CN103487341B - Self-excited vibration principle-based microstructural fatigue test device - Google Patents
Self-excited vibration principle-based microstructural fatigue test device Download PDFInfo
- Publication number
- CN103487341B CN103487341B CN201310481444.7A CN201310481444A CN103487341B CN 103487341 B CN103487341 B CN 103487341B CN 201310481444 A CN201310481444 A CN 201310481444A CN 103487341 B CN103487341 B CN 103487341B
- Authority
- CN
- China
- Prior art keywords
- micro
- test specimen
- electrode
- self
- excited vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
The invention discloses a self-excited vibration principle-based microstructural fatigue test device which comprises an insulating supporting base, a microtest piece, two direct-current driving electrodes and a substrate, wherein the insulating supporting base is neither connected with any electrode nor grounded, and is in a potential floating state; one end of the microtest piece is fixedly arranged on the insulating supporting base, and the other end is in a horizontal suspension state; a certain clearance is kept between the two direct-current driving electrodes, and the two direct-current driving electrodes are arranged at two sides of the microtest piece and are in parallel to the microtest piece, wherein one direct-current driving electrode is connected into direct-current positive voltage, and the other direct-current driving electrode is connected into direct-current negative voltage; the insulating supporting base and the direct-current driving electrodes are fixedly arranged on the substrate. The self-excited vibration principle-based microstructural fatigue test device is simple in structure, and avoids the problems of being difficult to clamp and align; a large enough low-cycle fatigue test load can be provided without the need of prefabricating a gap on the microtest piece or placing the microtest piece in the vacuum environment; the fatigue tests of a plurality of microtest pieces can be simultaneously performed with relatively low cost, and the load cycle number can be conveniently recorded.
Description
Technical field
The present invention relates to a kind of micro structure fatigue experimental device based on self-excited vibration principle, belong to nanometer technique basis
Research field.
Background technology
It is often subjected to large impact, the big poor working conditions such as vibration, high-temperature gradient, now in device during micro electro mechanical device
The mechanical parts such as micro- beam, mems thin film can produce excessive deformation and ess-strain, consequently, it is possible to causing low-cycle fatigue failure.Cause
This, at the beginning of micro electro mechanical device designs, with regard to it is also contemplated that the low-cycle fatigue problem of its mechanical part, and it is tired to carry out low week accordingly
Labor is tested.However, micro structure is small-sized, traditional large-scale fatigue experimental device cannot load it is therefore desirable to be directed to micro- knot
The new fatigue experimental device of structure research and method.
Existing micro structure fatigue experimental device can be divided into contact and contactless two classes.Contact refers to test
Device just must can complete the transmission of load with micro- test specimen directly contact, and this kind of assay device includes vibration table, atomic force microscopy
Mirror, nano-hardness tester etc..Although contact fatigue experimental device can provide sufficiently large load, to ensure low cycle fatigue test
Smooth enforcement, but there is also that assay device is expensive and volume is big, the clamping of micro- test specimen and centering difficult the problems such as.For solving
The problems referred to above, contactless fatigue experimental device arises at the historic moment, and it is mainly loaded using contactless forces such as electrostatic force, test dress
Put low cost and small volume, the clamping of micro- test specimen and centering are also easily controlled.However, existing contactless micro structure fatigue examination
Experiment device is also problematic, and they pass through electrostatic drive parallel-plate or comb structure mostly, by the load transmission of alternation to micro-
On test specimen, micro- test specimen is driven to be in resonance state, so that micro- test specimen examination position occurs fatigue rupture.But due to electrostatic unstability
The presence of effect (pull-in effect), electrostatic force load is seriously restricted, and therefore micro- test specimen is under such assay device
Amplitude not big, generally only electrode spacing 1/3, lead to test specimen examine the vibration stress plastic strain amplitude at position be not enough to into
Row low cycle fatigue test, the test period being embodied as single micro- test specimen was often beyond one day.In order to increase micro- test specimen examination
, thus lowering test period, current method is to design to lack on micro- test specimen for the vibration stress at position, raising low-cycle fatigue damage
Mouthful feature, or micro- test specimen is placed in vacuum environment is tested.Although said method can shorten test period, but
With the anti-fatigue performance of change (weakening) original micro structure as cost, the difference of this experimental condition and actual operating conditions,
Micro structure fatigue data reliability and effectiveness can be affected, also just cannot accurately pre- micro-measuring structure under actual operating conditions
Life-span.In sum, micro structure fatigue field is needed one kind badly and can either simply and easily be tested and (do not exist and clamp and right
Middle problem), can guarantee that the fatigue test dress of stringency of test (not changing micro structure original structure feature and working condition) again
Put.
