CN103335833B - Device for online measuring dynamic performance of ultra-precision hydrostatic spindle and method for measuring dynamic performance of hydrostatic spindle by using same - Google Patents
Device for online measuring dynamic performance of ultra-precision hydrostatic spindle and method for measuring dynamic performance of hydrostatic spindle by using same Download PDFInfo
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- CN103335833B CN103335833B CN201310272441.2A CN201310272441A CN103335833B CN 103335833 B CN103335833 B CN 103335833B CN 201310272441 A CN201310272441 A CN 201310272441A CN 103335833 B CN103335833 B CN 103335833B
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Abstract
The invention discloses a device for online measuring dynamic performance of an ultra-precision hydrostatic spindle and a method for measuring the dynamic performance of the hydrostatic spindle by using the same, and relates to the method for online measuring the dynamic performance of the ultra-precision hydrostatic spindle. The problem that in the convention method, online measurement of the dynamic performance of the ultra-precision hydrostatic spindle cannot be carried out, or influence of an installing error and a manufacturing error of a measuring benchmark on a measuring result is difficultly avoided is solved. The method provided by the invention comprises the following steps: acquiring displacement information between a sensor and a standard ball by using a high-precision displacement sensor; amplifying the acquired displacement information by a signal amplifier; inputting the acquired displacement information into a computer after passing through an A/D (analog/digital) conversion circuit and a data acquisition circuit; acquiring phase information of the spindle and inputting the phase information into the computer by using a rotary encoder; analyzing and processing the phase information by the computer to obtain error data of the rotating dynamic performance of the ultra-precision hydrostatic spindle, thereof implementing the online measurement of the dynamic performance of the ultra-precision hydrostatic spindle. The device and the method are applicable to the online measurement of the dynamic performance of the ultra-precision hydrostatic spindle.
Description
Technical field
The present invention relates to a kind of ultraprecise hydrostatic spindle dynamic property On-line Measuring Method.
Background technology
Along with the fast development of modern science and technology, particularly the advancing by leaps and bounds of the Cutting-edge science technology such as Aeronautics and Astronautics, national defence, military project, these industries to the stability of product and the requirement of usability more and more higher, be exactly relatively typically at the widely used KDP quartz crystal device of laser nuclear fusion system, this crystal is owing to having the characteristics such as soft, crisp, easy deliquescence, the optical manufacturing methods such as traditional polishing can not be used for the processing of large-aperture KDP crystal, and the processing of current single-point diamond fly cutting realizes the Main Means that KDP crystal finally processes.Cut is the processing of a kind of copy type, and the precision of ultra-precision machine tool determines the machining precision of part.Therefore, super-precision machine tools is the core of KDP crystals for ultra-precision processing and key, and wherein ultraprecision spindles is the core component of ultra-precision machine tool, and the dynamic property of ultraprecision spindles directly has influence on surface quality and the manufacturing accuracy of part to be processed.In actual process, when adopting the close fly cutting large-aperture KDP crystal of vertical superfinishing, no matter be along table feed direction at finished surface, or on the direction vertical with table feed, all there is the microwaviness of rule, the space periodic of these microwaviness is about some tens of pm to tens of milliseconds, amplitude is about tens nanometer, show that the formation of these microwaviness is relevant with the dynamic property of ultraprecise hydrostatic spindle after deliberation, huge difficult problem to be solved is bitten in the on-line measurement how realizing ultraprecision spindles dynamic property at present.
Application number be 200810064030.3 patent of invention disclose a kind of ultra-precise gas static-pressure axis system, but prior art is mainly based on the measurement of method realization to ultraprecision spindles performance of static test, the method can not react the time of day of ultraprecision spindles in practical work process and dynamic property, even if adopt specific process can realize the on-line measurement of the dynamic property of ultraprecise hydrostatic spindle, because the manufacturing accuracy of ultraprecise hydrostatic spindle is very high, the dynamic error produced in its rotary course is in tens of extremely hundreds of nanometer scale, when detecting its dynamic property, the alignment error of measuring basis and foozle all can cause comparatively serious impact to measurement result.
Summary of the invention
The object of the invention is can not realize the dynamic property on-line measurement of ultraprecise hydrostatic spindle or existing method and be difficult to solve to solve existing method the problem that the alignment error of measuring basis and foozle have an impact to measurement result, propose the device of on-line measurement ultraprecise hydrostatic spindle dynamic property and adopt the method for this measurement device hydrostatic spindle dynamic property.
The device of on-line measurement ultraprecise hydrostatic spindle dynamic property of the present invention, this device comprises signal gathering unit and data processing unit, and described signal gathering unit comprises a high accuracy displacement sensor, sensor stand, No. two high accuracy displacement sensors, standard ball, test rod, No. three high accuracy displacement sensors and rotary encoders; The rear end face of ultraprecise hydrostatic spindle rotor is processed as taper, as measurement datum;
One end of test rod is fixedly connected with standard ball, the other end of test rod is threaded, and be threaded connection in the interior step of hollow main shaft, standard ball is close on taper measurement datum, sensor stand is under shed structure, sensor stand is inverted and is fixed on the stator of motor in hydrostatic spindle, high accuracy displacement sensor, No. two high accuracy displacement sensors and No. three high accuracy displacement sensors are separately fixed on sensor stand, for measure ultraprecise hydrostatic spindle rotate time standard ball and high accuracy displacement sensor and between displacement; Rotary encoder is fixed on ultraprecise hydrostatic spindle; Rotary encoder is for measuring phase information when main shaft rotates;
Data processing unit comprises signal amplifier, A/D change-over circuit, data acquisition circuit and computing machine;
Three signal input parts of the collection signal output terminal difference connection signal amplifier of high accuracy displacement sensor, No. two high accuracy displacement sensors and No. three high accuracy displacement sensors; The output terminal of the phase information of rotary encoder connects the phase information input end of computing machine, the amplified signal output terminal of signal amplifier connects the amplified signal input end of A/D change-over circuit, the data signal input of the digital signal output end connection data Acquisition Circuit of A/D change-over circuit, the image data output terminal of data acquisition circuit connects the image data input end of computing machine;
Adopt the method for the measurement device hydrostatic spindle dynamic property of above-mentioned on-line measurement ultraprecise hydrostatic spindle dynamic property, the concrete steps of the method are:
Step one, run lathe and make ultraprecision spindles work, utilize a high accuracy displacement sensor, No. two high accuracy displacement sensors and No. three high accuracy displacement sensors to measure displacement information between each displacement transducer and standard ball respectively; And the displacement information measured between each displacement transducer and standard ball is passed to signal amplifier;
Step 2, utilize rotary encoder to measure the phase information that motor rotates in hydrostatic spindle, and pass to computing machine by obtaining the phase information that motor rotates;
Step 3, adopt signal amplifier by step one, the displacement information obtained between each displacement transducer and standard ball amplifies, and by amplify after displacement transducer and standard ball between displacement information pass to A/D change-over circuit;
Step 4, employing A/D change-over circuit carry out analog to digital conversion to the displacement information between displacement transducer and standard ball, obtain data message;
Step 5, by step 4 obtain data information transfer to data acquisition circuit, adopt data acquisition circuit to step 4 obtain data message gather, and by gather obtain information pass to computing machine;
The information that step 6, computing machine obtain step 5 collection and the phase information that the motor that step 2 obtains rotates are carried out homophase and are subtracted each other, obtain the dynamic property error information that ultraprecise hydrostatic spindle rotates, and using obtaining the dynamic property error information of ultraprecise hydrostatic spindle rotation as measurement result, complete the on-line measurement of ultraprecise hydrostatic spindle dynamic property.
Measuring basis ball of the present invention has self-centering feature with the installation conical surface, ensure that main shaft rotation center can overlap very well with the rotation center of measuring basis ball, eliminates the impact that alignment error causes measurement result; A high accuracy displacement sensor, No. two high accuracy displacement sensors and No. three high accuracy displacement sensors are collected the motor phase information that signal and rotary encoder obtain to carry out subtracting each other process in computing machine in same phase place, the measuring error because the foozle of standard ball own causes can be eliminated, thus realize the on-line measurement to nano-precision ultraprecise direct-drive type hydrostatic spindle dynamic property.
Accompanying drawing explanation
Fig. 1 is the structural representation of the device of on-line measurement ultraprecise hydrostatic spindle dynamic property of the present invention.
Embodiment
Embodiment one: composition graphs 1 illustrates present embodiment, the device of on-line measurement ultraprecise hydrostatic spindle dynamic property described in present embodiment, this device comprises signal gathering unit and data processing unit, and described signal gathering unit comprises a high accuracy displacement sensor 1, sensor stand 2, No. two high accuracy displacement sensors 3, standard ball 4, test rod 4-1, No. three high accuracy displacement sensors 6 and rotary encoder 7; The rear end face of ultraprecise hydrostatic spindle rotor is processed as taper, as measurement datum 5;
One end of test rod 4-1 is fixedly connected with standard ball 4, the other end of test rod 4-1 is threaded, and be threaded connection in the interior step of hollow main shaft, standard ball 4 is close on taper measurement datum 5, sensor stand 2 is under shed structure, sensor stand 2 is inverted and is fixed on the stator of motor in hydrostatic spindle, a high accuracy displacement sensor 1, No. two high accuracy displacement sensors 3 and No. three high accuracy displacement sensors 6 are separately fixed on sensor stand 2, for measure ultraprecise hydrostatic spindle rotate time standard ball 4 and high accuracy displacement sensor and between displacement, rotary encoder 7 is fixed on ultraprecise hydrostatic spindle, rotary encoder 7 is for measuring phase information when main shaft rotates,
Data processing unit comprises signal amplifier a, A/D change-over circuit b, data acquisition circuit c and computing machine d;
Three signal input parts of the collection signal output terminal difference connection signal amplifier a of a high accuracy displacement sensor 1, No. two high accuracy displacement sensors 3 and No. three high accuracy displacement sensors 6; The output terminal of the phase information of rotary encoder 7 connects the phase information input end of computing machine d, the amplified signal output terminal of signal amplifier a connects the amplified signal input end of A/D change-over circuit b, the data signal input of the digital signal output end connection data Acquisition Circuit c of A/D change-over circuit b, the image data output terminal of data acquisition circuit c connects the image data input end of computing machine d.
Measurement datum described in present embodiment is arranged on the rear end of main shaft, Measurement and analysis is carried out in real time in process, do not affect the process of ultra-precision machine tool, measurement result can reflect time of day in ultraprecision spindles real work and dynamic property, measure owing to adopting three high accuracy displacement sensors simultaneously, No. one sensor is arranged on the axis of main shaft, and two-way is arranged on the radial direction of main shaft in addition, can realize the axial float of main shaft and the detection of radial beat characteristic simultaneously.Adopt contactless high-precision displacement transducer can not impact the running status of main shaft in the measurements.Because measuring basis ball is screwed in the interior step of hollow main shaft by test rod rear end, measuring basis ball has self-centering feature with the installation conical surface, ensure that main shaft rotation center can overlap very well with the rotation center of measuring basis ball, eliminate the impact that alignment error causes measurement result; High accuracy displacement sensor is collected the motor phase information that signal and rotary encoder obtain to carry out subtracting each other process in same phase place, eliminate the measuring error because the foozle of standard ball own causes, the method is simple, measurement result accurately and reliably, measuring accuracy is high, can realize the on-line measurement of the dynamic property to nano-precision direct-drive type ultraprecise hydrostatic spindle.
Present embodiment comprises vertical superfinishing close direct-drive type hydrostatic spindle system, measuring system and computer data acquisition and treatment system, and ultraprecise direct-drive type hydrostatic spindle system is made up of servomotor and motor stator and a few part of rotor.Servomotor is made up of motor stator and rotor, and motor stator is connected with machine tool beam cover plate by casing, and crossbearer cover plate is directly connected on machine tool beam, realizes the installation of motor stator with fixing.Rotor is directly installed on the rotatable parts of hydrostatic spindle, realize the Direct driver to hydrostatic spindle, the rotatable parts of main shaft comprise the several part in axle center of thrust button, lower thrust button and hollow, this a few part realizes fixing by bolt and connects, manufacture and in installation process, ensure that the axis of main axis component parts is strictly coaxial, to improve the running accuracy of axle.The stationary part of main shaft sleeve is directly fixed on machine tool beam by bolt, and rotary encoder is arranged on the rear end of main shaft to obtain phase information when main shaft rotates.Pressurized air or pressure oil is passed into realize nearly zero friction gearing between main shaft sleeve and rotatable parts.Measuring system forms by being arranged on the measuring basis ball of hydrostatic spindle rear end and high accuracy displacement sensor and transducer signal amplifier, A/D converter and data acquisition system (DAS), and high accuracy displacement sensor is arranged on sensor stand.Computing machine realizes the analysis and treament operation of measurement data, and meanwhile, the signal that the main shaft rotatable phase information obtained by rotary encoder sends into the same high accuracy displacement sensor collected of computing machine simultaneously together processes.The process of ultra-precision machine tool realizes the processing to workpiece by the diamond cutter be arranged on the micro-feeding tool holder under main shaft on thrust button, is positioned at by trade union college on the vacuum cup on the horizontal table below main shaft.Because measuring system is positioned at the rear end of machine-tool spindle system, and the process of lathe is carried out in the lower front end of main shaft, and both are separate, are independent of each other, and realizes measuring the dynamic property of main shaft while processing.Measurement result and workpiece machining surface quality measurements are contrasted mutually simultaneously, realize the impact analysis of dynamic characteristics of spindle system to workpiece machining surface quality easily.
Embodiment two, present embodiment are further illustrating the device of the on-line measurement ultraprecise hydrostatic spindle dynamic property described in embodiment one, the material of standard ball 4 is stainless steel, surface figure accuracy PV value after standard ball 4 polishing is less than λ/20, wherein λ=0.633 μm, surfaceness is less than 2nm.
Embodiment three, present embodiment are further illustrating the device of the on-line measurement ultraprecise hydrostatic spindle dynamic property described in embodiment one, a high accuracy displacement sensor 1, No. two high accuracy displacement sensors 3 and No. three high accuracy displacement sensors 6 all adopt capacitive transducer, and the resolution of described capacitive transducer is less than 1nm.
Embodiment four, present embodiment are further illustrating the device of the on-line measurement ultraprecise hydrostatic spindle dynamic property described in embodiment one, it also comprises display e, and the display input end of display e connects the display output terminal of computing machine d.
Embodiment five, present embodiment are further illustrating the device of the on-line measurement ultraprecise hydrostatic spindle dynamic property described in embodiment one, the installation site of a high accuracy displacement sensor 1 and No. three high accuracy displacement sensors 6 was on the horizontal axis of reference sphere 4 centre of sphere, and the installation site of No. two high accuracy displacement sensors 3 was on the vertical axis of reference sphere 4 centre of sphere.
Embodiment six, present embodiment are further illustrating the device of the on-line measurement ultraprecise hydrostatic spindle dynamic property described in embodiment one, and ultraprecise hydrostatic spindle is static air pressure or fluid pressure ultraprecision spindles.
Embodiment seven, present embodiment are the methods of the measurement device hydrostatic spindle dynamic property of the on-line measurement ultraprecise hydrostatic spindle dynamic property adopted described in embodiment one, and the concrete steps of the method are:
Step one, run lathe and make ultraprecision spindles work, utilize a high accuracy displacement sensor 1, No. two high accuracy displacement sensors 3 and No. three high accuracy displacement sensors 6 to measure displacement information between each displacement transducer and standard ball 4 respectively; And the displacement information measured between each displacement transducer and standard ball 4 is passed to signal amplifier a;
Step 2, the phase information utilizing rotary encoder 7 to measure motor in hydrostatic spindle to rotate, and pass to computing machine d by obtaining the phase information that motor rotates;
Step 3, the displacement information obtained between each displacement transducer and standard ball 4 amplifies by step one to adopt signal amplifier a, and the displacement information between the displacement transducer after amplifying and standard ball 4 is passed to A/D change-over circuit b;
Step 4, employing A/D change-over circuit b carry out analog to digital conversion to the displacement information between displacement transducer and standard ball 4, obtain data message;
Step 5, the data information transfer that step 4 obtained, to data acquisition circuit c, adopt data acquisition circuit c to obtain data message to step 4 and gather, and pass to computing machine d by gathering the information obtained;
The information that step 6, computing machine d obtain step 5 collection and the phase information that the motor that step 2 obtains rotates are carried out homophase and are subtracted each other, obtain the dynamic property error information that ultraprecise hydrostatic spindle rotates, and using obtaining the dynamic property error information of ultraprecise hydrostatic spindle rotation as measurement result, complete the on-line measurement of ultraprecise hydrostatic spindle dynamic property.
Present embodiment is mainly divided into: install and measure benchmark: standard ball 4 be arranged on the taper datum clamp face of hydrostatic spindle System Back-end portion processing, the other end of test rod 4-1 is fixed on the inside of hollow main shaft by nut; High accuracy displacement sensor is installed: be first fixed on the shell of motor stator by high accuracy displacement sensor support 2, secondly loads high accuracy displacement sensor by the mounting hole on support 2; Regulate and measure primary clearance: slowly rotating spindle, the primary clearance of adjustment high accuracy displacement sensor and measuring basis ball 4, clearance control when main shaft is rotated between high accuracy displacement sensor and measuring basis ball 4 is in the measurement range ability of high accuracy displacement sensor; Measure: run ultra-precision machine tool, turn-on data acquisition system, change in displacement situation between Real-time Collection high accuracy displacement sensor and measuring basis ball, meanwhile the data of the rotary encoder obtained and the data of the high-precision sensor collected together are prepared against treatment and analyses stored in computing machine, thus complete the dynamic property on-line checkingi operation of ultraprecise hydrostatic spindle.
Present embodiment is at the rear end of ultraprecise hydrostatic spindle rotor processing taper datum clamp face, test rod one end is standard ball, standard ball is directly installed on taper reference field as measuring basis, change in displacement when adopting high accuracy displacement sensor measurement main shaft to rotate between standard ball and high accuracy displacement sensor, to be changed by transducer signal amplifier and A/D and the displacement variable recorded is sent into computing machine and carried out data analysis and process by data acquisition, meanwhile, the main shaft rotating position signal obtained by rotary encoder is sent into computing machine and is processed together with the displacement transducer signal collected, thus realize the on-line measurement of ultraprecise direct-drive type dynamic characteristics of spindle system.Measure owing to adopting triple channel simultaneously, the axial float of main shaft and the detection of radial beat performance can be realized simultaneously, because measuring basis ball is screwed in the interior step of hollow main shaft by test rod rear end, measuring basis ball has self-centering feature with the installation conical surface, ensure that main shaft rotation center can overlap very well with the rotation center of measuring basis ball, eliminate the impact that alignment error causes measurement result; Sensor is collected the motor phase information that signal and rotary encoder obtain to carry out subtracting each other process in same phase place, eliminate the measuring error because the foozle of measuring basis ball own causes, the present invention realizes carrying out real-time online measuring to the dynamic property of the ultraprecise hydrostatic spindle be under actual machining state, does not affect the process of ultra-precision machine tool.
Motor of the present invention is direct current or AC permanent-magnet brushless electric machine, and rotor is directly connected with hydrostatic spindle rotating part, middle without flexible connected link.
