JP3002981B1 - Processing method and processing device - Google Patents

Abstract

To obtain a desired processing shape in a conventional processing method, a relative position between a processing tool and a workpiece is adjusted so that a tip of the processing tool moves on a surface to be processed along a contour of the processing shape. Since the position was controlled, two axes of the moving stage had to be controlled simultaneously, and there was a technical problem that it was difficult to obtain high processing accuracy. SOLUTION: The tip of a machining electrode 104 is a workpiece 1
The XY-axis stage 108 is driven so that a rectangular area including the processing shape pattern stored in the shape information storage device 110 is scanned at predetermined intervals on the surface to be processed 03,
At the same time, the processing tool 104 and the workpiece 103 are only connected when the processing tool tip position determination device 111 determines that the tip of the processing electrode 104 is directly above the processing shape pattern stored in the shape information storage device 110. An arbitrary processing pattern is formed by applying a constant current during the processing to perform the processing.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing method and a processing apparatus for processing a workpiece into an arbitrary shape in the metal industry, the electronics industry, the machine industry, and the like.

[0002]

2. Description of the Related Art In order to obtain an arbitrary processing shape in a conventional processing method such as machining, it is necessary to move a tip of a processing tool along a contour of a processing shape on a processing surface of a workpiece. A method has been used in which the relative position between a tool and a workpiece is controlled, and at the same time, the processing is performed by physically contacting the processing tool and the workpiece. Here, in order to control the relative position between the processing tool and the workpiece so that the tip of the processing tool moves along a desired processing shape, the following method has been used.

[0003] 1. The processing shape pattern is approximated by a plurality of functions, and the scanning stage is controlled so that the tip of the processing tool moves on the surface to be processed along the approximated function. 2. The processing stage pattern is interpolated at many points, and the scanning stage is controlled such that the tip of the processing tool moves by connecting these points linearly.

[0004]

However, the above method has the following problems. First, in order to control the relative position between the processing tool and the workpiece so that the tip of the processing tool moves on the processing surface along the contour of the desired processing shape pattern, the processing tool or the workpiece is required. It is necessary to drive the mounted moving stage two-dimensionally. Therefore, two axes of the moving stage must be controlled simultaneously. However, when two axes are moved at the same time, even when a moving stage having the same positioning accuracy is used, a movement error becomes larger than when only one axis is scanned. Therefore, when high processing accuracy is required, a very high-precision moving stage and control device are required.

In order to approximate a machining shape pattern with a plurality of functions, it is necessary to first analyze information on the machining shape pattern by numerical calculation to find an optimal combination of functions. In order to move the processing tool along the obtained function, a high-performance stage control device having a function of driving the moving stage according to the given function is required.

Further, when the moving stage is controlled so that the processing shape pattern is interpolated at a number of points and the tip of the processing tool is connected linearly on these points and moves, an error due to linear approximation is required. Therefore, the actually processed shape is different from the target processed shape. An object of the present invention is to improve the conventional shape processing method to eliminate the above-mentioned problems.

[0007]

In order to solve the above-mentioned problems, in the processing method of the present invention, a processing tool and a workpiece are arranged so as to face each other, and a space between a tip of the processing tool and the workpiece is provided. By generating physical or chemical processing phenomena,
In the processing method for performing processing on a surface to be processed of the workpiece, a tip of the processing tool may have an arbitrary interval within a rectangular region including a processing shape pattern to be formed on the surface to be processed of the workpiece. A moving step of moving at least one of the processing tool and the workpiece so as to scan with the processing tool, and only when the tip of the processing tool is directly above the processing shape pattern, the processing tool and the workpiece By simultaneously or alternately performing a processing step of exciting physical or chemical processing phenomena between the workpiece and a processing step, a processing pattern of an arbitrary shape is formed on the processing surface of the workpiece. It is characterized by forming.