Content of the invention
The technology of the present invention solve problem: overcome the deficiencies in the prior art, a kind of micro- knot based on self-excited vibration principle is provided
Structure fatigue experimental device, it had both solved the problems, such as that contact assay device high cost, clamping and centering were difficult, improved existing again
There is the not enough problem of the loaded load of contactless assay device.
The technology of the present invention solution: the micro structure fatigue experimental device based on self-excited vibration principle, specifically include:
One insulating supporting pedestal, this insulating supporting pedestal is neither connected with any electrode, also earth-free, is in potential and floats
Dynamic state；
One conductive micro- test specimen, one end of this micro- test specimen is fixed on above-mentioned insulating supporting pedestal, and the other end is level
Hanging shape, micro- test specimen can keep its original architectural feature in micro electro mechanical device；
Two DC driven electrodes, are placed in micro- test specimen both sides and parallel with micro- test specimen, electrode height is slightly below insulating supporting
Pedestal, one of DC driven electrode accesses direct-flow positive voltage, and another DC driven electrode accesses negative DC voltage, two electricity
Certain spacing is kept between pole；
One substrate, described insulating supporting pedestal and DC driven electrode are each attached on this substrate.
By a resistance of connecting between two DC driven electrodes, in one oscillograph of resistor in parallel and counting
Device, realizes monitoring and the record of load cycle number.
Described micro- test specimen can be the micro structure of the multi-forms such as micro-cantilever, micro- simply supported beam, mems thin film, and cross section is permissible
It is the different shape such as square, circular, oval, preparing material can be various conductive materials, such as silicon, gold, aluminum, copper, shape memory
Alloy etc..
Described DC driven electrode is cylinder, and its cross section can be various shapes, including rectangle, cylindrical or oval
Shape.
Described insulating supporting pedestal and backing material are multiple insulant, including polyimides, silicone rubber or photoresist.
When described micro- test specimen is the micro-cantilever of 25-26 μm of diameter, its length is 15-20mm.
Described DC driven electrode be a diameter of 3mm cylindrical when, one of electrode DC driven electrode access just
DC voltage, scope is 0～+3000v, and another DC driven electrode then accesses negative DC voltage, scope is 0～-
3000v, the spacing keeping between electrode is 8-15mm.
Described DC driven electrode be a diameter of 3mm cylindrical when, the height of its insulating supporting pedestal is 3-3.5mm.
The circulation on micro- test specimen can be adjusted by changing cross section, spacing and the DC source output of two electrodes
Load amplitude.
Through Theoretical Calculation and experimental study, when the draw ratio (length-to-diameter) of micro- test specimen is 250-1000, electricity
When the ratio of die opening and micro- beam length is 0.3-0.6, the present invention can only rely on straight in the case of not having alternating current drive signal
Stream voltage, drives micro- test specimen to be in the resonance state near first natural frequency all the time, the vibration amplitude of micro- test specimen can reach
More than 2 times of electrode spacing.For Structural Dynamicses angle, micro- test specimen is transported by itself in the electrostatic field that the present invention produces
The feedback effect of dynamic state adjusts energy input, belongs to a kind of " self-excited vibration ".
Present invention advantage compared with prior art is:
(1) compared with existing contact fatigue experimental device, the loading structure structure of the present invention is simple, size and micro- test specimen
Quite, not there is a problem of that clamping and centering are difficult.
(2) compared with existing contactless fatigue experimental device, the present invention can make micro- test specimen be in significantly self-excited vibration
State, loaded load is sufficiently large, disclosure satisfy that the requirement of low cycle fatigue test, without using design breach feature, be placed in
The methods such as vacuum environment are it is ensured that the precision of fatigue test.
(3) compared with existing contactless fatigue experimental device, present invention greatly simplifies load cycle monitoring and note
Recording device.Existing contactless assay device is to be come by detecting faint capacitance variations (output signal) between micro- test specimen and electrode
Indirect monitoring load cycle.Because output signal and drive signal are the AC signal of same frequency, and output signal is extremely faint,
When be commonly encountered the difficult problem of drive signal and the bad differentiation of output signal.And the drive signal of the present invention is unidirectional current, will not be to friendship
Stream output signal produces interference.One resistance of series connection in the circuit between two DC driven electrodes, you can obtain output signal
Waveform, and record load cycle number.
