CN110699716B - Method for controlling micro-nano three-dimensional printing process based on optical image recognition technology - Google Patents

Method for controlling micro-nano three-dimensional printing process based on optical image recognition technology Download PDF

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CN110699716B
CN110699716B CN201911099236.4A CN201911099236A CN110699716B CN 110699716 B CN110699716 B CN 110699716B CN 201911099236 A CN201911099236 A CN 201911099236A CN 110699716 B CN110699716 B CN 110699716B
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CN110699716A (en
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朱国栋
龚大卫
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Orange River microsystem technology (Shanghai) Co., Ltd
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00Electroforming
    • C25D1/0033D structures, e.g. superposed patterned layers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00Processes of additive manufacturing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y50/00Data acquisition or data processing for additive manufacturing
    • B33Y50/02Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00Electroforming
    • C25D1/006Nanostructures, e.g. using aluminium anodic oxidation templates [AAO]
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00Electroforming
    • C25D1/04Wires; Strips; Foils

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Abstract

The invention provides a method for controlling a micro-nano three-dimensional printing process based on an optical image recognition technology, which applies the optical image recognition technology to the micro-nano three-dimensional printing process and realizes simple, convenient and reliable accurate control of the printing process. The size and the shape of a liquid column formed between a solution in the microtube and the surface of the sample in the micro-nano three-dimensional printing process are observed and quantified in real time through an optical system, and the relative displacement rate between the microtube and the sample is controlled through a feedback system, so that the size and the structure of the liquid column are ensured to be unchanged or changed according to a preset value, and the stable and accurate printing of the micro-nano three-dimensional object is realized.

Description

Method for controlling micro-nano three-dimensional printing process based on optical image recognition technology
Technical Field
The invention relates to the technical field of instrument control, in particular to a method for controlling a micro-nano three-dimensional printing process based on an optical image recognition technology.
Background
In recent years, micro-nano three-dimensional printing technology based on a hollow micro-tube is widely concerned by the industry and academia, such as micro-nano electrochemical metal deposition technology based on meniscus control, polymer nanowire direct writing technology based on direct stretching, and the like. In the micro-nano three-dimensional printing process, the size and the precision of a printed object are determined by the accurate control of the distance between the hollow micro-tube and the deposition surface in the approaching process and the real-time regulation and control of the moving speed of the hollow micro-tube in the micro-nano structure printing process. In the micro-nano electrochemical deposition process, the distance between the micro-tube and the deposition surface and the relative movement rate of the micro-tube and the sample surface in the subsequent electroplating process are regulated and controlled through controlling the electroplating current. The control of the distance between the hollow microtube and the surface of the sample and the deposition rate can also be realized by combining the imaging process of the atomic force microscope and finely controlling the acting force between the hollow microtube and the surface of the sample.
Disclosure of Invention
Aiming at the problems, the invention provides a method for controlling a micro-nano three-dimensional printing process based on an optical image recognition technology, which applies the optical image recognition technology to the micro-nano three-dimensional printing process and realizes simple, convenient and reliable accurate control of the printing process.
A method for controlling a micro-nano three-dimensional printing process based on an optical image recognition technology is characterized by comprising the following steps: the method comprises the following steps of observing and quantifying the size and the shape of a liquid column formed between a solution in a microtube and the surface of a sample in the micro-nano three-dimensional printing process in real time through an optical system, and controlling the relative displacement rate between the microtube and the sample through a feedback system, so as to ensure that the size and the structure of the liquid column are unchanged or changed according to a preset value, wherein the method comprises the following steps: controlling the optical image recognition regulation and control of the distance between the micro-tube and the sample surface in the approaching process and controlling the optical image recognition regulation and control of the size and the precision of a printed object in the subsequent printing process, wherein the optical image recognition regulation and control process of the distance between the micro-tube and the sample surface in the approaching process comprises the following steps: filling a solution required by printing in the micro-tube, and then regulating and controlling the distance between the micro-tube and the surface of the sample by one of an electric motor or a piezoelectric driver according to the requirement of displacement precision required by the three-dimensional micro-nano printing principle to enable the micro-tube and the sample to gradually approach each other; when the distance between the micro tube and the sample is far, the solution filled in the micro tube shrinks in the micro tube due to the capillary force of the micro tube, the small gap causes the capillary force along with the further reduction of the distance between the micro tube and the surface of the sample, the solution in the micro tube extends out from the tip of the micro tube under the action of the capillary force, a liquid column with micro-nano size is formed between the tip of the micro tube and the surface of the sample, and the existence of the liquid column can be observed through an optical microscope, and the size of the liquid column can be determined; as the distance between the tip of the microtube and the surface of the sample is further reduced, the diameter of the liquid column is further increased, the shape is changed, and the change processes are tracked by an optical microscope and are subjected to image acquisition and quantitative operation; the shape and the size of the liquid column are determined through an optical microscope, and the distance between the micro tube and the surface of the sample is controlled, so that the stable and accurate printing of the micro-nano three-dimensional object is realized.
