CN103305884B - Manufacture the method for micro-nano coaxial tube - Google Patents
Manufacture the method for micro-nano coaxial tube Download PDFInfo
- Publication number
- CN103305884B CN103305884B CN201310224867.0A CN201310224867A CN103305884B CN 103305884 B CN103305884 B CN 103305884B CN 201310224867 A CN201310224867 A CN 201310224867A CN 103305884 B CN103305884 B CN 103305884B
- Authority
- CN
- China
- Prior art keywords
- micro
- nano
- conduit
- light electrolysis
- electrically
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The invention discloses a kind of method manufacturing micro-nano coaxial tube, it comprises the following steps: the light electrolysis conduit 1) providing an electrically-conductive backing plate and three different size internal diameters (D1, D2, D3), and D1 & lt; D2 & lt; D3; 2) adopt microcell electrowinning systems, be the columnar structure of light electrolysis conduit at electrically-conductive backing plate substrates A material of D1 with internal diameter, the diameter of post is D1; 3) around diameter being the columnar structure of A material of D1, is the straight tube-like micro-nano structure of light electrolysis conduit at electrically-conductive backing plate substrates B material of D2 with internal diameter; 4) obtained in step 3) external diameter is the B material straight tube-like micro-nano structure of D2, on electrically-conductive backing plate, use materials A galvanic deposit straight tube-like micro-nano structure with the light electrolysis conduit that internal diameter is D3, the present invention can utilize the direct preparation micro-nano coaxial tube of common single-glass light electrolysis conduit high-level efficiency, high control precision.
Description
Technical field
The present invention relates to micro-nano material and manufacture field, is specifically a kind of method manufacturing micro-nano coaxial tube.
Background technology
Micro-nano structure is the material structure of a kind of micron or nanoscale, micro-nano structure array is the orderly material structure of the arrangement of a kind of micron or nanoscale, material can be metal, pottery, semi-conductor or organic materials, there is specific electricity, magnetics, optics and mechanical characteristic and function, be applied to various microelectronics and photoelectric chip manufacture, precision optical machinery processing and medical device field.And micro-nano coaxial tube is refered in particular in the metal of micron and nanoscale, semi-conductor or ceramic coaxial valve structure.
Microcell electrolytic deposition technology is a kind of micro-nano technology technology based on Scanning probe technique (SPT), and its principle adopts bore at the light electrolysis conduit of micro-nano size as the supply source of electrolytic solution, realizes the growth of microcell electrochemical deposition.Microcell electrowinning systems is made up of computer and circuit amplifier, piezoelectric bar (or precision motor and drive shaft), light electrolysis conduit and the electrolytic solution filled in light electrolysis conduit.Computer and circuit amplifier provide and control three road voltages and export, every road voltage driven piezoelectric bar (or precision motor), change the light electrolysis conduit that three road voltage output values just can make to be fixed on three piezoelectric bar (or motor drive shaft) point of intersection of X, Y, Z axis and do three-dimensional motion, the current potential simultaneously controlling electrolytic solution in light electrolysis conduit carries out the microcell galvanic deposit of material, realizes the deposition growth of three-dimensional micro-nano structure; Principle of work is similar to 3D printer, can referenced patent US7955486.
Microcell electrolytic deposition technology is owing to combining the similar Piezoelectric Control Technology of SPT, high precision control can be carried out at three-dimensional space to Material growth position (i.e. light electrolysis conduit outlet point), as: the nano metal post etc. growing ordered arrangement on the silicon substrate of conduction.Therefore, microcell electrolytic deposition technology is that a kind of three-dimensional straight of novelty writes the micro-nano structure growing technology that declines, and can be used for manufacturing three-dimensional micro-nano structure and array thereof.
Light electrolysis conduit is the key part of microcell electrowinning systems (have employed the system of microcell electrolytic deposition technology), the light electrolysis conduit of current use is the common mono-layer tube of glass-pulling, and what directly formed in process of growth is solid column or thread micro-nano structure.When preparing tubular structure by above-mentioned technology, adopt at present three-dimensional method of writing thread coiling, its efficiency and control accuracy low.
Summary of the invention
Technical problem to be solved by this invention is: overcome above the deficiencies in the prior art, provides a kind of method directly preparing micro-nano coaxial tube with common single-glass light electrolysis conduit of high-level efficiency, high control precision.
Technical solution of the present invention is as follows: a kind of method manufacturing micro-nano coaxial tube, and it comprises the following steps:
1) the light electrolysis conduit for microcell electrolytic deposition of an electrically-conductive backing plate and three different size internal diameters (D1, D2, D3) is provided, and D1<D2<D3;
2) adopt microcell electrowinning systems, be the columnar structure of light electrolysis conduit at electrically-conductive backing plate substrates A material of D1 with internal diameter, the diameter of post is D1;
3) around diameter be the columnar structure of A material of D1, the straight tube-like micro-nano structure of the B material that the columnar structure of to be the light electrolysis conduit of D2 with internal diameter at electrically-conductive backing plate substrates and diameter the be A material of D1 is coaxial; Because inner core has diameter to be the columnar structure of the A material of D1, so see that separately the structure of B material is straight tube-like micro-nano structure, see on the whole the columnar structure that the straight tube-like micro-nano structure of B material is coated on A material formed outer for B material inner core be the solid post structure of A material.
4) obtained in step 3) external diameter is the B material straight tube-like micro-nano structure of D2, with the straight tube-like micro-nano structure that the light electrolysis conduit that internal diameter is D3 uses materials A galvanic deposit coaxial with B material straight tube-like micro-nano structure on electrically-conductive backing plate, namely obtain micro-nano coaxial tube.Due to inner core have outer for B material inner core be the solid post structure of A material, so see that separately the structure of A material is straight tube-like micro-nano structure, see it is the solid post structure of A material containing B material clip central layer on the whole.
Described D1 is 10nm-200 μm; Described D2 is 50nm-200 μm, D3 is 100nm-500 μm, wherein D1<D2<D3.
As preferably, micro-nano coaxial tube end is smooth, and the length of described micro-nano coaxial tube is 100nm-1cm.
As preferably, the solubility difference of A material and B material can be utilized as required to be dissolved by the straight tube-like micro-nano structure of B material or utilize the chemical property difference of A material and B material to be corroded by the straight tube-like micro-nano structure of B material, obtain the micro-nano coaxial tube of the band voided layer be made up of materials A inner leg, voided layer and the materials A sleeve pipe coaxial with materials A inner leg.
As preferably, can to adopt as required by the array of multiple light electrolysis vessel arrangment according to step 1) to the method for step 4), on electrically-conductive backing plate, interlock system produces micro-nano coaxial tube array.
The invention has the beneficial effects as follows: compared with preparing tubular structure with the method that three-dimensional writes thread coiling, this technology has higher efficiency and control accuracy, can be applicable to the miniature electrical components such as the coaxial cable transmission line preparing micro-nano size.Can to adopt by the light electrolysis conduit array of multiple light electrolysis vessel arrangment simultaneously according to step 1) to the method for step 5), on electrically-conductive backing plate, growth manufactures micro-nano coaxial tube array, further increases efficiency and control accuracy; The present invention can also comprise the micro-nano coaxial tube of more multi-layered structure according to the method manufacture of the technical program and array meets different demand.
Accompanying drawing explanation
Fig. 1 is the structural representation of light electrolysis conduit of the present invention.
Fig. 2 is electrically-conductive backing plate of the present invention and A material column structural representation.
Fig. 3 is that the present invention forms B material straight tube-like micro-nano structure schematic diagram.
Fig. 4 is micro-nano coaxial tube schematic diagram of the present invention.
Fig. 5 is band voided layer micro-nano coaxial tube schematic diagram.
As shown in the figure: 1, light electrolysis conduit, 1.1, light electrolysis conduit outlet, 2, electrically-conductive backing plate, 3, A material columnar structure, 4, B material straight tube-like micro-nano structure, 5, A material straight tube-like micro-nano structure.
Embodiment
With specific embodiment, the present invention is described in further details below, but the present invention is not only confined to following specific embodiment.
Micro-nano coaxial tube is manufactured according to following steps:
1) composition graphs 1-Fig. 5, provides the light electrolysis conduit 1 for microcell electrolytic deposition of an electrically-conductive backing plate 2 and three different size internal diameters (500nm, 1.2 μm, 2 μm);
2) the microcell electrowinning systems of computer control, be the columnar structure 3 of light electrolysis conduit 1 at electrically-conductive backing plate substrates metallic substance tungsten of 500nm with internal diameter, the diameter of columnar structure 3 is 500nm; Light electrolysis conduit 1 is as a major parts of microcell electrowinning systems, light electrolysis conduit 1 energy supply electrolytic solution, can material needed for electrically-conductive backing plate substrates at outlet 1.1 place of light electrolysis conduit 1, computer can high-precision control light electrolysis conduit in three-dimensional outlet position, last deposition growth goes out the micro-nano structure of desired shape, and principle of work is similar to 3D printer.
3) around diameter be the columnar structure 3 of tungsten of 500nm, the straight tube-like micro-nano structure 4 of to be the light electrolysis conduit 1 of 1.2 μm with internal diameter at electrically-conductive backing plate 2 substrates and diameter the be coaxial metallic copper of the columnar structure 3 of the tungsten of 500nm; Because inner core has diameter to be the columnar structure of the tungsten of 500nm, so see that separately the structure of metallic copper is straight tube-like micro-nano structure, see on the whole the columnar structure 3 that the straight tube-like micro-nano structure 4 of metallic copper is coated on tungsten formed outer for copper inner core be the solid post structure of tungsten.
4) obtained in step 3) external diameter is the metallic copper straight tube-like micro-nano structure 4 of 1.2 μm, with the straight tube-like micro-nano structure 5 that the light electrolysis conduit 1 that internal diameter is 2 μm uses material of tungsten galvanic deposit coaxial with metallic copper straight tube-like micro-nano structure 4 on electrically-conductive backing plate 2, namely obtain micro-nano coaxial tube.Due to inner core have outer for copper inner core be the solid post structure of tungsten, so see that separately the structure of outermost metal tungsten is straight tube-like micro-nano structure 5, see it is the solid post structure of tungsten containing metallic copper sandwich of layers on the whole.
Described micro-nano coaxial tube end is smooth, and the length of described micro-nano coaxial tube is set to 50 μm.
As preferably, the chemical property difference of tungsten and metallic copper can be utilized as required to be corroded by the straight tube-like micro-nano structure 4 of metallic copper, obtain the micro-nano coaxial tube of the band voided layer be made up of tungsten inner leg, voided layer and the tungsten sleeve pipe coaxial with tungsten inner leg.
As preferably, can adopt as required the array that arranged by multiple light electrolysis conduit 1 simultaneously according to step 1) to the method for step 4), electrically-conductive backing plate produces micro-nano coaxial tube array.
Claims (3)
1. manufacture a method for micro-nano coaxial tube, it is characterized in that: it comprises the following steps:
1) the light electrolysis conduit for microcell electrolytic deposition of an electrically-conductive backing plate and three different size internal diameters (D1, D2, D3) is provided, and D1<D2<D3;
2) adopt microcell electrowinning systems, be the columnar structure of light electrolysis conduit at electrically-conductive backing plate substrates A material of D1 with internal diameter, the diameter of post is D1;
3) around diameter be the columnar structure of A material of D1, the straight tube-like micro-nano structure of the B material that the columnar structure of to be the light electrolysis conduit of D2 with internal diameter at electrically-conductive backing plate substrates and diameter the be A material of D1 is coaxial;
4) around step 3) in obtained external diameter be the B material straight tube-like micro-nano structure of D2, with the straight tube-like micro-nano structure that the light electrolysis conduit that internal diameter is D3 uses materials A galvanic deposit coaxial with B material straight tube-like micro-nano structure on electrically-conductive backing plate, namely obtain micro-nano coaxial tube;
Utilize the solubility difference of A material and B material dissolved by the straight tube-like micro-nano structure of B material or utilize the chemical property difference of A material and B material to be corroded by the straight tube-like micro-nano structure of B material, obtain the micro-nano coaxial tube of the band voided layer be made up of materials A inner leg, voided layer and the materials A sleeve pipe coaxial with materials A inner leg; Adopt by the synchronous steps performed 1 of the array of multiple light electrolysis vessel arrangment) to step 4), electrically-conductive backing plate produces micro-nano coaxial tube array.
2. the method for manufacture micro-nano coaxial tube according to claim 1, is characterized in that: described D1 is 10nm-200 μm; Described D2 is 50nm-200 μm, D3 is 100nm-500 μm.