(4) present invention can carry out the fatigue test of multiple test specimens at lower cost simultaneously.Existing fatigue experimental device
Often using exchange type of drive, and pass through frequency detecting and feedback circuit, micro- test specimen is maintained resonance state, to simultaneously
Carry out the fatigue test of n test specimen, be necessary for being equipped with n set exchange driving and frequency detecting and feedback circuit.And the present invention adopts
DC driven mode, micro structure is in self-excited vibration state, is therefore easy to for n assay device to be connected in parallel on a unidirectional current
Tested under source, eliminate above-mentioned n set exchange and drive and frequency detecting and feedback circuit, test can be saved to greatest extent
Cost.
Brief description
Fig. 1 is the structure top view of the present invention；
Fig. 2 is the structure right view of the present invention；
Fig. 3 is the bulk testing system schematic (comprising to drive and cycle index device) of the present invention；
Fig. 4 is the pulse output test datagram of the present invention；
Fig. 5 is the fatigue test scheme schematic diagram of the present invention；
Fig. 6 carries out the schematic diagram of multiple micro- test specimen fatigue tests for the present invention simultaneously.
Specific embodiment
As shown in Figure 1, 2, the present invention provides a kind of micro structure fatigue experimental device based on self-excited vibration principle, comprising:
It is cuboid in one insulating supporting pedestal 1(the present embodiment, a height of 6mm*3mm*3.3mm of long * width *), this insulating supporting pedestal
It is not connected with any electrode, also earth-free, it is in potential quick condition；It is cylinder in one conductive micro- test specimen 2(the present embodiment
Body, long 15-20mm, 20-60 μm of diameter), one end of this micro- test specimen 2 is fixed on above-mentioned insulating supporting pedestal 1, and the other end is water
Flat hanging shape；Be cylinder in two DC driven electrode 3(the present embodiment, a diameter of 3mm, a length of 20mm), two electrodes 3 with
Micro- test specimen is parallel, and keeps a determining deviation (8-10mm), and one of electrode accesses positive DC voltage (0～+3000v), separately
One electrode then accesses negative DC voltage (0～-3000v)；The a width of 30mm*30mm of the long * of one substrate 4(), above-mentioned one
Insulating supporting pedestal 1 and two DC driven electrodes 3 are each attached on this substrate 4.
The operation principle of the present invention is the chattering based on micro- test specimen in electrostatic field, particularly as follows: straight by two
Stream drive electrode 3 is connected with the positive pole of DC source and negative pole respectively, now can produce one between two electrodes 3 and stablize electrostatic
?；In this electrostatic field, micro- test specimen 2 is subject to electrostatic force because of electrostatic induction effect, and electrostatic force overcomes elastic-restoring force to make micro-
Test specimen produces horizontal-shift；When DC voltage increases further, electrostatic force and horizontal-shift also increase therewith, until elasticity is returned
When multiple power cannot keep balance with electrostatic force, micro- test specimen 2 will occur unstable phenomenon (pull-in), and with DC driven electrode 3
Upper surface；Because micro- test specimen 2 is fixed on insulating supporting pedestal 1, both it was not connected with any electrode and was not grounded, place
In potential quick condition, therefore micro- test specimen 2 contact with DC driven electrode 3 does not lead to short circuit；With above-mentioned contact process
Carry out is that DC driven electrode 3 (makes the potential of micro- test specimen 2 and the electricity of electrode 3 to the charging and discharging process of micro- test specimen 2 simultaneously
Gesture is identical, if contact is anelectrode, is charging process, if contact is negative electrode, is discharge process), due to micro- examination
The electric capacity very little of part 2, this charge and discharge process can complete moment；After the completion of contact and discharge and recharge, because the opposite sex is repelled each other principle,
Reversely, electrostatic force and restoring force drive micro- test specimen 2 to move to opposite direction jointly for electrostatic force suffered by micro- test specimen 2, until with another
Individual DC driven electrode 3 comes in contact and carries out discharge and recharge；So repeatedly, above-mentioned micro- test specimen 2 contact with DC driven electrode 3
With charge and discharge process so that it may so that micro- test specimen 2 forms a kind of stable resonance motion.