When a discharge phenomenon caused by applying a voltage between the processing tool and the workpiece is used as the processing phenomenon, the tip diameter of the processing tool is reduced because no physical force acts on the processing tool. It is possible to reduce the thickness, and it is possible to obtain a high processing resolution by setting a close scanning interval in a rectangular area including the processing shape pattern. Similarly,
As the processing phenomenon, when an electrochemical reaction caused by applying a voltage between the processing tool and the workpiece in an electrolyte solution is used, the same effect as when using a discharge phenomenon is obtained. In addition, the consumption of the processing tool is extremely reduced, and both the removal processing and the additional processing can be realized.

Further, the processing apparatus of the present invention is provided with holding means for holding the processing tool and the workpiece in a facing state, and physically or chemically holding the tip of the processing tool and the workpiece. In a processing apparatus for performing processing on a processing surface of the workpiece by generating a processing phenomenon, a shape information storage unit configured to store information of a processing shape pattern formed on a processing surface of the processing object; A moving means for arbitrarily changing a relative position between a processing tool and the workpiece; and a processing shape pattern stored in the shape information storage means on a processing surface of the processing tool. Scanning means for controlling the moving means so as to scan at an arbitrary interval in a rectangular area including; and a processing pattern of the processing tool of the workpiece based on information stored in the shape information storage means. Directly above It is characterized in that it comprises a machining tool tip position position determining means for determining whether a.

Further, in order to increase the processing resolution, when the processing phenomenon is a discharge phenomenon caused by applying a voltage between the processing tool and the workpiece, the processing tool is added to the above-described configuration. A separation distance setting means for arbitrarily setting a distance between a tip and a processing surface of the workpiece, and a voltage control means for applying an arbitrary voltage between the processing tool and the workpiece.

Further, in order to realize both the removal processing and the addition processing, the processing phenomenon is caused by an electrochemical reaction caused by applying a voltage between the processing tool and the workpiece in an electrolyte solution. In such a case, in addition to the above-described configuration, a separation distance setting means for arbitrarily setting a distance between the tip of the processing tool and a surface to be processed of the workpiece, and between the processing tool and the workpiece. And an electrochemical reaction control means for applying an arbitrary voltage or current to the device.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION First Embodiment FIG. 1 shows, as a first embodiment of the present invention, a processing apparatus in which an electrochemical reaction is used for a processing phenomenon. In this embodiment, a workpiece 103 immersed in a processing solution 102 in a processing solution container 101 and a workpiece 10
And a reference electrode 105 serving as a reference for an electrode potential.
And a potential / current control device 106 for controlling the potential and current of the workpiece 103 and the processing electrode 104, and installed below the processing solution container 101 to move the workpiece 103 in the Z-axis direction (vertical direction). Z-axis stage 1 that can be moved
07, an XY-axis stage 108 installed below the Z-axis stage 107 and capable of moving the workpiece 103 in the X-axis and Y-axis directions (horizontal direction), a Z-axis stage 107 and an XY-axis stage A movement position control device 109 for controlling the movement of 108, a shape information storage device 110 for storing information of an arbitrary processing shape pattern, and a connection to the movement position control device 109, the shape information storage device 110, and the potential / current control device 106 Based on the information stored in the shape information storage device 110 and the movement position information of the workpiece 103 sent from the movement position control device 109, the machining electrode 1
A tool tip position determination device 111 that determines whether or not the tip of the workpiece 04 is directly above a desired processing shape pattern on the surface to be processed of the workpiece 103 is provided.

The potential / current control device 106 includes, for example, a machining electrode circuit 1 called a potentio galvanostat.
06A, a microcomputer for controlling the potential of the processing electrode 104 of the processing electrode circuit 106A, a current flowing between the processing electrode 104 and the workpiece 103, and various operation keys for operation. The processing electrode circuit 106A is
For example, as shown in FIG. 2, a variable resistor 202 connected to the positive side of the constant voltage power supply 201, an operational amplifier 203 connected to the variable resistor 202, and a counter electrode (working electrode) 104 connected to the output of the operational amplifier 203. , A working electrode (workpiece) 103 which is disposed opposite to the counter electrode (working electrode) 104 and is connected to the negative side of the constant voltage power supply 201, and a reference serving as a reference for measuring the potential of the working electrode (workpiece) 103. It is composed of electrodes 105 and the like.

