CN1032976A - Long optical grating pair relatively rotates angle-measuring method and application - Google Patents
Long optical grating pair relatively rotates angle-measuring method and application Download PDFInfo
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- CN1032976A CN1032976A CN 88108061 CN88108061A CN1032976A CN 1032976 A CN1032976 A CN 1032976A CN 88108061 CN88108061 CN 88108061 CN 88108061 A CN88108061 A CN 88108061A CN 1032976 A CN1032976 A CN 1032976A
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Abstract
The present invention is the new angle measurement application technology in the delicate metering field tests.It is characterized in that the angle measurement that relatively rotates with a pair of long optical grating pair, its moving grating is to be contained in one on the pivot arm that stationary shaft rotates, when rotating, pivot arm on fixing indication grating window, produces in the Moire fringe information input computing machine, by the fixed routine computing, provide a high precision then, reliable and stable low-angle value.The present invention can be made into small-angle generator, is used for detecting accurate autocollimator and level meter; Or be used on the multiteeth indexing table as low-angle segmentation reading device; Or moving grating is vertically mounted on the pivot arm, make the lever test table.Be convenient to realize digitizing and robotization, environment for use there is not specific (special) requirements, low being convenient to of cost promoted.
Description
The invention belongs in the metrological testing technology field a new method of testing and application technology.It is characterized in that realizing low-angle metering and test with the relatively rotating of long raster set.The present invention includes computing two parts of test and computing machine.
Mainly contain following several to low-angle precision measurement method both at home and abroad at present: one, utilize the sine principle angle measurement: lay two accurate dial gauges (using bird formula interferometer or vertical optical meter usually) on the next door of a horizontal rigid body beam, one of them is used for nulling, keep beam motionless in its oscillation centre when transverse axis swings up and down, another then is used to refer to the chord length of swing, the angle value that just can obtain swinging according to the ratio of chord length and brachium.The angle measurement scope of this method is limit by the range of dial gauge, be to enlarge the angle measurement scope, still need fill up precision gage block with different size to remedy the deficiency of dial gauge range below the gauge rod of dial gauge.Though this instrument precision is higher, structure is complicated, the cost height, and reading is not directly perceived, inconvenience and computer interconnection, and operating process is loaded down with trivial details.Two, utilize the laser interferance method angle measurement: this method measuring accuracy height, measurement range is also bigger, also be convenient to realize and computer interconnection, but structure is more complicated, and cost is higher, requires also very harsh to test environment.Three, utilize grating angle measurement its cost in garden expensive more, generally be used for surveying full week the test at angle arbitrarily in (360 °) angle.
The object of the present invention is to provide the low-angle new method-long raster set of a kind of measurement to relatively rotate angle-measuring method.This method is simple in structure, and measuring sensor has only two length of a film gratings, thereby cost is low.Because its chain tape is extremely short, and contactless and friction in chain tape, thereby the measuring accuracy height, reliable and stable.Angle measurement scope of the present invention depends on the grating constant of used grating, is generally about 1 °.
Application to long raster set at present is only limited to the measurement length displacement; Relatively rotating angle measurement with long raster set is not studied or uses by people as yet.The principle of this angle-measuring method is shown in accompanying drawing one.Pivot arm 1 rotates around stationary shaft 2, and the moving grating G of drive and pivoted arm positioned vertical
2Rotate fixing four-light schistostoma phase indication grating G together
1With respect to moving grating G
2Little gap is arranged and arranged parallel.By the emitted directional light vertical irradiation of light source 3 scioptics 4 in long raster set G
1, G
2Delineation face.Light is by long raster set G
1, G
2The Moire fringe change information of Xing Chenging is by one group of corresponding photovalve 5 (corresponding indication grating G that receives afterwards
1Each window one photovalve is arranged).Indication grating G
1Four windows by grating length direction line spread, promptly vertical with the delineation direction of grating.Indication grating G in the four-light mouth
1The phase place of delineation is followed successively by pi/2, O, π and 3 pi/2s.When grating is paid G
1With G
2When relatively rotating, receive the Moire fringe information of four variations by photovalve 5.Analyze (theoretical derivation is partly seen Appendix) by paying upright leaf optical theory, after the information that is obtained on O and the π phase window is by difference be:
Vs＝AFs（θ）·Sin（ (2πRθ)/(d) ）……（1）
Information on pi/2 and the 3 pi/2 windows after by difference is:
Vc＝AFc（θ）·Cos（ (2πRθ)/(d) ）……（2）
A is the constant relevant with specific device in the formula;
R is the vertical range of window center line to center of rotation;
θ is long raster set G
1, G
2Relative rotation (i.e. the grid line angle of two gratings);
Fs(θ), Fc(θ) be respectively the which amplitude modulation factor of sine function and cosine function in formula (1) and the formula (2).They and window size h, b and position e thereof
1Or e
2, grating constant d, and the relative rotation θ that grating is paid is relevant.After the structure that grating is paid was determined, they were the function (see Appendix middle formula (14) or (16)) of rotational angle theta.Its hb, e
1And e
2See shown in the accompanying drawing 1.
Theory and practice proves, modulating function Fs(θ) with Fc(θ) variation in the angle measurement scope is quite mild, amplitude with previous cycle sine (or cosine) function in the angle measurement process is AFs(θ) (or AFc(θ)), replacing thereafter, the error that amplitude produced of one-period is negligible.Accompanying drawing 2 is the oscillogram that changes with rotational angle theta for Vs and the Vc that obtains on storage oscilloscope, accompanying drawing 2(a) for measuring the gamut oscillogram, (b) be the local oscillogram of launching.They and theoretical analysis promptly are consistent with formula (2) with formula (1).
In this angle-measuring method, use an one-chip computer to do the information processing of photosignal.The process of finding the solution rotational angle theta on single-chip microcomputer mainly may further comprise the steps:
1. to two paths of signals Vs and Vc continuous sampling, get its extreme value and be current AFs(θ) and AFc(θ) value.Trial run before measurement can guarantee that this step is ahead of other step.
2. behind operation program, obtain Vs/AFs(θ) and Vc/AFc(θ) value.
3. by above-mentioned value, the program through looking into arcsin function or inverse cosine function table obtains the value of 2 π (R)/(d) θ.
4. just can obtain the θ value by further operation program.
The processing speed of single-chip microcomputer can satisfy the general test requirement fully, can provide high-resolution numeral simultaneously and show, is convenient to and other computer interconnection.Utilize the technology of the present invention angle measurement cost low in addition, environment for use there is not specific (special) requirements.
Utilize this method angle measurement, its precision depends on that R(is as shown in Figure 1) the delineation precision of value and grating; Measurement range depends on the incisure density of used grating and the height of window.Incisure density as grating is 50/mm, and during h=2mm, measurement range is 40 ' (reducing then as h, measurement range can further enlarge), and when at this moment R got 200mm, can obtain was 0.3 second precision; R can obtain 0.15 second precision when getting 400mm.The R value is got bigger value as far as possible under the condition that physical construction allows, but the incisure density of grating is generally got 50/mm or 100/mm.
Utilize angle measurement technique of the present invention can make small-angle generator, as low-angle transmission benchmark; Be used for examining and determine accurate autocollimator and level meter; Or, provide low-angle segmentation reading as parts of multiteeth indexing table; Simultaneously also can utilize the principle of this method to make rothotest, the moving grating positioned vertical at this moment then grating being paid is made the lever test table on the rotating lever arm, with the delicate metering of its simple structure realization to the tiny length size.
Claims (2)
1, the present invention is the application technology of a new measurement low-angle (or micrometer) in the delicate metering field tests: it is characterized in that small-angle generator and the multiteeth indexing table upper angle segmentation reading part made from the counterrotating method of a pair of long raster set or make other instrument.
2, said according to claim 1: other instrument of utilizing the counterrotating method of a pair of long raster set to make is characterized in that moving grating is vertically mounted on lever test table made on the pivot arm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 88108061 CN1011821B (en) | 1988-11-26 | 1988-11-26 | Relative-rotating angle-measuring method using long raster set |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 88108061 CN1011821B (en) | 1988-11-26 | 1988-11-26 | Relative-rotating angle-measuring method using long raster set |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1032976A true CN1032976A (en) | 1989-05-17 |
| CN1011821B CN1011821B (en) | 1991-02-27 |
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ID=4834900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 88108061 Expired CN1011821B (en) | 1988-11-26 | 1988-11-26 | Relative-rotating angle-measuring method using long raster set |
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| Country | Link |
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| CN (1) | CN1011821B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1295483C (en) * | 2004-05-12 | 2007-01-17 | 中国科学院长春光学精密机械与物理研究所 | Auto-collimation interference measurement system for three dimensional angular distortion of object |
| CN106767542A (en) * | 2016-12-28 | 2017-05-31 | 中国科学院长春光学精密机械与物理研究所 | A kind of contactless torsion angle measuring system and measuring method |
| CN113639674A (en) * | 2021-10-13 | 2021-11-12 | 成都宏明电子股份有限公司 | Non-contact rotary potentiometer based on light refraction principle |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104764419B (en) * | 2015-03-04 | 2017-11-17 | 江苏大学 | A kind of vehicle corner sensor system based on LASER Light Source |
-
1988
- 1988-11-26 CN CN 88108061 patent/CN1011821B/en not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1295483C (en) * | 2004-05-12 | 2007-01-17 | 中国科学院长春光学精密机械与物理研究所 | Auto-collimation interference measurement system for three dimensional angular distortion of object |
| CN106767542A (en) * | 2016-12-28 | 2017-05-31 | 中国科学院长春光学精密机械与物理研究所 | A kind of contactless torsion angle measuring system and measuring method |
| CN106767542B (en) * | 2016-12-28 | 2019-02-01 | 中国科学院长春光学精密机械与物理研究所 | The contactless torsion angle measuring system of one kind and measurement method |
| CN113639674A (en) * | 2021-10-13 | 2021-11-12 | 成都宏明电子股份有限公司 | Non-contact rotary potentiometer based on light refraction principle |
| CN113639674B (en) * | 2021-10-13 | 2022-01-14 | 成都宏明电子股份有限公司 | Non-contact rotary potentiometer based on light refraction principle |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1011821B (en) | 1991-02-27 |
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