CN103474518A - 多孔金字塔减反射结构制备方法及hit太阳能电池制备工艺 - Google Patents
多孔金字塔减反射结构制备方法及hit太阳能电池制备工艺 Download PDFInfo
- Publication number
- CN103474518A CN103474518A CN2013104678118A CN201310467811A CN103474518A CN 103474518 A CN103474518 A CN 103474518A CN 2013104678118 A CN2013104678118 A CN 2013104678118A CN 201310467811 A CN201310467811 A CN 201310467811A CN 103474518 A CN103474518 A CN 103474518A
- Authority
- CN
- China
- Prior art keywords
- pyramid
- amorphous silicon
- silicon film
- monocrystalline substrate
- deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000002360 preparation method Methods 0.000 title claims abstract description 28
- 238000005516 engineering process Methods 0.000 title claims abstract description 13
- 239000000758 substrate Substances 0.000 claims abstract description 52
- 238000000034 method Methods 0.000 claims abstract description 17
- 238000005530 etching Methods 0.000 claims abstract description 14
- 238000004140 cleaning Methods 0.000 claims abstract description 11
- 239000002253 acid Substances 0.000 claims abstract description 7
- 238000001020 plasma etching Methods 0.000 claims abstract description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 40
- 238000000151 deposition Methods 0.000 claims description 21
- 239000000243 solution Substances 0.000 claims description 21
- 230000008021 deposition Effects 0.000 claims description 20
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 18
- 210000004027 cell Anatomy 0.000 claims description 14
- 230000001413 cellular effect Effects 0.000 claims description 9
- 238000005137 deposition process Methods 0.000 claims description 6
- 239000011259 mixed solution Substances 0.000 claims description 6
- 238000007650 screen-printing Methods 0.000 claims description 6
- 101710134784 Agnoprotein Proteins 0.000 claims description 5
- 238000004062 sedimentation Methods 0.000 claims description 5
- 238000005229 chemical vapour deposition Methods 0.000 claims description 3
- 239000002086 nanomaterial Substances 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 230000002708 enhancing effect Effects 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 11
- 229910052710 silicon Inorganic materials 0.000 abstract description 11
- 239000010703 silicon Substances 0.000 abstract description 11
- 238000002310 reflectometry Methods 0.000 abstract description 6
- 238000002161 passivation Methods 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 3
- 239000003513 alkali Substances 0.000 abstract 1
- 244000144992 flock Species 0.000 abstract 1
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 235000008216 herbs Nutrition 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Photovoltaic Devices (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310467811.8A CN103474518B (zh) | 2013-10-10 | 2013-10-10 | 多孔金字塔减反射结构制备方法及hit太阳能电池制备工艺 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310467811.8A CN103474518B (zh) | 2013-10-10 | 2013-10-10 | 多孔金字塔减反射结构制备方法及hit太阳能电池制备工艺 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103474518A true CN103474518A (zh) | 2013-12-25 |
CN103474518B CN103474518B (zh) | 2015-09-09 |
Family
ID=49799299
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310467811.8A Active CN103474518B (zh) | 2013-10-10 | 2013-10-10 | 多孔金字塔减反射结构制备方法及hit太阳能电池制备工艺 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN103474518B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107611226A (zh) * | 2017-10-09 | 2018-01-19 | 浙江晶科能源有限公司 | 一种晶体硅绒面制作方法、太阳能电池及其制作方法 |
CN111933745A (zh) * | 2020-06-28 | 2020-11-13 | 泰州中来光电科技有限公司 | 一种基于反应离子刻蚀的黑硅钝化接触电池的制备方法 |