The processing electrode 104 is a rod-shaped body, and the tip facing the surface to be processed is sharpened, only a part of the tip is exposed, and the other part is covered with an insulator. . As the material of the rod-shaped body, for example, carbon, tungsten, platinum or the like is used. The reference electrode 105 is, for example,
A cylindrical body of glass, a liquid junction is provided at the tip of the side immersed in the processing solution, and a thin line made of silver is provided at the center of the cylindrical body so as to reach the glass film portion, and the thin line is immersed. To fill the silver chloride solution.

According to the machining electrode circuit 106A, the current flowing between the counter electrode (machining electrode) 104 and the working electrode (workpiece) 103 is required for electrolytic machining by changing the resistance value of the variable resistor 202. It is possible to set the required current. Z axis stage 107 and XY axis stage 1
08 is driven in the Z-axis direction and the XY-axis direction by the electric driving means under the control of the movement position control device 109, and the movement amount and the movement position are electrically measured. A signal indicating the movement amount and the movement position is sent from the movement position control device 109 to the processing tool tip position determination device 111.

The processing tool tip position determination device 111 is configured to cover the tip of the processing electrode 104 based on the movement amount signal and the movement position signal of the Z-axis stage 107 and the X-axis stage 108 sent from the movement position control device 109. It is determined whether or not the surface to be processed of the workpiece 103 is directly above the processed shape pattern stored in the shape information storage device 110.

The procedure of the processing method according to this embodiment will be described below with reference to FIG. First, the shape information of the desired processing pattern is stored in the shape information storage device 110. Next, the processing electrode 1 is controlled by the separation distance control means.
The separation distance between the tip of the workpiece 04 and the surface of the workpiece 103 is controlled to a predetermined distance. Examples of the separation distance control means include a laser distance sensor and a method of measuring a tunnel current. Next, the tip of the processing electrode 104 is placed on the surface of the workpiece 103 to be processed.
The moving position control device 109 scans a rectangular area including the processing shape pattern stored in the memory 10 at predetermined intervals.
Drives the XY-axis stage 108. At the same time, the processing electrode 1 is determined by the processing tool tip position determination device 111.
It is determined whether or not the tip of 04 is directly above the processed shape pattern stored in the shape information storage device 110 on the processed surface of the workpiece 103. And the processing electrode 10
If it is determined that the front end of the workpiece 4 is directly above the machining shape pattern, a signal is sent to the potential / current control device 106 to apply a constant current between the machining electrode 104 and the workpiece 103 to perform machining. carry out. This is repeated until the entire rectangular area including the processing shape pattern is scanned, thereby obtaining a desired processing shape pattern.

According to the above procedure, a desired shape can be processed on the processing surface of the workpiece 103. For example, when processing a circular pattern as shown in FIG. 4, the tip of the processing electrode 104 is scanned on the processing surface of the workpiece 103 as shown by a dotted arrow, and When a current is applied only when the tip is directly above the circular processing pattern, only the inside of the circular pattern is processed, and a desired processing shape can be obtained.

By applying this embodiment, a metal plate having a diameter of 80
In the embodiment in which the gear-shaped pattern of 0 μm is manufactured by etching, the scanning area of the XY stage 108 is set to 800 μm × 80.
0μm square, scanning direction X direction, speed 50μ
Driven at m / s. The interval between scanning lines was 5 μm.
Only when it is determined that the tip of the processing electrode 104 is directly above the set gear shape pattern, the potential / current control device 106 causes a predetermined gap between the processing electrode 104 and the workpiece 103. A current was applied. At this time, the distance between the tip of the processing electrode 104 and the surface to be processed of the workpiece 103 is 10 μm, and the applied current at the time of performing the processing is Io.
n = 1000 μA, Ton = 0.3 second, Toff = 0.
The pulse current was 3 seconds.

As the working electrode 104, a platinum-iridium alloy wire whose tip was sharpened to a tip diameter of 1 μm by electrolytic etching, and a portion other than the tip was covered with a resin was used. Further, a chromium plate was used as the workpiece 103, and a silver / silver chloride electrode was used as the reference electrode 105. The processing solution was 62.7 g / l of sulfamic acid.
And a chromium electrolytic etching solution in which boric acid was mixed at 37.3 g / l. As a result, diameter 800μm, depth about 15μm
Was obtained by etching.

