CN103456900A - Flexible display device manufacturing method - Google Patents
Flexible display device manufacturing method Download PDFInfo
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- CN103456900A CN103456900A CN2013103648134A CN201310364813A CN103456900A CN 103456900 A CN103456900 A CN 103456900A CN 2013103648134 A CN2013103648134 A CN 2013103648134A CN 201310364813 A CN201310364813 A CN 201310364813A CN 103456900 A CN103456900 A CN 103456900A
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Abstract
The invention provides a flexible display device manufacturing method. The method includes the steps of grafting an organic functional group on the surface of a hard carrier substrate, coating the surface of the modified hard carrier substrate with a pre-formed photoresist film layer, manufacturing a flexible substrate on the photoresist film layer, manufacturing a flexible display component on the flexible substrate, carrying out ultraviolet irradiation treatment on the modified hard carrier substrate, and stripping the flexible substrate from photoresist by adopting physical means between the modified hard carrier substrate and the flexible substrate. According to the method, the organic functional group is grafted on the surface of the hard carrier substrate, the photoresist has a cross-linking polymerization reaction with the organic functional group grafted on the surface of the modified hard carrier substrate after the photoresist undergoes ultraviolet irradiation treatment, therefore, the photoresist can adhere to the surface of the modified hard carrier substrate firmly, and consequently, the flexible substrate can be stripped from the modified hard carrier substrate and the photoresist when the physical means are adopted. The method is simple, easy to realize, good in stripping performance, and free from damage to the flexible substrate and the flexible display component.
Description
Technical field
The invention belongs to field of display, relate in particular to a kind of manufacture method of flexible display apparatus.
Background technology
Flexible display apparatus refers to the display unit for preparing photoelectric device and obtain on flexible base, board.Due to flexible display apparatus have ultra-thin, can be curling, folding, shock-resistant, shock resistance is strong, lightweight, volume is little, the advantage such as easy to carry, be subject to showing great attention to of industry, be widely used in the multiple technologies fields such as electroluminescent device demonstration, liquid crystal display, electrophoretic display, application prospect is very considerable.
At present, for prepare photoelectric device on flexible base, board, obtain flexible display apparatus, following three kinds of methods arranged usually:
Mode one: adopt the method for not carrying out any processing, directly on flexible base, board, preparing photoelectric device to obtain flexible display apparatus.This method is simple to operate, but due in the process for preparing photoelectric device on flexible base, board, flexible base, board is easily crooked, therefore is difficult to realize the flexible large tracts of land production that shows product.
Mode two: adopt volume to volume (roll-to-roll process) method to prepare flexible display apparatus.There are similarity in the method and mode one: be and through directly preparing photoelectric device on the flexible base, board of any processing, do not obtaining flexible display apparatus; Different, the method adopts and be prepared photoelectric device in the coiling flexible base, board.In theory, use the method can realize the flexible large-scale production that shows product, but larger owing to using the method to produce the organic light-emitting device technical difficulty on flexible base, board, currently available technology is difficult to realization.
Mode three: the conventional glass for the preparation of photoelectric device of employing etc., as carrier substrates, are pasted combination, fixing flexible substrate by carrier substrate of glass and flexible base, board, then prepare photoelectric device on flexible base, boards.After preparation process finishes, then flexible photoelectric device is separated from glass carrier.Use the method to prepare flexible display apparatus, because carrier substrate of glass plays a part the fixing flexible substrate, therefore in the preparation process of flexible display apparatus, do not deform, fold etc., effectively solve the flexible base, board that mode one exists and held flexible technical problem.
Have the problems such as frangible, easy curling and distortion due to flexible base, board, first, second kind of method all is difficult to produce the flexibility demonstration product of high-quality, and is difficult to realize large tracts of land production.In actual production process, general the third method that adopts prepares flexible display apparatus, after being about to flexible base, board and being pasted on the rigid carrier substrate surface such as glass, complete the manufacturing process of follow-up flexible display device, after prepared by device, by suitable stripping means, rigid carrier is peeled off again, thereby completed the making of whole flexible display.So, how flexible base, board and rigid carrier are carried out to suitable adhesion and peel off one of key technology that becomes the flexible display making.
