CN103551927A - Device for polishing micropores by driving abrasive particle motion through electrophoresis auxiliary ultrasonic vibration and processing method - Google Patents
Device for polishing micropores by driving abrasive particle motion through electrophoresis auxiliary ultrasonic vibration and processing method Download PDFInfo
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- CN103551927A CN103551927A CN201310557926.6A CN201310557926A CN103551927A CN 103551927 A CN103551927 A CN 103551927A CN 201310557926 A CN201310557926 A CN 201310557926A CN 103551927 A CN103551927 A CN 103551927A
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- micropore
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/002—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using electric current
Abstract
The invention relates to polishing of inner surfaces of metal or non-metal hard and brittle material micropores and particularly relates to a device for polishing the micropores by driving abrasive particle motion through electrophoresis auxiliary ultrasonic vibration and a processing method. Electrophoresis auxiliary processing and the ultrasonic processing are combined together; under the adsorption action of electrophoresis, fine abrasive particles are adsorbed near to a tool; the tool disturbs solutions in the micropores under extruding and pumping action generated by positive and negative hydraulic impact caused by ultrasonic vibration in the solutions; furthermore, the disturbance to the solutions can be aggravated due to impact waves generated by ultrasonic cavitation breaking; therefore, the ultrafine abrasion particles in the solutions can move relative to a processed surface to fulfill the aim of polishing a single-micropore workpiece or a multi-micropore workpiece.
Description
Technical field
The present invention relates to the polishing of metal or hard brittle materia micropore inner surface, especially a kind of device of electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore and the method for polishing micropore.
Background technology
The application of various micropores in the industries such as aircraft, automobile, electrical equipment, chemical industry, food, biologic medical is more and more extensive.As micropore, automotive fuel nozzle, chemical fibre filament nozzle etc. on printed circuit board (PCB).Approximately 10 microns of the squit hole minimum diameters of chemical fiber wire nozzle.
The method that is suitable at present capillary processing mainly contains: machine drilling, laser boring, spark machined and Electrolyzed Processing.But the method with machine drilling, can leave burr in the exit of micropore, this burr can affect result of use, by laser and spark machined, all can leave recast layer at micropore hole wall place, thereby affect the service life of micropore, the hole wall surface quality of micropore is worsened.The automobile oil nozzle that for example conventional method is processed, roughness great ， has flanging burr in balancing gate pit, and atomizer discharge coefficient only has 0.5～0.6.In order to meet more and more stricter emission regulation demands, diesel engine requires atomizer discharge coefficient more than 0.8, needs further to improve its discharge coefficient.
Abrasive flow machining is to utilize abrasive particle to realize with respect to the compressional movement of surface to be machined, abrasive particle must be in pressured masterpiece continuous-flow under abrasive Flow medium carrying, abrasive Flow Machining technology can be divided into dynamic pressure abrasive Flow Machining and static pressure abrasive Flow Machining technology, static pressure abrasive Flow Machining technology is that recent two decades grows up, its adopts high-molecular organic material that viscosity is very high as medium, the abrasive particle with shear action is suspended, wherein form viscoplasticity abrasive material, make under pressure abrasive material contact with surface to be machined, produce shear action and carry out polishing processing.Because abrasive Flow Machining is to produce polishing effect by being close to the shear action of the boundary layer abrasive particle of wall, in passage, abrasive Flow velocity flow profile radially directly has influence on boundary layer abrasive particle at motion and the force-bearing situation of wall, and then has determined processing effect.Abrasive flows is that extruding working solution makes abrasive particle move with respect to surface to be machined, and electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore is to utilize the instrument of ultrasonic vibration to form positive and negative hydraulic shock to solution generation extruding and pump-absorb action in solution, cause the solution disturbance in micropore, the shock wave producing of crumbling and fall is steeped in ultrasonic cavitation can aggravate this disturbance again, thereby abrasive particle is moved with respect to surface to be machined.Micropore is less, and the required extruding force of abrasive flows is larger, higher to the requirement of equipment; And the motion of electrophoresis assisting ultrasonic vibratory drive abrasive material only need reduce the average grain diameter of ultra micro abrasive particle.