Embodiment 2 As shown in FIG. 5, the present embodiment has substantially the same configuration as that of Embodiment 1, except that the Z-axis stage 107 controlled by the movement position control device 109 has It is characterized in that the processing electrode 104 is mounted via the electrode mounting arm 112. The operation of this device is as follows.
07 is driven to set the machining electrode mounting arm 112.
Moves up and down in the Z-axis direction, the processing electrode 104 is driven by the processing electrode mounting arm 112, and the separation distance from the processing surface of the workpiece 103 is set. Further, the processing solution container 1
By driving the XY stage 108 provided below the workpiece 01, the processing electrode 104 relatively moves on the processing surface of the workpiece 103.

According to this, the same effect as in the first embodiment can be obtained. Third Embodiment As shown in FIG. 6, the third embodiment has substantially the same configuration as that of the first embodiment, but has a Z
The axis stage 107 is installed, and the Z axis stage 10
7 through the machining electrode mounting arm 112
4 is characterized in that it is attached.

The operation of this apparatus is as follows.
07 is driven to set the machining electrode mounting arm 112.
Moves up and down in the Z-axis direction, the processing electrode 104 is driven by the processing electrode mounting arm 112, and the separation distance from the processing surface of the workpiece 103 is set. Furthermore, XY stage 1
By driving 08, the machining electrode 104 is driven by the machining electrode mounting arm 112 and moves on the work surface of the work 103.

According to this, the same effect as in the first embodiment can be obtained. Fourth Embodiment FIG. 7 shows a processing apparatus having substantially the same configuration as that of the first embodiment, but using a discharge phenomenon as a processing phenomenon. In the present embodiment, a work 103 immersed in a work fluid 102 in a work fluid container 101 and a work 1
A machining electrode 104 disposed opposite to the workpiece 03 for performing electric discharge machining on the workpiece 103; and a discharge current control device 70 for controlling a discharge current flowing between the workpiece 103 and the machining electrode 104.
1 and a workpiece 1 installed below the processing fluid container 101.
03, which can be moved in the Z-axis direction (vertical direction), and a Z-axis stage 107, which is installed below the Z-axis stage 107, moves the workpiece 103 in the X-axis and Y-axis directions (horizontal direction). XY-axis stage 108 that can be moved
A movement position control device 109 for controlling movement of the Z-axis stage 107 and the XY-axis stage 108; and a shape information storage device 110 for storing information of an arbitrary processing shape pattern.
Moving position control device 109 and shape information storage device 110
Connected to the discharge current control device 701 and the information stored in the shape information storage device 110 and the movement position control device 10
9 determines whether or not the tip of the processing electrode 104 is directly above a desired processing shape pattern on the processing surface of the processing target 103 based on the movement position information of the processing target 103 sent from the processing tool 9. A tip position determination device 111 is provided.

The discharge current control device 701 includes the machining electrode 10
By applying a voltage between the workpiece 4 and the workpiece 103, a pulse-like discharge current required for machining can be generated between the machining electrode 104 and the workpiece 103. Processing electrode 104
Is a rod-shaped body, made of brass, a zinc alloy, an aluminum alloy, or the like. The processing liquid 102 is an insulating oily liquid, such as white kerosene, silicon oil, or machine oil.

According to this apparatus, the tip of the processing electrode 104 is moved in the same manner as in the first embodiment.
By applying a discharge current between the processing electrode 104 and the workpiece 103 by the discharge current control device 701 only when it is directly above the processing shape pattern on the processing surface of
Any shape can be obtained.

[0027]

According to the present invention, the following effects can be obtained. First, regardless of the shape of the pattern to be processed, the scanning of the moving stage is performed so that the tip of the processing tool scans a rectangular area including the processing shape pattern on the surface to be processed at regular intervals, The control of the moving stage is very simple. In addition, the stage moves only one axis at a time, and the movement error is smaller than in the case where two axes are simultaneously controlled, so that relatively high processing accuracy can be easily obtained.

