CN103256941B - A kind of method that MEMS gyroscope is high-order temperature compensated - Google Patents
A kind of method that MEMS gyroscope is high-order temperature compensated Download PDFInfo
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Abstract
The present invention relates to the practical approach that a kind of MEMS gyroscope is high-order temperature compensated, for MEMS gyroscope and accelerometer are carried out temperature-compensating, the method includes: (1) sets up zero drift angle speed output valve and the model of temperature of gyroscope；(2) according to zero drift angle speed output valve of gyroscope at different temperature and different angular velocity by a series of temperature compensation coefficient needed for the above-mentioned model of matching acquisition gyroscope；(3) set up gyroscope compensation calculation model in the range of total temperature according to model and temperature compensation coefficient, be calculated the gyroscope zero drift angle velocity output signal after temperature-compensating according to compensation calculation model.The present invention, by setting up the model of temperature compensation of zero drift angle speed, utilizes this model of temperature compensation to compensate zero drift angle speed of gyroscope, can effectively reduce the drift of gyroscope, and be allowed to tend towards stability；Drift stability is improved, thus has reached the effect temperature compensation to gyroscope.
Description
Technical field
The present invention relates to the temperature compensation of a kind of gyroscope (or accelerometer).
Background technology
Gyroscope is the core component determining inertia system precision, and silicon micromechanical gyroscope the most fast-developing is the MEMS (MEMS) that a class difficulty is bigger, is belonging to the product that the micromachined of silicon combines with gyroscopic theory.The high accuracy gyroscope of one function admirable, not only to reduce the connection anchor point between oscillating mass block and detection mass and substrate as far as possible, also to reduce the mechanical couplings between oscillating mass block and detection mass as far as possible.Illustrate as a example by one list fulcrum angular oscillation formula MEMS gyro below.
Fig. 1 show the structure of a kind of single fulcrum angular oscillation formula MEMS gyro, and this structure is driven outer shroud and a detection inner disc to form by one.Drive outer shroud to be connected with inner disc by four cantilever beams, and inner disc connects also by four cantilever Liang Yu center anchor points.Total is just suspended on substrate by one, the center strong point, so this gyroscope is actually a standard floated angular oscillation gyroscope.
The whole travel(l)ing rest of gyroscope includes encouraging ring and detection dish to be all supported by central anchor point.And the output of this single fulcrum gyroscope is connected on turning rate input contact.Outer shroud whirling vibration about the z axis under comb-like electrode drives, when there being an angular acceleration around X-direction to act on gyro, gyro is by by a corioliseffect along Y-direction, inner disc will swing along Y-direction, and amplitude of fluctuation will be directly proportional to coriolis force size, the angular velocity of output is directly proportional to coriolis force size.
Single fulcrum angular oscillation formula silicon micro mechanical MEMS gyroscope and other MEMS gyroscope and accelerometer, with thin silicon wafer as material, utilize semiconductor processing technology to make, monocrystalline silicon piece use photoetching and anisotropic etch process to be fabricated by.The silicon micro-gyroscope major part currently developed is all in speed level, and the performance of each side is far from the application demand in the fields such as satisfied industry and civilian high accuracy.Owing to silicon materials are a kind of thermo-sensitive materials, its machinery, physical characteristic temperature influence are bigger, when the temperature varies, not only physical dimension to deform, the performances such as the elastic modelling quantity of material, hot strength, residual stress also can occur great variety, therefore temperature susceplibility is big, one of the temperature drift main error source becoming gyro.Owing to micro-silicon inertia device is all easily affected by each factor of own material, manufacturing process and working environment in precision and degree of stability, this directly influence its in business and the application of industrial circle, the temperature drift therefore solving micromechanical gyro is a key technology of gyro application.But the manufacturing process of gyro and technology hardly result in a short time and be greatly improved, therefore, carry out temperature control or temperature drift compensation is the important channel solving this problem.By studying the drift of silicon micro-gyroscope, it is necessary to being improved the precision of gyro by the compensation of gyroscopic drift.