WO2024051175A1 (zh) * | 2022-09-07 | 2024-03-14 | 中国科学院上海微系统与信息技术研究所 | 一种柔性薄型单晶硅太阳电池的制备方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101661972A (zh) * | 2009-09-28 | 2010-03-03 | 浙江大学 | 一种低表面反射率的单晶硅太阳电池绒面制作工艺 |
CN101794843A (zh) * | 2010-03-15 | 2010-08-04 | 常州天合光能有限公司 | 一种降低多晶制绒反射率的方法 |
CN102299207A (zh) * | 2011-08-30 | 2011-12-28 | 华北电力大学 | 用于太阳电池的多孔金字塔型硅表面陷光结构制备方法 |
CN102618937A (zh) * | 2012-04-10 | 2012-08-01 | 苏州阿特斯阳光电力科技有限公司 | 一种单晶硅太阳电池的制绒工艺 |
CN103035772A (zh) * | 2012-12-21 | 2013-04-10 | 常州天合光能有限公司 | Hit太阳能电池结构 |
CN103077976A (zh) * | 2012-08-17 | 2013-05-01 | 常州天合光能有限公司 | 一种提高n型衬底hit太阳能电池开路电压的方法 |
CN103219428A (zh) * | 2013-04-12 | 2013-07-24 | 苏州大学 | 一种晶体硅太阳能电池的绒面结构及其制备方法 |
-
2013
- 2013-10-10 CN CN201310467811.8A patent/CN103474518B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101661972A (zh) * | 2009-09-28 | 2010-03-03 | 浙江大学 | 一种低表面反射率的单晶硅太阳电池绒面制作工艺 |
CN101794843A (zh) * | 2010-03-15 | 2010-08-04 | 常州天合光能有限公司 | 一种降低多晶制绒反射率的方法 |
CN102299207A (zh) * | 2011-08-30 | 2011-12-28 | 华北电力大学 | 用于太阳电池的多孔金字塔型硅表面陷光结构制备方法 |
CN102618937A (zh) * | 2012-04-10 | 2012-08-01 | 苏州阿特斯阳光电力科技有限公司 | 一种单晶硅太阳电池的制绒工艺 |
CN103077976A (zh) * | 2012-08-17 | 2013-05-01 | 常州天合光能有限公司 | 一种提高n型衬底hit太阳能电池开路电压的方法 |
CN103035772A (zh) * | 2012-12-21 | 2013-04-10 | 常州天合光能有限公司 | Hit太阳能电池结构 |
CN103219428A (zh) * | 2013-04-12 | 2013-07-24 | 苏州大学 | 一种晶体硅太阳能电池的绒面结构及其制备方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107611226A (zh) * | 2017-10-09 | 2018-01-19 | 浙江晶科能源有限公司 | 一种晶体硅绒面制作方法、太阳能电池及其制作方法 |
CN111933745A (zh) * | 2020-06-28 | 2020-11-13 | 泰州中来光电科技有限公司 | 一种基于反应离子刻蚀的黑硅钝化接触电池的制备方法 |
WO2024051175A1 (zh) * | 2022-09-07 | 2024-03-14 | 中国科学院上海微系统与信息技术研究所 | 一种柔性薄型单晶硅太阳电池的制备方法 |
Also Published As
Publication number | Publication date |
---|---|
CN103474518B (zh) | 2015-09-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102646745B (zh) | 一种光伏器件及太阳能电池 | |
TWI463682B (zh) | 異質接面太陽能電池 | |
CN105070792B (zh) | 一种基于溶液法的多晶太阳电池的制备方法 | |
CN103996746B (zh) | 一种可量产的perl晶体硅太阳电池的制作方法 | |
CN101840953B (zh) | 一种制备表面混合调制晶硅太阳能电池的方法 | |
CN108172658B (zh) | 一种n型异质结双面太阳能电池的制备方法 | |
CN203503678U (zh) | 一种hit太阳能电池 | |
CN103219426A (zh) | 一种超小绒面太阳电池及其制备方法 | |
CN201936901U (zh) | 薄膜太阳能电池组成结构 | |
CN103474518B (zh) | 多孔金字塔减反射结构制备方法及hit太阳能电池制备工艺 | |
CN102270668B (zh) | 一种异质结太阳能电池及其制备方法 | |
CN102569479A (zh) | 叠层硅基异质结太阳能电池 | |
CN108321221B (zh) | 具有微腔结构的石墨烯太阳能电池及其制备方法 | |
CN211238272U (zh) | 一种晶硅/非晶硅异质结电池 | |
CN102157596B (zh) | 一种势垒型硅基薄膜半叠层太阳电池 | |
CN208368521U (zh) | 具有微腔结构的石墨烯太阳能电池 | |
CN103035772A (zh) | Hit太阳能电池结构 | |
CN101707219B (zh) | 本征隔离结构太阳能电池及其制造方法 | |
CN101866969B (zh) | 太阳电池 | |
CN103066153A (zh) | 硅基薄膜叠层太阳能电池及其制造方法 | |
CN203260611U (zh) | 一种hit太阳能电池结构 | |
CN210156405U (zh) | 具有氢退火tco导电膜的异质结电池结构 | |
CN208111466U (zh) | 石墨烯双面太阳能电池 | |
CN202977494U (zh) | 一种晶体硅\非晶硅双节双面电池 | |
CN201360010Y (zh) | 薄膜光伏器件 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: Solar photovoltaic industry park Tianhe Road 213031 north of Jiangsu Province, Changzhou City, No. 2 Patentee after: TRINASOLAR Co.,Ltd. Address before: Solar photovoltaic industry park Tianhe Road 213031 north of Jiangsu Province, Changzhou City, No. 2 Patentee before: trina solar Ltd. |
|
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: Solar photovoltaic industry park Tianhe Road 213031 north of Jiangsu Province, Changzhou City, No. 2 Patentee after: trina solar Ltd. Address before: Tianhe Electronic Industrial Park Road 213022 north of Jiangsu Province, Changzhou City, No. 2 Patentee before: CHANGZHOU TRINA SOLAR ENERGY Co.,Ltd. |