In the present invention height of micro- test specimen 2 place insulating supporting pedestal 1 be slightly above electrode 3, so micro- test specimen 2 with electrode
In 3 contact process, it will slip over from the surface of electrode 3 and move forward, anti-immediately after without being stopped by electrode 3
To therefore vibration amplitude can reach more than 2 times of electrode spacing it is sufficient to meet the demand of low cycle fatigue test.
Fig. 3 is the bulk testing system schematic (comprising DC driven and load cycle recording equipment) of the present invention.Wherein,
5 is DC source, and 6 is resistance, and 7 is oscillograph, and 8 is enumerator.As described above, micro- test specimen 2 is in two DC driven electrodes
Between contact process back and forth, be also micro- test specimen 2 charge and discharge process of itself, be figuratively: micro- test specimen is contacted with negative electrode
When, a certain amount of electronics can be absorbed, when then moving to anelectrode, these electronics can be discharged, thus shape between electrodes
Become a series of pulse signal.Therefore this pulse signal can characterize the vibration processes of micro- test specimen and the load of fatigue test
Cyclic process.By a resistance 6 of connecting between electrode, and an oscillograph 7 in parallel and enumerator 8 on resistance 6, you can prison
Survey above-mentioned pulse signal, and realize the record of load cycle, as shown in Figure 4.
Fig. 5 elaborates the fatigue test scheme of the present invention.First, DC voltage DC source 5 being exported is applied to this
After two electrodes 3 of invention, micro- test specimen 2 is in self-excited vibration state, enumerator then start recording load cycle number；Using micro-
Mirror 9 and high speed ccd 10, can obtain indeed vibrations frequency and the vibration amplitude of micro- test specimen 2, and indeed vibrations frequency therein can use
In the calibration of enumerator, indeed vibrations amplitude then can be converted into micro- test specimen 2 by finite element software and examine the vibration at position to answer
Stress-strain amplitude；When micro- test specimen occur fatigue rupture after (micro- test specimen of this example generally within a few houres or even a few minutes just
Fatigue fracture can occur), self-excited vibration will stop, and enumerator is also automatically stopped counting, and load cycle number now is exactly micro-
Test life under this vibration stress level for the test specimen；Then change a new micro- test specimen, and adjust the output of DC source,
In aforementioned manners new test specimen can be carried out with the fatigue test under another vibration stress strain level.
In order to save test period further, n above-mentioned assay device can be connected in parallel under same DC source,
And a resistance 6 and enumerator 8 are set by each assay device, fatigue test is carried out to n micro- test specimen, such as Fig. 6 simultaneously
Shown.Each assay device and its supporting resistance on respective branch road, therefore for the self-excited vibration shape of each micro- test specimen 2
The registration of state, the pulse signal of vibration induction and enumerator 8, all will not interfere,
The micro structure fatigue experimental device based on self-excited vibration principle of the present invention, wherein micro- test specimen 2 can be micro-cantilever
The micro structure of the multi-forms such as beam, micro- simply supported beam, mems thin film, cross section can be the different shape such as square, circular, oval, system
Standby material can be various conductive materials, such as silicon, gold, aluminum, copper, marmem etc.；DC driven electrode 3 cylinder, it is horizontal
Section can be various shapes, including rectangle, cylindrical or oval；Insulating supporting pedestal 1 and substrate 4 to prepare material permissible
For multiple insulant, including polyimides, silicone rubber or photoresist.
The micro structure fatigue experimental device based on self-excited vibration principle of the present invention, can be by changing the horizontal stroke of two electrodes 3
The methods such as section, spacing and DC source output, to adjust the cyclic loading amplitude on micro- test specimen 2.
In a word, present configuration is simple, charger and micro- test specimen sizableness, there is not clamping and difficult the asking of centering
Topic；Can in not gap, be not interposing under conditions of vacuum and provide sufficiently large test load to carry out low-cycle fatigue for micro- test specimen
Test；The fatigue test of multiple micro- test specimens can be carried out at lower cost simultaneously, and easily record load cycle number.
The present invention shows to elaborate and belongs to techniques well known.
The above, be only embodiments of the invention, not the present invention made with any pro forma restriction, every foundation
The principle of the invention and technical spirit sub any simple modification, equivalent variations and modification made to above example, all still fall within
Within the scope of technical solution of the present invention, therefore protection scope of the present invention is worked as and is defined by claims.