According to document, if the thermal coefficient of expansion of silicon materials is α, semiconductor dimensions is l0, then, during variations in temperature △ T, the change in size of material is L, and L=l0(1+α△T).And the coefficient of elasticity of gyroscope is the function of physical dimension, temperature causes the change of physical dimension, it will causes the change of the rigidity of quasiconductor beam, thus causes the natural angular frequency of gyroscope to change.From the kinetics equation of gyroscope it will be seen that natural angular frequency is relevant with sensitivity, dynamic characteristic and stability, so, temperature not only can affect the output sensitivity of gyroscope, and dynamic characteristic and stability to gyroscope also will produce a very large impact.
It addition, gyro uses will also result in a certain degree of problem.Zero drift angle speed (zero drift angle speed: the NRi of such as gyro, zero partially or zero-bit angular velocity refers to gyroscope output valve in the case of zero input angular velocity, can be that input angular velocity represents with the t-test mean equivalent conversion of output in the long period) drift can be produced along with the change of the temperature and movement run, and the change of temperature is particularly evident, ambient temperature constantly changes, and sensor uses time long own temperature also to change, constantly raise, and be nonlinear change, so angular velocity of output there will be obvious deviation.Variations in temperature is the most obvious, and deviation is the biggest, seriously reduces the dependable with function of gyro.Therefore temperature-compensating is to improve Gyro Precision and the important technical of range of application.
The research work of domestic gyroscope temperature-compensating starts from late nineteen eighties, and there are Tsing-Hua University, Southeast China University, the National University of Defense technology, Shanghai Communications University, BJ University of Aeronautics & Astronautics etc. in main research unit.The research of these units biases toward the foundation of system temperature model and the research of theoretical method.Such as following list of references:
The patent of invention " a kind of distributed layer-dividing grade temperature error compensating method of optical fiber gyroscope " of Publication No. 101408427A；
The patent of invention " a kind of temperature drift compensation method for gyroscope " of Publication No. 102230806A；
2007, BJ University of Aeronautics & Astronautics's journal, vol33, NO12, " periodic error of quartz MEMS gyro drift is demarcated level and is compensated ".
These methods have some limitations, and are mainly manifested in:
Conventional compensation approach is that the output signal of sensor is calibrated and compensated for by the mode using simulation, and the method there are disadvantages that, as compensating element, is influenced by temperature equally；Compensation precision is limited by the nonlinearity erron of sensor；The realization of local temperature control typically requires the internal structure changing sensor, material or increase extra temperature control system, it is achieved complex etc..
In order to not change the structure of sensor, the more method using software compensation.But software compensation is premised on accurate sensor model, it usually needs complicated temp. controlling box and complicated test equipment.
For silicon MEMS gyro temperature-compensating method itself unlike the gyro of other structures many, and can the method for simple and effective realization less, rest on theory and software phase more.Therefore need to inquire into a kind of method that realization that can be simple and effective carries out temperature-compensating to MEMS gyroscope
Summary of the invention
It is an object of the invention to provide a kind of method that MEMS gyroscope can be carried out temperature-compensating simple and effectively.
For reaching above-mentioned purpose, the technical solution used in the present invention is:
The practical approach that a kind of MEMS gyroscope is high-order temperature compensated, for the various MEMS gyroscope including the MEMS gyroscope of single fulcrum angular oscillation formula and accelerometer are carried out temperature-compensating, the method includes:
(1) zero drift angle speed output valve and the model of temperature of the gyroscope described in foundation；
(2) according to zero drift angle speed output valve of gyroscope described at different temperature and different angular velocity by matching obtain described in gyroscope above-mentioned model needed for a series of temperature compensation coefficient；
(3) according to described model and described temperature compensation coefficient set up described in gyroscope compensation calculation model in the range of total temperature, be calculated the described gyroscope zero drift angle velocity output signal after temperature-compensating according to described compensation calculation model.
Preferably, in described step (1), described model isWherein, NRFor zero drift angle speed output valve of described gyroscope, T is temperature, and m, n are positive integer.
Preferably, in described model, n=5, the compensation order of i.e. described gyroscope is 5,21 described temperature compensation coefficients needed for this described model.