To this, researchers have carried out a large amount of research.Common stripping means is to adopt High energy laser beam scanning at the carrier substrate back side, binding agent is occurred aging, and adhesive performance descends, thereby flexible base, board can be stripped down from the nonbreakable glass substrate.But because this method needs superlaser scanning, cause production efficiency lower, and cost is very high, simultaneously, superlaser scanning also likely brings certain impact to the device of preparation, and then the flexible performance that shows product of impact.
In addition, researchers have also developed other stripping means, as made metal level, oxide skin(coating), dielectric film between carrier substrates and flexible base, board, or binding agent is processed, and then adopted respectively diverse ways that flexible base, board and carrier substrates are peeled off; Or, by form the semiconductor film have non crystalline structure and contain hydrogen on carrier substrates, then heating makes to cause between metal level and oxide skin(coating) the diffusion of hydrogen, make between the two stress changes and realize peeling off of flexible base, board and carrier substrates.Although these methods are feasible, increased to a certain extent the complexity of technique, increased cost, be unfavorable for making the high-quality flexible product that shows.
Summary of the invention
The purpose of the embodiment of the present invention is to provide a kind of manufacture method of flexible display apparatus, be intended to solve to use after carrier substrates fixing flexible substrate prepare flexible display device and obtain in the flexible process that shows product, flexible base, board and carrier substrates stripping technology complexity, stripping technology condition poor controllability, be unfavorable for making high-quality flexibility demonstration product and the high problem of cost.
The embodiment of the present invention is achieved in that a kind of manufacture method of flexible display apparatus, comprises the steps:
One hard carrier substrate is provided;
To the modifying surface of described hard carrier substrate, the grafting organo-functional group, to form the modified hard carrier substrates;
Apply the preset photoresist of one deck on the surface of described modified hard carrier substrates, to form the sticking photoresist rete of tool;
Prepare organic material to form flexible base, board on dried described photoresist rete, make described flexible base, board and the adhesion of described photoresist rete;
Make flexible display device on described flexible base, board;
A side irradiation ultraviolet radiation that deviates from described flexible display device from described modified hard carrier substrates, allow the organo-functional group generation cross-linking polymerization on surface of monomer in photoresist and modified hard carrier substrates, make photoresist stick to firmly the surface of modified hard carrier substrates;
Apply physical means between modified hard carrier substrates and flexible base, board, so that flexible base, board and modified hard substrate and photoresist lift off thereof.
The manufacture method of flexible display apparatus provided by the invention, it is by carrying out modification to the hard carrier substrate surface, the grafting organo-functional group, and apply the preset photoresist of one deck on the surface of modified hard carrier substrates, after ultraviolet treatment with irradiation, the organo-functional group of the monomer in photoresist and modified hard carrier substrates surface graft carries out cross-linking polymerization, make photoresist stick to firmly the surface of hard carrier substrate, when between hard carrier substrate and flexible base, board, applying physical means, can be by flexible base, board and hard carrier substrate and photoresist lift off thereof.The method manufacture craft is simple, and production cost is low, is applicable to large-area manufacturing, thereby provides powerful guarantee for flexible base, board in the application of demonstration product scope.
The accompanying drawing explanation
Fig. 1 is the schematic flow sheet of the manufacture method of the flexible display apparatus that provides of the embodiment of the present invention;
The reaction principle schematic diagram to the modification of hard carrier substrate, grafting organo-functional group that Fig. 2 embodiment of the present invention provides;
Fig. 3 is the structural representation after modified hard carrier substrates surface-coated photoresist rete that the embodiment of the present invention provides;
Fig. 4 be the embodiment of the present invention provide prepare flexible base, board on the photoresist rete after structural representation;
Fig. 5 is the structural representation after the making flexible display device on flexible base, board that the embodiment of the present invention provides;
Fig. 6 is that the side that the hard carrier substrate is deviated to flexible display device that the embodiment of the present invention provides is carried out the schematic diagram that ultraviolet ray is irradiated;
Fig. 7 is the flexible display apparatus that provides of the embodiment of the present invention and the schematic diagram after the hard carrier substrate desquamation.