Embodiment eight, present embodiment is further illustrating of the method for measurement device hydrostatic spindle dynamic property to the on-line measurement ultraprecise hydrostatic spindle dynamic property described in embodiment seven, before carry out step one, first a high accuracy displacement sensor 1 is adjusted, the primary clearance of No. two high accuracy displacement sensors 3 and No. three high accuracy displacement sensors 6 and measuring basis ball 4, ensure a high accuracy displacement sensor 1, No. two high accuracy displacement sensors 3 and the primary clearance between No. three high accuracy displacement sensors 6 and measuring basis ball 4 are in the measurement range ability of high accuracy displacement sensor.
Embodiment nine, present embodiment are further illustrating of the method for measurement device hydrostatic spindle dynamic property to the on-line measurement ultraprecise hydrostatic spindle dynamic property described in embodiment eight, and a high accuracy displacement sensor 1, No. two high accuracy displacement sensors 3 and No. three high accuracy displacement sensors 6 are 15 μm-30 μm with the primary clearance of measuring basis ball 4.
In measuring process, a high accuracy displacement sensor 1 and No. three high accuracy displacement sensors 6 are collected the motor phase information that signal and rotary encoder 7 obtain to carry out subtracting each other process in same phase place, eliminate the measuring error because the foozle of standard ball 4 own causes.Owing to adopting three high accuracy displacement sensors to measure simultaneously, a road sensor is arranged on the axis of main shaft, and two-way is arranged on the radial direction of main shaft in addition, can realize the axial float of main shaft and the detection of radial beat characteristic simultaneously.Measurement mechanism is positioned at the rear end of machine-tool spindle system, and the process of lathe is carried out in the lower front end of main shaft, and both are separate, are independent of each other, and realizes measuring the dynamic property of main shaft while processing.Measurement result and workpiece machining surface quality measurements are contrasted mutually simultaneously, realize the impact analysis of dynamic characteristics of spindle system to workpiece machining surface quality easily.
The present invention is not limited to above-mentioned embodiment, can also be the reasonable combination of technical characteristic described in the respective embodiments described above.
Claims (7)
1. the method for the measurement device hydrostatic spindle dynamic property of on-line measurement ultraprecise hydrostatic spindle dynamic property, this device comprises signal gathering unit and data processing unit, and described signal gathering unit comprises a high accuracy displacement sensor (1), sensor stand (2), No. two high accuracy displacement sensors (3), standard ball (4), test rod (4-1), No. three high accuracy displacement sensors (6) and rotary encoders (7); The rear end face of ultraprecise hydrostatic spindle rotor is processed as taper, as measurement datum (5);
One end of test rod (4-1) is fixedly connected with standard ball (4), the other end of test rod (4-1) is threaded, and be threaded connection in the interior step of hollow main shaft, standard ball (4) is close on taper measurement datum (5), sensor stand (2) is under shed structure, sensor stand (2) is inverted and is fixed on the stator of motor in hydrostatic spindle, a high accuracy displacement sensor (1), No. two high accuracy displacement sensors (3) and No. three high accuracy displacement sensors (6) are separately fixed on sensor stand (2), for measure ultraprecise hydrostatic spindle rotate time standard ball (4) and high accuracy displacement sensor and between displacement, rotary encoder (7) is fixed on ultraprecise hydrostatic spindle, rotary encoder (7) is for measuring phase information when main shaft rotates,
Data processing unit comprises signal amplifier (a), A/D change-over circuit (b), data acquisition circuit (c) and computing machine (d); Three signal input parts of the collection signal output terminal of a high accuracy displacement sensor (1), No. two high accuracy displacement sensors (3) and No. three high accuracy displacement sensors (6) connection signal amplifier (a) respectively; The output terminal of the phase information of rotary encoder (7) connects the phase information input end of computing machine (d), the amplified signal output terminal of signal amplifier (a) connects the amplified signal input end of A/D change-over circuit (b), the data signal input of digital signal output end connection data Acquisition Circuit (c) of A/D change-over circuit (b), the image data output terminal of data acquisition circuit (c) connects the image data input end of computing machine (d);
It is characterized in that, the concrete steps of the method:
Step one, run lathe and make ultraprecision spindles work, utilize a high accuracy displacement sensor (1), No. two high accuracy displacement sensors (3) and No. three high accuracy displacement sensors (6) to measure displacement information between each displacement transducer and standard ball (4) respectively; And the displacement information measured between each displacement transducer and standard ball (4) is passed to signal amplifier (a);
Step 2, utilize rotary encoder (7) to measure the phase information that motor rotates in hydrostatic spindle, and pass to computing machine (d) by obtaining the phase information that motor rotates;
Step 3, the displacement information adopting signal amplifier (a) step one to be obtained between each displacement transducer and standard ball (4) amplify, and the displacement information between the displacement transducer after amplification and standard ball (4) is passed to A/D change-over circuit (b);
Step 4, employing A/D change-over circuit (b) carry out analog to digital conversion to the displacement information between displacement transducer and standard ball (4), obtain data message;
Step 5, by step 4 obtain data information transfer to data acquisition circuit (c), adopt data acquisition circuit (c) to obtain data message to step 4 to gather, and pass to computing machine (d) by gathering the information obtained;
The information that step 6, computing machine (d) obtain step 5 collection and the phase information that the motor that step 2 obtains rotates are carried out homophase and are subtracted each other, obtain the dynamic property error information that ultraprecise hydrostatic spindle rotates, and using obtaining the dynamic property error information of ultraprecise hydrostatic spindle rotation as measurement result, complete the on-line measurement of ultraprecise hydrostatic spindle dynamic property.
2. the method for the measurement device hydrostatic spindle dynamic property of on-line measurement ultraprecise hydrostatic spindle dynamic property according to claim 1, it is characterized in that, the material of standard ball (4) is stainless steel, surface figure accuracy PV value after standard ball (4) polishing is less than λ/20, wherein λ=0.633 μm, surfaceness is less than 2nm.
3. the method for the measurement device hydrostatic spindle dynamic property of on-line measurement ultraprecise hydrostatic spindle dynamic property according to claim 1, it is characterized in that, high accuracy displacement sensor (1), No. two high accuracy displacement sensors (3) and No. three high accuracy displacement sensors (6) all adopt capacitive transducer, and the resolution of described capacitive transducer is less than 1nm.
4. the method for the measurement device hydrostatic spindle dynamic property of on-line measurement ultraprecise hydrostatic spindle dynamic property according to claim 1, it is characterized in that, it also comprises display (e), and the display input end of display (e) connects the display output terminal of computing machine (d).
5. the method for the measurement device hydrostatic spindle dynamic property of on-line measurement ultraprecise hydrostatic spindle dynamic property according to claim 1, it is characterized in that, the installation site of a high accuracy displacement sensor (1) and No. three high accuracy displacement sensors (6) was on the horizontal axis of the centre of sphere of reference sphere 4, the installation site of No. two high accuracy displacement sensors (3) be reference sphere 4 centre of sphere vertical axis on.
6. the method for the measurement device hydrostatic spindle dynamic property of the on-line measurement ultraprecise hydrostatic spindle dynamic property according to right 1, it is characterized in that, before carry out step one, first a high accuracy displacement sensor (1) is adjusted, the primary clearance of No. two high accuracy displacement sensors (3) and No. three high accuracy displacement sensors (6) and measuring basis ball (4), ensure a high accuracy displacement sensor (1), No. two high accuracy displacement sensors (3) and the gap between No. three high accuracy displacement sensors (6) and measuring basis ball (4) are in the measurement range ability of high accuracy displacement sensor.
7. the method for the measurement device hydrostatic spindle dynamic property of the on-line measurement ultraprecise hydrostatic spindle dynamic property according to right 6, it is characterized in that, a high accuracy displacement sensor (1), No. two high accuracy displacement sensors (3) and No. three high accuracy displacement sensors (6) are 15 μm-30 μm with the primary clearance of measuring basis ball (4).
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107796618A (en) * | 2016-08-31 | 2018-03-13 | 鼎奇(天津)主轴科技有限公司 | A kind of measuring method of main shaft dynamic characteristic |
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| CN103335833A (en) | 2013-10-02 |
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