CN103305884A - Method for manufacturing micro-nano coaxial tube - Google Patents
Method for manufacturing micro-nano coaxial tube Download PDFInfo
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- CN103305884A CN103305884A CN2013102248670A CN201310224867A CN103305884A CN 103305884 A CN103305884 A CN 103305884A CN 2013102248670 A CN2013102248670 A CN 2013102248670A CN 201310224867 A CN201310224867 A CN 201310224867A CN 103305884 A CN103305884 A CN 103305884A
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Abstract
The invention discloses a method for manufacturing a micro-nano coaxial tube. The method comprises the following steps of: (1) providing a conducting base plate and three microelectrolysis guide tubes with different inner diameters (D1, D2 and D3), wherein D1 is less than D2 and D2 is less than D3; (2) electrically depositing a columnar structure of an A material on the conducting base plate by using the microelectrolysis guide tube with the inner diameter D1 by virtue of a micro area electrolytic deposition system, wherein the diameter of the column is D1; (3) around the columnar structure of the A material, electrically depositing a straight tubular micro-nano structure of a B material on the conducting base plate by using the microelectrolysis guide tube with the inner diameter D2, wherein the diameter of the columnar structure of the A material is D1; and (4) around the straight tubular micro-nano structure of the B material, electrically depositing a straight tubular micro-nano structure with the A material on the conducting base plate by using the microelectrolysis guide tube with the inner diameter D3, wherein the outer diameter of the straight tubular micro-nano structure of the material B which is obtained in the step (3) is D2. The method can be directly used for preparing the micro-nano coaxial tube with high efficiency and high control precision by utilizing common single-glass microelectrolysis guide tubes.
Description
Technical field
The present invention relates to micro-nano material and make the field, specifically is a kind of method of making micro-nano size coaxial valve.
Background technology
Micro-nano structure is the material structure of a kind of micron or nanoscale, micro-nano structure array is the orderly material structure of arrangement of a kind of micron or nanoscale, material can be metal, pottery, semi-conductor or organic materials, have specific electricity, magnetics, optics and mechanical characteristic and function, be applied to various microelectronics and photoelectric chip manufacturing, precision optical machinery processing and medical science equipment field.And micro-nano size coaxial valve refers in particular to metal, semi-conductor or ceramic coaxial valve structure at micron and nanoscale.
Microcell electrolytic deposition technology is a kind of micro-nano processing technology based on Scanning probe technique (SPT), and its principle is to adopt bore at little electrolysis conduit of micro-nano size supply source as electrolytic solution, realizes the growth of microcell electrochemical deposition.Microcell electrolytic deposition system is comprised of computer and circuit amplifier, piezoelectric bar (or precision motor and drive shaft), little electrolysis conduit and the electrolytic solution that fills in little electrolysis conduit.Computer and circuit amplifier provide and control three road Voltage-outputs, every road voltage drives a piezoelectric bar (or precision motor), changing three road voltage output values just can make little electrolysis conduit at three piezoelectric bars (or motor drive shaft) intersection point place of being fixed in X, Y, Z axis do three-dimensional motion, the current potential of controlling simultaneously electrolytic solution in little electrolysis conduit carries out the microcell galvanic deposit of material, realizes the deposition growth of three-dimensional micro-nano structure; Principle of work is similar to the 3D printer, but referenced patent US7955486.
Microcell electrolytic deposition technology is owing to combining the similar Piezoelectric Control Technology of SPT, can carry out high precision control at three-dimensional space to Material growth position (being little electrolysis conduit outlet point), as: at the nano metal post of the silicon substrate growth ordered arrangement of conduction etc.Therefore, microcell electrolytic deposition technology is that a kind of three-dimensional straight of novelty is write the micro-nano structure growing technology that declines, and can be used for making three-dimensional micro-nano structure and array thereof.
Little electrolysis conduit is the key part of microcell electrolytic deposition system (having adopted the system of microcell electrolytic deposition technology), the little electrolysis conduit that uses at present is the common mono-layer tube of glass-pulling, and what directly form in the process of growth is solid column or thread micro-nano structure.When preparing tubular structure with above-mentioned technology, adopt at present three-dimensional method of writing thread coiling, its efficient and control accuracy are low.
Summary of the invention
Technical problem to be solved by this invention is: overcome above the deficiencies in the prior art, provide the little electrolysis conduit of the common single-glass of usefulness of a kind of high-level efficiency, high control precision directly to prepare the method for micro-nano size coaxial valve.
Technical solution of the present invention is as follows: a kind of method of making micro-nano size coaxial valve, and it may further comprise the steps:
1) provide the little electrolysis conduit that is used for the microcell electrolytic deposition of an electrically-conductive backing plate and three different size internal diameters (D1, D2, D3), and D1＜D2＜D3;
2) adopt microcell electrolytic deposition system, with internal diameter be little electrolysis conduit of D1 at the columnar structure of electrically-conductive backing plate substrates A material, the diameter of post is D1;
3) being the columnar structure of the A material of D1 around diameter, is that little electrolysis conduit of D2 is the straight tube-like micro-nano structure of the coaxial B material of the columnar structure of A material of D1 at electrically-conductive backing plate substrates and diameter with internal diameter; Because it is the columnar structure of the A material of D1 that inner core has diameter, so seeing separately the structure of B material is the straight tube-like micro-nano structure, the straight tube-like micro-nano structure of seeing on the whole the B material be coated on form on the columnar structure of A material outer for B material inner core be the solid post structure of A material.
4) centering on the external diameter that makes in the step 3) is the B material straight tube-like micro-nano structure of D2, with internal diameter be little electrolysis conduit of D3 at electrically-conductive backing plate with the materials A galvanic deposit straight tube-like micro-nano structure coaxial with B material straight tube-like micro-nano structure, namely obtain micro-nano size coaxial valve.Because it is the straight tube-like micro-nano structure for B material inner core is the solid post structure of A material so see separately the structure of A material that inner core has outer, sees on the whole it is the solid post structure that contains the A material of B material sandwich of layers.
Described D1 is 10nm-200 μ m; Described D2 is 50nm-200 μ m, and D3 is 100nm-500 μ m, wherein D1＜D2＜D3.
As preferably, micro-nano size coaxial valve end is smooth, and the length of described micro-nano size coaxial valve is 100nm-1cm.
As preferably, the solubility difference that can utilize as required A material and B material is with the straight tube-like micro-nano structure dissolving of B material or utilize the chemical property difference of A material and B material with the straight tube-like micro-nano structure corrosion of B material, obtains by materials A inner leg, voided layer and the micro-nano size coaxial valve with voided layer that forms with the coaxial materials A sleeve pipe of materials A inner leg.
As preferably, can adopt as required the array that is formed by a plurality of little electrolysis conduits arrangements according to the method for step 1) to step 4), interlock system is produced micro-nano size coaxial valve array on electrically-conductive backing plate.
The invention has the beneficial effects as follows: prepare tubular structure with method that three-dimensional is write thread coiling and compare, this technology has higher efficient and control accuracy, can be applicable to prepare the miniature electronic parts such as coaxial cable transmission line of micro-nano size.Can adopt the little electrolysis conduit array that is formed by a plurality of little electrolysis conduits arrangements simultaneously according to the method for step 1) to step 5), make micro-nano size coaxial valve array in the electrically-conductive backing plate growth, further improve efficient and control accuracy; Micro-nano size coaxial valve and array thereof that the present invention can also comprise according to the method manufacturing of the technical program more multi-layered structure satisfy different demands.
Description of drawings
Fig. 1 is the structural representation of the little electrolysis conduit of the present invention.
Fig. 2 is electrically-conductive backing plate of the present invention and A material column structural representation.
Fig. 3 is that the present invention forms B material straight tube-like micro-nano structure schematic diagram.
Fig. 4 is micro-nano size coaxial valve schematic diagram of the present invention.
Fig. 5 is band voided layer micro-nano size coaxial valve schematic diagram.
As shown in the figure: 1, little electrolysis conduit, 1.1, little electrolysis conduit outlet, 2, electrically-conductive backing plate, 3, A material columnar structure, 4, B material straight tube-like micro-nano structure, 5, A material straight tube-like micro-nano structure.
Embodiment
The below is described in further details the present invention with specific embodiment, but the present invention not only is confined to following specific embodiment.
Make micro-nano size coaxial valve according to following steps:
1) in conjunction with Fig. 1-Fig. 5, provides the little electrolysis conduit 1 that is used for the microcell electrolytic deposition of an electrically-conductive backing plate 2 and three different size internal diameters (500nm, 1.2 μ m, 2 μ m);
2) the microcell electrolytic deposition system of computer control, with internal diameter be little electrolysis conduit 1 of 500nm at the columnar structure 3 of electrically-conductive backing plate substrates metallic substance tungsten, the diameter of columnar structure 3 is 500nm; Little electrolysis conduit 1 is as a major parts of microcell electrolytic deposition system, little electrolysis conduit 1 energy supply electrolytic solution, outlet 1.1 places at little electrolysis conduit 1 can be at the required material of electrically-conductive backing plate substrates, computer can the little electrolysis conduit of high-precision control in three-dimensional outlet position, last deposition growth goes out the micro-nano structure of desired shape, and principle of work is similar to the 3D printer.
3) being the columnar structure 3 of the tungsten of 500nm around diameter, is that little electrolysis conduit 1 of 1.2 μ m is the straight tube-like micro-nano structure 4 of the coaxial metallic copper of the columnar structure 3 of tungsten of 500nm at electrically-conductive backing plate 2 substrates and diameter with internal diameter; Because it is the columnar structure of the tungsten of 500nm that inner core has diameter, so seeing separately the structure of metallic copper is the straight tube-like micro-nano structure, the straight tube-like micro-nano structure 4 of seeing on the whole metallic copper be coated on form on the columnar structure 3 of tungsten outer for the copper inner core be the solid post structure of tungsten.
4) centering on the external diameter that makes in the step 3) is the metallic copper straight tube-like micro-nano structure 4 of 1.2 μ m, with internal diameter be little electrolysis conduit 1 of 2 μ m at the coaxial straight tube-like micro-nano structure 5 of electrically-conductive backing plate 2 usefulness material of tungsten galvanic deposit and metallic copper straight tube-like micro-nano structure 4, namely obtain micro-nano size coaxial valve.Because it is straight tube-like micro-nano structure 5 for the copper inner core is the solid post structure of tungsten so see separately the structure of outermost metal tungsten that inner core has outer, sees on the whole it is the solid post structure that contains the tungsten of metallic copper sandwich of layers.
Described micro-nano size coaxial valve end is smooth, and the length of described micro-nano size coaxial valve is made as 50 μ m.
As preferably, the chemical property difference that can utilize as required tungsten and metallic copper is straight tube-like micro-nano structure 4 corrosion of metallic copper, obtains by tungsten inner leg, voided layer and the micro-nano size coaxial valve with voided layer that forms with the coaxial tungsten sleeve pipe of tungsten inner leg.
As preferably, can adopt as required the array that is formed by a plurality of little electrolysis conduits 1 arrangements simultaneously according to the method for step 1) to step 4), produce micro-nano size coaxial valve array at electrically-conductive backing plate.
Claims (5)
1. method of making micro-nano size coaxial valve, it is characterized in that: it may further comprise the steps:
1) provide the little electrolysis conduit that is used for the microcell electrolytic deposition of an electrically-conductive backing plate and three different size internal diameters (D1, D2, D3), and D1＜D2＜D3;
2) adopt microcell electrolytic deposition system, with internal diameter be little electrolysis conduit of D1 at the columnar structure of electrically-conductive backing plate substrates A material, the diameter of post is D1;
3) being the columnar structure of the A material of D1 around diameter, is that little electrolysis conduit of D2 is the straight tube-like micro-nano structure of the coaxial B material of the columnar structure of A material of D1 at electrically-conductive backing plate substrates and diameter with internal diameter;
4) centering on the external diameter that makes in the step 3) is the B material straight tube-like micro-nano structure of D2, with internal diameter be little electrolysis conduit of D3 at electrically-conductive backing plate with the materials A galvanic deposit straight tube-like micro-nano structure coaxial with B material straight tube-like micro-nano structure, namely obtain micro-nano size coaxial valve.
2. the method for manufacturing micro-nano size coaxial valve according to claim 1, it is characterized in that: described D1 is 10nm-200 μ m; Described D2 is 50nm-200 μ m, and D3 is 100nm-500 μ m.
3. the method for manufacturing micro-nano size coaxial valve according to claim 1 and 2, it is characterized in that: the length of described micro-nano size coaxial valve is 100nm-1cm.
4. the method for manufacturing micro-nano size coaxial valve according to claim 1, it is characterized in that: the solubility difference of utilizing A material and B material is with the straight tube-like micro-nano structure dissolving of B material or utilize the chemical property difference of A material and B material with the straight tube-like micro-nano structure corrosion of B material, obtains by materials A inner leg, voided layer and the micro-nano size coaxial valve with voided layer that forms with the coaxial materials A sleeve pipe of materials A inner leg.
5. the method for manufacturing micro-nano size coaxial valve according to claim 1 is characterized in that: adopt by a plurality of little electrolysis conduits and arrange the synchronous steps performed 1 of array that forms) to step 4), can produce micro-nano size coaxial valve array at electrically-conductive backing plate.
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Cited By (3)
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| CN105442005A (en) * | 2015-12-01 | 2016-03-30 | 上海交通大学 | Localized electro-deposition method for achieving material surface texturing |
| CN110408978A (en) * | 2019-08-06 | 2019-11-05 | 哈尔滨理工大学 | A kind of metal micro member interconnected method based on electrochemical deposition |
| CN110699716A (en) * | 2019-11-12 | 2020-01-17 | 张家港博发纳米材料科技有限公司 | Method for controlling micro-nano three-dimensional printing process based on optical image recognition technology |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105442005A (en) * | 2015-12-01 | 2016-03-30 | 上海交通大学 | Localized electro-deposition method for achieving material surface texturing |
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| CN110408978A (en) * | 2019-08-06 | 2019-11-05 | 哈尔滨理工大学 | A kind of metal micro member interconnected method based on electrochemical deposition |
| CN110408978B (en) * | 2019-08-06 | 2021-03-30 | 哈尔滨理工大学 | Metal micro-component interconnection method based on electrochemical deposition |
| CN110699716A (en) * | 2019-11-12 | 2020-01-17 | 张家港博发纳米材料科技有限公司 | Method for controlling micro-nano three-dimensional printing process based on optical image recognition technology |
| CN110699716B (en) * | 2019-11-12 | 2022-01-04 | 橙河微系统科技(上海)有限公司 | Method for controlling micro-nano three-dimensional printing process based on optical image recognition technology |
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