirrors off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0095—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with ultraviolet radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0977—Reflective elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Lasers (AREA)
DE102011005835A 2011-03-21 2011-03-21 Vorrichtung und Verfahren zur Aufweitung eines Laserstrahls Ceased DE102011005835A1 (de)

Priority Applications (7)

Application Number Priority Date Filing Date Title
DE102011005835A DE102011005835A1 (de) 2011-03-21 2011-03-21 Vorrichtung und Verfahren zur Aufweitung eines Laserstrahls
PCT/EP2012/054575 WO2012126804A1 (de) 2011-03-21 2012-03-15 Vorrichtung und verfahren zur aufweitung eines laserstrahls
CN201280024784.0A CN103562774B (zh) 2011-03-21 2012-03-15 用于扩宽激光射束的装置和方法
US14/006,334 US9638907B2 (en) 2011-03-21 2012-03-15 Device and method for expanding a laser beam
KR1020137026820A KR101837232B1 (ko) 2011-03-21 2012-03-15 레이저빔의 확장 장치 및 방법
JP2014500331A JP6049683B2 (ja) 2011-03-21 2012-03-15 レーザービームを拡大するための装置および方法
EP12712604.3A EP2689285B1 (de) 2011-03-21 2012-03-15 Vorrichtung und verfahren zur aufweitung eines laserstrahls

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102011005835A DE102011005835A1 (de) 2011-03-21 2011-03-21 Vorrichtung und Verfahren zur Aufweitung eines Laserstrahls

Publications (1)

Publication Number Publication Date
DE102011005835A1 true DE102011005835A1 (de) 2012-09-27

Family

ID=45932292

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102011005835A Ceased DE102011005835A1 (de) 2011-03-21 2011-03-21 Vorrichtung und Verfahren zur Aufweitung eines Laserstrahls

Country Status (7)

Country Link
US (1) US9638907B2 (enExample)
EP (1) EP2689285B1 (enExample)
JP (1) JP6049683B2 (enExample)
KR (1) KR101837232B1 (enExample)
CN (1) CN103562774B (enExample)
DE (1) DE102011005835A1 (enExample)
WO (1) WO2012126804A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105116555A (zh) * 2015-09-08 2015-12-02 上海嘉强自动化技术有限公司 一种基于多面棱镜超高匀速扫描的均匀线光斑光路系统

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016044212A1 (en) 2014-09-17 2016-03-24 Corning Incorporated High-efficiency multiwavelength beam expander employing dielectric-enhanced mirrors
DE102015105673B4 (de) 2015-04-14 2018-03-08 Asphericon Gmbh Reflexiver Strahlformer
CN112255812A (zh) * 2020-11-06 2021-01-22 北京卓镭激光技术有限公司 一种小型红外激光器扩束准直装置
CN113433528B (zh) * 2021-07-19 2022-06-24 雷神等离子科技(杭州)有限公司 垂直扩散式单光束全方位激光雷达
CN115597483B (zh) * 2022-09-30 2024-02-06 南京理工大学 一种干涉仪扩束准直装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4205902A (en) * 1978-10-12 1980-06-03 The Perkin-Elmer Corporation Laser beam expander
JPS59154415A (ja) * 1983-02-22 1984-09-03 Asahi Optical Co Ltd 反射型のビ−ムエキスバンダ−光学系
US4475793A (en) * 1982-06-01 1984-10-09 Texas Instruments Incorporated Integrated optical beam expander
DE102007009318A1 (de) 2007-02-22 2008-08-28 Coherent Gmbh Laseranordnung mit einem Laser zur Erzeugung eines hochenergetischen Laserstrahls sowie Verfahren zum Betrieb einer derartigen Laseranordnung
US20090257118A1 (en) * 2008-04-15 2009-10-15 Jean-Marc Heritier Beam-shaping telescope
US20090323176A1 (en) * 2008-06-30 2009-12-31 Foxsemicon Integrated Technology, Inc. Single wavelength ultraviolet laser device

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3836256A (en) 1972-05-08 1974-09-17 Perkin Elmer Corp Interferometer for testing telescope optics
GB2178866B (en) * 1985-08-07 1989-11-01 Anthony John Benbow Robinson Holographic display means
US4691999A (en) * 1986-04-04 1987-09-08 Hughes Aircraft Company Afocal beam expansion apparatus and method
JPH01134981A (ja) * 1987-11-19 1989-05-26 Mitsubishi Electric Corp レーザビーム形状可変機構
US5321718A (en) * 1993-01-28 1994-06-14 Sdl, Inc. Frequency converted laser diode and lens system therefor
JPH07144291A (ja) * 1993-11-25 1995-06-06 Mitsubishi Electric Corp レーザ加工装置の非点収差低減方法
JP2001293588A (ja) * 2000-04-11 2001-10-23 Matsushita Electric Ind Co Ltd レーザビーム径の制御装置
JP2002026395A (ja) 2000-07-13 2002-01-25 Nec Eng Ltd 光集光装置
US6842293B1 (en) * 2002-04-13 2005-01-11 Yusong Yin Beam expander
JP4699874B2 (ja) * 2005-11-16 2011-06-15 株式会社ブイ・テクノロジー レーザ発生装置
DE502005007296D1 (de) 2005-12-23 2009-06-25 Trumpf Werkzeugmaschinen Gmbh Scannerkopf und bearbeitungsmaschine damit
US7729199B2 (en) * 2006-10-17 2010-06-01 Hnu-Photonics External beam expander
WO2008109563A2 (en) * 2007-03-02 2008-09-12 Koenig Dean B Light collimating system for schmidt-cassegrain telescope

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4205902A (en) * 1978-10-12 1980-06-03 The Perkin-Elmer Corporation Laser beam expander
US4475793A (en) * 1982-06-01 1984-10-09 Texas Instruments Incorporated Integrated optical beam expander
JPS59154415A (ja) * 1983-02-22 1984-09-03 Asahi Optical Co Ltd 反射型のビ−ムエキスバンダ−光学系
DE102007009318A1 (de) 2007-02-22 2008-08-28 Coherent Gmbh Laseranordnung mit einem Laser zur Erzeugung eines hochenergetischen Laserstrahls sowie Verfahren zum Betrieb einer derartigen Laseranordnung
US20090257118A1 (en) * 2008-04-15 2009-10-15 Jean-Marc Heritier Beam-shaping telescope
US20090323176A1 (en) * 2008-06-30 2009-12-31 Foxsemicon Integrated Technology, Inc. Single wavelength ultraviolet laser device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105116555A (zh) * 2015-09-08 2015-12-02 上海嘉强自动化技术有限公司 一种基于多面棱镜超高匀速扫描的均匀线光斑光路系统

Also Published As

Publication number Publication date
KR20140045346A (ko) 2014-04-16
JP6049683B2 (ja) 2016-12-21
JP2014508972A (ja) 2014-04-10
US20140293406A1 (en) 2014-10-02
EP2689285B1 (de) 2018-12-19
EP2689285A1 (de) 2014-01-29
US9638907B2 (en) 2017-05-02
CN103562774B (zh) 2017-07-04
KR101837232B1 (ko) 2018-03-09
CN103562774A (zh) 2014-02-05
WO2012126804A1 (de) 2012-09-27

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R012 Request for examination validly filed
R082 Change of representative

Representative=s name: KOHLER SCHMID MOEBUS PATENTANWAELTE, DE

R081 Change of applicant/patentee

Owner name: TRUMPF LASER GMBH, DE

Free format text: FORMER OWNER: TRUMPF LASER GMBH + CO. KG, 78713 SCHRAMBERG, DE

Effective date: 20141027

R082 Change of representative

Representative=s name: KOHLER SCHMID MOEBUS PATENTANWAELTE, DE

Effective date: 20141027

Representative=s name: KOHLER SCHMID MOEBUS PATENTANWAELTE PARTNERSCH, DE

Effective date: 20141027

R016 Response to examination communication
R002 Refusal decision in examination/registration proceedings
R003 Refusal decision now final