Embodiment
In order to make the technical problem to be solved in the present invention, technical scheme and beneficial effect clearer, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein, only in order to explain the present invention, is not intended to limit the present invention.
1-7 by reference to the accompanying drawings, the embodiment of the present invention provides a kind of manufacture method of flexible display apparatus, comprises the steps:
S01., one hard carrier substrate is provided;
Particularly, in the present embodiment, described hard carrier substrate can be carrier substrate of glass or silicon chip carrier substrate.
S02. to the modifying surface of described hard carrier substrate, the grafting organo-functional group, to form the modified hard carrier substrates;
As depicted in figs. 1 and 2, in the described step S02 of the embodiment of the present invention, need to process the modifying surface of described hard carrier substrate 1, the grafting organo-functional group, form modified hard carrier substrates 1 '.As preferred embodiment, the method to the modifying surface of described hard carrier substrate 1, comprise the steps:
S021. described hard carrier substrate 1 is placed in to 98%H
2sO
4with 30%H
2o
2and for example by volume carry out, in the mixed solution of proportioning (, volume ratio can be 3:1), at the temperature of 120-180 ℃ (as 150 ℃), 2-4 hour (as 3 hours) of reaction, make H
2o
2at H
2sO
4catalysis under the hydroxyl that decomposites by chemisorbed, be attached on the hard carrier substrate, obtain the hard carrier substrate 1 of rich surface hydroxyl;
S022. the hard carrier substrate 1 of above-mentioned rich surface hydroxyl is first rinsed respectively to then in 120 ℃ of vacuum dry 8 hours by acetone, ethanol;
In above-mentioned steps, in order to obtain the described hard carrier substrate 1 of cleaning, rich surface hydroxyl that impurity is few, the described hard carrier substrate 1 of above-mentioned rich surface hydroxyl is rinsed and dry the processing.Can use respectively the organic solvents such as acetone, ethanol to carry out several to it and clean, remove solvent or the impurity of hard carrier substrate 1 remained on surface of described rich surface hydroxyl.
S023. will be attached with the hard carrier substrate 1 of hydroxyl after flushing and drying, immerse in the anhydrous toluene solution that contains the siliceous coupling reagent of esters of acrylic acid (as 3-(trimethoxysilyl) propyl group-2-methyl-2-acrylate) that mass fraction is 0.2%, 3-5 hour (as 4 hours) of reaction under the state of sealing, the organo-functional group grafting that makes hydroxyl on the hard carrier substrate and the trimethoxysilyl generation chemical reaction in 3-(trimethoxysilyl) propyl group-2-methyl-2-acrylate and make 3-(trimethoxysilyl) propyl group-2-methyl-2-acrylate is to the hard carrier substrate, to form modified hard carrier substrates 1 ',
Wherein, described 3-(trimethoxysilyl) propyl group-2-methyl-2-acrylate comprises organo-functional group.
In the present embodiment, hard carrier substrate 1 is after surface treatment, contain abundant hydroxyl, form monolayer by the hydrolysis of the siliceous coupling reagent of esters of acrylic acid and the hydroxy combining on carrier substrates 1 surface again, this layer of monolayer, can be in uv-exposure with photoresist in polymerization single polymerization monomer by the two key cross-linked polymerics of C=C.
In the present embodiment, the modified hard carrier substrates 1 ' obtained through above-mentioned processing, the organic solvent that can adopt acetone etc. not affect above-mentioned modified support structure and performance is cleaned, and uses N
2deng inert gas, dry up, standby.
S03. apply the preset photoresist of one deck on the surface of described modified hard carrier substrates 1 ', to form the sticking photoresist rete 2 of tool;
As shown in figures 1 and 3, in the described step S03 of the embodiment of the present invention, apply the preset photoresist of one deck on the surface of described modified hard carrier substrates 1 ', to form the sticking photoresist rete 2 of tool.Particularly, described preset photoresist comprises polymerization single polymerization monomer, crosslinking agent and light trigger, and the mass fraction of the mixing of above-mentioned three kinds of components is respectively 70-85%, 10-30%, 1-5%.Wherein, particularly, described light trigger can be I-907
, described polymerization single polymerization monomer can be BMA
, described crosslinking agent can be TMPTA
S04. prepare organic material to form flexible base, board on dried described photoresist rete, make described flexible base, board and the adhesion of described photoresist rete;
As shown in Figure 1 and Figure 4, in the described step S04 of the embodiment of the present invention, described photoresist rete 2 is carried out to drying and process, prepare organic material to form flexible base, board 3 on dried described photoresist rete 2, make described flexible base, board 3 and described photoresist rete 2 adhesions.Now, because described photoresist has certain viscosity, can guarantee that by this photoresist rete 2 flexible base, board 3 keeps adhesion to be combined with modified hard carrier substrates 1 ', prevent in the preparation process of follow-up flexible display device, flexible base, board 3 breaks away from modified hard carrier substrates 1 '.The described organic material for preparing flexible base, board 3 can be selected PI, PET, PES, PEN or PC.