Claims (7)
1. a kind of micro structure fatigue experimental device based on self-excited vibration principle, comprising: an insulating supporting pedestal, a micro- examination
Part, two DC driven electrodes, a substrate it is characterised in that:
Described insulating supporting pedestal is not connected with any electrode, also earth-free, is in potential quick condition；
Described micro- test specimen is conductive, and its one end is fixed on above-mentioned insulating supporting pedestal, and the other end is horizontal hanging shape；
Described two DC driven electrodes keep determining deviations, are placed in micro- test specimen both sides parallel with micro- test specimen, one of
Electrode accesses direct-flow positive voltage, and another electrode accesses negative DC voltage；
Aforesaid insulating supporting pedestal and DC driven electrode are fixed with described substrate；
Described insulating supporting base height is slightly above DC driven electrode, and so micro- test specimen is in the contact with DC driven electrode
Cheng Zhong, it will slip over from the surface of DC electrode and move forward, without being stopped immediately after by DC driven electrode
Reversely；When the draw ratio of micro- test specimen be length-to-diameter be 250-1000, the ratio of electrode spacing and micro- beam length is 0.3-
When 0.6, in the case of there is no alternating current drive signal, only rely on DC voltage, drive micro- test specimen to be in the intrinsic frequency of single order all the time
Resonance state near rate, the vibration amplitude of micro- test specimen can reach more than 2 times of electrode spacing it is sufficient to meet low-cycle fatigue examination
The demand tested；
When the cylinder that described DC driven electrode is a diameter of 3mm, one of electrode DC driven electrode accesses positive
DC voltage, scope is 0～+3000v, and another DC driven electrode then accesses negative DC voltage, scope is 0～-
3000v, the spacing keeping between electrode is 8-15mm；
When described DC driven electrode be a diameter of 3mm cylindrical when, the height of described insulating supporting pedestal is 3-3.5mm；
In order to save test period further, n above-mentioned assay device can be connected in parallel under same DC source, and
One resistance and enumerator are set by each assay device, fatigue test are carried out to n micro- test specimen, each assay device simultaneously
And its supporting resistance is all on respective branch road, therefore for the pulse of the self-excited vibration state of each micro- test specimen, vibration induction
Signal and the registration of enumerator, all will not interfere.
2. the micro structure fatigue experimental device based on self-excited vibration principle according to claim 1 it is characterised in that: described
Micro- test specimen is micro-cantilever, micro- simply supported beam or mems thin film, and its cross section is square, circular, oval, prepare material be including silicon,
Gold, aluminum, copper, marmem are in interior various conductive materials.
3. the micro structure fatigue experimental device based on self-excited vibration principle according to claim 2 it is characterised in that: work as institute
State micro- test specimen be micro-cantilever, cross section be 25-26 μm of diameter circular when, its length be 15-20mm.
4. the micro structure fatigue experimental device based on self-excited vibration principle according to claim 1 it is characterised in that: described
DC driven electrode is cylinder, and its cross section is rectangle, cylindrical or oval.
5. the micro structure fatigue experimental device based on self-excited vibration principle according to claim 1 it is characterised in that: described
Insulating supporting pedestal and backing material are the various insulant including polyimides, silicone rubber or photoresist.
6. the micro structure fatigue experimental device based on self-excited vibration principle according to claim 1 it is characterised in that: pass through
Change cross section, spacing and the DC source output of two electrodes, to adjust the cyclic loading amplitude on micro- test specimen.