Applicant, on May 22nd, 2013, submitted a application to, and name is called the auxiliary fine ultrasonic machine tool of a kind of electrophoresis and processing method, and application number is 201310192315.6.Article the structure and machining method of the auxiliary fine ultrasonic machine tool of electrophoresis, and the application is when in the face of the unmanageable technical problem of micro hole and propose.Because abrasive Flow is abrasive particle, with respect to the compressional movement of surface to be machined, realize, Kong Yue little is more difficult to realize, and needed extruding force is larger, higher to the requirement of hydraulic system and equipment.Abrasive material working solution relatively disperses between workpiece and instrument, and abrasive material utilization rate is not high, affects polishing efficiency, especially for minimum micropore (50 microns), adopts abrasive Flow to be difficult to realize.
Summary of the invention
The device that the object of the invention is to consider the problems referred to above and a kind of electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore is provided; Meanwhile, the present invention also provides and has adopted described device to carry out the method for polishing micropore and the polishing that can effectively solve abrasive particle utilization rate and micro hole.
For achieving the above object, the technical scheme that the present invention takes is: a kind of device of electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore, comprises ultrasonic machine tool, work tank, electrophoresis dc source, instrument, working solution, ultra micro abrasive particle, micropore workpiece, the auxiliary circular electrode of electrophoresis; Described ultrasonic machine tool comprises axis system, enters electric system, the ultrasonic longitudinal vibration system of main shaft; Described electrophoresis dc source enters electric system by described, and it is anodal is connected with instrument, and its negative pole assists circular electrode to be connected with electrophoresis; The end face of described instrument should be able to cover required polishing micropore, and the surface of itself and micropore workpiece at least keeps the distance of an amplitude; Described ultra micro abrasive particle is distributed in working solution, and the average grain diameter of ultra micro abrasive particle is less than 1 micron; Described micropore workpiece, its micro-pore diameter is less than or equal to 50 microns.
As the preferred embodiment of the device of electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore of the present invention, described micropore workpiece is single micropore workpiece.
As the preferred embodiment of the device of electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore of the present invention, described micropore workpiece is group's micropore workpiece.
As the preferred embodiment of the device of electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore of the present invention, it is on the three-dimensional motion platform of 0.1 micron that described work tank is arranged on minimum resolution.
As the preferred embodiment of the device of electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore of the present invention, described ultra micro abrasive particle is not charged, and because its surface can be very large, the negative electrical charge in can adsorbent solution presents negative electricity.
In addition, the present invention also provides a kind of processing method of enforcement electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore of the device that uses electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore, and the method comprises the following steps:
(1) micropore workpiece is fixedly mounted on the workbench in work tank;
(2) positive pole of electrophoresis dc source is connected with instrument, and the negative pole of electrophoresis dc source is connected with the auxiliary circular electrode of electrophoresis;
(3) instrument is arranged in the ultrasonic longitudinal vibration system of main shaft by hammer, instrument dither vertically under the driving of ultrasonic-frequency power supply;
(4) the auxiliary circular electrode of electrophoresis assists circular electrode holder installation to be soaked in working solution by electrophoresis, due to the suction-operated of electrophoresis, makes the ultra micro abrasive particle in working solution under the driving of electric field force, be adsorbed onto near tool surfaces;
(5) micropore workpiece and instrument are under the servo feed system of ultrasonic lathe drives, and the instrument end face of making covers the micropore of required polishing, and itself and micropore surface of the work keep the distance of at least one amplitude; The positive and negative hydraulic shock that the ultrasonic vibration of instrument in solution causes produces extruding and pump-absorb action, solution in micropore is carried out to disturbance, and the crumble and fall shock wave that produces of ultrasonic cavity can aggravate the disturbance of solution, thereby the ultra micro abrasive particle in solution is moved with respect to surface to be machined, reach the object to micropore polishing; Implement the processing of electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore.
As the preferred embodiment of the processing method of the enforcement electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore of the device of use electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore of the present invention, described micropore workpiece is single micropore workpiece.
As the preferred embodiment of the processing method of the enforcement electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore of the device of use electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore of the present invention, described micropore workpiece is group's micropore workpiece.
As the preferred embodiment of the processing method of the enforcement electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore of the device of use electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore of the present invention, it is on the three-dimensional motion platform of 0.1 micron that described work tank is arranged on minimum resolution.
Preferred embodiment as the processing method of the enforcement electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore of the device of use electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore of the present invention, described ultra micro abrasive particle is not charged, because its surface can be very large, the negative electrical charge in can adsorbent solution presents negative electricity.
The processing method of the device of use electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore of the present invention and enforcement electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore, utilize the instrument of ultrasonic vibration in solution, to form positive and negative hydraulic shock to solution generation extruding and pump-absorb action, cause the solution disturbance in micropore, the shock wave producing of crumbling and fall is steeped in ultrasonic cavitation can aggravate this disturbance again, thereby abrasive particle is moved with respect to surface to be machined, realize the polishing to micropore; The applying of electric field between the auxiliary circular electrode of instrument and electrophoresis, can make ultra micro abrasive particle be adsorbed onto near instrument with micropore in, improve the utilization rate of abrasive material.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing single hole of the present invention.
Fig. 2 is the schematic diagram in electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing group of the present invention hole.
In figure, 1 is that work tank, 2 is that electrophoresis dc source, 3 is that instrument, 4 is that working solution, 5 is that ultra micro abrasive particle, 6 is that micropore workpiece, 7 is that electrophoresis is assisted circular electrode.
The specific embodiment
For the object, technical solutions and advantages of the present invention are better described, below in conjunction with the drawings and specific embodiments, the invention will be further described.
As shown in Figure 1-2, a kind of device of electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore, comprises ultrasonic machine tool, work tank 1, electrophoresis dc source 2, instrument 3, working solution 4, ultra micro abrasive particle 5, micropore workpiece 6, the auxiliary circular electrode 7 of electrophoresis; Described ultrasonic machine tool comprises axis system, enters electric system, the ultrasonic longitudinal vibration system of main shaft; Described electrophoresis dc source 2 enters electric system by described, and it is anodal is connected with instrument 3, and its negative pole assists circular electrode 7 to be connected with electrophoresis; Described ultra micro abrasive particle 5 is distributed in working solution 4, and working solution 4 is placed in work tank 1, and wherein, the average grain diameter of ultra micro abrasive particle 4 is less than 1 micron; Described micropore workpiece 6, its micro-pore diameter is less than or equal to 50 microns.
The anode bonding tool 3 of the electrophoresis dc source 2 shown in Fig. 1-2, the negative electrode of electrophoresis dc source 2 connects the auxiliary circular electrode 7 of electrophoresis, between instrument 3 and the auxiliary circular electrode 7 of electrophoresis, form an electric field, ultra micro abrasive particle 5 in working solution 4 is adsorbed onto near instrument 3 and in the micropore of required polishing under the effect of electric field force, improves the solubility of machining area abrasive material.
Ultra micro abrasive particle 5 shown in Fig. 1-2 is suspended in working solution 4, and average grain diameter is less than 1 micron.The motion of electrophoresis assisting ultrasonic vibratory drive abrasive particle is to utilize the electrophoretic characteristic of ultra micro abrasive particle 5 in solution, and ultra micro abrasive particle 5 itself is uncharged.Because the surface of ultra micro abrasive particle 5 can be very large, the negative electrical charge in can adsorbent solution, makes whole abrasive particle be negative electricity.Ultra micro abrasive particle 5 average grain diameters are less, and the electrophoretic characteristic of ultra micro abrasive particle 5 is more obvious.
In addition, implement the processing method of electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore.Micropore workpiece 6 is fixedly mounted on the workbench of work tank 1; The positive pole of electrophoresis dc source 2 is connected with instrument 3, and the negative pole of electrophoresis dc source 2 is connected with the auxiliary circular electrode 7 of electrophoresis; Instrument 3 is arranged in the ultrasonic longitudinal vibration system of main shaft by hammer, instrument dither vertically under the driving of ultrasonic-frequency power supply; The auxiliary circular electrode 7 of electrophoresis is assisted circular electrode holder to install by electrophoresis and is soaked in working solution 4, due to the suction-operated of electrophoresis, makes the ultra micro abrasive particle 5 in working solution 4 under the driving of electric field force, be adsorbed onto instrument 3 near surfaces; Micropore workpiece 6 and instrument 3, under the servo feed system of ultrasonic lathe drives, make instrument 3 end faces can cover the micropore of required polishing, and itself and the distance of micropore workpiece 6 at least one amplitude of surface maintenance; The positive and negative hydraulic shock that the ultrasonic vibration of instrument 3 in solution causes produces extruding and pump-absorb action, solution in micropore is carried out to disturbance, and the crumble and fall shock wave that produces of ultrasonic cavity can aggravate the disturbance of solution, thereby the ultra micro abrasive particle 5 in solution is moved with respect to surface to be machined, reach the object to 6 polishings of micropore workpiece; Implement the processing of electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore.
Described instrument 3 end faces should cover the micropore of required polishing, and instrument 3 end faces and micropore be the distance of a ultrasonic amplitude at least apart, in order to avoid 3 pairs of workpiece of instrument 6 carry out hammering processing.Instrument 3 is installed in the main shaft that ultrasonic vibration can be provided, and under the driving of ultrasonic-frequency power supply, instrument 3 is done dither vertically.Main shaft is installed on vertical slipway, and vertical slipway can drive shaft moves up and down so that add and carry out thick tool setting man-hour.
Described instrument 3 does not need on-line machining, does not need it is rotated with main shaft, as long as its end face can cover the micropore of required polishing yet, can carry out polishing to single micropore, also can to a plurality of micropores, carry out polishing simultaneously, realize group's hole polishing, improve polishing efficiency.
The anode bonding tool 3 of described electrophoresis dc source 2, the negative electrode of electrophoresis dc source 2 connects the auxiliary circular electrode 7 of electrophoresis, between instrument 3 and the auxiliary circular electrode 7 of electrophoresis, form an electric field, ultra micro abrasive particle 5 in working solution 4 is adsorbed onto near instrument 3 and in the micropore of required polishing under the effect of electric field force, improves the solubility of machining area abrasive material.
Described ultra micro abrasive particle 5 is suspended in working solution 4, and average grain diameter is less than 1 micron.The motion of electrophoresis assisting ultrasonic vibratory drive abrasive particle is to utilize the electrophoretic characteristic of ultra micro abrasive particle 5 in solution, and ultra micro abrasive particle 5 itself is uncharged.Because the surface of ultra micro abrasive particle 5 can be very large, the negative electrical charge in can adsorbent solution, makes whole abrasive particle be negative electricity.Ultra micro abrasive particle 5 average grain diameters are less, and the electrophoretic characteristic of ultra micro abrasive particle 5 is more obvious.
Described micropore workpiece 6 is installed in work tank 1, is immersed in abrasive material working solution, and instrument 3 end faces also need to be immersed in abrasive material working solution, otherwise cannot implement electrophoresis assisting ultrasonic vibratory drive abrasive material motion polishing micropore.Work tank 1 is installed on micro-three-dimensional motion platform, and the minimum resolution of micro-three-dimensional motion platform x axle, y axle and z axle is all 0.1 micron.
Last institute should be noted that; above embodiment is only in order to illustrate technical scheme of the present invention but not limiting the scope of the invention; although the present invention is explained in detail with reference to preferred embodiment; those of ordinary skill in the art is to be understood that; can modify or be equal to replacement technical scheme of the present invention, and not depart from essence and the scope of technical solution of the present invention.
Claims (10)
1. a device for electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore, comprises ultrasonic machine tool, it is characterized in that, also comprises work tank, electrophoresis dc source, instrument, working solution, ultra micro abrasive particle, micropore workpiece, the auxiliary circular electrode of electrophoresis;
Described ultrasonic machine tool comprises axis system, enters electric system, the ultrasonic longitudinal vibration system of main shaft;
Described electrophoresis dc source enters electric system by described, and it is anodal is connected with instrument, and its negative pole assists circular electrode to be connected with electrophoresis;
The end face of described instrument should be able to cover the micropore of required polishing, and the surface of itself and micropore workpiece at least keeps the distance of an amplitude;
Described ultra micro abrasive particle is distributed in working solution, and the average grain diameter of ultra micro abrasive particle is less than 1 micron;
Described micropore workpiece, its micro-pore diameter is less than or equal to 50 microns.
2. the device of electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore as claimed in claim 1, is characterized in that, described micropore workpiece is single micropore workpiece.
3. the device of electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore as claimed in claim 1, is characterized in that, described micropore workpiece is group's micropore workpiece.
4. the device of electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore as claimed in claim 1, is characterized in that, it is on the three-dimensional motion platform of 0.1 micron that described work tank is arranged on minimum resolution.
5. the device of the electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore as described in claim 1 or 4, is characterized in that, described ultra micro abrasive particle is not charged, and because its surface can be very large, the negative electrical charge in can adsorbent solution presents negative electricity.
6. a processing method of implementing electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore is installed in use as claimed in claim 1, it is characterized in that, comprises the following steps:
(1) micropore workpiece is fixedly mounted on the workbench in work tank;
(2) positive pole of electrophoresis dc source is connected with instrument, and the negative pole of electrophoresis dc source is connected with the auxiliary circular electrode of electrophoresis;
(3) instrument is arranged in the ultrasonic longitudinal vibration system of main shaft by hammer, instrument dither vertically under the driving of ultrasonic-frequency power supply;
(4) the auxiliary circular electrode of electrophoresis assists circular electrode holder installation to be soaked in working solution by electrophoresis, due to the suction-operated of electrophoresis, makes the ultra micro abrasive particle in working solution under the driving of electric field force, be adsorbed onto near tool surfaces;
(5) micropore workpiece and instrument are under the servo feed system of ultrasonic lathe drives, and the instrument end face of making can cover the micropore of required polishing, and itself and micropore surface of the work keep the distance of at least one amplitude; The positive and negative hydraulic shock that the ultrasonic vibration of instrument in solution causes produces extruding and pump-absorb action, solution in micropore is carried out to disturbance, and the crumble and fall shock wave that produces of ultrasonic cavity can aggravate the disturbance of solution, thereby the ultra micro abrasive particle in solution is moved with respect to surface to be machined, reach the object to micropore polishing; Implement the processing of electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore.
7. the method for electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore as claimed in claim 6, is characterized in that, described micropore workpiece is single micropore workpiece.
8. the method for electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore as claimed in claim 6, is characterized in that, described micropore workpiece is group's micropore workpiece.
9. the method for electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore as claimed in claim 6, is characterized in that, it is on the three-dimensional motion platform of 0.1 micron that described work tank is arranged on minimum resolution.
10. the method for electrophoresis assisting ultrasonic vibratory drive abrasive particle motion polishing micropore as claimed in claim 6, is characterized in that, described ultra micro abrasive particle is not charged, and because its surface can be very large, the negative electrical charge in can adsorbent solution presents negative electricity.
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| CN201310557926.6A CN103551927B (en) | 2013-11-11 | 2013-11-11 | The device of a kind of electrophoresis assisting ultrasonic vibratory drive grain motion polishing micropore and processing method |
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Cited By (13)
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| CN103909288A (en) * | 2014-04-04 | 2014-07-09 | 广东工业大学 | Electrophoretic assisted ultrasonic mechanical composite micro-drilling machining device |
| CN103909300A (en) * | 2014-04-04 | 2014-07-09 | 广东工业大学 | Electrophoresis and supersonic vibration assisted micro-milling and machining device |
| CN104786155A (en) * | 2015-02-03 | 2015-07-22 | 浙江工业大学 | Ultrasonic assisted gas-liquid-solid three-phase abrasive particle flow polishing processing method and device |
| CN104875081A (en) * | 2015-06-03 | 2015-09-02 | 浙江工业大学 | Microhole precision-machining method based on dielectrophoresis |
| CN109877658A (en) * | 2019-03-26 | 2019-06-14 | 湖南科技大学 | A kind of shear thickening-electrophoresis composite polishing device |
| CN110238714A (en) * | 2019-07-18 | 2019-09-17 | 大连海事大学 | Metal increasing material manufacturing part surface current becomes liquid assisting ultrasonic burnishing device and processing method |
| CN111390658A (en) * | 2020-04-30 | 2020-07-10 | 岭南师范学院 | Micro-channel electrophoresis auxiliary micro-ultrasonic processing device and method |
| CN111805319A (en) * | 2020-07-02 | 2020-10-23 | 哈尔滨工业大学 | Full-automatic feeding device of ultrasonic auxiliary grinding machine for excircle of hard and brittle single crystal micro-cylinder |
| CN112892809A (en) * | 2021-02-05 | 2021-06-04 | 何宽 | Ultrasonic machining device for optical glass |
| CN115157020A (en) * | 2022-06-29 | 2022-10-11 | 大连理工大学 | Multi-field auxiliary abrasive scouring and polishing method and device |
| CN115365987A (en) * | 2021-11-15 | 2022-11-22 | 广州市纬略实业股份有限公司 | Process for polishing workpiece physically and chemically simultaneously and application thereof |
| CN115383599A (en) * | 2022-09-22 | 2022-11-25 | 广东技术师范大学 | Electrophoresis-assisted self-feeding type ultra-precise micro polishing method and device |
| CN115837631A (en) * | 2023-02-21 | 2023-03-24 | 太原理工大学 | High-precision gear composite vibration shape collaborative polishing method and device |
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| CN103909300A (en) * | 2014-04-04 | 2014-07-09 | 广东工业大学 | Electrophoresis and supersonic vibration assisted micro-milling and machining device |
| CN103909288A (en) * | 2014-04-04 | 2014-07-09 | 广东工业大学 | Electrophoretic assisted ultrasonic mechanical composite micro-drilling machining device |
| CN104786155A (en) * | 2015-02-03 | 2015-07-22 | 浙江工业大学 | Ultrasonic assisted gas-liquid-solid three-phase abrasive particle flow polishing processing method and device |
| CN104875081A (en) * | 2015-06-03 | 2015-09-02 | 浙江工业大学 | Microhole precision-machining method based on dielectrophoresis |
| CN104875081B (en) * | 2015-06-03 | 2017-04-12 | 浙江工业大学 | Microhole precision-machining method based on dielectrophoresis |
| CN109877658B (en) * | 2019-03-26 | 2023-12-08 | 湖南科技大学 | Shear thickening-electrophoresis composite polishing device |
| CN109877658A (en) * | 2019-03-26 | 2019-06-14 | 湖南科技大学 | A kind of shear thickening-electrophoresis composite polishing device |
| CN110238714A (en) * | 2019-07-18 | 2019-09-17 | 大连海事大学 | Metal increasing material manufacturing part surface current becomes liquid assisting ultrasonic burnishing device and processing method |
| CN111390658A (en) * | 2020-04-30 | 2020-07-10 | 岭南师范学院 | Micro-channel electrophoresis auxiliary micro-ultrasonic processing device and method |
| CN111805319A (en) * | 2020-07-02 | 2020-10-23 | 哈尔滨工业大学 | Full-automatic feeding device of ultrasonic auxiliary grinding machine for excircle of hard and brittle single crystal micro-cylinder |
| CN111805319B (en) * | 2020-07-02 | 2021-08-13 | 哈尔滨工业大学 | Full-automatic feeding device of ultrasonic auxiliary grinding machine for excircle of hard and brittle single crystal micro-cylinder |
| CN112892809A (en) * | 2021-02-05 | 2021-06-04 | 何宽 | Ultrasonic machining device for optical glass |
| CN115365987A (en) * | 2021-11-15 | 2022-11-22 | 广州市纬略实业股份有限公司 | Process for polishing workpiece physically and chemically simultaneously and application thereof |
| CN115365987B (en) * | 2021-11-15 | 2024-01-19 | 广州市纬略实业股份有限公司 | Process and application for polishing workpiece by physical and chemical simultaneously |
| CN115157020A (en) * | 2022-06-29 | 2022-10-11 | 大连理工大学 | Multi-field auxiliary abrasive scouring and polishing method and device |
| CN115383599A (en) * | 2022-09-22 | 2022-11-25 | 广东技术师范大学 | Electrophoresis-assisted self-feeding type ultra-precise micro polishing method and device |
| CN115383599B (en) * | 2022-09-22 | 2023-08-15 | 广东技术师范大学 | Electrophoresis-assisted self-feeding type ultra-precise micro-polishing method and device |
| CN115837631A (en) * | 2023-02-21 | 2023-03-24 | 太原理工大学 | High-precision gear composite vibration shape collaborative polishing method and device |
| CN115837631B (en) * | 2023-02-21 | 2023-05-12 | 太原理工大学 | High-precision gear compound vibration shape collaborative polishing method and device |
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| CN103551927B (en) | 2016-08-24 |
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