S05. make flexible display device on described flexible base, board;
As shown in Figure 1 and Figure 5, in the described step S05 of the embodiment of the present invention, on described flexible base, board 3, prepare flexible display device 4.Described flexible display device 4 can be the OLED device.
S06. deviate from a side irradiation ultraviolet radiation of described flexible display device from described modified hard carrier substrates, allow the organo-functional group generation cross-linking polymerization on surface of monomer in the photoresist rete and modified hard carrier substrates, make the photoresist rete stick to firmly the surface of modified hard carrier substrates;
As shown in accompanying drawing 1 and Fig. 6, in the described step S06 of the embodiment of the present invention, deviate from a side irradiation ultraviolet radiation of described flexible display device 4 from described modified hard carrier substrates 1 '.After ultraviolet ray is irradiated, after the acceptance of component light trigger or absorption ultraviolet ray in described photoresist rete 2, chemical change occurs in self, is decomposed into free radical or cation, thus initiated polymerization.Component polymerization single polymerization monomer in described photoresist rete 2 is under the effect of above-mentioned light trigger, the two keys of C=C in described polymerization single polymerization monomer molecule are opened, with the monolayer generation cross-linking polymerization that is attached to described modified hard carrier substrates 1 ' surface, thereby strengthened the bonding force of described modified hard carrier substrates 1 ' and photoresist rete 2, made described photoresist rete 2 stick to firmly the surface of described modified hard carrier substrates 1 '.
S07. apply physical means between modified hard carrier substrates and flexible base, board, so that flexible base, board and modified hard carrier substrates 1 ' and photoresist rete thereof are peeled off.
As shown in accompanying drawing 1 and Fig. 7, in the described step S07 of the embodiment of the present invention, apply physical means between described modified hard carrier substrates 1 ' and described flexible base, board 3, so that described flexible base, board 3 is peeled off fully with described modified hard carrier substrates 1 ' and photoresist rete 2 thereof.After ultraviolet treatment with irradiation, adhesion between described modified hard carrier substrates 1 ' and described photoresist rete 2 obviously increases, by physical means, described flexible base, board 3 can be stripped down fully from described modified hard carrier substrates 1 ' and photoresist rete 2 thereof, wherein said physical means can be and applies mechanical force, as lift, the means such as traction, cutter are cut.
The manufacture method of the flexible display apparatus that the embodiment of the present invention provides, it is by carrying out modification to the hard carrier substrate surface, the grafting organo-functional group, and apply the preset photoresist of one deck on the surface of modified hard carrier substrates, after ultraviolet treatment with irradiation, the organo-functional group of the monomer in photoresist and modified hard carrier substrates surface graft carries out cross-linking polymerization, make photoresist stick to firmly the surface of hard carrier substrate, when between hard carrier substrate and flexible base, board, applying physical means, can be by flexible base, board and hard carrier substrate and photoresist lift off thereof.The method manufacture craft is simple, and production cost is low, is applicable to large-area manufacturing, thereby provides powerful guarantee for flexible base, board in the application of demonstration product scope.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, all any modifications of doing within the spirit and principles in the present invention, be equal to and replace and improvement etc., within all should being included in protection scope of the present invention.
Claims (6)
1. the manufacture method of a flexible display apparatus, is characterized in that, comprises the steps:
One hard carrier substrate is provided;
To the modifying surface of described hard carrier substrate, the grafting organo-functional group, to form the modified hard carrier substrates;
Apply the preset photoresist of one deck on the surface of described modified hard carrier substrates, to form the sticking photoresist rete of tool;
Prepare organic material to form flexible base, board on dried described photoresist rete, make described flexible base, board and the adhesion of described photoresist rete;
Make flexible display device on described flexible base, board;
A side irradiation ultraviolet radiation that deviates from described flexible display device from described modified hard carrier substrates, allow monomer in photoresist and the organo-functional group generation cross-linking polymerization on modified hard carrier substrates surface, make photoresist stick to firmly the surface of modified hard carrier substrates;
Apply physical means between described modified hard carrier substrates and described flexible base, board, so that flexible base, board and modified hard carrier substrates and photoresist lift off thereof.
2. the manufacture method of flexible display apparatus as claimed in claim 1, is characterized in that, to the modifying surface of described hard carrier substrate, the grafting organo-functional group specifically comprises with the step that forms the modified hard carrier substrates:
Described hard carrier substrate is placed in to 98%H
2sO
4with 30%H
2o
2and according to volume, carry out in the mixed solution of proportioning, at the temperature of 120-180 ℃, reaction 2-4 hour, make H
2o
2at H
2sO
4catalysis under the hydroxyl that decomposites by chemisorbed, be attached on the hard carrier substrate;
To be attached with the hard carrier substrate of hydroxyl after flushing and drying, immerse in the anhydrous toluene solution that contains the organo-functional group that mass fraction is 0.2%, reaction 3-5 hour under the state of sealing, make hydroxyl on the hard carrier substrate and the trimethoxysilyl generation chemical reaction in organo-functional group and make the organo-functional group grafting to the hard carrier substrate, to form the modified hard carrier substrates;
Wherein, described organo-functional group is the siliceous coupling reagent of esters of acrylic acid.
3. the manufacture method of flexible display apparatus as claimed in claim 1, it is characterized in that, described preset photoresist comprises polymerization single polymerization monomer, crosslinking agent and light trigger, wherein, the mass fraction that described polymerization single polymerization monomer, crosslinking agent and light trigger three mix is respectively 70-85%, 10-30%, 1-5%.
4. the manufacture method of flexible display apparatus as claimed in claim 1, it is characterized in that, a described side irradiation ultraviolet radiation that deviates from described flexible display device from described hard carrier substrate, allow the organo-functional group generation cross-linking polymerization on surface of monomer in photoresist and hard carrier substrate, photoresist is sticked in the step on surface of hard carrier substrate firmly
After ultraviolet ray is irradiated, the organo-functional group on the polymerization single polymerization monomer in described photoresist and described modified hard carrier substrates surface is by C=C key cross-linked polymeric.
5. the preparation method of modified support as claimed in claim 1, it is characterized in that: the described organic material for preparing flexible base, board is at least one in PI, PET, PES, PC, PEN.
6. the preparation method of modified support as claimed in claim 1, is characterized in that: described hard carrier substrate employing carrier substrate of glass or silicon chip carrier substrate.
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| CN109839770A (en) * | 2017-11-29 | 2019-06-04 | 张家港康得新光电材料有限公司 | Flexible display panels and flexible liquid crystal display based on it |
| CN111903199A (en) * | 2018-03-26 | 2020-11-06 | 应用材料公司 | Method for producing a flexible device, a flexible electronic device and a flexible arrangement of a plurality of electronic devices |
| CN108511635A (en) * | 2018-06-07 | 2018-09-07 | 京东方科技集团股份有限公司 | A kind of preparation method of flexible display substrates |
| CN108511635B (en) * | 2018-06-07 | 2020-03-06 | 京东方科技集团股份有限公司 | Preparation method of flexible display substrate |
| CN109192077A (en) * | 2018-11-07 | 2019-01-11 | 深圳秋田微电子股份有限公司 | The production method of flexible liquid crystal device |
| CN109192077B (en) * | 2018-11-07 | 2019-09-03 | 深圳秋田微电子股份有限公司 | The production method of flexible liquid crystal device |
| CN111415949A (en) * | 2020-04-27 | 2020-07-14 | 武汉华星光电半导体显示技术有限公司 | Flexible display panel and manufacturing method thereof |
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