CN103331692A - 一种基于永磁环的悬浮抛光装置 - Google Patents
一种基于永磁环的悬浮抛光装置 Download PDFInfo
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- CN103331692A CN103331692A CN2013101942937A CN201310194293A CN103331692A CN 103331692 A CN103331692 A CN 103331692A CN 2013101942937 A CN2013101942937 A CN 2013101942937A CN 201310194293 A CN201310194293 A CN 201310194293A CN 103331692 A CN103331692 A CN 103331692A
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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SU1252141A1 (ru) * | 1984-07-16 | 1986-08-23 | МВТУ им.Н.Э.Баумана | Инструмент дл гидродинамического полировани плоских деталей |
CN201881287U (zh) * | 2010-11-08 | 2011-06-29 | 浙江工业大学 | 液流悬浮超精密圆柱体抛光头的配模装置 |
CN102699809A (zh) * | 2012-05-07 | 2012-10-03 | 浙江工业大学 | 可主动驱动的悬浮基盘抛光装置 |
CN102830041A (zh) * | 2012-09-04 | 2012-12-19 | 济南美医林电子仪器有限公司 | 磁悬浮轴承支撑结构步进扫描力矩测量装置 |
CN203266379U (zh) * | 2013-05-22 | 2013-11-06 | 浙江工业大学 | 一种基于永磁环的悬浮抛光装置 |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU1252141A1 (ru) * | 1984-07-16 | 1986-08-23 | МВТУ им.Н.Э.Баумана | Инструмент дл гидродинамического полировани плоских деталей |
CN201881287U (zh) * | 2010-11-08 | 2011-06-29 | 浙江工业大学 | 液流悬浮超精密圆柱体抛光头的配模装置 |
CN102699809A (zh) * | 2012-05-07 | 2012-10-03 | 浙江工业大学 | 可主动驱动的悬浮基盘抛光装置 |
CN102830041A (zh) * | 2012-09-04 | 2012-12-19 | 济南美医林电子仪器有限公司 | 磁悬浮轴承支撑结构步进扫描力矩测量装置 |
CN203266379U (zh) * | 2013-05-22 | 2013-11-06 | 浙江工业大学 | 一种基于永磁环的悬浮抛光装置 |
Non-Patent Citations (1)
Title |
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渡边纯二等: "半导体基片的非接触抛光技术", 《半导体设备》 * |
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CN103331692B (zh) | 2016-03-02 |
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Effective date of registration: 20191225 Address after: 314200 inner northeast building, 4880 Pingshan Avenue, Pinghu Economic Development Zone, Jiaxing City, Zhejiang Province Patentee after: Pinghu Lianxiang Electroplating Technology Co.,Ltd. Address before: 510000 unit 2414-2416, building, No. five, No. 371, Tianhe District, Guangdong, China Patentee before: GUANGDONG GAOHANG INTELLECTUAL PROPERTY OPERATION Co.,Ltd. Effective date of registration: 20191225 Address after: 510000 unit 2414-2416, building, No. five, No. 371, Tianhe District, Guangdong, China Patentee after: GUANGDONG GAOHANG INTELLECTUAL PROPERTY OPERATION Co.,Ltd. Address before: The city Zhaohui six districts Chao Wang Road Hangzhou City, Zhejiang province 310014 18 Patentee before: Zhejiang University of Technology |
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Granted publication date: 20160302 Termination date: 20200522 |