Preferably, in described step (2), surface fitting is used to obtain a series of described temperature compensation coefficient.
Preferably, described gyroscope is carried out comprehensive matching to described temperature compensation coefficient at different temperature and different angular velocity, zero drift angle speed output valve of the gyroscope sampled described under different temperatures, different angular velocity, obtain described gyroscope temperature coefficient curved surface in total temperature, gamut according to the matching in the three-dimensional system of coordinate being made up of temperature, angular velocity, zero drift angle speed output valve of above-mentioned sampled value, described temperature coefficient surface fitting obtain a series of described temperature compensation coefficient.
Preferably, according to the needs of precision, described temperature is divided into several isometric minizones, zero drift angle speed output valve described in multiple repairing weld the sampled value as this minizone of averaging in each described minizone.
Preferably, obtain being constituted actual three-dimension curved surface by temperature, angular velocity, zero drift angle speed output valve, then being obtained described gyroscope temperature coefficient curved surface in total temperature, gamut by matching according to described sampled value described point in described three-dimensional system of coordinate.
Preferably, least-squares estimation or way of fitting is used to obtain described gyroscope temperature coefficient curved surface in total temperature, gamut for described actual three-dimension curved surface.
Preferably, in described step (3), described model and described temperature compensation coefficient are done dot product and obtains described gyroscope compensation calculation model in the range of total temperature.
The method is realized by compensation system；
Described compensation system includes
PC, the output signal containing zero described drift angle speed output valve that described PC is exported with described gyroscope is connected, and according to the temperature compensation coefficient described in described temperature and zero described drift angle speed output valve matching, and according to the compensation calculation model in the range of total temperature of the gyroscope described in described model and the foundation of described temperature compensation coefficient；
Memorizer, described memorizer is connected with described PC by interface module and the temperature compensation coefficient described in storing and described gyroscope compensation calculation model in the range of total temperature；
Main arithmetical unit, described main arithmetical unit has three inputs, the output signal containing zero described drift angle speed output valve that described main arithmetical unit, first input was exported with described gyroscope by the first conversion processing module is connected, the output signal containing temperature value that second input of described main arithmetical unit is exported with temperature sensor by the second conversion processing module is connected, and the 3rd input of described main arithmetical unit is connected with the outfan of described memorizer；The outfan of described main arithmetical unit connects process modular converter；The described temperature compensation coefficient in memorizer described in reading described main arithmetical unit and described gyroscope compensation calculation model in the range of total temperature, and according to zero drift angle speed output valve of described gyroscope and described temperature, described gyroscope carried out temperature-compensating calculating and gyroscope described in exporting zero drift angle velocity output signal after temperature-compensating.
Above-mentioned memorizer and main arithmetical unit both can realize in the way of using special circuit, it would however also be possible to employ the forms such as microprocessor realize.
Owing to technique scheme is used, the present invention compared with prior art has the advantage that the present invention by establishing the model of temperature compensation of zero drift angle speed to the process of test data and analysis, utilize this model of temperature compensation set up that zero drift angle speed of gyroscope is compensated, the drift of gyroscope can be effectively reduced, and be allowed to tend towards stability；Drift stability is improved, thus has reached the effect temperature compensation to gyroscope so that it is disclosure satisfy that the application of engineering to a certain extent.
Accompanying drawing explanation
Accompanying drawing 1 is the structural representation of existing single fulcrum angular oscillation formula MEMS gyroscope.
Accompanying drawing 2 is the schematic diagram being made up of actual three-dimension curved surface temperature, angular velocity, zero drift angle speed output valve obtained in three-dimensional system of coordinate in the present invention.
Accompanying drawing 3 is the schematic diagram of the gyroscope obtained by matching in present invention temperature coefficient curved surface in total temperature, gamut.
Accompanying drawing 4 is the theory diagram compensating system in the present invention.
Detailed description of the invention
The invention will be further described for embodiment shown in below in conjunction with the accompanying drawings.
Embodiment one: the practical approach that a kind of MEMS gyroscope is high-order temperature compensated, for carrying out temperature-compensating to the various MEMS gyroscope including the MEMS gyroscope of single fulcrum angular oscillation formula and accelerometer.In the present embodiment, as a example by the temperature drift to the MEMS gyroscope of single fulcrum angular oscillation formula compensates.The most sensitive to variations in temperature owing to constituting the performance of electronic device in the material of silicon micromechanical vibratory gyroscope and gyroscope peripheral circuit, cause the output accuracy serious restriction by ambient temperature of silicon micromechanical vibratory gyroscope.When ambient temperature changes, the bias drift of gyroscope substantially aggravates.Therefore the temperature characterisitic of silicon micromechanical vibratory gyroscope is studied, analyze gyroscope and export zero inclined rule, grasp zero relation partially and between ambient temperature, it is compensated, for reducing the silicon micromechanical vibratory gyroscope sensitivity to temperature, the service precision improving silicon micromechanical vibratory gyroscope is extremely important.
Relevant parameter illustrates:
1, zero drift angle speed: NRi, zero partially or zero-bit angular velocity refers to gyroscope output valve in the case of zero input angular velocity, can be that input angular velocity represents with the t-test mean equivalent conversion of output in the long period.Structural material (especially silicon materials) performance of micro-mechanical gyroscope is affected relatively big by ambient temperature, zero drift angle speed can over time, the change of the factor such as ambient temperature and change, therefore, bias instaility is often given under certain temperature conditions；
2, fitting coefficient: Ci；Fitting coefficient in this method amounts to 21, C0-C20；
3, temperature: Ti, the temperature range in this method is-55 DEG C to 125 DEG C.
The high-order temperature compensated practical approach of this MEMS gyroscope includes:
(1) zero drift angle speed output valve and the model of temperature of gyroscope is set up.
This model is for normalized zero drift angle speed output valve NRSet up with normalized temperature T.This model isWherein, NRFor zero drift angle speed output valve of gyroscope, T is temperature, and m, n are positive integer.In order to improve compensation effect, improve fitting precision as far as possible, be conducive to the most again quick compensation deals, and hardware system is capable of, be 5 through repeatedly proving compensation order, i.e. n=5, above-mentioned model isThis order is that comparison is high in micromechanics MEMS gyro.
(2) according to zero drift angle speed output valve of gyroscope at different temperature and different angular velocity by a series of temperature compensation coefficient needed for the above-mentioned model of matching acquisition gyroscope.
Owing to zero drift angle speed output valve of gyroscope and the model of temperature of above-mentioned foundation are 5 rank, therefore its required 21 temperature compensation coefficients, respectively C0-C20。
In this step, surface fitting is used to obtain a series of temperature compensation coefficient.Gyroscope is carried out comprehensive matching to temperature compensation coefficient at different temperature and different angular velocity, zero drift angle speed output valve of gyroscope under different temperatures, different angular velocity of first sampling.In above-mentioned sampling process, can according to precision need temperature is divided into several isometric minizones, multiple repairing weld zero drift angle speed output valve the sampled value as this minizone of averaging in each minizone.Then gyroscope temperature coefficient curved surface in total temperature, gamut is obtained according to the matching in the three-dimensional system of coordinate being made up of temperature, angular velocity, zero drift angle speed output valve of above-mentioned sampled value.Concrete, obtain being constituted actual three-dimension curved surface by temperature, angular velocity, zero drift angle speed output valve, then being obtained gyroscope temperature coefficient curved surface in total temperature, gamut by matching according to sampled value described point in three-dimensional system of coordinate.Finally least-squares estimation or way of fitting is used to obtain series of temperature penalty coefficient C by temperature coefficient curved surface0-C20。
It is described in detail below in conjunction with specific embodiment.In order to zero drift angle speed under different temperatures is compensated, need first batch or single gyro to be carried out the matching of temperature compensation coefficient.Matching uses the method for surface fitting, it is ensured that different temperatures, comprehensive matching of different angular velocity.
The method of matching is: fix one of them parameter, such as temperature in temperature, angular velocity, changes angular velocity, tests one group of zero drift angle velocity amplitude；Fix another one parameter, such as angular velocity, transformation temperature, one group of zero drift angle velocity amplitude of re-test again.The value of test is fitted.
During data acquisition, data are distributed as evenly as possible within the scope of bigger temperature, and can measure and repeatedly reduce measurement error.
Needs according to precision, temperature is divided into the most isometric minizone, data acquisition is carried out in each temperature range, each minizone can carry out multiple repairing weld, and make the number of samples of each minizone in temperature axis essentially identical, sampled value on each minizone is carried out arithmetic average, each minizone obtains a value, as the sampled value in this interval.The most just the value of some zero drift angle speed identical with demarcation interval quantity has been obtained.The impact inclined on MEMS gyro zero in order to study temperature, certain type MEMS micromechanical gyro is placed in temperature control box, such as at-50 DEG C ,-40 DEG C ,-30 DEG C ,-20 DEG C ,-10 DEG C, 0 DEG C, 10 DEG C, 20 DEG C, 30 DEG C, 40 DEG C, 50 DEG C, 60 DEG C ... under 100 DEG C of ambient temperatures the most higher, it is carried out zero bias testing.After each temperature field is constant, sample respectively, take its average as at a temperature of this zero of gyro inclined stationary value.
As a example by single shaft MEMS gyro, (gyro of three axles is in like manner), the process of temperature compensation coefficient matching is such that
(1) fixed temperature, changes angular velocity, tests the value of zero drift angle speed.
Under the conditions of same temperature, the range ability of MEMS gyro changes different angular velocity, be designated as ω i.Next organizes value NRi_t of zero drift angle speed to gather this temperature；
(2) fixed angles speed, changes temperature, tests the value of zero drift angle speed.
Under the conditions of same angular velocity, choosing some test temperature spots in temperature range-55 to 125 DEG C, being designated as Ti=T0+ △ T, △ T is temperature increment；The value NRi_ ω of zero drift angle speed when gathering different temperatures under the conditions of this angular velocity；
(3) surface fitting
In the three-dimensional system of coordinate that Ti ω i NRi is constituted, use statistical recurrence to carry out surface fitting two groups of above-mentioned sample magnitude, obtain the relation of temperature and zero gyro drift angle speed.The process of matching is so: in three-dimensional system of coordinate, by each Ti, the zero drift angle velocity amplitude described point of each ω i, constitutes an irregular curved surface, is i.e. constituted actual three-dimension curved surface, as shown in Figure 2 by temperature, angular velocity, zero drift angle speed output valve.
Using method of least square or other approximating methods to be fitted, finally draw the ideal surface of gyroscope temperature coefficient in total temperature, gamut, as shown in Figure 3, then the Ci obtained by matching is temperature compensation coefficient.
(3) set up gyroscope compensation calculation model in the range of total temperature according to model and temperature compensation coefficient, be calculated the gyroscope zero drift angle velocity output signal after temperature-compensating according to compensation calculation model.
Model and temperature compensation coefficient are done dot product and to obtain gyroscope compensation calculation model in the range of total temperature as follows:
Rate(T)=C0+C1NR+C2T+…+Ci-1NRTn-1+CiTn。
And 5 complete rank compensation calculation models are as follows:
By the calculating of above formula, i.e. can get the gyroscope zero drift angle velocity output signal after temperature-compensating.
Said method is realized by compensation system, sees shown in accompanying drawing 4.Compensation system includes PC, memorizer, main arithmetical unit.
The output signal containing zero drift angle speed output valve that PC is exported with gyroscope is connected, and according to temperature and zero drift angle speed output valve matching temperature compensation coefficient, and set up gyroscope compensation calculation model in the range of total temperature according to model and temperature compensation coefficient.
Memorizer is connected with PC by interface module and stores temperature compensation coefficient and the gyroscope compensation calculation model in the range of total temperature.Interface module includes the series interface board (for example with NI USB-6281 interface board) being connected with PC and the fitting coefficient serioparallel exchange module being connected with this series interface board, and fitting coefficient serioparallel exchange module is connected with memorizer.This memorizer is nonvolatile memory EEPROM.
