CN103296142B - A kind of ultraviolet detector preparation method based on fluoresent coating integrating sphere - Google Patents
A kind of ultraviolet detector preparation method based on fluoresent coating integrating sphere Download PDFInfo
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- CN103296142B CN103296142B CN201310228842.8A CN201310228842A CN103296142B CN 103296142 B CN103296142 B CN 103296142B CN 201310228842 A CN201310228842 A CN 201310228842A CN 103296142 B CN103296142 B CN 103296142B
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The present invention relates to a kind of ultraviolet detector preparation method based on fluoresent coating integrating sphere, by the polishing of integrating sphere inner surface, evenly plate one deck fluorescence membrane by vacuum or spin coating film plating process at integrating sphere inwall; Integration hemisphere bottom slot and embed the receiver of silicon-based detector part as ultraviolet signal, on the round edge of the merging of two integration hemisphere, perforate is as entrance aperture; Because the emission wavelength of fluorescence membrane is at the sensitive band of silicon-based detector, is received by silicon-based detector part instantaneously after integrating sphere inwall multiple reflections, achieve the sensitive response of silicon-based detector to UV signal.Not be used in plated film on the cover glass window of silica-based image device or photosurface; avoid detector except the damage of window operation to device; simultaneously based in integrating sphere to the repeatedly excitation luminescence of ultraviolet light reflection; greatly improve fluorescence efficiency and gross energy; achieve ultraviolet accurately detecting easily; effective, with low cost.
Description
Technical field
The present invention relates to a kind of ultraviolet detection technology, particularly a kind of ultraviolet detector preparation method based on fluoresent coating integrating sphere.
Background technology
Ultraviolet detection technology is a kind of important photoelectric detecting technology, and its application has been deep into the numerous areas such as military exercises, astrosurveillance, environmental monitoring, medical bio analysis, creates profound influence to modern national defense and people's lives.Image device in detector, can only detect visible waveband and infrared band two regions as CCD, CMOS etc., but it is very weak in ultraviolet band response.This is because the degree of depth very little (<2nm) that ultraviolet light penetrates in polysilicon.Since CCD and other photodetectors drop into commodity production, with regard to being devoted to always, searching is a kind of can improve the method for detector to ultraviolet band susceptibility to people.Way feasible at present has two kinds: (one) increases ultraviolet light response by changing over picture device inside silicon substrate structure.Because ultraviolet light is very little in silica-based middle penetration depth, the mode can carrying on the back photograph detects, and reduces absorber thickness.But because silicon materials energy gap is less, and UV photon energy is higher, so realize silicon ultraviolet light detector technically have larger difficulty, and will change the image device production line of existing maturation, thus improves production cost.(2) on photosurface, be coated with the fluorescence membrane that the response of one deck ultraviolet strengthens.This layer film can convert the ultraviolet light of incidence to the visible light wave range of silicon-based detector sensitivity, indirectly achieves ultraviolet detection.But it but reduces device itself to the sensitivity of visible ray and picture resolution, adds the Non-uniform responsivity of imageing sensor.
Summary of the invention
The present invention be directed to the problem of detector to ultraviolet band susceptibility difference, propose a kind of ultraviolet detector preparation method based on fluoresent coating integrating sphere, by fluorescence membrane direct plating on integrating sphere inwall, both overcome the technological problems of detector photosurface plated film, and film affects the problems such as the sensitivity of device itself, resolution and Non-uniform responsivity difference.
Technical scheme of the present invention is: a kind of ultraviolet detector preparation method based on fluoresent coating integrating sphere, specifically comprises the steps:
1) integrating sphere is divided into two hemisphere, by the polishing of integrating sphere inner surface, and on the round edge at two integration hemisphere, respectively opens the semicircle orifice of same radius;
2) one deck fluorescence membrane is evenly plated by vacuum or spin coating film plating process at integrating sphere inwall;
3) by processing after two hemisphere be encapsulated as a complete sphere, the semicircle orifice of two hemisphere just to one-tenth circular hole, as entrance aperture;
4) two hemispheres faying face is as horizontal plane, integrating sphere bottom slot and embed the receiver of silicon-based detector part as ultraviolet signal, receiver receiving plane is consistent with integrating sphere inwall;
5), after incident flashlight enters integrating sphere by entrance aperture, received by silicon-based detector part after multiple reflection inside.
Described fluorescence membrane fluorescent material used is the organic or inorganic material with burst of ultraviolel emission characteristics.
Described integrating sphere adopts metal or plastic material.
Beneficial effect of the present invention is: the ultraviolet detector and the preparation method that the present invention is based on fluoresent coating integrating sphere; not be used in plated film on the cover glass window of silica-based image device or photosurface; avoid detector except the damage of window operation to device; simultaneously based in integrating sphere to the repeatedly excitation luminescence of ultraviolet light reflection; greatly improve fluorescence efficiency and gross energy; achieve ultraviolet accurately detecting easily, effective, with low cost.
Accompanying drawing explanation
Fig. 1 is the ultraviolet detector schematic diagram that the present invention is based on fluoresent coating integrating sphere.
Embodiment
Ultraviolet detector based on fluoresent coating integrating sphere adopts integrating sphere as the gatherer of flashlight and to visible light-responded silicon-based detector.Preparation method's step is as follows:
1) integrating sphere adopts metal or plastic material, inner surface polishing, to ensure between spherome surface and rete firmly adhesive force;
2) schematic diagram as shown in Figure 1, spheroid is divided into two hemisphere, the round edge of two integration hemisphere is respectively opened the semicircle orifice of same radius, by the film plating process such as vacuum or spin coating at integrating sphere inwall uniform coated 2; For ensureing membrane uniformity, during true plated film, at the uniform velocity rotation mode is adopted to hemisphere; Coating Materials used is fluorescent material, has burst of ultraviolel emission characteristics, any organic or inorganic material with the stimulated luminescence of luminous lower translation function such as near in road horse (Lumogen), coronene (Coronene) etc., but is not limited thereto;
3) after machining, two hemisphere are tightly packaged into a complete sphere, the semicircle orifice of two hemisphere is just to one-tenth circular hole, and as incoming signal receiver hole 1, ultraviolet enters integrating sphere inside by this perforate.Incident flashlight is integrated ball inwall fluorescence membrane coating multiple reflections, and fluorescent material swashs transition by ultraviolet excitation generation energy level and send visible ray in very short time;
4) bottom integrating sphere, with entrance aperture, direction in 90 ° is opened a rectangular channel (suppose the center of circle of an incident ultraviolet radiation respectively by entrance aperture and integrating sphere, this position turned clockwise pointed by 90 °, incident light direction is the center of rectangular channel), the size of this rectangular channel is consistent with the size of silicon-based detector part, then embed the receiver of CCD or CMOS silicon-based devices as ultraviolet signal, receiver receiving plane is consistent with integrating sphere inwall.Silicon-based detector 3 have employed the front common silica-based image devices of illuminated such as CCD or CMOS, can only to visible light-responded;
5) because the emission wavelength of fluorescence membrane is at the sensitive band of silicon-based detector, received by silicon-based detector part 3 instantaneously after integrating sphere inwall multiple reflections, achieve the sensitive response of silicon-based detector to UV signal.
Fluorescence membrane 2 is close to integrating sphere inwall, when incident uv is by integrating sphere entrance aperture 1, after entering integrating sphere inside, can multiple reflections be realized, within the extremely short time, realize frequency conversion conversion, therefore energy absorption be abundant, utilizing emitted light signal is comparatively strong, and the conversion efficiency of fluorescence membrane is higher.Because wavelength of transmitted light is just in time in the sensitive response wave band of silicon-based detector 3 response spectrum, explorer response is sensitive.
Embodiment: adopt light-weight metal aluminum to make the spheroid of 6 inches, spheroid is divided into 2 hemisphere; Adopt the polishing of special chemical reagent inner surface; The round edge of two integration hemisphere is respectively opened the semicircle orifice of same radius, as entrance pupil after merging; Adopt the plated film mode of vacuum thermal evaporation, deposit one deck Lumogen fluorescence membrane at integrating sphere inwall; The method of mechanical fasteners is adopted by spheroid to be assembled into a complete spheroid, and with entrance aperture, a rectangular opening is opened in direction in 90 ° bottom integrating sphere, and to fix a model be the line array CCD of ILX55B, the outer mounting and fixing bracket of spheroid, namely makes a ultraviolet detector.
Claims (3)
1., based on a ultraviolet detector preparation method for fluoresent coating integrating sphere, it is characterized in that, specifically comprise the steps:
1) integrating sphere is two hemisphere, by the polishing of integrating sphere inner surface, and on the round edge at two integration hemisphere, respectively opens the semicircle orifice of same radius;
2) one deck fluorescence membrane is evenly plated by vacuum or spin coating film plating process at integrating sphere inwall;
3) by processing after two hemisphere be encapsulated as a complete sphere, the semicircle orifice of two hemisphere just to one-tenth circular hole, as entrance aperture;
4) two hemispheres faying face is as horizontal plane, integrating sphere bottom slot and embed the receiver of silicon-based detector part as ultraviolet signal, receiver receiving plane is consistent with integrating sphere inwall;
5), after incident flashlight enters integrating sphere by entrance aperture, received by silicon-based detector part after multiple reflection inside.
2. according to claim 1 based on the ultraviolet detector preparation method of fluoresent coating integrating sphere, it is characterized in that, described fluorescence membrane fluorescent material used is the organic or inorganic material with burst of ultraviolel emission characteristics.
3. according to claim 1 based on the ultraviolet detector preparation method of fluoresent coating integrating sphere, it is characterized in that, described integrating sphere adopts metal or plastic material.
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| CN201310228842.8A CN103296142B (en) | 2013-06-09 | 2013-06-09 | A kind of ultraviolet detector preparation method based on fluoresent coating integrating sphere |
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| CN201310228842.8A CN103296142B (en) | 2013-06-09 | 2013-06-09 | A kind of ultraviolet detector preparation method based on fluoresent coating integrating sphere |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10002294A1 (en) * | 2000-01-20 | 2001-07-26 | Philips Corp Intellectual Pty | Reflection ability measurement device for optical system, has sphere coated with luminescent substance on entire inner surface |
| CN102538968A (en) * | 2011-12-29 | 2012-07-04 | 中国科学院长春光学精密机械与物理研究所 | Vacuum ultraviolet hemisphere reflectivity testing device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100420144B1 (en) * | 1998-06-30 | 2004-04-17 | 삼성에스디아이 주식회사 | Fluorescent material optical property measuring device |
| JP2000321128A (en) * | 1999-05-14 | 2000-11-24 | Canon Inc | Integrating sphere and spectroscopic measuring apparatus employing it |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10002294A1 (en) * | 2000-01-20 | 2001-07-26 | Philips Corp Intellectual Pty | Reflection ability measurement device for optical system, has sphere coated with luminescent substance on entire inner surface |
| CN102538968A (en) * | 2011-12-29 | 2012-07-04 | 中国科学院长春光学精密机械与物理研究所 | Vacuum ultraviolet hemisphere reflectivity testing device |
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