CN103409795A - Crucible platform lifting mechanism of pseudo-single crystal silicon ingot furnace - Google Patents
Crucible platform lifting mechanism of pseudo-single crystal silicon ingot furnace Download PDFInfo
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- CN103409795A CN103409795A CN2013103282490A CN201310328249A CN103409795A CN 103409795 A CN103409795 A CN 103409795A CN 2013103282490 A CN2013103282490 A CN 2013103282490A CN 201310328249 A CN201310328249 A CN 201310328249A CN 103409795 A CN103409795 A CN 103409795A
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- supporting plate
- crucible platform
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- column
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Abstract
The invention relates to a crucible platform lifting mechanism of a pseudo-single crystal silicon ingot furnace, which comprises a crucible platform, a graphite column, a steel column, a supporting plate, a lifting device, a flexible transmission shaft and a motor, wherein the graphite column is arranged on the bottom surface of the crucible platform, downwards extends out of a lower thermal insulator, and then is connected with the steel column; after downwards extending out of a furnace body, the steel column is fixedly connected with the supporting plate horizontally arranged; the lifting device is fixedly arranged below the furnace body, and is connected with the supporting plate; the flexible transmission shaft and the motor are arranged on the supporting plate; the lifting device is connected with and driven by the flexible transmission shaft; the flexible transmission shaft is connected with and driven by the motor. The crucible platform lifting mechanism has a reasonable structure, the crucible platform is enabled to move up and down in the thermal insulator of the ingot furnace, and the process requirement in the quasi-single crystal silicon ingot production process is met.
Description
Technical field
The invention belongs to accurate single-crystal ingot casting furnace technical field, particularly the hoisting appliance of crucible platform in ingot furnace.
Background technology
Accurate monocrystalline is the mode of casting crystalline that adopts on polycrystalline silicon ingot or purifying furnace, the quasi-monocrystalline silicon with high-conversion rate that a series of advanced persons' of process technical process is produced.Its main technique is that seed crystal is placed in the bottom by quartz crucible in accurate single crystal growing furnace, and under vacuum state, adopts accurately sectional temperature-controlledly, and while guaranteeing the thawing of silicon material, the seed crystal partial melting, grow monocrystalline thus.Domestic polycrystalline silicon ingot or purifying furnace is mainly the structure of GT at present, is that crucible, platform are motionless, and upper heating element, side heating element and upper thermal insulator move up and down.This structure can meet processing requirement to polycrystalline silicon ingot or purifying furnace, but just can not meet processing requirement in the ingot furnace of producing quasi-monocrystalline silicon.In order to meet the requirement of quasi-monocrystalline silicon ingot casting, ingot furnace must have strict thermograde and setting rate to control, and therefore the interface shape be applicable to needs an accurate fusing controlling organization of correspondence with it.
Summary of the invention
The object of the present invention is to provide a kind of hoisting appliance of crucible platform of accurate single-crystal ingot casting furnace, produce needed processing requirement to meet the quasi-monocrystalline silicon ingot casting.
For achieving the above object, the present invention adopts following scheme:
A kind of crucible platform hoisting appliance of accurate single-crystal ingot casting furnace, comprise crucible platform, graphite column, steel column, supporting plate, lifting device, transmission mechanism, motor.
Described crucible platform bottom surface is provided with the graphite column, and the graphite column stretches out lower thermal insulator downwards and with steel column, is connected outward, adopts the graphite column to be because the hot environment of thermal insulator inside; Steel column is fixedly connected with horizontally disposed supporting plate after stretching out body of heater downwards, is fixed with lifting device under body of heater, and lifting device is connected with supporting plate; Supporting plate is provided with transmission mechanism and motor, and lifting device is connected and driven by driving snake, and driving snake is connected and driven by motor.
During work, described driven by motor driving snake, driving snake become translational motion drive supporting plate to it by the high precision ball screw lifting device and move up and down, and supporting plate drives crucible platform by steel column and graphite column and realizes up-and-down movement.
The present invention is rational in infrastructure, and crucible platform can be moved up and down in ingot furnace, has met the quasi-monocrystalline silicon ingot casting and has produced needed processing requirement.
The accompanying drawing explanation
Fig. 1 is accurate single-crystal ingot casting furnace of the present invention and crucible platform hoisting appliance structural representation thereof,
Fig. 2 is the upward view of Fig. 1.
