CN103498159B - 一种抛光浆料 - Google Patents
一种抛光浆料 Download PDFInfo
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- CN103498159B CN103498159B CN201310434423.XA CN201310434423A CN103498159B CN 103498159 B CN103498159 B CN 103498159B CN 201310434423 A CN201310434423 A CN 201310434423A CN 103498159 B CN103498159 B CN 103498159B
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- polishing
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- polishing slurries
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- aluminum oxide
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CN201310434423.XA CN103498159B (zh) | 2013-09-23 | 2013-09-23 | 一种抛光浆料 |
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CN201310434423.XA CN103498159B (zh) | 2013-09-23 | 2013-09-23 | 一种抛光浆料 |
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CN103498159A CN103498159A (zh) | 2014-01-08 |
CN103498159B true CN103498159B (zh) | 2016-01-20 |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1440449A (zh) * | 2000-07-05 | 2003-09-03 | 卡伯特微电子公司 | 用于cmp的含硅烷的抛光组合物 |
CN101033374A (zh) * | 2007-04-13 | 2007-09-12 | 中国地质大学(武汉) | 一种高纯度纳米金刚石抛光液及其制备方法 |
CN101591508A (zh) * | 2008-05-30 | 2009-12-02 | 安集微电子(上海)有限公司 | 一种用于金属化学机械抛光的抛光浆料及其用途 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US6602439B1 (en) * | 1997-02-24 | 2003-08-05 | Superior Micropowders, Llc | Chemical-mechanical planarization slurries and powders and methods for using same |
JP2000265160A (ja) * | 1999-03-12 | 2000-09-26 | Sumitomo Osaka Cement Co Ltd | 高速鏡面研磨用研磨材 |
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- 2013-09-23 CN CN201310434423.XA patent/CN103498159B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1440449A (zh) * | 2000-07-05 | 2003-09-03 | 卡伯特微电子公司 | 用于cmp的含硅烷的抛光组合物 |
CN101033374A (zh) * | 2007-04-13 | 2007-09-12 | 中国地质大学(武汉) | 一种高纯度纳米金刚石抛光液及其制备方法 |
CN101591508A (zh) * | 2008-05-30 | 2009-12-02 | 安集微电子(上海)有限公司 | 一种用于金属化学机械抛光的抛光浆料及其用途 |
Non-Patent Citations (1)
Title |
---|
化学机械抛光过程抛光液作用的研究进展;邹微波等;《金刚石与磨料磨具工程》;20120229;第32卷(第1期);第53-56、59页 * |
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CN103498159A (zh) | 2014-01-08 |
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Inventor after: Zheng Jiefu Inventor before: Yang Longxing |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20170425 Address after: 529080 Dongsheng Road, high tech Zone, Guangdong, Jiangmen, China, No. 185 Patentee after: JIANGMEN JACKSONLEA ABRASIVE MATERIALS CO.,LTD. Address before: Tianhe District Tong East Road Guangzhou city Guangdong province 510665 B-101 No. 5, room B-118 Patentee before: GUANGDONG GAOHANG INTELLECTUAL PROPERTY OPERATION Co.,Ltd. Effective date of registration: 20170425 Address after: Tianhe District Tong East Road Guangzhou city Guangdong province 510665 B-101 No. 5, room B-118 Patentee after: GUANGDONG GAOHANG INTELLECTUAL PROPERTY OPERATION Co.,Ltd. Address before: 214000 Jiangsu city in Wuxi Province Economic Development Zone Huishan Spring Road No. 588 Patentee before: WUXI YANGGONG MACHINERY MANUFACTURING Co.,Ltd. |