CN203011370U - Calibrating apparatus for angle measuring device based on optical lever - Google Patents
Calibrating apparatus for angle measuring device based on optical lever Download PDFInfo
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- CN203011370U CN203011370U CN 201320006554 CN201320006554U CN203011370U CN 203011370 U CN203011370 U CN 203011370U CN 201320006554 CN201320006554 CN 201320006554 CN 201320006554 U CN201320006554 U CN 201320006554U CN 203011370 U CN203011370 U CN 203011370U
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Abstract
Angle measurement device calibrating installation based on optical lever, belong to angular error field of measuring technique, solve the problems, such as that the calibrating device of existing angle error is at high cost, including lower turntable, bottom two dimension manual translation adjusting platform, the mounting base of goniometer part to be examined and determine, middle part two dimension manual translation adjusting platform, upper turntable, one-dimensional manual translation platform, plane mirror, laser, photodetector and the reading head being mounted on verification table. In use, goniometer part to be examined and determine is mounted in mounting base, upper turntable and plane mirror is driven to rotate by controlling lower turntable
, reflection light deflection
After be incident on target surface, then control upper turntable and reversely rotate
; By being calibrated angle
With the standard value sequence of angle step
, calculate the standard value sequence for being calibrated angle
. The utility model structure is simple, and manufacturing cost is low, improves the precision of angle measurement device.
Description
Technical field
The utility model belongs to the angular error field of measuring technique, particularly a kind of calibrating installation of angle measurement device.
Background technology
The method of measurement of angle is varied, roughly can be divided into Mechanical Method (as end tooth indexing, lever method), electromagnetic method (as circle magnetic grid, round induction synchrometer) and photoelectric method (as optical dividing head, scale, regular polygonal prism body examination angle, code-disc angle measurement, grating angle measurement, loop laser angle measurement, laser interference angle measurement) etc.
Mechanical Method adopts high class gear as the calibration foundation, and can improve by differential mode resolution and precision take end tooth indexing as representative.The advantage of the method is that precision is more stable, and the complete cycle measuring accuracy is higher; Its shortcoming is that precision reaches 0.1 rad and is difficult to afterwards continue to improve again, this be mainly due to multilayer differential when cumulative each layer concentric error require high being difficult to reach.Instrument and equipment is heavy in addition, and operation requirements is high.
Electromagnetic method adopts electromagnetic induction that the mode that angular displacement is converted to electric signal is carried out measurement of angle take round induction synchrometer as representative, and precision can reach 0.5 rad.The advantage of the method is lower to environmental requirement, can be used for the mal-conditions such as lathe; Shortcoming is to have drift, and is anti-interference relatively poor and the life-span is shorter.
In photoelectric method, type is more, and precision is relatively high.
The Moire fringe that the radial grating that the utilization of circle grating is scribed on the disk of glass disk or tangential grating and indication grating produce carries out measurement of angle.The method generally can reach the approximately complete cycle precision of 0.2 rad, reaches as high as 0.05 rad, but high-precision round photogate difficulty makes, and is expensive.
The ring grating is to scribe grid line on the face of cylinder of a steel loop, with the Moire fringe that produces with indication grating carry out measurement of angle.Belong to raster pattern precision angle device, have the advantages such as non-contact measurement, easy for installation, digitizing reading.The precision of this device is close with the circle grating.
The loop laser angle measurement adopts the laser gyro principle to measure angular velocity, and then obtains rotational angle.The method can reach the measuring accuracy of 0.1 rad, but the method technical difficulty is very large, only has a few countries to grasp, and technology is not yet ripe.
The laser interference angle measurement is to utilize the way of interfering, and realizes angle measurement thereby low-angle is converted into postulates of relativity.The precision of this method is the highest at present, there is the research report can reach the sensitivity of 0.002 rad abroad, but this only limits to low-angle measurement, the precision that its complete cycle is measured generally is about 0.1 rad, reach as high as 0.04 rad, but the instrument very complex is expensive, and only commercial laser interferometer just needs units up to a million, the high-accuracy measurement of more leisure opinion and required related facility.
With regard to angular encoder at present commonly used such as scale, code-disc, round induction synchrometer, circle grating, ring grating etc., the product of producing is because all there is scoring errors in the reason of technique, the 350mm ring grating of producing such as Britain Reinshaw company has the approximately scoring errors of 0.8 rad, and there is the approximately scoring errors of 0.5 rad in the best ring grating product that the said firm provides.This is insufferable for high-acruracy survey, therefore must the scoring errors of angle measurement device be corrected.
Also adopt the optical lever principle to measure the measurement of miniature linear displacement and micro angular displacement in prior art.
The optical lever principle is based on the following fact: 1, and according to reflection law, if the direction of incident ray is constant, when a certain angle θ of reflecting surface rotation, the direction of reflection ray will be rotated 2 θ angles; 2, there is conversion relation accurately between catoptrical Angulation changes amount, light brachium (being that incidence point is to the distance of hot spot) and hot spot displacement three.
Fig. 1 is seen in the principle explanation of optical lever, one light beam drops on receiving screen through hot spot after flat mirror reflects, when there being micro-displacement δ L to cause level crossing that small rotation is arranged, emergent light namely deflects with the angle of twice, simultaneously because the distance B of level crossing and scale is longer, make the emergent light hot spot move than δ L much bigger apart from δ n.By formula
δL=δn/(2D/b)
Can obtain micro-displacement δ L.
2D/b is the magnification of system.
Be more than to utilize the optical lever principle to ask micrometric displacement, in fact, utilize this principle can also ask micro angular displacement, when reflecting surface rotation one angle [alpha], reflection ray rotates 2 α, and α can be obtained by following formula:
α=δL/b=δn/2D
Because the value of D is very large, so δ n is also large, just becomes and easily measured.
The distinguishing feature of optical lever principle is: along with resolution and the precision of the lengthening measuring system of light arm almost is linear growth, be quick on the draw, precision is high.In the time of most of, the optical lever principle is used as the miniature linear displacement measuring method, such as the elastic modulus of measuring material, creep compliance etc.Due to the transforming relationship of angle and displacement of the lines, this principle also can be used for the measurement of micro angular displacement except being used for the measurement of miniature linear displacement, does not still use the optical lever principle to measure the record of demarcating as the angle measurement device at present.
The utility model content
All there is scoring errors in various degree in any angle measurement device products.And due to reasons such as request for utilization, cost, buying restrictions, often be difficult to buy the angle measurement device that is fit to precision.Such as using for high-acruracy surveys such as uranometries, angle measurement accuracy need to reach 0.01 rad or higher, and this error for angle measurement device itself has proposed very high requirement, even if the angle measurement product of current full accuracy also is difficult to satisfy its requirement.Therefore, be very necessary to calibrating and the correction of angle error.
On the other hand, there is the shortcoming of device costliness in present existing calibrating installation, and such as comparing calibrating with high-precision grating encoder, this grating is just very expensive and very difficult to obtain; Interferometric method calibrating for another example, the price of the equipment such as interferometer is also very expensive.
The angle measurement device calibrating installation that the purpose of this utility model is to provide that a kind of calibration accuracy is higher, relative low price, calibration equipment are easy to obtain.
The technical scheme that the utility model adopts is as follows:
Angle measurement device calibrating installation based on optical lever:
Comprise verification table, lower turntable is installed on verification table, lower turntable is made of base and lower rotary table, and the shaft set on lower rotary table is on the rolling bearing on base;
By adapter flange, the two-dimentional manual translation in bottom is installed on lower rotary table and regulates platform, bottom two dimension manual translation is regulated the mount pad that location survey hornwork spare to be checked is installed by adapter flange on platform;
The center of top of mount pad is equipped with the two-dimentional manual translation in middle part by adapter flange and regulates platform;
The two-dimentional manual translation in middle part is regulated on platform and by adapter flange, upper turntable is installed;
The rotation center of lower turntable, location survey hornwork spare to be checked and upper turntable is positioned on the same vertical curve;
Upper turntable is made of base and top rotary table, on the rolling bearing on the shaft set base on top rotary table;
By adapter flange, one dimension manual translation platform is installed on upper turntable;
By adapter flange, mirror holder is installed on one dimension manual translation platform, vertically is provided with level crossing on mirror holder, the reflecting surface of level crossing and the rotation center of upper turntable are positioned at same plane;
Laser instrument and photodetector are installed on verification table, and laser instrument and photodetector and level crossing are positioned at same level, and the target surface of photodetector is parallel to the rotation center of top rotary table;
Described level crossing, laser instrument and photodetector consist of optical lever;
Read head be used to the corner numerical value that reads location survey hornwork spare to be checked is installed on verification table;
Read head and photodetector all are connected with data processor by data collecting card;
The control system of upper turntable and lower turntable all is connected with data processor.
As preferred version of the present utility model:
Described location survey hornwork spare to be checked is angular encoder, inductosyn, scale, circle grating or ring grating;
The read head of described corner numerical value be used to reading location survey hornwork spare to be checked has more than two, and read head is the diameter distribution along location survey hornwork spare periphery to be checked and arranges on verification table;
Described data processor is single-chip microcomputer or computing machine;
Described photodetector is the CCD camera of control able to programme.
During use, location survey hornwork spare to be checked is horizontal positioned is arranged on mount pad; Regulate platform, middle part two dimension manual translation adjusting platform by regulating the two-dimentional manual translation in bottom, the rotation center of lower turntable, location survey hornwork spare to be checked, upper turntable is positioned on the same vertical curve; By regulating one dimension manual translation platform, make the reflecting surface of level crossing and the rotation center of upper turntable be positioned at same plane; Control laser instrument and send laser, incident ray is incided on the reflecting surface of level crossing, with the rotation center quadrature of top rotary table, the reflection ray of laser is impinged perpendicularly on the target surface of photodetector.
Treat with above-mentioned calibrating installation the method that calibrating angle measurement device examines and determine and comprise following sequential steps:
Step 1: control lower turntable by the corner step-length θ rotation that equates, treat calibrating angle measurement device and carry out the multistep sampled measurements, gather and demarcated angle sequence β
iMeasured value sequence α with angle step
i, comprise the following steps:
Step 1.1: the light spot image data on the target surface of collection photodetector, as starting point light spot image data;
Step 1.2: gather the reading value β that is demarcated angle, and the measured value α of angle step, comprise the following steps:
Rotating shaft by turntable under data processor controlled is rotated by the corner step-length θ that sets, θ=360 °/n wherein, n 〉=21600, lower turntable drives upper turntable and level crossing rotation, incide on the target surface of same photodetector after reflection ray deflection angle 2 θ of level crossing, obtain the terminal point light spot image;
Gather terminal point light spot image data, calculate the rotating angle increment value of the location survey hornwork spare to be checked that records by optical lever according to following formula, as the measured value α of angle step:
α=arctan(δn/2D)
δ n in following formula be the starting point light spot image to the air line distance of terminal point light spot image, D is light arm or light path, represents the distance between the target surface of level crossing and photodetector;
Gather the corner reading value of location survey hornwork spare to be checked by read head, as being demarcated angle beta;
Step 1.3: the corner step-length θ reverse rotation of setting is pressed in the rotating shaft by turntable on data processor controlled, impinge perpendicularly on the target surface of photodetector after making reflection ray reverse angle 2 θ of the level crossing on turntable, complete a step sampled measurements, turn back to step 1.1 and carry out next step sampled measurements;
Step 2: the standard value sequence of calculating angle step
Comprise the following steps:
The rotating shaft of turntable rotates a circle under data processor controlled, after completing n step sampled measurements, obtains being demarcated angle sequence β
iMeasured value sequence α with angle step
i, according to the standard value sequence i of following formula calculating angle step
α in following formula
iBe the measured value of i angle step, i is all positive integers from 1 to n,
Accumulated value for the measured value of all angle steps;
Step 3: calculate and demarcated angle sequence β according to following formula
iThe corresponding standard value sequence φ that is demarcated angle
i:
I in following formula is all positive integers from 1 to n,
It is the standard value sequence of the angle step that calculated in sampled measurements in the 1st to i step
Accumulated value.
In above-mentioned calibration method, can get corner step-length θ 〉=1 jiao minute, light arm D 〉=5m.
The calibration method of using the utility model device to carry out is that absolute angle scrambler to be detected is arranged on a specially designed turntable, and this turntable designs for twin shaft, the dead in line of two rotating shafts in up and down, but can control respectively its rotation.Beam of laser is gone out with this flat mirror reflects, approximately place a CCD camera in the position of 10m (light path) in distance, when level crossing rotated a low-angle with upper turntable, the position of hot spot will change, and the CCD camera can detect this variation.Because the light arm has 10m, so even if very little angle (such as 0.1 rad), facula position just has larger movement (5 microns), and this displacement can be processed by image accurately obtain fully.Size restrictions due to the CCD target surface, level crossing is only with low-angle of outer ring rotating, such as 1 jiao minute or 0.1 rad, after completing this low-angle detection, upper turntable plays low-angle of turntable reverse rotation relatively, so hot spot is got back to again near starting point, just can carry out next low-angle detection afterwards, detect until complete complete cycle.
In whole testing process, the supporting bull frame of reference of angular encoder will be read angle and change.After completing the complete cycle detection, can obtain the angular displacement in each step after the CCD detected image is processed, carry out closed adjustment after summation.Because the angle of whole circumference is 360 °, this is a known quantity, therefore after completing the complete cycle measurement, should equal 360 ° after the measured value in each step is cumulative, but because there is error in measurement, make accumulated value be not equal to 360 °, this difference＜360 °-accumulated value〉be mis-tie.This difference divided by measuring frequency n, is obtained correction v, each measured value is added correction, namely obtain the adjusted value of measuring amount, this method is exactly closed method of adjustment commonly used in surveying.Utilize this method can obtain the Angular Displacement Detecting value in each step, i.e. the adjusted value that obtains through closed adjustment of the measuring amount in each step.Can compensate correction to the reading of angular encoder by this detected value: to every one step surveying, angular encoder reading and optical lever measured value two detected values corresponding to cover are arranged, here the compensation method of adopting is, the optical lever measured value is used as standard, the optical lever measured value is deducted the reading value of angular encoder, measured value with this value and angular encoder is mapped one by one again, just consists of a number table.When carried out again measurement of angle reading with the angular encoder read head after, can utilize above-mentioned number table to carry out the correction that difference obtains measuring, the angular encoder reading is added measurement result after its correction is namely corrected, Here it is, and compensation is corrected.The method of utilizing this case to carry has obtained a series of little corrected values corresponding to rotational angle registration.Next the indicating value of the angle of rotation that these are little successively cumulative (the cumulative meaning is successively: such as 5 steps were arranged, the step-length in each step is 5 ', so just can obtain following numerical value and be listed as: " 0,5,10,15,20,25 ".More step number is analogized, and the step-length in each step needn't be definitely equal.), obtaining a series of angle registration that increases progressively, also will add up successively through numerical value after correcting simultaneously, obtain the numerical value after a series of correction that increases progressively.This two columns value can form an amendment list, and (content of amendment list is two column datas: first row is fixed angle numerical value, the registration of general corresponding angle measurement device, secondary series is the numerical value after corresponding corrected value when being the numerical value of corresponding the first row of the registration when the angle measurement device, be true value), carry out measurement result after interpolation calculation can be corrected according to the measurement registration that obtains in actual measurement as argument.
The whole testing process of above-mentioned calibration method is controlled by computer program, realizes that AUTOMATIC STATIC detects; Code wheel reading and CCD gather by same set of control, acquisition software system management, realize that robotization detects, and complete cycle detects the reprocessing analysis the data obtained; That whole system should be placed in is airtight, in the laboratory of lucifuge.
Above-mentioned calibration method is mapped two kinds of data based time serieses, the result of optical lever detection system can be used for the scoring errors of angle correction scrambler.Two groups of data are arranged in experiment, and one group is the data that the angular encoder read head obtains, and one group is the camera data of optical lever detection system, and these two groups of data correspondence mutually gather simultaneously, just can be used to result is carried out analyzing and processing.Therefore, the control of whole system, data acquisition need to have unified coordination to control.Static Detection is carried out in the confirmatory experiment plan, only need be in the situation that before each step beginning, static collection of turntable gets final product with rotating afterwards.During formal the detection, optical lever test experience system has carried out design and the debugging of abundant necessity.
The utility model device can be realized the calibrating of the measurement of angle device of degree of precision, and calibration accuracy can improve with the optical arm length increase of optical lever, on the other hand, after having realized that complete cycle is measured, thereby can realize that by closed adjustment the nature demarcation improves the precision of measuring greatly.The utility model apparatus structure is simple and easy to, and simple and easy to do with the calibration method that the utility model device carries out, cost is lower, can be high precision angle-measuring correction is provided, improved the precision of angle measurement device.
Description of drawings
Fig. 1 is optical lever principle schematic of the prior art;
Fig. 2 is that the utility model is based on the cut-open view of the angle measurement device calibrating installation of optical lever;
Fig. 3 is the light path schematic diagram of the optical lever in the utility model;
Fig. 4 is the cut-open view of the lower turntable in Fig. 2;
Fig. 5 is the cut-open view of the upper turntable in Fig. 2;
Fig. 6 is the schematic perspective view of the calibrating installation in Fig. 2.
Embodiment
Angle measurement device calibrating installation based on optical lever, comprise and be arranged on indoor verification table 1 airtight, lucifuge, as shown in Figure 2, turntable 2 under installing on verification table 1, as shown in Figure 4, lower turntable 2 is made of base 22 and lower rotary table 23, and the rotating shaft 24 on lower rotary table 23 is sleeved on rolling bearing 25 on base 22;
With adapter flange 3, the two-dimentional manual translation in bottom is installed and regulates platform 4 on lower rotary table 23, the two dimension manual translation is regulated the mount pad 6 that location survey hornwork spare 7 to be checked is installed with adapter flange 5 on platform 4 in the bottom;
Described location survey hornwork spare to be checked 7 is circular angular encoder;
Location survey hornwork spare 7 to be checked is on the top periphery that horizontal positioned is sleeved on mount pad 6;
With adapter flange 8, the two-dimentional manual translation in middle part is installed in the center of top of mount pad 6 and regulates platform 16;
Regulate on platform 16 in middle part two dimension manual translation and install turntable 10 with adapter flange 9;
Regulate platform 4, middle part two dimension manual translation adjusting platform 16 by regulating the two-dimentional manual translation in bottom, the rotation center of lower turntable 2, location survey hornwork spare 7 to be checked and upper turntable 10 is positioned on the same vertical curve;
As shown in Figure 5, upper turntable 10 is made of base 26 and top rotary table 27, and the rotating shaft 28 on top rotary table 27 is sleeved on rolling bearing 29 on base 26;
With adapter flange 11, one dimension manual translation platform 12 is installed on upper turntable 10;
With adapter flange 13, mirror holder 14 is installed on one dimension manual translation platform 12, vertically is provided with level crossing 15 on mirror holder 14, by regulating one dimension manual translation platform 12, make the reflecting surface of level crossing 15 and the rotation center of upper turntable 10 be positioned at same plane;
Laser instrument 17 and photodetector 18 are installed on verification table 1, are made laser instrument 17 and photodetector 18 be positioned at same level with level crossing 15, make the target surface of photodetector 18 be parallel to the rotation center of top rotary table 10;
Described level crossing 15, laser instrument 17 and photodetector 18 consist of optical lever;
Read head for the corner numerical value that reads location survey hornwork spare 7 to be checked is installed on verification table 1;
Read head is connected with photodetector and all is connected with data processor by data collecting card;
The control system of upper turntable 10 and lower turntable 2 all is connected with data processor;
As shown in Figure 3, control laser instrument 17 and send laser, incident ray 19 is incided on the reflecting surface M of level crossing 15, rotation center quadrature with top rotary table 10, the reflection ray 20 of laser is impinged perpendicularly on the target surface of photodetector 18, M in Fig. 3 represents the state when level crossing 15 is positioned at initial position, and N is the normal of level crossing 15 reflecting surface M when being positioned at initial position.
Treat with said apparatus the method that calibrating angle measurement device 7 examines and determine and comprise following sequential steps:
Step 1: control lower turntable 2 by the corner step-length θ rotation that equates, treat calibrating angle measurement device 7 and carry out the multistep sampled measurements, gather and demarcated angle sequence β
iMeasured value sequence α with angle step
i, comprise the following steps:
Step 1.1: the light spot image data on the target surface of collection photodetector 18, as starting point light spot image data;
Step 1.2: gather the measured value α that is demarcated angle beta and angle step, comprise the following steps:
Rotating shaft 24 by turntable under data processor controlled 2 is rotated by the corner step-length θ that sets, θ=360 °/n wherein, n 〉=21600, lower turntable 2 drives upper turntable 10 and level crossing 15 rotations, as shown in Figure 3, after reflection ray 20 deflection angle 2 θ of level crossing 15, the reflection ray 21 that obtains incides on the target surface of photodetector 18, obtain the terminal point light spot image, M ＇ in Fig. 3 represents the state when level crossing 15 is positioned at the final position, and N ＇ is the normal of level crossing 15 reflecting surface M ＇ when being positioned at the final position;
Gather terminal point light spot image data, calculate the rotating angle increment value of the location survey hornwork spare to be checked that records by optical lever according to following formula, as the measured value α of angle step:
α=arctan(δn/2D)
δ n in following formula be the starting point light spot image to the air line distance of terminal point light spot image, D is light arm or light path, represents the distance between the target surface of level crossing 15 and photodetector 18;
Gather the corner reading value of location survey hornwork spare 7 to be checked by read head, as being demarcated angle beta;
Step 1.3: the corner step-length θ reverse rotation of setting is pressed in the rotating shaft 28 by turntable on data processor controlled 10, after making reflection ray 21 reverse angle 2 θ of the level crossing 15 on turntable 10, the reflection ray 20 that obtains impinges perpendicularly on the target surface of photodetector 18, complete a step sampled measurements, turn back to step 1.1 and carry out next step sampled measurements;
Step 2: the standard value sequence of calculating angle step
Comprise the following steps:
The rotating shaft 24 of turntable 2 rotates a circle under data processor controlled, after completing n step sampled measurements, obtains being demarcated angle sequence β
iMeasured value sequence α with angle step
i, according to the standard value sequence of following formula calculating angle step
α in following formula
iBe the measured value of i angle step, i is all positive integers from 1 to n,
Accumulated value for the measured value of all angle steps;
Step 3: calculate and demarcated angle sequence β according to following formula
iThe corresponding standard value sequence φ that is demarcated angle
i:
I in following formula is all positive integers from 1 to n,
It is the standard value sequence of the angle step that calculated in sampled measurements in the 1st to i step
Accumulated value.
The read head of described corner numerical value be used to reading location survey hornwork spare 7 to be checked has four, and four read heads are the diameter distribution along location survey hornwork spare 7 peripheries to be checked and arrange on verification table 1;
Described data processor is computing machine;
Described photodetector 18 is the CCD camera of the control able to programme of 30mm for long limit;
Described corner step-length θ can be 1 jiao minute, and light arm D can be 10m.
Claims (2)
1. based on the angle measurement device calibrating installation of optical lever, it is characterized in that:
Comprise verification table, lower turntable is installed on verification table, lower turntable is made of base and lower rotary table, and the shaft set on lower rotary table is on the rolling bearing on base;
By adapter flange, the two-dimentional manual translation in bottom is installed on lower rotary table and regulates platform, bottom two dimension manual translation is regulated the mount pad that location survey hornwork spare to be checked is installed by adapter flange on platform;
The center of top of mount pad is equipped with the two-dimentional manual translation in middle part by adapter flange and regulates platform;
The two-dimentional manual translation in middle part is regulated on platform and by adapter flange, upper turntable is installed;
The rotation center of lower turntable, location survey hornwork spare to be checked and upper turntable is positioned on the same vertical curve;
Upper turntable is made of base and top rotary table, on the rolling bearing on the shaft set base on top rotary table;
By adapter flange, one dimension manual translation platform is installed on upper turntable;
By adapter flange, mirror holder is installed on one dimension manual translation platform, vertically is provided with level crossing on mirror holder, the reflecting surface of level crossing and the rotation center of upper turntable are positioned at same plane;
Laser instrument and photodetector are installed on verification table, and laser instrument and photodetector and level crossing are positioned at same level, and the target surface of photodetector is parallel to the rotation center of top rotary table;
Described level crossing, laser instrument and photodetector consist of optical lever;
Read head be used to the corner numerical value that reads location survey hornwork spare to be checked is installed on verification table;
Read head and photodetector all are connected with data processor by data collecting card;
The control system of upper turntable and lower turntable all is connected with data processor.
2. the angle measurement device calibrating installation based on optical lever according to claim 1 is characterized in that:
Described location survey hornwork spare to be checked is angular encoder, inductosyn, scale, circle grating or ring grating;
The read head of described corner numerical value be used to reading location survey hornwork spare to be checked has more than two, and read head is the diameter distribution along location survey hornwork spare periphery to be checked and arranges on verification table;
Described data processor is single-chip microcomputer or computing machine;
Described photodetector is the CCD camera of control able to programme.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES2527261A1 (en) * | 2013-07-19 | 2015-01-21 | Fundación Tekniker | Device and method of verification of reflective surfaces and calibration method (Machine-translation by Google Translate, not legally binding) |
| CN106705894A (en) * | 2017-01-25 | 2017-05-24 | 天津大学 | Error calibration and compensation method for double-circular grating angle displacement detection system |
| CN108051016A (en) * | 2017-12-30 | 2018-05-18 | 天津市计量监督检测科学研究院 | A kind of hand-held laser rangefinder calibrating multiple degrees of freedom adjustment holder |
| CN110686641A (en) * | 2018-07-04 | 2020-01-14 | 约翰内斯·海德汉博士有限公司 | Measuring device for a spindle or a turntable |
| US10989573B2 (en) | 2019-03-15 | 2021-04-27 | Pegatron Corporation | Method and device for correcting angle sensor |
-
2013
- 2013-01-07 CN CN 201320006554 patent/CN203011370U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES2527261A1 (en) * | 2013-07-19 | 2015-01-21 | Fundación Tekniker | Device and method of verification of reflective surfaces and calibration method (Machine-translation by Google Translate, not legally binding) |
| CN106705894A (en) * | 2017-01-25 | 2017-05-24 | 天津大学 | Error calibration and compensation method for double-circular grating angle displacement detection system |
| CN106705894B (en) * | 2017-01-25 | 2019-03-26 | 天津大学 | The error calibration of double Circular gratings Angular Displacement Detecting Systems and compensation method |
| CN108051016A (en) * | 2017-12-30 | 2018-05-18 | 天津市计量监督检测科学研究院 | A kind of hand-held laser rangefinder calibrating multiple degrees of freedom adjustment holder |
| CN110686641A (en) * | 2018-07-04 | 2020-01-14 | 约翰内斯·海德汉博士有限公司 | Measuring device for a spindle or a turntable |
| US11435717B2 (en) | 2018-07-04 | 2022-09-06 | Dr. Johannes Heidenhain Gmbh | Measuring device for a spindle or a rotary table |
| US10989573B2 (en) | 2019-03-15 | 2021-04-27 | Pegatron Corporation | Method and device for correcting angle sensor |
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