In figure: 1 is that body of heater, 2 is that upper thermal insulator, 3 is that crucible platform, 4 is that graphite column, 5 is that lower thermal insulator, 6 is that steel column, 7 is that lifting device, 8 is that motor, 9 is that supporting plate, 10 is driving snake.
Embodiment
The present invention will be further described in detail below in conjunction with embodiment and accompanying drawing thereof:
See Fig. 1, Fig. 2, a kind of crucible platform hoisting appliance of accurate single-crystal ingot casting furnace, comprise crucible platform 3, graphite column 4, steel column 6, supporting plate 9, lifting device 7, driving snake 10, motor 8.
As shown in Figure 1 and Figure 2, crucible platform 3 bottom surfaces of described upper thermal insulator 2, lower thermal insulator 5 inside are provided with three graphite columns 4, graphite column 4 stretches out downwards outside lower thermal insulator 5 and is connected with steel column 6, steel column 6 is fixedly connected with horizontally disposed supporting plate 9 after stretching out body of heater 1 downwards, body of heater is fixed with three lifting devices 7 for 1 time, the leading screw of lifting device 7 and supporting plate 9 are connected, supporting plate 9 is provided with driving snake 10 and motor 8, lifting device 7 is connected with driving snake 10, and driving snake 10 is connected with motor 8.
Described motor 8 drives two driving snakes 10, driving snake 10 drives 7 rotations of three lifting devices by ball-screw, the leading screw of lifting device 7 is converted to moving up and down of supporting plate 9, and supporting plate 9 drives crucible platform 3 by three steel columns 6 and graphite column 4 and realizes up-and-down movement.
Above-described is only the preferred embodiment of the present invention, it should be pointed out that for the person of ordinary skill of the art, under the premise without departing from the principles of the invention, can also make some modification and improvement, and these also should be considered as belonging to protection scope of the present invention.
Claims (1)
1. the crucible platform hoisting appliance of an accurate single-crystal ingot casting furnace, is characterized in that: comprise crucible platform, graphite column, steel column, supporting plate, lifting device, driving snake and motor;
Described crucible platform bottom surface is provided with the graphite column, and the graphite column stretches out lower thermal insulator downwards and with steel column, is connected outward, and steel column is fixedly connected with horizontally disposed supporting plate after stretching out body of heater downwards; Under body of heater, be fixed with lifting device, lifting device is connected with supporting plate; Supporting plate is provided with driving snake and motor, and lifting device is connected and driven by driving snake, and driving snake is connected and driven by motor.
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CN2013103282490A CN103409795A (en) | 2013-08-01 | 2013-08-01 | Crucible platform lifting mechanism of pseudo-single crystal silicon ingot furnace |
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CN2013103282490A CN103409795A (en) | 2013-08-01 | 2013-08-01 | Crucible platform lifting mechanism of pseudo-single crystal silicon ingot furnace |
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CN103409795A true CN103409795A (en) | 2013-11-27 |
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CN2013103282490A Pending CN103409795A (en) | 2013-08-01 | 2013-08-01 | Crucible platform lifting mechanism of pseudo-single crystal silicon ingot furnace |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103741205A (en) * | 2014-01-28 | 2014-04-23 | 安徽大晟新能源设备科技有限公司 | Full monocrystalline silicon ingot casting furnace |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101429677A (en) * | 2007-11-07 | 2009-05-13 | 常州华盛天龙机械有限公司 | Polysilicon ingot furnace |
CN203382849U (en) * | 2013-08-01 | 2014-01-08 | 安徽大晟新能源设备科技有限公司 | Lifting mechanism for crucible platform of pseudo-single crystal ingot furnace |
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2013
- 2013-08-01 CN CN2013103282490A patent/CN103409795A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101429677A (en) * | 2007-11-07 | 2009-05-13 | 常州华盛天龙机械有限公司 | Polysilicon ingot furnace |
CN203382849U (en) * | 2013-08-01 | 2014-01-08 | 安徽大晟新能源设备科技有限公司 | Lifting mechanism for crucible platform of pseudo-single crystal ingot furnace |
Non-Patent Citations (1)
Title |
---|
J.E.希格利等: "《机械工程设计 下册》", 30 September 1988, article "机械工程设计", pages: 323 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103741205A (en) * | 2014-01-28 | 2014-04-23 | 安徽大晟新能源设备科技有限公司 | Full monocrystalline silicon ingot casting furnace |
CN103741205B (en) * | 2014-01-28 | 2016-02-24 | 安徽大晟新能源设备科技有限公司 | Full monocrystalline silicon cast ingot stove |
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Application publication date: 20131127 |