3. the method for manufacture micro-nano coaxial tube according to claim 1 and 2, is characterized in that: the length of described micro-nano coaxial tube is 100nm-1cm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310224867.0A CN103305884B (en) | 2013-06-06 | 2013-06-06 | Manufacture the method for micro-nano coaxial tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310224867.0A CN103305884B (en) | 2013-06-06 | 2013-06-06 | Manufacture the method for micro-nano coaxial tube |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103305884A CN103305884A (en) | 2013-09-18 |
| CN103305884B true CN103305884B (en) | 2015-10-28 |
Family
ID=49131590
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310224867.0A Active CN103305884B (en) | 2013-06-06 | 2013-06-06 | Manufacture the method for micro-nano coaxial tube |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103305884B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105442005B (en) * | 2015-12-01 | 2018-08-31 | 上海交通大学 | A kind of textured local plating method of realization material surface |
| CN110408978B (en) * | 2019-08-06 | 2021-03-30 | 哈尔滨理工大学 | Metal micro-component interconnection method based on electrochemical deposition |
| CN110699716B (en) * | 2019-11-12 | 2022-01-04 | 橙河微系统科技(上海)有限公司 | Method for controlling micro-nano three-dimensional printing process based on optical image recognition technology |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101260552A (en) * | 2008-04-23 | 2008-09-10 | 哈尔滨工程大学 | Surface reproducing method for root canal appliance |
| US20090000364A1 (en) * | 2007-02-20 | 2009-01-01 | Min-Feng Yu | Electrochemical deposition platform for nanostructure fabrication |
| CN101864587A (en) * | 2009-04-20 | 2010-10-20 | 鸿富锦精密工业（深圳）有限公司 | Device and method for forming nanoscale metal particles/metal composite coatings |
| CN102205944A (en) * | 2011-04-19 | 2011-10-05 | 北京化工大学 | Device and method for manufacturing micro-nano structure |
| CN102766892A (en) * | 2012-08-10 | 2012-11-07 | 重庆绿色智能技术研究院 | Micro-nano processing method and device |
-
2013
- 2013-06-06 CN CN201310224867.0A patent/CN103305884B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090000364A1 (en) * | 2007-02-20 | 2009-01-01 | Min-Feng Yu | Electrochemical deposition platform for nanostructure fabrication |
| CN101260552A (en) * | 2008-04-23 | 2008-09-10 | 哈尔滨工程大学 | Surface reproducing method for root canal appliance |
| CN101864587A (en) * | 2009-04-20 | 2010-10-20 | 鸿富锦精密工业（深圳）有限公司 | Device and method for forming nanoscale metal particles/metal composite coatings |
| CN102205944A (en) * | 2011-04-19 | 2011-10-05 | 北京化工大学 | Device and method for manufacturing micro-nano structure |
| CN102766892A (en) * | 2012-08-10 | 2012-11-07 | 重庆绿色智能技术研究院 | Micro-nano processing method and device |
Non-Patent Citations (2)
| Title |
|---|
| 微纳米加工技术及其应用综述;崔铮;《物理》;20060112;第35卷(第1期);第34-39页 * |
| 电化学扫描探针显微镜在表面微/纳米加工的应用;汤儆等;《微纳电子技术》;20030825(第7/8期);第192-196页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103305884A (en) | 2013-09-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103305884B (en) | Manufacture the method for micro-nano coaxial tube | |
| Duan et al. | Optically active nanostructured ZnO films | |
| CN104458813B (en) | Nano-pore measurement system based on diamond like carbon film and preparation method thereof | |
| CN103056463B (en) | Manufacturing method for carbon nano tube tool electrode for micro electrochemical machining and multi-functional working tanks | |
| CN102244051A (en) | High-performance directional heat conduction copper-base diamond composite material and preparation method thereof | |
| CN106461042A (en) | Methods and apparatus for compact series linear actuators | |
| CN102732885B (en) | Magnetic-field-assisted silicon micro-nano processing technology and equipment | |
| CN103668367B (en) | The manufacture method of micro-nano structure array fin | |
| CN103628106A (en) | Method for preparing indium/tellurium porous nanowire array | |
| Wang et al. | Fabrication of micro copper walls by localized electrochemical deposition through the layer by layer movement of a micro anode | |
| CN102618914B (en) | Photon-assisted porous silicon electrochemical etching tank | |
| CN103708414B (en) | A kind of preparation of magnetic nanometer array and transfer method | |
| CN204867693U (en) | Discontinuous micro -structure electric machining instrument head of micro heat pipe inner wall and processingequipment | |
| CN103320825B (en) | Method for manufacturing high-density large-scale micro-nano-structure array | |
| CN203593801U (en) | Laser strengthening electro-deposition rapid prototyping processing device | |
| CN102684068A (en) | Tunable laser based on nanowire array and preparation process thereof | |
| CN101423760B (en) | High fluorescent efficiency cadmium telluride quantum point prepared by cathodic tellurium electric pole | |
| CN202007125U (en) | System for batch preparation of three-dimensional microstructures with large aspect ratio | |
| CN101984142A (en) | Device for generating single-size micro nano bubbles by micro nano probe electrolysis | |
| CN103337564A (en) | Method for preparing metal nanoparticles capable of improving LED luminous efficiency | |
| CN105668561A (en) | Method for preparing high-orientation graphene nano structure | |
| CN102393450B (en) | Magnetic tweezers probe based on optical fiber | |
| Koledov et al. | Nano-nanomanipulation of CdSe nanowires using nano-tweezers based on shape memory alloys | |
| Bai et al. | A single micro-LED manipulation system based on micro-gripper | |
| Pei et al. | Flexible nozzle based liquid metal direct writing system assisted in patterned silicon nanowires |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |