CN103302368B - Three-electrode high-frequency ultrashort pulse micro electrochemical machining power supply and electrochemical machining method thereof - Google Patents
Three-electrode high-frequency ultrashort pulse micro electrochemical machining power supply and electrochemical machining method thereof Download PDFInfo
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Abstract
The invention discloses a three-electrode high-frequency ultrashort pulse micro electrochemical machining power supply and an electrochemical machining method thereof in the technical field of electrochemical machining. The electrochemical machining power supply comprises a first high speed amplifier, a second high speed amplifier, a tool electrode, an auxiliary electrode, a workpiece electrode and a water-based inactive electrolyte, wherein the auxiliary electrode, the tool electrode and the workpiece electrode are used for being applied with synchronous negative pulse machining voltages with the same pulse width, the same cycle, different amplitudes and high-frequency ultrashort composite machining waveforms; the auxiliary electrode is used for guiding hydrogen ions gathered on the lower end face of the tool electrode and allows the hydrogen ions to produce hydrogen after the hydrogen ions obtain electrons; the auxiliary electrode is also used for reducing the oxygen evolution amount of the workpiece electrode 9 and prompting selective dissolution of a metallic material to be machined; and the invention provides the electrochemical machining method using the power supply. According to the power supply and the method, the loss of the tool electrode is restrained, the selective dissolution of the machined metallic material is promoted, and the machining efficiency and machining stability are improved.
Description
Technical field
The invention belongs to technical field of electrolysis processing, particularly relate to a kind of three electrode high-frequency ultrashort pulse electrochemical micromachining power supply and processing methods thereof.
Background technology
Electrolyzed Processing (Electrochemical Machining, ECM) utilizes electric current to flow through machining gap anode metal is dissolved in the electrolytic solution in the form of an ion, thus by a kind of processing method shaping for anode metal work pieces process.Electrolyzed Processing and traditional machining and conventional special process method (Laser Processing, electron beam process, ion beam processing, Ultrasonic machining, spark machined etc.) are Comparatively speaking, there is following advantage: applied range, every conductive material all can be processed, and not affected by the intensity of material, hardness and toughness etc.; Workpiece material is removed in the form of an ion, and theoretical machining accuracy is high, can reach micron even nanoscale; Surface quality is good, without heat affected layer, after processing, surface of the work is without residual stress and burr etc.Conventional yardstick Electrolyzed Processing has become a kind of indispensable manufacturing process in manufacture field.Since the nineties in last century, along with the continuing to bring out and growing to high accuracy high-quality micro three-dimensional structure metal parts demand of metal alloy compositions of excellent performance, impel electrochemical micromachining (Micro-ECM or μ ECM) to have and developed rapidly.
In electrochemical micromachining, in order to improve processing locality, reduce dispersion corrosion and reduce workpiece surface roughness, the process of usual employing is: utilize lateral wall insulation electrode, in the water base passivity electrolyte of low concentration, by controlling the technological parameters such as the amplitude of high frequency pulse power supply, frequency, electrode feed speed and machining gap, improve machining accuracy and crudy.Wherein, electrochemical reaction mechanism from metal/solution interface, utilize high-frequency pulse current to the temporary steady-state process of interfacial electric double layer charge and discharge, work out the new technical means of high-frequency ultrashort pulse electrochemical micromachining, substantially increase the locality of electrochemical micromachining, achieving the machining accuracy of micron/submicron, is an important research direction in electrochemical micromachining field.High-frequency ultrashort pulse power supply (pulsewidth is hundreds of μ s to tens of ns) is one of key equipment in electrochemical micromachining field.
Successively there is the multiple high frequency pulse power supply for electrochemical micromachining both at home and abroad at present, compared with the high frequency pulse power supply adopting contravariant with major loop, it is simple that the chopped mode pulse power has circuit structure, the advantages such as pulse regulation is convenient, be widely applied, the Electrolyzed Processing pulse power almost all adopts chopped mode both at home and abroad so far.By the difference of chopper amplification device in chopped mode high frequency pulse power supply, Electrolyzed Processing high frequency pulse power supply can be categorized as: IGBT(igbt) chopped mode, single channel MOSFET(isolated-gate field effect transistor (IGFET)) a few class such as chopped mode and two-way MOSFET pipe chopped mode.By in electrochemical micromachining adopt the difference of electrode number, can be divided into: two electrode high frequency pulse power supplies, three electrode high-frequency ultrashort pulse power supplys and four electrode high-frequency ultrashort pulse power supply three major types.
IGBT pipe chopped mode high frequency pulse power supply, about its pulse voltage can be adjusted to several a few hectovolt from 0V, peak current rating also reaches kilo-ampere, but its operating frequency comparatively MOSFET is low, be about 10 ~ 30KHz, be comparatively applicable in the Electrolyzed Processing of small-sized electrically conductive workpiece.
The high frequency pulse power supply of single channel MOSFET pipe chopped mode, its pulse voltage can be adjusted to hundreds of volt left and right from 0V; Single channel MOSFET pipe peak current rating can reach tens of to hundreds of ampere, and switching speed can up to hundreds of nanosecond, and on state resistance is low and have positive temperature coefficient, is easy to parallel connection to realize High-current output.The feature of this type of high frequency pulse power supply is: frequency high (tens of to hundreds of KHz), pulse width, pipe thermal losses is little, and power supply architecture is comparatively simple, and cost is lower, several MOSFET pipe exportable relatively high power in parallel.This type of high frequency pulse power supply powerful is suitable for traditional electrolyte processing, this type of high frequency pulse power supply low power is applicable to electrochemical micromachining, but along with the raising of pulse frequency, of short duration inter-train pause is made to be not enough to allow the electric double layer capacitance at metal electrode/electrolyte interface place discharge completely, the ME for maintenance that between electrode, existence one is larger is caused (to lose when machining voltage increases to about 10V from 2V, ME for maintenance about increases to about 2.6V from 1.4V), the loose erosion of electrochemical micromachining is increased, and the form accuracy of workpiece reduces; And during the copped wave of single channel MOSFET pipe, easily cause saltus step place distortion under waveform.
Two-way MOSFET pipe chopped mode high frequency pulse power supply can be divided into two classes again: a kind of for adopting two-way to control, the phase difference of double switch control signal is 1800, control same model MOSFET pipe T1 and T2 respectively, when T1 conducting, T2 cut-off, between electrode, be in machining state; When T1 cut-off, T2 conducting, ME for maintenance and interpolar deionization state is between electrode, eliminate interpolar ME for maintenance fast, thus the average voltage level significantly reduced in process, and then make the pattern of finished surface vestige obtain larger improvement, improve dimensional accuracy and the surface quality of processing.The another kind of same signal input two-way MOSFET pipe for having precipitous rising, trailing edge edge, drive circuit adopts the high-speed power MOSFET pipe of two mutual symmetries to carry out copped wave, the driving voltage of the MOSFET pipe T1 of N raceway groove and the MOSFET pipe T2 of P raceway groove is contrary, when the gate source voltage (VGS) inputted is for positive voltage, T1 conducting, T2 ends, and is in machining state between electrode; When the gate source voltage inputted is negative voltage, T2 conducting, T1 ends, and be in ME for maintenance and deionization state between electrode, this kind of chopper amplification mode also solves wave distortion problem.Two-way MOSFET pipe chopped mode high frequency pulse power supply, its pulse frequency reaches as high as hundreds of KHz, is applicable in electrochemical micromachining, but the symmetry to the synchronism of input signal, edge steep and MOSFET pipe, there is very high requirement.And in order to improve the locality of electrochemical micromachining further, realize high accuracy, high-quality processing, just require higher pulse frequency, it reaches tens of ns up to tens of MHz(pulsewidth).
So far, both at home and abroad in micro-electrode processing, major part adopts negative electrode as instrument (cathode tool connect with reference to ground), anode as two electrode high frequency pulse power supplies of workpiece (anode workpiece end input high frequency positive pulse current signal), traditional electrolyte cooked mode still continued to use by the pulse power, do not consider that in electrochemical micromachining, tool-electrode lower surface area is much smaller than the asymmetry of surface of the work.In process, for the charging current of the bulky capacitor (small capacitances relative to tool cathode/electrolyte interface place electric double layer) of workpiece anode/electrolyte interface electric double layer, the proportion accounting for total current is comparatively large, reduces the utilization rate of pulse current, increases power supply power consumption.
The scholars such as Korea S state-run Seoul National University Se Hyun Ahn were in about 2004, at tool cathode and workpiece anode side platinized platinum as counter electrode, and counter electrode is directly connected with tool-electrode, applies high-frequency ultrashort pulse electric current at interpolar, form three electrode high-frequency ultrashort pulse power supplys.Because workpiece immerses the surface area of area much larger than instrument immersion electrolyte of electrolyte, resistance between workpiece and electrolyte is much smaller than the resistance between instrument and electrolyte, voltage drop between workpiece and electrolyte is also less, and arranging balance platinum electrode is voltage drop in order to compensate between electrolyte and two Different electrodes.If do not have counter electrode, relatively low current potential is applied between electrode and workpiece, makes 304 stainless surface of the works form chromium oxide layer, stops the further dissolving of workpiece.Balance platinum electrode is set, inhibit the generation at stainless steel finished surface passivation layer, to a certain degree improve working (machining) efficiency, but place counter electrode geomery comparatively large, placement location the Distance tool electrode is far away, cause the dispersion corrosion at surface of the work place corresponding to counter electrode to become large, workpiece surface quality reduces.
Four electrode high-frequency ultrashort pulse power supplys are on the basis of tool cathode and workpiece anode two electrode, add three electrode potential controllers, by the reference electrode RE of potential instrument, be positioned in the electrolyte above workpiece to electrode CE, working electrode WE is directly connected with workpiece to be machined, constitutes and has reference electrode RE, four electrode high-frequency ultrashort pulse power supplys to electrode CE, work package electrode WE and tool-electrode TE.The scholars such as the Rolf Schuster of Buddhist Ritz Ha Er Bel research institute of Germany were in about 2000, by reference to electrode RE, to electrode CE, come to apply bias voltage to piece pole WE, simultaneously between piece pole WE and tool-electrode TE, apply high-frequency ultrashort pulse, in about 1 μm machining gap, achieve the processing of submicron order precision.But it needs strict control electrode current potential, and structure is also more complicated; Adopt ultrashort pulse electrochemical micromachining, although machining accuracy can reach sub-micron, working (machining) efficiency is lower.
In sum, IGBT pipe chopped mode high frequency pulse power supply, is applicable in the Electrolyzed Processing of micro metal workpiece; Single, double road MOSFET pipe chopped mode high frequency pulse power supply, is applicable in electrochemical micromachining.But along with the raising of pulse frequency, the easy distortion of output waveform of single, double road MOSFET pipe chopped mode high frequency pulse power supply, the loose erosion of processing increases, and the form accuracy of workpiece reduces, and is difficult to output frequency and reaches tens of ns up to tens of MHz(pulsewidth) ultrashort pulse electric current.
Two electrode high frequency pulse power supplies, do not consider that in electrochemical micromachining, tool-electrode lower surface area, much smaller than the asymmetry of surface of the work, makes the utilization rate of pulse current reduce.There are three electrode high-frequency ultrashort pulse power supplys of counter electrode, consider the asymmetry of two electrode machining areas in electrochemical micromachining, inhibit the generation at stainless steel finished surface passivation layer, to a certain degree improve working (machining) efficiency, but the dispersion corrosion that result also in surface of the work place corresponding to counter electrode becomes large, and workpiece surface quality reduces.Utilize four electrode high-frequency ultrashort pulse power supplys, high-precision electrochemical micromachining can be realized, but structure is more complicated, and working (machining) efficiency is lower.At present, in electrochemical micromachining, what no matter adopt is the high frequency pulse power supply of a few electrode form, the lower jumping edge of pulse current during processing, there is the transient state current of commutation to flow through tool-electrode (contrary with electric current during normal process), cause tool-electrode processed, i.e. the loss of tool-electrode.
In addition, in electrochemical micromachining, in order to improve processing locality further, usually adopt electrode sidewall insulation technology, after electrode sidewall insulation, the surface area of generating electrodes reaction reduces, and under identical External Electrical Field, only has tool cathode lower surface to assemble H
+, H
+greatly reduce compared with when number is nonisulated with electrode; Because hydrogen-evolution overpotential is " 0 ", when electrifying electrodes, there is H
+region, even if liberation of hydrogen, due to H
+the minimizing of number, causes tool cathode average current to reduce, and the average processing electric current density of corresponding workpiece anode region reduces, and process velocity (efficiency) reduces further.
Further, in electrochemical micromachining, workpiece anode is while processed dissolving, and with the precipitation of a certain amount of oxygen, the oxygen easy oxidation metal surface of precipitation, makes passivation layer thickening, and then slow down the anodic solution speed of metal works.Tool cathode has a large amount of hydrogen to separate out, and a large amount of hydrogen parcel electrode end surfaces of precipitation, inflate in minimum machining gap, disturbance electrolytic conductivity changes, and processing electric current is fluctuated.Anode separates out a large amount of oxygen, slows down the dissolution velocity of anode workpiece; Negative electrode assembles a large amount of hydrogen of separating out, and causes process bad stability, working (machining) efficiency to reduce.
Therefore, how while realizing high accuracy processing further, effective suppression tool electrode loss, export section negative electrode separates out hydrogen, suppress Oxygen anodic evolution, promote that work metal material selectivity is dissolved, improve electrochemical micromachining efficiency and processing stability, be in electrochemical micromachining high-frequency ultrashort pulse Power Management Design, still need a key technical problem urgently to be resolved hurrily.
Summary of the invention
The object of the invention is to, a kind of three electrode high-frequency ultrashort pulse electrochemical micromachining power supply and electrochemical machining methods thereof are provided, for solve above-mentioned background technology record existing electrochemical Machining Technology in Problems existing.
To achieve these goals, the technical scheme that the present invention proposes is, a kind of three electrode high-frequency ultrashort pulse electrochemical micromachining power supplys, is characterized in that described Electrolyzed Processing power supply comprises: the first high speed amplifier 1, second high speed amplifier 2, tool-electrode 6, auxiliary electrode 8, piece pole 9 and water base passivity electrolyte 10;
Described tool-electrode 6 is made up of the insulating barrier 7 of conductive part and covering conductive part outer wall, and upper surface and the lower surface of described conductive part are exposed;
Described auxiliary electrode 8 is made up of metal ring, and metal ring is inserted in tool-electrode 6 and is fixed on the insulating barrier 7 of tool-electrode 6 outer wall, and the inwall of metal ring is close to the insulating barrier of tool-electrode 6 outer wall;
Described piece pole 9 is metal material to be processed, fixing or to be installed in electrolytic cell and ground connection;
Described water base passivity electrolyte 10 injects electrolytic cell and to be processed partially submerged by tool-electrode 6, auxiliary electrode 8 and piece pole 9;
Described auxiliary electrode 8, between tool-electrode 6 and piece pole 9 three electrode, for apply synchronous, etc. pulsewidth, etc. cycle, the amplitude such as not, negative pulse, the ultrashort Compound Machining waveform of high frequency machining voltage;
The hydrogen ion that described auxiliary electrode 8 is assembled for guiding tool electrode 6 lower surface, and separate out hydrogen after making described hydrogen ion obtain electronics, and auxiliary electrode 8 also analyses oxygen amount for what reduce piece pole 9, impels metal material selective dissolution to be processed;
The output of described first high speed amplifier 1 is connected with auxiliary electrode 8, and the output of described second high speed amplifier 2 is connected with the upper surface of tool-electrode 6 conductive part, the input termination input signal 3 of described first high speed amplifier 1 and the second high speed amplifier 2;
Described first high speed amplifier 1 is for amplitude between regulation output to the pulsewidth amplitude and arteries and veins of the voltage on auxiliary electrode 8;
Described second high speed amplifier 2 is for amplitude between regulation output to the pulsewidth amplitude and arteries and veins of the voltage on tool-electrode 6.
Described first high speed amplifier 1 is made up of operational amplifier U1, adjustable potentiometer PT and feedback resistance R3;
Wherein, one end of adjustable potentiometer PT is connected with the amplifier end of oppisite phase of operational amplifier U1, the other end as the first high speed amplifier 1 input, for accessing input signal 3;
One end of feedback resistance R3 is connected with the amplifier end of oppisite phase of operational amplifier U1, and the other end is connected with the output of operational amplifier U1;
The output of described operational amplifier U1 is connected with auxiliary electrode 8, the amplifier in-phase end ground connection of operational amplifier U1, the negative voltage absolute value of the negative supply Vss1 of the positive voltage absolute value less-than operation amplifier U1 of the positive supply Vcc1 of operational amplifier U1;
The positive supply Vcc1 of described operational amplifier U1 is used for, when the low level signal of input signal 3 amplifies through the amplifier end of oppisite phase of operational amplifier U1, regulating operational amplifier U1 to be in saturation amplification district;
The negative supply Vss1 of described operational amplifier U1 is used for, when the high level of input signal 3 amplifies through the amplifier end of oppisite phase of operational amplifier U1, regulating operational amplifier U1 to be in linear amplification region;
Described adjustable potentiometer PT is used for when operational amplifier U1 is in linear amplification region, amplitude between the arteries and veins regulating the first high speed amplifier 1 to output to the voltage on auxiliary electrode 8.