Further: the optical system comprises an objective lens, an ocular lens or a CCD (charge coupled device), a lens cone and a light source, wherein the direction of the lens cone is parallel to the surface of the sample or forms a certain included angle with the surface of the sample.
Further: when the optical system comprises an ocular lens, the size and the shape of the liquid column are observed and determined manually, and the size and the shape of the liquid column in the approaching process and the printing process are regulated and controlled manually, so that the size and the precision of a printed object are controlled; however, the defects of slow feedback time and poor precision exist in manual observation and regulation, and the feedback is easily delayed or excessive.
Further: when the optical system comprises a CCD, the optical image can be directly acquired by a computer in real time and developed by a corresponding software algorithm, the computer system determines the size and the shape of the liquid column in real time, and controls a piezoelectric or motor displacement table through feedback setting to adjust the relative displacement rate of the microtube and the surface of the sample, thereby finally realizing the fine regulation and control of the size and the precision of a printed object.
Further: the applicable micro-nano three-dimensional printing system comprises various systems for carrying out three-dimensional printing based on hollow micro-tubes or MEMS micro-tube arrays filled with various solutions.
Further: according to the difference of the operation principle of the micro-nano three-dimensional printing system, the distance between the micro-tube and the surface of the sample is controlled by an electric motor, a piezoelectric driver or any other feasible displacement device.
Further: the diameter of the hollow micro-tube is between millimeter and hundreds of nanometers, the hollow micro-tube can be processed from various materials, the micro-tube is a capillary tube made of common glass or quartz glass, and the sharpening of the tip of the capillary tube can be further realized by adopting a fusion drawing process if necessary; the microtube is specifically a microtube array consisting of a plurality of microtubes.
Further: the following process of optical image recognition and regulation of the size and precision of the printed object in the printing process is specifically as follows: in the process of printing the approached three-dimensional micro-nano object, the optical image recognition function also plays a role in regulation and control; whether the printing process is continuous or not can be identified and controlled by judging whether the liquid column is stable or not through optical image acquisition and operation; because the size and the precision of the printed object are controlled by the size of the liquid column, the change of the size of the liquid column in the printing process can be judged through optical image recognition, and the displacement rate of the motor or the piezoelectric driver is regulated and controlled through circuit feedback, so that the size of the liquid column in the printing process is ensured to be unchanged or changed according to preset conditions, and the precise regulation and control of the size of the printed object are realized.
The invention is suitable for all instruments and equipment which adopt the hollow microtubes filled with the solution to realize the printing function of the three-dimensional micro-nano structure. The specific implementation of the method can be divided into optical image identification regulation and control of the distance between the hollow microtube and the sample surface in the approaching process and optical image identification regulation and control of the size and the precision of a printed object in the subsequent printing process; the method is different from the prior principle that the distance between the micro-tube and the deposition surface is regulated and controlled by controlling the electroplating current and the relative movement rate of the micro-tube and the sample surface in the subsequent electroplating process, integrates the optical image recognition technology into the micro-nano three-dimensional printing technology, and controls the distance between the micro-tube and the experimental surface and the deposition rate through the shape and the size of liquid drops between the hollow micro-tube and the sample surface to realize the accurate regulation and control of the size of a printed object.
Drawings
FIG. 1 shows the formation and expansion of a liquid column when a solution-filled microtube is brought into proximity with the surface of a sample. FIG. a is a far distance, liquid column not formed; FIG. b shows the formation of a liquid column under capillary force at a slight distance; from c to d, the distance between the microtube and the surface of the sample further decreases, and the size of the liquid column increases.
Fig. 2 is a first configuration mode of an optical system and a micro-nano three-dimensional printing system in an optical image recognition process, and a first configuration mode is that the size of a liquid column is determined through human eye observation and is manually adjusted and controlled; fig. b shows the development of an image recognition algorithm, with real-time control of the size and shape of the liquid column by a software system.
Fig. 3 is a second configuration mode of an optical system and a micro-nano three-dimensional printing system in the process of optical image recognition, and a second configuration mode is that the size of a liquid column is determined through human eye observation and is manually adjusted and controlled; fig. b shows the development of an image recognition algorithm, with real-time control of the size and shape of the liquid column by a software system.
FIG. 4 shows the formation and broadening process of a liquid column as a capillary filled with 0.05M copper sulfate solution is gradually brought closer to a slide on which a 100nm gold layer is deposited, and the tip of the capillary is gradually brought closer to the surface of a sample from a view a to a view d.
Fig. 5 is a schematic diagram of a process for realizing growth of copper nanowires by a micro-nano three-dimensional electrochemical deposition technology and an optical image recognition and feedback control algorithm.
The names corresponding to the sequence numbers in the figure are as follows:
an objective lens 1, an ocular lens 2, a CCD3, a lens barrel 4, a sample 5, a computer 6, a micro-tube 7, a displacement table 8, a liquid column 9, a micro-tube tip 10, an electroplating solution 11 and a copper layer 12.
Detailed Description
A method for controlling a micro-nano three-dimensional printing process based on an optical image recognition technology comprises the following steps: the size and the shape of a liquid column formed between a solution in the microtube and the surface of the sample in the micro-nano three-dimensional printing process are observed and quantified in real time through an optical system, and the relative displacement rate between the microtube and the sample is controlled through a feedback system, so that the size and the structure of the liquid column are ensured to be unchanged or changed according to a preset value, and the stable and accurate printing of the micro-nano three-dimensional object is realized.
The optical system comprises an objective lens 1, an ocular lens 2 or a CCD3, a lens cone 4 and a light source (not shown in the figure and belonging to the prior art), wherein the direction of the lens cone 4 is parallel to the surface of the sample 5 or forms an included angle with the surface of the sample 5.
When the optical system comprises an eyepiece, see fig. 2a, fig. 3 a: manually observing and determining the size and shape of the liquid column, and manually regulating and controlling the size and shape of the liquid column in the approaching process and the printing process so as to control the size and precision of the printed object; however, the defects of slow feedback time and poor precision exist in manual observation and regulation, and the feedback is easily delayed or excessive.
When the optical system includes a CCD, see fig. 2b, fig. 3 b: the optical image can be directly acquired by the computer 6 in real time, is developed by a corresponding software algorithm, the size and the shape of the liquid column are determined by a computer system in real time, the piezoelectric or motor displacement table is controlled by feedback setting, and the relative displacement rate of the microtube and the surface of the sample is adjusted, so that the size and the precision of a printed object are finely regulated and controlled finally.
The applicable micro-nano three-dimensional printing system comprises various systems for carrying out three-dimensional printing based on hollow micro-tubes or MEMS micro-tube arrays filled with various solutions.
According to the difference of the operation principle of the micro-nano three-dimensional printing system, the control of the distance between the micro-tube and the surface of the sample can be realized through an electric motor, a piezoelectric driver or any other feasible displacement device.
The diameter of the hollow micro-tube is between millimeter and hundreds of nanometers, the hollow micro-tube can be processed by various materials, and when the micro-tube is a capillary tube made of common glass or quartz glass, the sharpening of the tip of the capillary tube can be further realized by adopting a fusion drawing process if necessary to form the tip of the micro-tube; when the microtubes are microtubes arrays formed by a plurality of microtubes, the microtubes are specifically thinned into microtubes arrays prepared by adopting a microelectronic MEMS process.
The method comprises two parts of optical image identification and regulation of the distance between the hollow microtube and the sample surface in the approaching process and optical image identification and regulation of the size and the precision of a printed object in the subsequent printing process.
The optical image identification and regulation process of the distance between the hollow microtube and the sample surface in the approaching process is as follows: the hollow microtube is filled with electroplating solution 11 required by printing, and then the surface distance between the hollow microtube 7 and the sample 5 is regulated and controlled by an electric motor or a piezoelectric driver according to the requirement of displacement precision required by the three-dimensional micro-nano printing principle, so that the hollow microtube and the sample gradually approach to each other. When the distance between the micro tube and the sample is far away, the solution filled in the micro tube shrinks in the micro tube due to the capillary force of the hollow micro tube 7, the small gap causes the capillary force along with the further reduction of the surface distance between the micro tube 7 and the sample 5, the solution in the micro tube extends out from the tip of the micro tube under the capillary force, a micro-nano liquid column 9 is formed between the tip of the micro tube and the surface of the sample, and the existence of the liquid column 9 can be observed through an optical microscope, and the size of the liquid column is determined; as the distance between the tip 10 of the microtube and the surface of the sample 5 is further reduced, the diameter of the liquid column 9 is further increased, the shape is changed, and the change processes are tracked by an optical microscope and are subjected to image acquisition and quantitative operation; therefore, the shape and the size of the liquid column are determined through the optical microscope, the distance between the microtube and the surface of the sample is accurately controlled, and the damage to the sample and the tip of the microtube caused by the overapproximation is avoided.
The following process of optical image recognition and regulation of the size and precision of the printed object in the printing process is specifically as follows: in the process of printing the approached three-dimensional micro-nano object, the optical image recognition function also plays a role in regulation and control; whether the printing process is continuous or not can be identified and controlled by judging whether the liquid column 9 is stable or not through optical image acquisition and operation; because the size and the precision of the printed object are controlled by the size of the liquid column 9, the change of the size of the liquid column 9 in the printing process can be judged through optical image recognition, the displacement rate of the motor or the piezoelectric driver is regulated and controlled through circuit feedback, the size of the liquid column in the printing process is ensured to be unchanged or changed according to preset conditions, and the accurate regulation and control of the size of the printed object are realized.
Example one, see fig. 4: the embodiment introduces that in the micro-nano three-dimensional electrochemical deposition process, the size and the shape of a liquid column are observed and determined to change along with the distance between a micro-tube and the surface of a sample based on an optical image recognition technology. The solution was an aqueous solution of copper sulfate, at a concentration of 0.05 mol/l. A common glass capillary tube with the outer diameter of 1.5mm and the inner diameter of 0.86mm is adopted as a micro tube. The capillary was melt drawn using a commercial pin puller to give a capillary tip having an outside diameter of about 10 microns. The sample was a glass slide with a 100nm gold layer plated on the surface. FIG. 4 shows the formation and gradual expansion of a liquid column as the distance between the tip of a microtube and the surface of a sample changes, as photographed by an optical system equipped with a CCD module. The lens barrel of the optical system is parallel to the surface of the sample during shooting. In the diagram a, the microtube is far away from the surface of the sample, and a liquid column is not formed yet. As the distance between the two is further reduced, a fine liquid column forms (fig. b). With further decrease in distance, the liquid column gradually widens (fig. c and d).
Example two, see fig. 5: the embodiment introduces a method for regulating and controlling the size of a liquid column based on an optical image recognition technology in the micro-nano three-dimensional electrochemical deposition process so as to regulate and control the stable deposition process of a copper nanowire. The microtubes 7 and samples 5 used were the same as in example one. And a Z-direction piezoelectric driver is adopted to accurately control the relative displacement rate between the microtube 7 and the sample 5 in the electrodeposition process. Before working, a thin channel wire is inserted into the micro tube 7, the other end of the wire is connected with the anode of a voltage source, and the cathode or the grounding end of the voltage source is electrically connected with the gold layer on the surface of the sample, so that an electric loop is formed. Figure 5 is a schematic diagram of a copper micron wire electrodeposition process. For simplicity, components such as computer feedback, optical systems, and Z-direction piezoelectric actuators are not shown. The graph a shows that the microtube approaches the surface of a sample and forms a stable liquid column, a voltage source begins to apply a constant voltage of +0.3V, the microtube is controlled by the Z-direction piezoelectric driver to start to be away from the surface of the sample, an optical image is collected by a computer system and analyzed by a developed algorithm, and the displacement rate of the Z-direction piezoelectric driver is controlled by circuit feedback, so that the size of the liquid column is ensured to be unchanged in the displacement process of the piezoelectric driver. At this time, under positive voltage bias, the copper layer starts to deposit on the surface of the sample 5 (fig. b), and as the distance between the micro-tube and the surface of the sample 5 is further increased under the control of the piezoelectric actuator, the thickness of the copper layer 12 is increased along with the optical image recognition and feedback to form a micro-wire structure, and the diameter of each wire is the same.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims (8)

1. A method for controlling a micro-nano three-dimensional printing process based on an optical image recognition technology is characterized by comprising the following steps: the method comprises the following steps of observing and quantifying the size and the shape of a liquid column formed between a solution in a microtube and the surface of a sample in the micro-nano three-dimensional printing process in real time through an optical system, and controlling the relative displacement rate between the microtube and the sample through a feedback system, so as to ensure that the size and the structure of the liquid column are unchanged or changed according to a preset value, wherein the method comprises the following steps: controlling the optical image recognition regulation and control of the distance between the micro-tube and the sample surface in the approaching process and controlling the optical image recognition regulation and control of the size and the precision of a printed object in the subsequent printing process, wherein the optical image recognition regulation and control process of the distance between the micro-tube and the sample surface in the approaching process comprises the following steps: filling a solution required by printing in the micro-tube, and then regulating and controlling the distance between the micro-tube and the surface of the sample by one of an electric motor or a piezoelectric driver according to the requirement of displacement precision required by the three-dimensional micro-nano printing principle to enable the micro-tube and the sample to gradually approach each other; when the distance between the micro tube and the sample is far, the solution filled in the micro tube shrinks in the micro tube due to the capillary force of the micro tube, the small gap causes the capillary force along with the further reduction of the distance between the micro tube and the surface of the sample, the solution in the micro tube extends out from the tip of the micro tube under the action of the capillary force, a liquid column with micro-nano size is formed between the tip of the micro tube and the surface of the sample, and the existence of the liquid column can be observed through an optical microscope, and the size of the liquid column can be determined; as the distance between the tip of the microtube and the surface of the sample is further reduced, the diameter of the liquid column is further increased, the shape is changed, and the change processes are tracked by an optical microscope and are subjected to image acquisition and quantitative operation; the shape and the size of the liquid column are determined through an optical microscope, and the distance between the micro tube and the surface of the sample is controlled, so that the stable and accurate printing of the micro-nano three-dimensional object is realized.
2. The method for controlling the micro-nano three-dimensional printing process based on the optical image recognition technology according to claim 1, wherein the method comprises the following steps: the optical system comprises an objective lens, an ocular lens or a CCD (charge coupled device), a lens cone and a light source, wherein the direction of the lens cone is parallel to the surface of the sample or forms a certain included angle with the surface of the sample.
3. The method for controlling the micro-nano three-dimensional printing process based on the optical image recognition technology according to claim 2, wherein the method comprises the following steps: when the optical system comprises an ocular lens, the size and the shape of the liquid column are observed and determined manually, and the size and the shape of the liquid column in the approaching process and the printing process are regulated and controlled manually, so that the size and the precision of a printed object are controlled; however, the defects of slow feedback time and poor precision exist in manual observation and regulation, and the feedback is easily delayed or excessive.
4. The method for controlling the micro-nano three-dimensional printing process based on the optical image recognition technology according to claim 2, wherein the method comprises the following steps: when the optical system comprises a CCD, the optical image can be directly acquired by a computer in real time and developed by a corresponding software algorithm, the computer system determines the size and the shape of the liquid column in real time, and controls a piezoelectric or motor displacement table through feedback setting to adjust the relative displacement rate of the microtube and the surface of the sample, thereby finally realizing the fine regulation and control of the size and the precision of a printed object.
5. The method for controlling the micro-nano three-dimensional printing process based on the optical image recognition technology according to claim 1, wherein the method comprises the following steps: the applicable micro-nano three-dimensional printing system comprises various systems for carrying out three-dimensional printing based on hollow micro-tubes or MEMS micro-tube arrays filled with various solutions.
6. The method for controlling the micro-nano three-dimensional printing process based on the optical image recognition technology according to claim 1, wherein the method comprises the following steps: according to the difference of the operation principle of the micro-nano three-dimensional printing system, the distance between the micro-tube and the surface of the sample is controlled by an electric motor, a piezoelectric driver or any other feasible displacement device.
7. The method for controlling the micro-nano three-dimensional printing process based on the optical image recognition technology according to claim 1, wherein the method comprises the following steps: the diameter of the hollow micro-tube is between millimeter and hundreds of nanometers, the hollow micro-tube is processed from various materials, the micro-tube is a capillary tube made of common glass or quartz glass, and the sharpening of the tip of the capillary tube is further realized by adopting a fusion drawing process; the microtube is specifically a microtube array consisting of a plurality of microtubes.
8. The method for controlling the micro-nano three-dimensional printing process based on the optical image recognition technology according to claim 1, wherein the method comprises the following steps: the following process of optical image recognition and regulation of the size and precision of the printed object in the printing process is specifically as follows: in the process of printing the approached three-dimensional micro-nano object, the optical image recognition function also plays a role in regulation and control; whether the printing process is continuous or not can be identified and controlled by judging whether the liquid column is stable or not through optical image acquisition and operation; because the size and the precision of the printed object are controlled by the size of the liquid column, the change of the size of the liquid column in the printing process can be judged through optical image recognition, and the displacement rate of the motor or the piezoelectric driver is regulated and controlled through circuit feedback, so that the size of the liquid column in the printing process is ensured to be unchanged or changed according to preset conditions, and the precise regulation and control of the size of the printed object are realized.
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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103305884A (en) * 2013-06-06 2013-09-18 宁波微极电子科技有限公司 Method for manufacturing micro-nano coaxial tube
CN103590076A (en) * 2013-11-28 2014-02-19 铜陵学院 Laser-reinforced electrodeposition rapid-prototyping processing apparatus and method
CN205474039U (en) * 2016-03-24 2016-08-17 河南理工大学 System for three -dimensional metal micro -structure of electrochemical machining
CN106801248A (en) * 2017-02-03 2017-06-06 中山大学 The preparation facilities and method of a kind of three-dimensional micro-nano structure device
CN107937939A (en) * 2017-11-16 2018-04-20 中国科学院宁波材料技术与工程研究所 Three-dimensional fine metal structure increases the manufacture method and its manufacture device of material
CN110093641A (en) * 2019-04-23 2019-08-06 河南理工大学 A kind of micro-structure is without magnetic property method and system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103305884A (en) * 2013-06-06 2013-09-18 宁波微极电子科技有限公司 Method for manufacturing micro-nano coaxial tube
CN103590076A (en) * 2013-11-28 2014-02-19 铜陵学院 Laser-reinforced electrodeposition rapid-prototyping processing apparatus and method
CN205474039U (en) * 2016-03-24 2016-08-17 河南理工大学 System for three -dimensional metal micro -structure of electrochemical machining
CN106801248A (en) * 2017-02-03 2017-06-06 中山大学 The preparation facilities and method of a kind of three-dimensional micro-nano structure device
CN107937939A (en) * 2017-11-16 2018-04-20 中国科学院宁波材料技术与工程研究所 Three-dimensional fine metal structure increases the manufacture method and its manufacture device of material
CN110093641A (en) * 2019-04-23 2019-08-06 河南理工大学 A kind of micro-structure is without magnetic property method and system

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