Further, unlike the case where the contour of the machined shape pattern is approximated by a plurality of functions, there is no need to perform complicated numerical analysis. Further, when the electric discharge machining technique is used, the tip of the machining tool can be made thinner, and a high machining resolution can be obtained by increasing the scanning interval of the machining electrode.

When the electrolytic machining technique is used, the same effect as when the electric discharge machining technique is used can be obtained.
The consumption of the processing tool is extremely reduced, and both the removal processing and the addition processing can be realized by the same apparatus.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a first embodiment of the present invention.

FIG. 2 is a circuit diagram showing an example of a constant current circuit used in the present invention.

FIG. 3 is a flowchart showing a processing procedure according to the present invention.

FIG. 4 is an explanatory view showing an example of a processing method according to the present invention.

FIG. 5 is a schematic diagram showing a second embodiment of the present invention.

FIG. 6 is a schematic diagram showing a third embodiment of the present invention.

FIG. 7 is a schematic diagram showing a fourth embodiment of the present invention.

[Explanation of symbols]

 Reference Signs List 101 processing solution container 102 processing solution 103 workpiece 104 processing electrode 105 reference electrode 106 potential / current control device 107 Z-axis stage 108 XY-axis stage 109 moving position control device 110 shape information storage device 111 processing tool tip position determination device

────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-3-79233 (JP, A) JP-A-9-216127 (JP, A) JP-A-11-158682 (JP, A) (58) Field (Int.Cl. ⁷ , DB name) B23H 1/00-9/18

Claims (6)

(57) [Claims] 1. A processing tool and a workpiece are arranged to face each other, and a physical or chemical processing phenomenon is generated between a tip of the processing tool and the workpiece, whereby the workpiece is processed. In the processing method of performing processing on the surface to be processed, the tip of the processing tool may scan at an arbitrary interval in a rectangular area including a processing shape pattern to be formed on the processing surface of the workpiece. A moving step of moving at least one of the processing tool and the workpiece, and only when the tip of the processing tool is directly above the processing shape pattern, only between the processing tool and the workpiece. And simultaneously or alternately performing a processing step of exciting a physical or chemical processing phenomenon to form a processing pattern of an arbitrary shape on the processing surface of the workpiece. To Processing method for the butterflies. 2. The machining method according to claim 1, wherein the machining phenomenon is a discharge phenomenon caused by applying a voltage between the machining tool and the workpiece. 3. The processing method according to claim 1, wherein the processing phenomenon is an electrochemical reaction caused by applying a voltage between the processing tool and the workpiece in an electrolyte solution. . And a holding means for holding the processing tool and the workpiece in opposition to each other, by causing a physical or chemical processing phenomenon between the tip of the processing tool and the workpiece. In a processing apparatus for performing processing on a surface to be processed of the workpiece, shape information storage means for storing information of a processing shape pattern formed on the surface to be processed of the workpiece, the processing tool and the workpiece Moving means for arbitrarily changing the relative position of the processing tool, and the tip of the processing tool arbitrarily moves within a rectangular area including the processing shape pattern stored in the shape information storage means on the processing surface of the workpiece. Scanning means for controlling the moving means so as to scan at intervals of, based on the information stored in the shape information storage means, whether the tip of the processing tool is directly above the processing pattern of the workpiece judge Processing apparatus, characterized in that it comprises a tool tip position position determining means. 5. The processing phenomenon is a discharge phenomenon caused by applying a voltage between a processing tool and a workpiece, and a distance between a tip of the processing tool and a processing surface of the workpiece is determined. 5. The processing apparatus according to claim 4, further comprising: a separation distance setting unit that is arbitrarily set; and a voltage control unit that applies an arbitrary voltage between the processing tool and the workpiece. 6. The processing phenomenon is an electrochemical reaction caused by applying a voltage between the processing tool and the workpiece in an electrolyte solution, wherein the tip of the processing tool and a workpiece between the processing tool and the workpiece are processed. A separation distance setting means for arbitrarily setting a distance to a processing surface, and an electrochemical reaction control means for applying an arbitrary voltage or current between the processing tool and the workpiece. Item 5. The processing apparatus according to Item 4.