Described second high speed amplifier 2 is made up of operational amplifier U2, input resistance R1 and feedback electronic R2;
Wherein, one end of input resistance R1 is connected with the amplifier end of oppisite phase of operational amplifier U2, the other end as the second high speed amplifier 2 input, for accessing input signal 3;
One end of feedback resistance R2 is connected with the amplifier end of oppisite phase of operational amplifier U2, and the other end is connected with the output of operational amplifier U2;
The output of described operational amplifier U2 is connected with the upper surface of tool-electrode 6 conductive part, the amplifier in-phase end ground connection of operational amplifier U2, the negative voltage absolute value of the negative supply Vss1 of the positive voltage absolute value less-than operation amplifier U2 of the positive supply Vcc2 of operational amplifier U2;
The positive supply Vcc2 of described operational amplifier U2 is used for, when the low level signal of input signal 3 amplifies through the amplifier end of oppisite phase of operational amplifier U2, regulating operational amplifier U2 to be in saturation amplification district;
The negative supply Vss1 of described operational amplifier U2 is used for, when the high level of input signal 3 amplifies through the amplifier end of oppisite phase of operational amplifier U2, regulating operational amplifier U2 to be in linear amplification region.
Described input signal 3 is the ultrashort positive pulse signal of high frequency.
The conductive part of described tool-electrode 6 is metal cylinder or round metal stage body.
Described metal ring and metal cylinder or round metal stage body coaxial.
The distance of the lower surface of the conductive part of described metal ring and tool-electrode 6 is less than 3 millimeters.
Described water base passivity electrolyte 10 is NaNO
3or NaClO
3group water solution.
Use three electrode high-frequency ultrashort pulse electrochemical micromachining power supplys to carry out a method for Electrolyzed Processing, it is characterized in that described method comprises:
Step 1: regulate the first high speed amplifier 1 and the second high speed amplifier 2, when pulsewidth, pulsewidth Amplitude Ration second high speed amplifier 2 of the voltage that the first high speed amplifier 1 is outputted on auxiliary electrode 8 outputs to little first setting value of pulsewidth amplitude of the voltage on tool-electrode 6;
Time between arteries and veins, between the arteries and veins making the first high speed amplifier 1 output to the voltage on auxiliary electrode 8, amplitude is 0V, little second setting value of Amplitude Ration 0V between the arteries and veins making the second high speed amplifier 2 output to the voltage on tool-electrode 6;
Step 2: move to after tool-electrode 6 is contacted tool setting above metal works electrode 9, water base passivity electrolyte 10 pours electrolytic cell with constant speed effluent, by the channel floor submergence to be processed of tool-electrode 6, auxiliary electrode 8 and piece pole 9;
Step 3: open three electrode high-frequency ultrashort pulse electrochemical micromachining power supplys, and at auxiliary electrode 8, between tool-electrode 6 and piece pole 9 three electrode, apply synchronous, etc. pulsewidth, etc. cycle, the amplitude such as not, negative pulse, the ultrashort Compound Machining waveform of high frequency machining voltage;
Step 4: tool-electrode 6 and auxiliary electrode 8 at the uniform velocity move downward with the speed of several micron per minute, the hydrogen ion that auxiliary electrode 8 guiding tool electrode 6 lower surface is assembled, and separate out hydrogen after making described hydrogen ion obtain electronics, and in motion process, the oxygen amount of analysing of piece pole 9 reduces, and impels metal material selective dissolution to be processed; After several minutes, piece pole 9 is pierced, powered-down, stops electrolyte pouring;
Step 5: the position of resetting tool electrode 6 and auxiliary electrode 8, after taking out piece pole 9, rinses and dries, process finishing.
Described first setting value is 300mV-500mV, and described second setting value is 300mV-500mV.
The present invention utilizes three electrode high-frequency ultrashort pulse power supplys to carry out electrochemical micromachining, effectively inhibit tool electrode loss, and part derives the cathodic hydrogen in little machining gap, and reduce Oxygen anodic evolution amount, promote that work metal material selectivity is dissolved, while realizing high accuracy electrochemical micromachining further, effectively improve working (machining) efficiency and processing stability.
Accompanying drawing explanation
Fig. 1 is the structure chart of three electrode high-frequency ultrashort pulse electrochemical micromachining power supplys;
Fig. 2 is front view and the top view of tool-electrode and auxiliary electrode structure;
Fig. 3 is the Compound Machining oscillogram of three electrode high-frequency ultrashort pulse electrochemical micromachining power supplys;
In figure, 1-first high speed amplifier, 2-second high speed amplifier, 3-input signal, 4-first high speed amplifier outputs to the voltage U on auxiliary electrode
aE, 5-second high speed amplifier outputs to the voltage U on tool-electrode
tE, 6-tool-electrode, the insulating barrier of 7-tool-electrode outer wall, 8-auxiliary electrode, 9-piece pole, the water base passivity electrolyte of 10-, 11-reference ground, 12-electrolytic cell.
Detailed description of the invention
Below in conjunction with accompanying drawing, preferred embodiment is elaborated.It is emphasized that following explanation is only exemplary, instead of in order to limit the scope of the invention and apply.
Fig. 1 is the structure chart of three electrode high-frequency ultrashort pulse electrochemical micromachining power supplys.As shown in Figure 1, three electrode high-frequency ultrashort pulse electrochemical micromachining power supplys provided by the invention comprise: the first high speed amplifier 1, second high speed amplifier 2, tool-electrode 6, auxiliary electrode 8, piece pole 9 and water base passivity electrolyte 10.At auxiliary electrode 8, between tool-electrode 6 and piece pole 9 three electrode, apply synchronous, etc. pulsewidth, etc. cycle, the amplitude such as not, negative pulse, the ultrashort Compound Machining waveform of high frequency machining voltage.
Wherein, tool-electrode 6 is made up of the insulating barrier 7 of conductive part and covering conductive part outer wall, and upper surface and the lower surface of this conductive part are exposed.Auxiliary electrode 8 is made up of metal ring, and metal ring is inserted in tool-electrode 6 and is fixed on the insulating barrier 7 of tool-electrode 6 outer wall, and the inwall of metal ring is close to the insulating barrier of tool-electrode 6 outer wall.Conductive part adopts metal cylinder, and metal ring is coaxial with the metal cylinder as conductive part, and the lower surface of metal ring distance conductive part is several millimeters.Fig. 2 is front view and the top view of tool-electrode and auxiliary electrode structure, as shown in Figure 2, tool-electrode 6 adopt have outer wall insulating barrier and lower surface smooth and keep exposed, diameter is the cylindric tungsten filament of 100 microns.Radial direction wide is adopted to be that the thin annulus of minute metallic of 100 microns is as auxiliary electrode 8, and small ring-type auxiliary electrode 8 is coated on cylindrical sidewalls insulating tool electrode 6, and coaxially fitting tightly both keeping, the lower surface of small ring-type auxiliary electrode 8 the Distance tool electrode 6 is about 3 millimeters.
Piece pole 9 is metal material to be processed, fixing or to be installed in electrolytic cell 12 and ground connection.Water base passivity electrolyte 10 injects electrolytic cell and to be processed partially submerged by tool-electrode 6, auxiliary electrode 8 and piece pole 9.As shown in Figure 2, the lower surface with tool-electrode 6 Comparatively speaking, the metal plate of the large several order of magnitude size of surface area is as piece pole 9 for the present embodiment.Meanwhile, employing concentration is the NaNO3 aqueous solution of 0.25mol/L is electrolyte, with tool-electrode 6, small ring-type auxiliary electrode 8 and metal plate piece pole 9, forms three-electrode cell system.
The output of above-mentioned first high speed amplifier 1 is connected with auxiliary electrode 8, and the input termination input signal 3(Ui of the first high speed amplifier 1).First high speed amplifier 1 is for amplitude between regulation output to the pulsewidth amplitude and arteries and veins of the voltage on auxiliary electrode 8.First high speed amplifier 1 is made up of operational amplifier U1, adjustable potentiometer PT and feedback resistance R3.Wherein, one end of adjustable potentiometer PT is connected with the amplifier end of oppisite phase of operational amplifier U1, the other end as the first high speed amplifier 1 input, for accessing input signal 3.One end of feedback resistance R3 is connected with the amplifier end of oppisite phase of operational amplifier U1, and the other end is connected with the output of operational amplifier U1.The output of operational amplifier U1 is connected with auxiliary electrode 8, the amplifier in-phase end ground connection of operational amplifier U1.
Operational amplifier U1 adopts the current mode operational amplifier that slew rate is 7300V/ μ s, bandwidth is about 200MHz.The adjusting range of adjustable potentiometer PT is 0 ~ 1K Ω, precision is 1 ‰.The resistance of feedback resistance R3 is 1K Ω, precision is 1 ‰.Operational amplifier U1, adjustable potentiometer PT and feedback resistance R3 form reverse voltage type negative-feedback high speed amplifier, and the resistance of adjustment adjustable potentiometer PT, makes its multiplication factor be about-4.Be 2.5V by amplitude, cycle 3.6 μ s(wherein pulsewidth be 1.2 μ s, be 2.4 μ s between arteries and veins) positive voltage pulse as input signal 3.The positive supply Vcc of adjustment operational amplifier U1
1, make its value be about+0.9V; The negative supply Vss of adjustment operational amplifier U1
1, make its value be about-15V.Positive supply Vcc
1absolute amplitude be less than negative supply Vss
1absolute amplitude, under non-equilibrium powering mode, by adjustment positive supply Vcc
1amplitude, guarantee the low level signal (0V) of input signal 3, during amplification anti-phase through operational amplifier U1, operational amplifier U1 is in saturation amplification district, realizes the first high speed amplifier 1 and outputs to voltage U on auxiliary electrode 8
aEarteries and veins between amplitude be 0V.By adjustment negative supply Vss
1amplitude, when guaranteeing the amplification anti-phase through operational amplifier U1 of the high level of input signal 3, operational amplifier U1 is in linear amplification region, be about 250 Ω by adjust the high level amplitude of input signal 3 be the resistance of+2.5V and adjustable potentiometer PT again, realize the first high speed amplifier 1 and output to voltage U on auxiliary electrode 6
aEpulsewidth amplitude be-10.5V.Wherein, regulated by the resistance of adjustable potentiometer PT, realize U
aEarteries and veins between the fine setting of amplitude size.Control method is simple, U
aEwaveform easily realizes.
The output of the second high speed amplifier 2 is connected with the upper surface of the conductive part of tool-electrode 6, and the input termination input signal 3 of the second high speed amplifier 2.Second high speed amplifier 2 is for amplitude between regulation output to the pulsewidth amplitude and arteries and veins of the voltage on tool-electrode 6.Second high speed amplifier 2 is made up of operational amplifier U2, input resistance R1 and feedback electronic R2.Wherein, one end of input resistance R1 is connected with the amplifier end of oppisite phase of operational amplifier U2, the other end as the second high speed amplifier 2 input, for accessing input signal 3.One end of feedback resistance R2 is connected with the amplifier end of oppisite phase of operational amplifier U2, and the other end is connected with the output of operational amplifier U2.The output of operational amplifier U2 is connected with the upper surface of the conductive part of tool-electrode 6, the amplifier in-phase end ground connection of operational amplifier U2.
Operational amplifier U2 adopts the current mode operational amplifier that slew rate is 7300V/ μ s, bandwidth is about 200MHz.The resistance of input resistance R1 is 250 Ω, and precision is 1 ‰.The resistance of feedback resistance R2 is 1K Ω and precision is 1 ‰.Operational amplifier U2, input resistance R1 and feedback electronic R2 form reverse voltage type negative-feedback high speed amplifier, and its multiplication factor is-4.Be 2.5V by amplitude, cycle 3.6 μ s(wherein pulsewidth be 1.2 μ s, be 2.4 μ s between arteries and veins) positive voltage pulse as input signal 3.The positive supply Vcc2 of adjustment operational amplifier U2, makes its value be about+2.2V; The negative supply Vss1 of adjustment operational amplifier U2, makes its value be about-15V; The absolute amplitude of positive supply Vcc2 is less than the absolute amplitude of negative supply Vss1, under non-equilibrium powering mode, by the amplitude of adjustment positive supply Vcc2, guarantee the low level signal (0V) of input signal 3, during amplification anti-phase through operational amplifier U2, operational amplifier U2 is in saturation amplification district, realizes the second high speed amplifier 2 and outputs to voltage U on tool-electrode 6
tEarteries and veins between amplitude be-300mV.By the amplitude of adjustment negative supply Vss1, when guaranteeing the amplification anti-phase through operational amplifier U2 of the high level of input signal 3, operational amplifier U2 is in linear amplification region, then is 2.5V by adjusting the high level amplitude of input signal 3, realizes the second high speed amplifier 2 and outputs to voltage U on tool-electrode 6
tEpulsewidth amplitude be-10V.Control method is simple, U
tEwaveform easily realizes.
Above-mentioned first high speed amplifier 1 and the first high speed amplifier 2, having frequency can from the fan-out capability that 0V is adjusted to tens of volt left and right, peak point current is the ultrashort pulse signal of hundreds of mA up to tens of MHz, voltage.
Above-mentioned input signal 3 is the ultrashort positive pulse signal of high frequency, and the first high speed amplifier 1 outputs to the voltage signal U on auxiliary electrode 8
aEfor the ultrashort undersuing of high frequency, the first high speed amplifier 2 outputs to the voltage signal U on tool-electrode 6
tEfor the ultrashort undersuing of high frequency.
The process utilizing above-mentioned three electrode high-frequency ultrashort pulse electrochemical micromachining power supplys to carry out Electrolyzed Processing is:
Step 1: regulate the first high speed amplifier 1 and the second high speed amplifier 2, when pulsewidth, pulsewidth Amplitude Ration second high speed amplifier 2 of the voltage that the first high speed amplifier 1 is outputted on auxiliary electrode 8 outputs to little first setting value of pulsewidth amplitude of the voltage on tool-electrode 6.
Time between arteries and veins, between the arteries and veins making the first high speed amplifier 1 output to the voltage on auxiliary electrode 8, amplitude is 0V, little second setting value of Amplitude Ration 0V between the arteries and veins making the second high speed amplifier 2 output to the voltage on tool-electrode 6.
Step 2: move to after tool-electrode 6 is contacted tool setting above metal works electrode 9, water base passivity electrolyte 10 with constant speed in the machining gap of electrolyte between tool-electrode 6 and piece pole 9, pour from tool-electrode 6 flow measurement, by the channel floor submergence to be processed of tool-electrode 6, auxiliary electrode 8 and piece pole 9.
Wherein, contact tool setting refers to that tool-electrode 6 moves gradually to piece pole 9, when just contacting, just thinks that the machining gap between them is 0.
Step 3: open three electrode high-frequency ultrashort pulse electrochemical micromachining power supplys, and at auxiliary electrode 8, between tool-electrode 6 and piece pole 9 three electrode, apply synchronous, etc. pulsewidth, etc. cycle, the amplitude such as not, negative pulse, the ultrashort Compound Machining waveform of high frequency machining voltage.
Step 4: tool-electrode 6 and auxiliary electrode 8 at the uniform velocity move downward with the speed of several micron per minute, after several minutes, (be generally no more than 10 minutes), piece pole 9 is pierced, powered-down, stops electrolyte pouring.
Step 5: the position of resetting tool electrode 6 and auxiliary electrode 8, after taking out piece pole 9, rinses and dries, process finishing.
In the present embodiment, above-mentioned first setting value is set as 500mV, and the second setting value is set as 300mV.When the electrochemical micromachining of large depth-to-width ratio, fine Fine and Deep Hole, be applied to the voltage signal U on auxiliary electrode 8
aEwith the voltage signal U be applied on tool-electrode 6
tEbe be all 3.6 μ s the cycle, the ultrashort voltage signal of synchronous negative pulse high frequency that pulsewidth is all 1.2 μ s.Wherein, voltage signal U on auxiliary electrode 8 is applied to
aEpulsewidth amplitude be-10.5V, be applied to voltage U on tool-electrode 6
tEpulsewidth amplitude be-10V.
When pulsewidth, be applied to the voltage U on auxiliary electrode 8
aEthan the voltage U be applied on tool-electrode 6
tElow 500mV, i.e. Δ U
2equal-500mV.At U
aEunder External Electrical Field, the H that tool-electrode 6 lower surface is assembled
+part is guided to auxiliary electrode 8 times, obtains electronics, separates out hydrogen, and part is derived the precipitation hydrogen in small machining gap; On the other hand, auxiliary electrode 8 adds the effective area of negative electrode generating electrodes reaction, makes more H
+electromigration is to auxiliary electrode 8 surface, obtain electronics, separate out hydrogen, this process enlarges liberation of hydrogen electric current (tool-electrode 6 and auxiliary electrode 8 on electric current sum), improve the average processing electric current density in corresponding anode workpiece electrode 9 machining area, decrease Oxygen anodic evolution amount, promote that work metal material selectivity is dissolved (pressing down shortness of breath molten), effectively improve the electrochemical micromachining speed (efficiency) adopting lateral wall insulation instrument.
Time between arteries and veins, be applied to the voltage U on auxiliary electrode 8
aEfor 0V(ground potential), piece pole 9 and reference ground 11(the earth or " 0 " potential point) be connected, its current potential is also 0V, and the electrolyte between tool-electrode 9 and auxiliary electrode 8 is depolarized, and ensure that high-frequency ultrashort pulse Electrolyzed Processing improves the advantage of locality by depolarising between arteries and veins.Time simultaneously between arteries and veins, be applied to the voltage U on tool-electrode 6
tElower than 0V 300 millivolts, i.e. Δ U
1equal negative 300mV; between tool-electrode 6 and piece pole 9; keep the bias voltage of a negative 300mV; jump under pulse along time; suppress the transient state current of commutation appeared on tool-electrode 6; protect tool-electrode 6, while guarantee high processing locality, also improve electrochemical micromachining efficiency.
The present invention adopts High-speed Electric flow pattern broad band amplifier, under non-equilibrium powering mode, the high-frequency ultrashort pulse power supply that composition negative voltage feedback type amplifies, realizing frequency can, from the output that 0V is adjusted to tens of volt left and right, peak point current is the ultrashort pulse signal of hundreds of mA, make electrochemical micromachining locality be further improved up to tens of MHz, voltage.According in electrochemical micromachining, cylindrical sidewalls insulation micro tool electrode (TE) lower end area is much smaller than the non-symmetrical features on piece pole (WE) surface, at cylindrical sidewalls insulating tool electrode jacket small ring-type auxiliary electrode AE, add the electrode area that cathode reaction occurs, and provide the electrode applying bias voltage.Between instrument TE and piece pole WE, auxiliary electrode AE and piece pole WE tri-electrode, apply synchronous, etc. pulsewidth, etc. cycle, the amplitude such as not, the machining voltage of the ultrashort composite wave-shape of negative pulse, high frequency, carry out electrochemical micromachining.Adopt auxiliary electrode, increase electrode effective area, outside machining area, increase hydrogen-separating quantity; In machining area, improve processing electric current density, improve the ablation speed of electrochemical micromachining; Adopt auxiliary electrode, apply bias voltage, tool-electrode not loss, insulating barrier not easily breaks.Novel three electrode high-frequency ultrashort pulse power supplys are utilized to carry out electrochemical micromachining, effectively inhibit tool electrode loss, and part derives the cathodic hydrogen in little machining gap, and reduce Oxygen anodic evolution amount, promote that work metal material selectivity is dissolved, while realizing high accuracy electrochemical micromachining further, effectively improve working (machining) efficiency and processing stability.
The above; be only the present invention's preferably detailed description of the invention, but protection scope of the present invention is not limited thereto, is anyly familiar with those skilled in the art in the technical scope that the present invention discloses; the change that can expect easily or replacement, all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claim.
Claims (10)
1. three electrode high-frequency ultrashort pulse electrochemical micromachining power supplys, is characterized in that described Electrolyzed Processing power supply comprises: the first high speed amplifier (1), the second high speed amplifier (2), tool-electrode (6), auxiliary electrode (8), piece pole (9) and water base passivity electrolyte (10);
Described tool-electrode (6) is made up of the insulating barrier (7) of conductive part and covering conductive part outer wall, and upper surface and the lower surface of described conductive part are exposed;
Described auxiliary electrode (8) is made up of metal ring, metal ring is inserted in tool-electrode (6) and is fixed on the insulating barrier (7) of tool-electrode (6) outer wall, and the inwall of metal ring is close to the insulating barrier of tool-electrode (6) outer wall;
Described piece pole (9) is metal material to be processed, fixing or to be installed in electrolytic cell and ground connection;
Described auxiliary electrode (8), between tool-electrode (6) and piece pole (9) three electrode, for apply synchronous, etc. pulsewidth, etc. cycle, the amplitude such as not, negative pulse, the ultrashort Compound Machining waveform of high frequency machining voltage;
The hydrogen ion that described auxiliary electrode (8) is assembled for guiding tool electrode (6) lower surface, and separate out hydrogen after making described hydrogen ion obtain electronics, and auxiliary electrode (8) also analyses oxygen amount for what reduce piece pole (9), impels metal material selective dissolution to be processed;
Described water base passivity electrolyte (10) injects electrolytic cell and to be processed partially submerged by tool-electrode (6), auxiliary electrode (8) and piece pole (9);
The output of described first high speed amplifier (1) is connected with auxiliary electrode (8), the output of described second high speed amplifier (2) is connected with the upper surface of tool-electrode (6) conductive part, the input termination input signal (3) of described first high speed amplifier (1) and the second high speed amplifier (2);
Described first high speed amplifier (1) is for amplitude between regulation output to the pulsewidth amplitude and arteries and veins of the voltage on auxiliary electrode (8);
Described second high speed amplifier (2) is for amplitude between regulation output to the pulsewidth amplitude and arteries and veins of the voltage on tool-electrode (6).
2. Electrolyzed Processing power supply according to claim 1, is characterized in that described first high speed amplifier (1) is made up of operational amplifier U1, adjustable potentiometer PT and feedback resistance R3;
Wherein, one end of adjustable potentiometer PT is connected with the amplifier end of oppisite phase of operational amplifier U1, the other end as the first high speed amplifier (1) input, for accessing input signal (3);
One end of feedback resistance R3 is connected with the amplifier end of oppisite phase of operational amplifier U1, and the other end is connected with the output of operational amplifier U1;
The output of described operational amplifier U1 is connected with auxiliary electrode (8), the amplifier in-phase end ground connection of operational amplifier U1, the negative voltage absolute value of the negative supply Vss1 of the positive voltage absolute value less-than operation amplifier U1 of the positive supply Vcc1 of operational amplifier U1;
The positive supply Vcc1 of described operational amplifier U1 is used for, when the low level signal of input signal (3) amplifies through the amplifier end of oppisite phase of operational amplifier U1, regulating operational amplifier U1 to be in saturation amplification district;
The negative supply Vss1 of described operational amplifier U1 is used for, when the high level of input signal (3) amplifies through the amplifier end of oppisite phase of operational amplifier U1, regulating operational amplifier U1 to be in linear amplification region;
Described adjustable potentiometer PT is used for when operational amplifier U1 is in linear amplification region, amplitude between the arteries and veins regulating the first high speed amplifier (1) to output to the voltage on auxiliary electrode (8).
3. Electrolyzed Processing power supply according to claim 1, is characterized in that described second high speed amplifier (2) is made up of operational amplifier U2, input resistance R1 and feedback electronic R2;
Wherein, one end of input resistance R1 is connected with the amplifier end of oppisite phase of operational amplifier U2, the other end as the second high speed amplifier (2) input, for accessing input signal (3);
One end of feedback resistance R2 is connected with the amplifier end of oppisite phase of operational amplifier U2, and the other end is connected with the output of operational amplifier U2;
The output of described operational amplifier U2 is connected with the upper surface of tool-electrode (6) conductive part, the amplifier in-phase end ground connection of operational amplifier U2, the negative voltage absolute value of the negative supply Vss1 of the positive voltage absolute value less-than operation amplifier U2 of the positive supply Vcc2 of operational amplifier U2;
The positive supply Vcc2 of described operational amplifier U2 is used for, when the low level signal of input signal (3) amplifies through the amplifier end of oppisite phase of operational amplifier U2, regulating operational amplifier U2 to be in saturation amplification district;
The negative supply Vss1 of described operational amplifier U2 is used for, when the high level of input signal (3) amplifies through the amplifier end of oppisite phase of operational amplifier U2, regulating operational amplifier U2 to be in linear amplification region.
4. Electrolyzed Processing power supply according to claim 1, is characterized in that described input signal (3) is for the ultrashort positive pulse signal of high frequency.
5., according to the Electrolyzed Processing power supply in claim 1-4 described in any one claim, it is characterized in that the conductive part of described tool-electrode (6) is metal cylinder or round metal stage body.
6. Electrolyzed Processing power supply according to claim 5, it is characterized in that described metal ring and metal cylinder or round metal stage body coaxial.
7. Electrolyzed Processing power supply according to claim 6, is characterized in that the distance of the lower surface of the conductive part of described metal ring and tool-electrode (6) is less than 3 millimeters.
8. Electrolyzed Processing power supply according to claim 7, is characterized in that described water base passivity electrolyte (10) is NaNO
3group water solution or NaClO
3group water solution.
9. use as the Electrolyzed Processing power supply in claim 1-8 as described in any one claim carries out the method for Electrolyzed Processing, it is characterized in that described method comprises:
Step 1: regulate the first high speed amplifier (1) and the second high speed amplifier (2), when pulsewidth, pulsewidth Amplitude Ration second high speed amplifier (2) of the voltage that the first high speed amplifier (1) is outputted on auxiliary electrode (8) outputs to little first setting value of pulsewidth amplitude of the voltage on tool-electrode (6);
Time between arteries and veins, between the arteries and veins making the first high speed amplifier (1) output to the voltage on auxiliary electrode (8), amplitude is 0V, little second setting value of Amplitude Ration 0V between the arteries and veins making the second high speed amplifier (2) output to the voltage on tool-electrode (6);
Step 2: move to piece pole (9) top by after tool-electrode (6) contact tool setting, water base passivity electrolyte (10) pours electrolytic cell with constant speed effluent, by the channel floor submergence to be processed of tool-electrode (6), auxiliary electrode (8) and piece pole (9);
Step 3: open three electrode high-frequency ultrashort pulse electrochemical micromachining power supplys, and at auxiliary electrode (8), between tool-electrode (6) and piece pole (9) three electrode, apply synchronous, etc. pulsewidth, etc. cycle, the amplitude such as not, negative pulse, the ultrashort Compound Machining waveform of high frequency machining voltage;
Step 4: tool-electrode (6) and auxiliary electrode (8) at the uniform velocity move downward with the speed of several micron per minute, the hydrogen ion that auxiliary electrode (8) guiding tool electrode (6) lower surface is assembled, and separate out hydrogen after making described hydrogen ion obtain electronics, and in motion process, the oxygen amount of analysing of piece pole (9) reduces, and impels metal material selective dissolution to be processed; After several minutes, piece pole (9) is pierced, powered-down, stops electrolyte pouring;
Step 5: the position of resetting tool electrode (6) and auxiliary electrode AE (8), after taking out piece pole (9), rinses and dries, process finishing.
10. method according to claim 9, it is characterized in that described first setting value is 300mV-500mV, described second setting value is 300mV-500mV.
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| DE102014012180B4 (en) * | 2014-08-16 | 2019-01-31 | Emag Holding Gmbh | Device for electrochemical machining of metallic workpieces |
| CN104588799B (en) * | 2014-12-08 | 2017-01-11 | 清华大学 | Micro electrochemical machining power supply with intrapulse output of auxiliary electrode and machining method thereof |
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| CN107999906A (en) * | 2017-11-17 | 2018-05-08 | 清华大学 | A kind of system for improving pulse power Electrolyzed Processing precision |
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| CN111266678B (en) * | 2020-02-21 | 2021-05-28 | 苏州大学 | Method for strengthening mass transfer efficiency in electrolytic machining micro-gap based on cathodic hydrogen evolution and control system |
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| CN115026362B (en) * | 2022-05-10 | 2023-06-02 | 广东工业大学 | Electrolysis device and method for micro-electrolytic machining of tungsten carbide hard alloy |
| CN115026363B (en) * | 2022-06-22 | 2024-02-06 | 西北工业大学 | Composite ultra-short pulse micro electrolytic machining method |
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