CN103386566B - 介质基片激光加工夹具及其使用方法 - Google Patents
介质基片激光加工夹具及其使用方法 Download PDFInfo
- Publication number
- CN103386566B CN103386566B CN201310289370.7A CN201310289370A CN103386566B CN 103386566 B CN103386566 B CN 103386566B CN 201310289370 A CN201310289370 A CN 201310289370A CN 103386566 B CN103386566 B CN 103386566B
- Authority
- CN
- China
- Prior art keywords
- dielectric substrate
- laser processing
- medium substrate
- plane region
- adjustment screw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
Description
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310289370.7A CN103386566B (zh) | 2013-07-10 | 2013-07-10 | 介质基片激光加工夹具及其使用方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310289370.7A CN103386566B (zh) | 2013-07-10 | 2013-07-10 | 介质基片激光加工夹具及其使用方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103386566A CN103386566A (zh) | 2013-11-13 |
CN103386566B true CN103386566B (zh) | 2015-04-01 |
Family
ID=49531089
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310289370.7A Active CN103386566B (zh) | 2013-07-10 | 2013-07-10 | 介质基片激光加工夹具及其使用方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN103386566B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108074860B (zh) * | 2018-01-12 | 2024-03-15 | 紫石能源有限公司 | 一种基片固定装置 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58176946A (ja) * | 1982-04-09 | 1983-10-17 | Toshiba Corp | ウエハ保持装置 |
JPS6025245A (ja) * | 1983-07-21 | 1985-02-08 | Teru Barian Kk | 半導体製造に使用されるウエハ−ホルダ− |
US5718574A (en) * | 1995-03-01 | 1998-02-17 | Tokyo Electron Limited | Heat treatment apparatus |
US5725718A (en) * | 1992-10-27 | 1998-03-10 | Applied Materials, Inc. | Clamp ring for domed heated pedestal in wafer processing chamber |
CN1321333A (zh) * | 1999-09-03 | 2001-11-07 | 三菱硅材料株式会社 | 晶片保持架 |
EP1253631A1 (en) * | 2000-10-16 | 2002-10-30 | Nippon Steel Corporation | Wafer holder, wafer support member, wafer holding device, and heat treating furnace |
CN201045735Y (zh) * | 2007-01-30 | 2008-04-09 | 葳明科技有限公司 | 晶片承载固定装置 |
-
2013
- 2013-07-10 CN CN201310289370.7A patent/CN103386566B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58176946A (ja) * | 1982-04-09 | 1983-10-17 | Toshiba Corp | ウエハ保持装置 |
JPS6025245A (ja) * | 1983-07-21 | 1985-02-08 | Teru Barian Kk | 半導体製造に使用されるウエハ−ホルダ− |
US5725718A (en) * | 1992-10-27 | 1998-03-10 | Applied Materials, Inc. | Clamp ring for domed heated pedestal in wafer processing chamber |
US5718574A (en) * | 1995-03-01 | 1998-02-17 | Tokyo Electron Limited | Heat treatment apparatus |
CN1321333A (zh) * | 1999-09-03 | 2001-11-07 | 三菱硅材料株式会社 | 晶片保持架 |
EP1253631A1 (en) * | 2000-10-16 | 2002-10-30 | Nippon Steel Corporation | Wafer holder, wafer support member, wafer holding device, and heat treating furnace |
CN201045735Y (zh) * | 2007-01-30 | 2008-04-09 | 葳明科技有限公司 | 晶片承载固定装置 |
Also Published As
Publication number | Publication date |
---|---|
CN103386566A (zh) | 2013-11-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4486077B2 (ja) | 形状構成可能なダイ分離装置 | |
DE60123366D1 (de) | Halter für eine substratkassette und vorrichtung ausgerüstet mit diesem halter | |
CN103386566B (zh) | 介质基片激光加工夹具及其使用方法 | |
CN103639753A (zh) | 矩形块高精度钻孔加工定位工装 | |
CN105282975A (zh) | 一种针对pcb板的螺纹孔加工方法 | |
CN110890295A (zh) | 一种用于多个激光器芯片贴装的夹具 | |
CN105904243A (zh) | 一种用于数控加工的零件快装止动方法 | |
KR101518042B1 (ko) | 대면적 피가공물 고정용 보조지그 | |
CN210073803U (zh) | 一种不规则晶圆固定装置 | |
KR101663997B1 (ko) | 스마트폰의 사이드키나 외장부품 곡면 가공방법 | |
CN204262900U (zh) | 对刀仪 | |
CN104392952A (zh) | 一种芯片专用夹具 | |
CN204976101U (zh) | 装夹工装 | |
CN203659352U (zh) | 一种标记支架用快速装夹工装 | |
CN204976070U (zh) | 一种斜度加工夹具 | |
CN209767942U (zh) | 一种hdi线路板定位装置 | |
KR101518043B1 (ko) | 대면적 피가공물 고정용 보조지그 | |
CN216371889U (zh) | 一种激光切割后晶圆储存盒加工专用放置夹紧机构 | |
CN209831729U (zh) | 一种衬底片切割装置 | |
CN205414812U (zh) | 一种手机通用焊接夹具 | |
CN216329270U (zh) | 一种晶托脱胶工装及脱胶系统 | |
CN218638958U (zh) | 光器件耦合定位夹具 | |
CN208322790U (zh) | 花形双面工件垂直侧向孔加工用装夹装置 | |
CN210745688U (zh) | 一种便于调节的电路板焊接用工装夹具 | |
JP6331701B2 (ja) | ツールホルダ及び溝加工装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP02 | Change in the address of a patent holder | ||
CP02 | Change in the address of a patent holder |
Address after: 233010 No. 726 long march road, Anhui, Bengbu Patentee after: The 41st Institute of CETC Address before: 266555 Qingdao economic and Technological Development Zone, Shandong Xiangjiang Road, No. 98 Patentee before: The 41st Institute of CETC |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20190228 Address after: 266555 Xiangjiang 98, Huangdao District, Qingdao City, Shandong Province Patentee after: China Electronics Technology Instrument and Meter Co., Ltd. Address before: 233010 No. 726 Changzheng Road, Bengbu City, Anhui Province Patentee before: The 41st Institute of CETC |
|
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: 266555 Xiangjiang 98, Huangdao District, Qingdao City, Shandong Province Patentee after: CLP kesiyi Technology Co.,Ltd. Address before: 266555 Xiangjiang 98, Huangdao District, Qingdao City, Shandong Province Patentee before: CHINA ELECTRONIC TECHNOLOGY INSTRUMENTS Co.,Ltd. |