There are main arithmetical unit three inputs.The output signal containing zero drift angle speed output valve that main arithmetical unit, first input was exported with gyroscope by the first conversion processing module is connected.First conversion processing module includes and gyroscope or add the A/D converter that is connected of meter and the normalized module being connected between A/D converter and main arithmetical unit.The output signal containing temperature value that second input of main arithmetical unit is exported with temperature sensor by the second conversion processing module is connected.Second conversion processing module includes the A/D converter being connected with temperature sensor and the normalized module being connected between A/D converter and main arithmetical unit.3rd input of main arithmetical unit is connected with the outfan of memorizer.
The outfan of main arithmetical unit connects process modular converter, and this process modular converter includes renormalization processing module and D/A converter.Main arithmetical unit reads the temperature compensation coefficient in memorizer, utilize spiral shell instrument compensation calculation model in the range of total temperature, zero drift angle speed output valve and temperature according to gyroscope carry out temperature-compensating calculating, and the zero drift angle velocity output signal that output gyroscope is after temperature-compensating to gyroscope.
Above-mentioned memorizer and main arithmetical unit both can realize in the way of using special circuit, it would however also be possible to employ the forms such as microprocessor realize.
Specifically, the work process of above-mentioned compensation system is divided into two parts: one is to write coefficient, and two is computing.
The first step works as writing coefficient, and the original output zero drift angle speed of gyro is fitted in PC, then writes in memorizer by standard SPI series interface board, and serial data inputs from temperature-compensating input port.After internal system is fitted coefficient conversion, 21 groups of 32bits data are stored in nonvolatile memory EEPROM.
Second step work is multinomial operation, after all being stored by 21 groups of fitting coefficient Ci, then inputs zero drift angle speed NRWith temperature T, carry out multinomial operation with the Ci data read from EEPROM.
Zero drift angle speed NRFrom adding meter or gyro, after A/D converter is changed, data serial input temp main arithmetical unit, it is normalized inside circuit, obtains normalization parallel digital signal and send in main arithmetical unit；Temperature T is obtained by temperature sensor, equally after A/D converter is changed, data serial input temp main arithmetical unit, is normalized, obtains normalization parallel digital signal and send into equally in main arithmetical unit inside circuit.By Ci, NRAbove-mentioned multinomial operation is carried out in main arithmetical unit with tri-groups of data of T.
Zero drift angle speed RateD after being compensated after multinomial operation, can directly export after parallel/serial conversion.If analogue signal need to be converted to, also need to carry out renormalization process and parallel/serial conversion, SOD serial output data Rate, be converted to required analogue signal NR through D/A converter '.
System for implementing hardware shown in accompanying drawing 4 is in the case of external angular velocity frequency is 100kHz, and through the computing of whole compensation process, the time delay exporting and inputting zero drift angle speed is about 1ms, can see have good real-time.
Showing through test statistics data, micromechanical gyro is through using the temperature compensation of the present invention, and zero drift angle speed reduces the deviation of an order of magnitude, can meet the needs that sensor is applied in real time.This patent by establishing the temperature-compensating multinomial model of zero drift angle speed to the process of test data and analysis.And with the model set up, drift angular velocity is compensated.From the result compensated it can be seen that after Bu Changing the drift of gyro effectively reduce, and tend towards stability；Drift stability is improved, thus has reached compensation effect, disclosure satisfy that the application of engineering to a certain extent.
Present invention have the advantage that
Compensating and use 5 rank multinomials, fitting coefficient uses the mode of surface fitting, and compensation precision is high；
Zero drift angle speed to be compensated becomes digital signal by analog-digital converter and carries out computing, reduce intractability, the hardware of compensation system realizes simplicity, have only to write in nonvolatile memory by the serial line interface of standard by the coefficient of matching, computing is compensated by arithmetical unit, both computing can independently be carried out by a micro-arithmetical unit, it is also possible to become one with the signal processing circuit of MEMS gyro.
Above-described embodiment only for technology design and the feature of the present invention are described, its object is to allow person skilled in the art will appreciate that present disclosure and to implement according to this, can not limit the scope of the invention with this.All equivalence changes made according to spirit of the invention or modification, all should contain within protection scope of the present invention.
Claims (6)
1. a method for MEMS gyroscope temperature-compensating, for carrying out temperature to MEMS gyroscope
Compensate, it is characterised in that: the method includes:
(1) zero drift angle speed output valve and the model of temperature of the gyroscope described in foundation；
(2) according to zero drift angle speed output of gyroscope described at different temperature and different angular velocity
Value by matching obtain described in gyroscope above-mentioned model needed for a series of temperature compensation coefficient；
(3) zero drift angle speed output valve of described gyroscope and the model of temperature are mended with described temperature
Repay coefficient to do dot product and obtain described gyroscope compensation calculation model in the range of total temperature
Wherein Ci is temperature compensation coefficient, i=0-20, NRThe zero drift angle speed output for described gyroscope
Value, T is temperature, is calculated described gyroscope after temperature-compensating according to described compensation calculation model
Zero drift angle velocity output signal；
The method is realized by compensation system；
Described compensation system includes
PC, it is defeated containing zero described drift angle speed that described PC and described gyroscope are exported
The output signal going out value is connected, and according to described temperature and zero described drift angle speed output valve matching institute
The temperature compensation coefficient stated, and according to the top described in described model and the foundation of described temperature compensation coefficient
Spiral shell instrument compensation calculation model in the range of total temperature；
Memorizer, described memorizer is connected with described PC by interface module and described in storing
Temperature compensation coefficient and the described gyroscope compensation calculation model in the range of total temperature；
Main arithmetical unit, having three inputs described main arithmetical unit, described main arithmetical unit first is defeated
Enter end by the first conversion processing module and described gyroscope exported containing zero described drift angle speed
The output signal of output valve is connected, and second input of described main arithmetical unit passes through the second conversion process
The output signal containing temperature value that module is exported with temperature sensor is connected, described main arithmetical unit
3rd input is connected with the outfan of described memorizer；The outfan of described main arithmetical unit connects
There is process modular converter；The described temperature compensation coefficient in memorizer described in reading described main arithmetical unit
With described gyroscope compensation calculation model in the range of total temperature, and zero according to described gyroscope is inclined
Described gyroscope is carried out described in temperature-compensating calculating output by angular velocity output valve and described temperature
The gyroscope zero drift angle velocity output signal after temperature-compensating.
The method of a kind of MEMS gyroscope temperature-compensating the most according to claim 1, its feature exists
In: in described step (2), use surface fitting to obtain a series of described temperature compensation coefficient.
The method of a kind of MEMS gyroscope temperature-compensating the most according to claim 2, its feature exists
In: described temperature compensation coefficient is entered at different temperature and different angular velocity by described gyroscope
The comprehensive matching of row, zero drift angle speed output of gyroscope described under different temperatures, different angular velocity of sampling
It is worth to sampled value, is being made up of temperature, angular velocity, zero drift angle speed output valve according to above-mentioned sampled value
Three-dimensional system of coordinate in matching obtain described gyroscope temperature coefficient curved surface in total temperature, gamut,
A series of described temperature compensation coefficient is obtained by described temperature coefficient surface fitting.
The method of a kind of MEMS gyroscope temperature-compensating the most according to claim 3, its feature exists
In: according to the needs of precision, described temperature is divided into several isometric minizones, each described
Zero drift angle speed output valve described in multiple repairing weld the sampling as this minizone of averaging in minizone
Value.
5., according to the method for a kind of MEMS gyroscope temperature-compensating described in claim 3 or 4, it is special
Levy and be: according to described sampled value described point in described three-dimensional system of coordinate obtain by temperature, angular velocity,
Zero drift angle speed output valve is constituted actual three-dimension curved surface, then obtains described gyroscope in full temperature by matching
Temperature coefficient curved surface in degree, gamut.
The method of a kind of MEMS gyroscope temperature-compensating the most according to claim 5, its feature exists
In: use least-squares estimation or way of fitting to obtain described for described actual three-dimension curved surface
Gyroscope temperature coefficient curved surface in total temperature, gamut.
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| CN100516778C (en) * | 2007-03-12 | 2009-07-22 | 北京航空航天大学 | Method for calibrating connected MEMS gyro dynamic error |
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