7. the micro structure fatigue experimental device based on self-excited vibration principle according to claim 1 it is characterised in that: pass through
Between two DC driven electrodes, one resistance of series connection, in one oscillograph of resistor in parallel and enumerator, realizes load and follows
The monitoring of number of rings and record.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310481444.7A CN103487341B (en) | 2013-10-15 | 2013-10-15 | Self-excited vibration principle-based microstructural fatigue test device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310481444.7A CN103487341B (en) | 2013-10-15 | 2013-10-15 | Self-excited vibration principle-based microstructural fatigue test device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103487341A CN103487341A (en) | 2014-01-01 |
| CN103487341B true CN103487341B (en) | 2017-01-25 |
Family
ID=49827735
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310481444.7A Expired - Fee Related CN103487341B (en) | 2013-10-15 | 2013-10-15 | Self-excited vibration principle-based microstructural fatigue test device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103487341B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104865141B (en) * | 2015-05-07 | 2017-06-23 | 北京航空航天大学 | A kind of surface strength test device |
| CN108254251B (en) * | 2018-01-10 | 2021-03-26 | 北京航空航天大学 | Atmosphere-controllable carbon fiber symmetric bending high-cycle fatigue test device |
| CN109617435A (en) * | 2019-01-28 | 2019-04-12 | 北京航空航天大学 | A kind of transformation of electrical energy circuit and transform method based on mechanical oscillation |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3595849B1 (en) * | 2003-06-30 | 2004-12-02 | 関西ティー・エル・オー株式会社 | Fatigue test equipment for micro / nano materials |
| CN2878348Y (en) * | 2005-12-16 | 2007-03-14 | 北京工业大学 | Microstructure single direction bending pulling fatigue experimental device |
| CN103338021A (en) * | 2013-07-04 | 2013-10-02 | 北京航空航天大学 | Micro electromechanical resonator based on structural self-excited vibration principle |
-
2013
- 2013-10-15 CN CN201310481444.7A patent/CN103487341B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3595849B1 (en) * | 2003-06-30 | 2004-12-02 | 関西ティー・エル・オー株式会社 | Fatigue test equipment for micro / nano materials |
| CN2878348Y (en) * | 2005-12-16 | 2007-03-14 | 北京工业大学 | Microstructure single direction bending pulling fatigue experimental device |
| CN103338021A (en) * | 2013-07-04 | 2013-10-02 | 北京航空航天大学 | Micro electromechanical resonator based on structural self-excited vibration principle |
Non-Patent Citations (1)
| Title |
|---|
| "多晶硅双端固支梁高周循环下疲劳特性的分析";陈龙龙等;《传感技术学报》;20090228;第22卷(第2期);第208-212页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103487341A (en) | 2014-01-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103487341B (en) | Self-excited vibration principle-based microstructural fatigue test device | |
| CN104677746B (en) | Micro structures fatigue at high temperature performance testing device and method under combined stress | |
| CN103837408B (en) | A kind of carbon mono-filaments pulling strengrth proving installation and method of testing thereof | |
| CN103338021A (en) | Micro electromechanical resonator based on structural self-excited vibration principle | |
| CN101839954A (en) | Automatic testing method and automatic testing device of aluminum electrolytic capacitors | |
| CN109738285A (en) | A kind of ultrasonic wave added cupping machine and test method | |
| CN206788288U (en) | Battery core short-circuit test mechanism | |
| CN103076226B (en) | Method for testing tensile mechanical property of metallic foil plate with help of high-frequency vibration | |
| CN100365402C (en) | Force sensor based on Micro-Nano composite structure | |
| CN104897144B (en) | More driving electrodes modal coupling micro-solid mode gyroscopes | |
| CN204536132U (en) | Micro structures fatigue at high temperature performance testing device under compound stress | |
| CN107192615A (en) | Metal electromagnetism loading system based on Lorentz force | |
| CN108169029B (en) | Electromechanical thermal coupling stress corrosion in-situ fatigue performance test device | |
| CN109375118A (en) | Current measuring device and current measurement system | |
| CN102598237A (en) | Methods and arrangement for detecting a wafer-released event within a plasma processing chamber | |
| CN103336147A (en) | High-frequency vibration clamp device for scanning ion conductance microscope | |
| CN106787943B (en) | A kind of S types device for collecting piezoelectric vibration energy | |
| CN102135525A (en) | Mechanics analysis device and mechanics analysis method for piezomodulated and sensed single cell | |
| JP6766351B2 (en) | Micro object characteristic measuring device | |
| CN103904372A (en) | Capacity grading cabinet for groups of lithium batteries | |
| CN203551246U (en) | High temperature superconductive magnetic suspension transverse dynamic test observation analysis system | |
| CN2878348Y (en) | Microstructure single direction bending pulling fatigue experimental device | |
| CN205049670U (en) | Automatic change metallized film condenser pulse ability on -line measuring device | |
| CN1789960A (en) | Apparatus for testing one-way flexural-tensile fatigue of microstructure | |
| US10816536B2 (en) | Bioparticle observation apparatus and bioparticle observation method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170125 Termination date: 20181015 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |