CN103335833A - Device for online measuring dynamic performance of ultra-precision hydrostatic spindle and method for measuring dynamic performance of hydrostatic spindle by using same - Google Patents
Device for online measuring dynamic performance of ultra-precision hydrostatic spindle and method for measuring dynamic performance of hydrostatic spindle by using same Download PDFInfo
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- CN103335833A CN103335833A CN2013102724412A CN201310272441A CN103335833A CN 103335833 A CN103335833 A CN 103335833A CN 2013102724412 A CN2013102724412 A CN 2013102724412A CN 201310272441 A CN201310272441 A CN 201310272441A CN 103335833 A CN103335833 A CN 103335833A
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Abstract
The invention discloses a device for online measuring dynamic performance of an ultra-precision hydrostatic spindle and a method for measuring the dynamic performance of the hydrostatic spindle by using the same, and relates to the method for online measuring the dynamic performance of the ultra-precision hydrostatic spindle. The problem that in the convention method, online measurement of the dynamic performance of the ultra-precision hydrostatic spindle cannot be carried out, or influence of an installing error and a manufacturing error of a measuring benchmark on a measuring result is difficultly avoided is solved. The method provided by the invention comprises the following steps: acquiring displacement information between a sensor and a standard ball by using a high-precision displacement sensor; amplifying the acquired displacement information by a signal amplifier; inputting the acquired displacement information into a computer after passing through an A/D (analog/digital) conversion circuit and a data acquisition circuit; acquiring phase information of the spindle and inputting the phase information into the computer by using a rotary encoder; analyzing and processing the phase information by the computer to obtain error data of the rotating dynamic performance of the ultra-precision hydrostatic spindle, thereof implementing the online measurement of the dynamic performance of the ultra-precision hydrostatic spindle. The device and the method are applicable to the online measurement of the dynamic performance of the ultra-precision hydrostatic spindle.
Description
Technical field
The present invention relates to a kind of ultraprecise hydrostatic spindle dynamic property On-line Measuring Method.
Background technology
Fast development along with modern science and technology, particularly Cutting-edge science technology such as Aeronautics and Astronautics, national defence, military project advances by leaps and bounds, these industries are more and more higher to the requirement of the stability of product and usability, be exactly at the widely used KDP quartz crystal device of laser nuclear fusion system relatively typically, characteristics such as this crystal is soft, crisp owing to having, easy deliquescence, traditional optics job operations such as polishing can not be used for the processing of heavy caliber KDP crystal, and single-point diamond fly cutting processing at present is the main means that realize the final processing of KDP crystal.Cut is a kind of copy type processing, and the precision of ultra-precision machine tool has determined the machining precision of part.Therefore, super-precision machine tools is the core and key of KDP crystal ultraprecise processing, and wherein the ultraprecise main shaft is the core component of ultra-precision machine tool, and the dynamic property of ultraprecise main shaft directly has influence on surface quality and the manufacturing accuracy of part to be processed.In actual process, adopt when vertical superfinishing is close to fly to cut processing heavy caliber KDP crystal, at finished surface no matter be along the table feed direction, still on the direction vertical with table feed, all there is regular microwaviness, the space periodic of these microwaviness at tens of micron to tens of millimeter, amplitude is about tens nanometer, the formation that shows these microwaviness after deliberation is relevant with the dynamic property of ultraprecise hydrostatic spindle, and the on-line measurement that how to realize ultraprecise main shaft dynamic property is to bite a huge difficult problem to be solved at present.
Application number is that 200810064030.3 patent of invention discloses a kind of ultra-precise gas static-pressure axis system, but prior art mainly is based on the method realization of static test to the measurement of ultraprecise main shaft performance, this method can not be reacted time of day and the dynamic property of ultraprecise main shaft in practical work process, can realize the on-line measurement of the dynamic property of ultraprecise hydrostatic spindle even adopt specific process, because the manufacturing accuracy of ultraprecise hydrostatic spindle is very high, to hundreds of nanometer scale, the alignment error of measuring basis and foozle all can cause comparatively measurement result and seriously influence the dynamic error that produces in its rotary course when its dynamic property was detected tens of.
Summary of the invention
The objective of the invention is to realize that in order to solve existing method the dynamic property on-line measurement of ultraprecise hydrostatic spindle or existing method are difficult to solve the alignment error of measuring basis and foozle to the problem that measurement result exerts an influence, proposed the device of on-line measurement ultraprecise hydrostatic spindle dynamic property and adopted the method for this measurement device hydrostatic spindle dynamic property.
The device of on-line measurement ultraprecise hydrostatic spindle dynamic property of the present invention, this device comprises signal gathering unit and data processing unit, and described signal gathering unit comprises high accuracy displacement sensor, sensor stand, No. two high accuracy displacement sensors, standard ball, test rod, No. three high accuracy displacement sensors and rotary encoder; The rear end face of ultraprecise hydrostatic spindle rotor is processed as taper, as the measuring basis face;
One end of test rod is fixedlyed connected with standard ball, the other end of test rod is threaded, and by on the interior step that is threaded in hollow main shaft, standard ball is close on the taper measuring basis face, sensor stand is the under shed structure, sensor stand is inverted and is fixed on the stator of motor in the hydrostatic spindle, a high accuracy displacement sensor, No. two high accuracy displacement sensors and No. three high accuracy displacement sensors are separately fixed on the sensor stand, when be used for measuring the rotation of ultraprecise hydrostatic spindle standard ball and high accuracy displacement sensor and between displacement; Rotary encoder is fixed on the ultraprecise hydrostatic spindle; Phase information when rotary encoder is used for measuring main axis rotation;
Data processing unit comprises signal amplifier, A/D change-over circuit, data acquisition circuit and computing machine;
The collection signal output part of a high accuracy displacement sensor, No. two high accuracy displacement sensors and No. three high accuracy displacement sensors is connected three signal input parts of signal amplifier respectively; The output terminal of the phase information of rotary encoder connects the phase information input end of computing machine, the amplified signal output terminal of signal amplifier connects the amplified signal input end of A/D change-over circuit, the digital signal output end of A/D change-over circuit connects the data-signal input end of data acquisition circuit, and the image data output terminal of data acquisition circuit connects the image data input end of computing machine;
Adopt the method for the measurement device hydrostatic spindle dynamic property of above-mentioned on-line measurement ultraprecise hydrostatic spindle dynamic property, the concrete steps of this method are:
Step 1, operation lathe make the work of ultraprecise main shaft, utilize high accuracy displacement sensor, No. two high accuracy displacement sensors and No. three high accuracy displacement sensors to measure displacement information between each displacement transducer and the standard ball respectively; And the displacement information that will measure between each displacement transducer and the standard ball passes to signal amplifier;
The phase information that the information that step 6, computing machine obtain the step 5 collection and the motor that step 2 obtains rotate is carried out homophase and is subtracted each other, obtain the dynamic property error information of ultraprecise hydrostatic spindle rotation, and the dynamic property error information that will obtain the rotation of ultraprecise hydrostatic spindle is finished the on-line measurement of ultraprecise hydrostatic spindle dynamic property as measurement result.
Measuring basis ball of the present invention with the conical surface be installed had the self-centering characteristic, guaranteed that the main axis rotation center can finely overlap with the rotation center of measuring basis ball, has eliminated the influence that alignment error causes measurement result; High accuracy displacement sensor, No. two high accuracy displacement sensors and No. three high accuracy displacement sensors are collected the motor phase information that signal and rotary encoder obtain in computing machine, subtract each other processing in same phase place, can eliminate the measuring error that causes owing to the foozle of standard ball own, thereby realize the on-line measurement to nano-precision ultraprecise direct-drive type hydrostatic spindle dynamic property.
Description of drawings
Fig. 1 is the structural representation of the device of on-line measurement ultraprecise hydrostatic spindle dynamic property of the present invention.
Embodiment
Embodiment one: present embodiment is described in conjunction with Fig. 1, the device of the described on-line measurement ultraprecise of present embodiment hydrostatic spindle dynamic property, this device comprises signal gathering unit and data processing unit, and described signal gathering unit comprises high accuracy displacement sensor 1, sensor stand 2, No. two high accuracy displacement sensors 3, standard ball 4, test rod 4-1, No. three high accuracy displacement sensors 6 and rotary encoder 7; The rear end face of ultraprecise hydrostatic spindle rotor is processed as taper, as measuring basis face 5;
The end of test rod 4-1 is fixedlyed connected with standard ball 4, the other end of test rod 4-1 is threaded, and by on the interior step that is threaded in hollow main shaft, standard ball 4 is close on the taper measuring basis face 5, sensor stand 2 is the under shed structure, sensor stand 2 is inverted and is fixed on the stator of motor in the hydrostatic spindle, a high accuracy displacement sensor 1, No. two high accuracy displacement sensors 3 and No. three high accuracy displacement sensors 6 are separately fixed on the sensor stand 2, when be used for measuring the rotation of ultraprecise hydrostatic spindle standard ball 4 and high accuracy displacement sensor and between displacement; Rotary encoder 7 is fixed on the ultraprecise hydrostatic spindle; Phase information when rotary encoder 7 is used for measuring main axis rotation;
Data processing unit comprises signal amplifier a, A/D change-over circuit b, data acquisition circuit c and computing machine d;
The collection signal output part of a high accuracy displacement sensor 1, No. two high accuracy displacement sensors 3 and No. three high accuracy displacement sensors 6 is connected three signal input parts of signal amplifier 7 respectively; The output terminal of the phase information of rotary encoder 7 connects the phase information input end of computing machine d, the amplified signal output terminal of signal amplifier 7 connects the amplified signal input end of A/D change-over circuit b, the digital signal output end of A/D change-over circuit b connects the data-signal input end of data acquisition circuit c, and the image data output terminal of data acquisition circuit c connects the image data input end of computing machine d.
The described measuring basis face of present embodiment is installed in the rear end of main shaft, Measurement and analysis is carried out in process in real time, do not influence the process of ultra-precision machine tool, measurement result can reflect time of day and the dynamic property in the real work of ultraprecise main shaft, because adopting three high accuracy displacement sensors measures simultaneously, No. one sensor is installed in the axial of main shaft, and two-way is installed in main shaft radially in addition, can realize the axial float of main shaft and the detection of radial beat characteristic simultaneously.In measurement, adopt the contactless high-precision displacement transducer can the running status of main shaft not to be impacted.Because the measuring basis ball is fixed on the interior step of hollow main shaft by the screw thread of test rod rear end, the measuring basis ball has the self-centering characteristic with the installation conical surface, guaranteed that the main axis rotation center can finely overlap with the rotation center of measuring basis ball, has eliminated the influence that alignment error causes measurement result; High accuracy displacement sensor is collected the motor phase information that signal and rotary encoder obtain subtract each other processing in same phase place, eliminated because the measuring error that the foozle of standard ball own causes, this method is simple, measurement result accurately and reliably, the measuring accuracy height can be realized the on-line measurement to the dynamic property of nano-precision direct-drive type ultraprecise hydrostatic spindle.
Present embodiment comprises the close direct-drive type hydrostatic spindle of vertical superfinishing system, measuring system and computer data acquiring and disposal system, and ultraprecise direct-drive type hydrostatic spindle system is made up of servomotor and main shaft stator and several parts of rotor.Servomotor is made up of motor stator and rotor, and motor stator links to each other with the lathe crossbearer cover plate by casing, and crossbearer cover plate directly is connected on the lathe crossbeam, realizes that the installation of motor stator is with fixing.Rotor is directly installed on the rotatable parts of hydrostatic spindle, realization is to the direct driving of hydrostatic spindle, the rotatable parts of main shaft comprise the axle center several sections of thrust button, following thrust button and hollow, these several parts realize fixing by bolt and connect, the axis strictness that guarantees main shaft rotatable parts each several part in manufacturing and the installation process is coaxial, to improve the running accuracy of axle.The stationary part of main shaft sleeve directly is fixed on the lathe crossbeam by bolt, the phase information of the rear end that rotary encoder is installed in main shaft when obtaining main axis rotation.Feed pressurized air or pressure oil between main shaft sleeve and the rotatable parts to realize nearly zero friction gearing.Measuring system is made up of the measuring basis ball that is installed in the hydrostatic spindle rear end and high accuracy displacement sensor and transducer signal amplifier, A/D converter and data acquisition system (DAS), and high accuracy displacement sensor is installed on the sensor stand.The analysis of computer realization measurement data with handle operation, meanwhile, the main axis rotation phase information that rotary encoder is obtained is sent into computing machine simultaneously and is together handled with the signal of the high accuracy displacement sensor that collects.The process of ultra-precision machine tool realizes processing to workpiece by being installed in the diamond cutter on the little tool slide on the thrust button under the main shaft, workpiece is positioned on the vacuum cup on the horizontal table of main shaft below.Because measuring system is positioned at the rear end of machine-tool spindle system, and the process of lathe is to carry out in the lower front end of main shaft, both are separate, are independent of each other, and the dynamic property to main shaft when being implemented in processing is measured.Simultaneously measurement result and workpiece machining surface quality testing result are contrasted mutually, realize that easily the main shaft dynamic property is to the impact analysis of workpiece machining surface quality.
Embodiment two, present embodiment are further specifying the device of embodiment one described on-line measurement ultraprecise hydrostatic spindle dynamic property, the material of standard ball 4 is stainless steel, surface figure accuracy PV value after standard ball 4 polishings is less than λ/20, λ=0.633 μ m wherein, surfaceness is less than 2nm.
Embodiment three, present embodiment are further specifying the device of embodiment one described on-line measurement ultraprecise hydrostatic spindle dynamic property, a high accuracy displacement sensor 1, No. two high accuracy displacement sensors 3 and No. three high accuracy displacement sensors 6 all adopt capacitive transducer, and the resolution of described capacitive transducer is less than 1nm.
Embodiment four, present embodiment are further specifying the device of embodiment one described on-line measurement ultraprecise hydrostatic spindle dynamic property, it also comprises display e, and the demonstration signal input part of display e connects the demonstration signal output part of computing machine d.
Embodiment five, present embodiment are further specifying the device of embodiment one described on-line measurement ultraprecise hydrostatic spindle dynamic property, the installation site of a high accuracy displacement sensor 1 and No. three high accuracy displacement sensors 6 was on the horizontal axis of reference sphere 4 centre ofs sphere, and the installation site of No. two high accuracy displacement sensors 3 was on the vertical axis of reference sphere 4 centre ofs sphere.
Embodiment six, present embodiment are that the ultraprecise hydrostatic spindle is static air pressure or fluid pressure ultraprecise main shaft to the further specifying of the device of embodiment one described on-line measurement ultraprecise hydrostatic spindle dynamic property.
Embodiment seven, present embodiment are to adopt the method for the measurement device hydrostatic spindle dynamic property of embodiment one described on-line measurement ultraprecise hydrostatic spindle dynamic property, and the concrete steps of this method are:
Step 1, operation lathe make the work of ultraprecise main shaft, utilize high accuracy displacement sensor 1, No. two high accuracy displacement sensors 3 and No. three high accuracy displacement sensors 6 to measure displacement information between each displacement transducer and the standard ball 4 respectively; And the displacement information that will measure between each displacement transducer and the standard ball 4 passes to signal amplifier a;
Displacement information between step 4, the employing A/D displacement transducer of change-over circuit b and the standard ball 4 carries out analog to digital conversion, obtains data message;
The phase information of the motor rotation that the information that step 6, the step 5 collection of computing machine d obtain and step 2 obtain is carried out homophase and is subtracted each other, obtain the dynamic property error information of ultraprecise hydrostatic spindle rotation, and the dynamic property error information that will obtain the rotation of ultraprecise hydrostatic spindle is finished the on-line measurement of ultraprecise hydrostatic spindle dynamic property as measurement result.
Present embodiment mainly is divided into: install and measure benchmark: standard ball 4 is installed on the taper datum clamp face of hydrostatic spindle system rearward end processing, the other end of test rod 4-1 is fixed on the inside of hollow main shaft by nut; High accuracy displacement sensor is installed: at first high accuracy displacement sensor support 2 is fixed on the shell of motor stator, secondly by the high accuracy displacement sensor of packing into of the mounting hole on the support 2; Regulate to measure primary clearance: rotating spindle slowly, adjust the primary clearance of high accuracy displacement sensor and measuring basis ball 4, the clearance control when making main axis rotation between high accuracy displacement sensor and the measuring basis ball 4 is in the measurement range ability of high accuracy displacement sensor; Measure: the operation ultra-precision machine tool, the turn-on data acquisition system, gather the change in displacement situation between high accuracy displacement sensor and the measuring basis ball in real time, meanwhile the data of the data of the rotary encoder that obtains and the high-precision sensor that collects are together deposited in computing machine in order to handling and analyze, thereby finish the online detection operation of dynamic property of ultraprecise hydrostatic spindle.
Present embodiment is at the rear end of ultraprecise hydrostatic spindle rotor processing taper datum clamp face, test rod one end is standard ball, standard ball is directly installed on the taper reference field as measuring basis, change in displacement when adopting high accuracy displacement sensor to measure main axis rotation between standard ball and the high accuracy displacement sensor, by transducer signal amplifier and A/D conversion and data acquisition the displacement variable that records is sent into computing machine and carry out data analysis and processing, meanwhile, the main axis rotation position signalling that rotary encoder is obtained is sent into computing machine and is handled together with the displacement transducer signal that collects, thereby realizes the on-line measurement of ultraprecise direct-drive type main shaft dynamic property.Because adopting triple channel measures simultaneously, can realize axial float and the radial beat performance detection of main shaft simultaneously, because the measuring basis ball is fixed on the interior step of hollow main shaft by the screw thread of test rod rear end, the measuring basis ball has the self-centering characteristic with the installation conical surface, guaranteed that the main axis rotation center can finely overlap with the rotation center of measuring basis ball, has eliminated the influence that alignment error causes measurement result; Sensor is collected the motor phase information that signal and rotary encoder obtain subtract each other processing in same phase place, eliminated because the measuring error that the foozle of measuring basis ball own causes, the present invention realizes the dynamic property that is in the ultraprecise hydrostatic spindle under the actual machining state is carried out real-time online measuring, does not influence the process of ultra-precision machine tool.
Motor of the present invention is direct current or AC permanent-magnet brushless electric machine, and rotor directly is connected with the hydrostatic spindle rotating part, middle no flexible connecting link.
Embodiment eight, present embodiment is further specifying the method for the measurement device hydrostatic spindle dynamic property of embodiment seven described on-line measurement ultraprecise hydrostatic spindle dynamic properties, before carrying out step 1, at first adjust high accuracy displacement sensor 1 No. one, the primary clearance of No. two high accuracy displacement sensors 3 and No. three high accuracy displacement sensors 6 and measuring basis ball 4 guarantees No. one high accuracy displacement sensor 1, primary clearance between No. two high accuracy displacement sensors 3 and No. three high accuracy displacement sensors 6 and the measuring basis ball 4 is in the measurement range ability of high accuracy displacement sensor.
Embodiment nine, present embodiment are to the further specifying of the method for the measurement device hydrostatic spindle dynamic property of embodiment eight described on-line measurement ultraprecise hydrostatic spindle dynamic properties, and high accuracy displacement sensor 1, No. two high accuracy displacement sensors 3 and No. three high accuracy displacement sensors 6 are 15 μ m-30 μ m with the primary clearance of measuring basis ball 4.
In the measuring process high accuracy displacement sensor 1 and No. three high accuracy displacement sensors 6 collected the motor phase information that signal and rotary encoder 7 obtain and subtract each other processing in same phase place, eliminated because the measuring error that standard ball 4 foozles own cause.Owing to adopt three high accuracy displacement sensors to measure simultaneously, No. one sensor is installed in the axial of main shaft, and two-way is installed in main shaft radially in addition, can realize the axial float of main shaft and the detection of radial beat characteristic simultaneously.Measurement mechanism is positioned at the rear end of machine-tool spindle system, and the process of lathe is to carry out in the lower front end of main shaft, and both are separate, is independent of each other, and the dynamic property to main shaft when being implemented in processing is measured.Simultaneously measurement result and workpiece machining surface quality testing result are contrasted mutually, realize that easily the main shaft dynamic property is to the impact analysis of workpiece machining surface quality.
The present invention is not limited to above-mentioned embodiment, can also be the reasonable combination of technical characterictic described in the respective embodiments described above.
Claims (8)
1. the device of on-line measurement ultraprecise hydrostatic spindle dynamic property, it is characterized in that, this device comprises signal gathering unit and data processing unit, and described signal gathering unit comprises a high accuracy displacement sensor (1), sensor stand (2), No. two high accuracy displacement sensors (3), standard ball (4), test rod (4-1), No. three high accuracy displacement sensors (6) and rotary encoder (7); The rear end face of ultraprecise hydrostatic spindle rotor is processed as taper, as measuring basis face (5);
One end of test rod (4-1) is fixedlyed connected with standard ball (4), the other end of test rod (4-1) is threaded, and by on the interior step that is threaded in hollow main shaft, standard ball (4) is close on the taper measuring basis face (5), sensor stand (2) is the under shed structure, sensor stand (2) is inverted and is fixed on the stator of motor in the hydrostatic spindle, a high accuracy displacement sensor (1), No. two high accuracy displacement sensors (3) and No. three high accuracy displacement sensors (6) are separately fixed on the sensor stand (2), when be used for measuring the rotation of ultraprecise hydrostatic spindle standard ball (4) and high accuracy displacement sensor and between displacement; Rotary encoder (7) is fixed on the ultraprecise hydrostatic spindle; Phase information when rotary encoder (7) is used for measuring main axis rotation;
Data processing unit comprises signal amplifier (a), A/D change-over circuit (b), data acquisition circuit (c) and computing machine (d); The collection signal output part of a high accuracy displacement sensor (1), No. two high accuracy displacement sensors (3) and No. three high accuracy displacement sensors (6) is connected three signal input parts of signal amplifier (7) respectively; The output terminal of the phase information of rotary encoder (7) connects the phase information input end of computing machine (d), the amplified signal output terminal of signal amplifier (7) connects the amplified signal input end of A/D change-over circuit (b), the digital signal output end of A/D change-over circuit (b) connects the data-signal input end of data acquisition circuit (c), and the image data output terminal of data acquisition circuit (c) connects the image data input end of computing machine (d).
2. the device of on-line measurement ultraprecise hydrostatic spindle dynamic property according to claim 1, it is characterized in that the material of standard ball (4) is stainless steel, the surface figure accuracy PV value after standard ball (4) polishing is less than λ/20, λ=0.633 μ m wherein, surfaceness is less than 2nm.
3. the device of on-line measurement ultraprecise hydrostatic spindle dynamic property according to claim 1, it is characterized in that, a high accuracy displacement sensor (1), No. two high accuracy displacement sensors (3) and No. three high accuracy displacement sensors (6) all adopt capacitive transducer, and the resolution of described capacitive transducer is less than 1nm.
4. the device of on-line measurement ultraprecise hydrostatic spindle dynamic property according to claim 1 is characterized in that, it also comprises display (e), and the demonstration signal input part of display (e) connects the demonstration signal output part of computing machine (d).
5. the device of on-line measurement ultraprecise hydrostatic spindle dynamic property according to claim 1, it is characterized in that, the installation site of a high accuracy displacement sensor (1) and No. three high accuracy displacement sensors (6) was on the horizontal axis of the centre of sphere of reference sphere 4, the installation site of No. two high accuracy displacement sensors (3) be reference sphere 4 centre ofs sphere vertical axis on.
6. adopt the method for the measurement device hydrostatic spindle dynamic property of the described on-line measurement ultraprecise of claim 1 hydrostatic spindle dynamic property, it is characterized in that the concrete steps of this method:
Step 1, operation lathe make the work of ultraprecise main shaft, utilize a high accuracy displacement sensor (1), No. two high accuracy displacement sensors (3) and No. three high accuracy displacement sensors (6) to measure displacement information between each displacement transducer and the standard ball (4) respectively; And the displacement information that will measure between each displacement transducer and the standard ball (4) passes to signal amplifier (a);
Step 2, utilize rotary encoder (7) to measure the phase information of motor rotation in the hydrostatic spindle, and will obtain the phase information that motor rotates and pass to computing machine (d);
Step 3, employing signal amplifier (a) amplify the displacement information that step 1 obtains between each displacement transducer and the standard ball (4), and the displacement information between the displacement transducer after will amplifying and the standard ball (4) passes to A/D change-over circuit (b);
Step 4, employing A/D change-over circuit (b) carry out analog to digital conversion to the displacement information between displacement transducer and the standard ball (4), obtain data message;
Step 5, the data information transfer that step 4 is obtained are given data acquisition circuit (c), adopt data acquisition circuit (c) that step 4 is obtained data message and gather, and the information that will gather acquisition passes to computing machine (d);
The phase information that the information that step 6, computing machine (d) obtain the step 5 collection and the motor that step 2 obtains rotate is carried out homophase and is subtracted each other, obtain the dynamic property error information of ultraprecise hydrostatic spindle rotation, and the dynamic property error information that will obtain the rotation of ultraprecise hydrostatic spindle is finished the on-line measurement of ultraprecise hydrostatic spindle dynamic property as measurement result.
7. according to the method for the measurement device hydrostatic spindle dynamic property of right 6 described on-line measurement ultraprecise hydrostatic spindle dynamic properties, it is characterized in that, before carrying out step 1, at first adjust a high accuracy displacement sensor (1), the primary clearance of No. two high accuracy displacement sensors (3) and No. three high accuracy displacement sensors (6) and measuring basis ball (4) guarantees a high accuracy displacement sensor (1), gap between No. two high accuracy displacement sensors (3) and No. three high accuracy displacement sensors (6) and the measuring basis ball (4) is in the measurement range ability of high accuracy displacement sensor.
8. according to the method for the measurement device hydrostatic spindle dynamic property of right 7 described on-line measurement ultraprecise hydrostatic spindle dynamic properties, it is characterized in that a high accuracy displacement sensor (1), No. two high accuracy displacement sensors (3) and No. three high accuracy displacement sensors (6) are 15 μ m-30 μ m with the primary clearance of measuring basis ball (4).
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| CN103674512B (en) * | 2013-11-11 | 2016-03-30 | 北京航天发射技术研究所 | The flexible bottom pilot system of launching tube |
| WO2016123831A1 (en) * | 2015-02-06 | 2016-08-11 | 湖南大学 | Grinding machine accuracy circular ascending method on basis of hydrostatic pressure spindle part |
| CN105004515A (en) * | 2015-07-06 | 2015-10-28 | 哈尔滨理工大学 | Static pressure main shaft movement precision on-line test method based on laser dynamic interferometer |
| CN105004515B (en) * | 2015-07-06 | 2018-01-23 | 哈尔滨理工大学 | Hydrostatic spindle kinematic accuracy on-line testing method based on dynamic Laser interferometer |
| CN115541225A (en) * | 2022-10-29 | 2022-12-30 | 通用技术集团机床工程研究院有限公司 | Online precision analysis method and system for main shaft of ultra-precision machine tool |
| CN115541225B (en) * | 2022-10-29 | 2023-09-05 | 通用技术集团机床工程研究院有限公司 | Method and system for analyzing online precision of spindle of ultra-precise machine tool |
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| CN103335833B (en) | 2015-05-13 |
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