CN111024119B - Rapid calibration method for triaxial MEMS gyroscope - Google Patents

Rapid calibration method for triaxial MEMS gyroscope Download PDF

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CN111024119B
CN111024119B CN201911164937.1A CN201911164937A CN111024119B CN 111024119 B CN111024119 B CN 111024119B CN 201911164937 A CN201911164937 A CN 201911164937A CN 111024119 B CN111024119 B CN 111024119B
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gyroscope
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董浩
陈立晶
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Tianjin Jinhang Institute of Technical Physics
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C25/00Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
    • G01C25/005Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass initial alignment, calibration or starting-up of inertial devices
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02TCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T90/00Enabling technologies or technologies with a potential or indirect contribution to GHG emissions mitigation

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Abstract

The invention relates to a method for rapidly calibrating a triaxial MEMS gyroscope, which comprises the following steps: (1) Adjusting the sensitive axis directions of the standard gyroscope and the gyroscope to be calibrated; (2) setting a sampling time interval T of gyroscope output data; (3) Recording data output of the two gyroscopes in the test time, and respectively calculating zero offset values of the gyroscopes to be calibrated according to a zero offset calculation formula (1); (4) Based on the test data obtained in the step (3), respectively calculating the noise value of the gyroscope to be calibrated according to a noise calculation formula (2); (5) Starting a test on the basis of the steps (1) and (2); (6) calculating linearity; (7) And (3) solving the delay time of the gyro to be calibrated based on the test data obtained in the step (5). The method ensures the effectiveness of the method by synchronously testing and calculating the excitation of the same space vector.

Description

Rapid calibration method for triaxial MEMS gyroscope
Technical Field
The invention belongs to the technical field of inertia, and relates to a rapid calibration method of a triaxial MEMS gyroscope applied to pod/cradle head stable control.
Background
The MEMS gyroscope converts the angular velocity of a rotating object into a voltage signal in direct proportion to the angular velocity by utilizing the Coriolis theorem, and the core component is produced in batches by doping technology, photoetching technology, corrosion technology, LIGA technology, packaging technology and the like, and is widely applied to stable control such as an inertial stable platform, gesture balance control and the like by the characteristics of small volume, light weight, good reliability and easiness in system integration.
In general, in the process of performing the MEMS gyroscope device model selection, the performance index parameters thereof need to be referred to and focused. In practice, the MEMS index changes with time and the application environment, so that the performance index of the selected MEMS gyroscope needs to be tested and calibrated for the initial stage of selection and maintenance in the product process. At present, the MEMS gyroscope test has no related national standard, and special test equipment such as a speed turntable, an angle (line) vibrating table, a horizontal reference and the like are generally required in GJB2426A-2015 'optical fiber gyroscope test method', so that the test steps are relatively complex, and operability and convenience are lacking under the condition of ensuring the limited conditions; at the same time, the white noise index is not listed as a test item, and is one of main influencing factors of the nacelle and the cradle head.
Disclosure of Invention
The invention aims to provide a rapid calibration method of a triaxial MEMS gyroscope, which is used for solving the problems in the prior art.
The invention discloses a method for rapidly calibrating a triaxial MEMS gyroscope, which comprises the following steps: (1) Adjusting the sensitive axis directions of the standard gyroscope and the gyroscope to be calibrated; (2) setting a sampling time interval T of gyroscope output data; (3) Recording data output of the two gyroscopes in the test time, and respectively calculating zero offset values of the gyroscopes to be calibrated according to a zero offset calculation formula (1); (4) Based on the test data obtained in the step (3), respectively calculating the noise value of the gyroscope to be calibrated according to a noise calculation formula (2); (5) Starting a test on the basis of the steps (1) and (2), and under a static state, after the gyroscope is stably output for a period of time, manually applying angular motion excitation along the X direction of the gyroscope sensitive axis to a test tool, repeating for a plurality of times, and then standing; if so, sequentially applying angular motion excitation along the Y-axis direction and the Z-axis direction to the test tool, and recording data output of the standard gyroscope and the gyroscope to be calibrated in the whole test process by a test computer; (6) Calculating linearity, wherein the linearity is used for representing the approaching degree of an actual curve output by a gyroscope and a fitting straight line, the fitting straight line is fitted through a least square method, the actual curve is output by a standard gyroscope, and the linearity of the gyroscope to be calibrated is calculated based on the test data obtained in the step (5); (7) And (3) solving the delay time of the gyro to be calibrated based on the test data obtained in the step (5).
According to the embodiment of the method for rapidly calibrating the triaxial MEMS gyroscope, the directions of sensitive axes of the standard gyroscope and the gyroscope to be calibrated are adjusted, the directions of X axis and Y axis of the standard gyroscope and the gyroscope to be calibrated are consistent, the direction of the Z axis is the direction, the standard gyroscope and the gyroscope to be calibrated are fixed on a test tool, and the test tool is placed on a table top.
According to one embodiment of the rapid calibration method of the triaxial MEMS gyroscope, the communication interfaces of the two gyroscopes are connected to the data resolving circuit through a cable, and the data resolving circuit is connected to the test computer through the cable. Starting a data resolving circuit and two gyroscopes, setting a sampling time interval T of output data of the gyroscopes through a test interface, and outputting the output in a stable state after the two gyroscopes are heated to be in thermal equilibrium;
according to one embodiment of the rapid calibration method of the triaxial MEMS gyroscope, zero offset of the gyroscope to be calibrated is achieved:
wherein B is 0 -zero offset;
ω Mi -the gyroscope output calculates the angular velocity.
According to an embodiment of the fast calibration method of the triaxial MEMS gyroscope of the present invention, the calculating the noise value of the gyroscope to be calibrated includes:
wherein B is s -noise;
-the output of the gyroscope to be calibrated calculates the average value of the angular velocity;
ω Bi -the standard gyroscope output solution angular velocity;
-the standard gyroscope output calculates an average value of the angular velocity.
According to an embodiment of the rapid calibration method of the triaxial MEMS gyroscope, the obtaining of the linearity of the gyroscope to be calibrated according to the formula (3) comprises:
in the formula, deltaomega max -maximum deviation between the actual curve and the fitted line;
ω ran -maximum output angular velocity of the gyroscope.
Outputting a standard gyrot=t, 2T, … nT as the angular velocity input value of the gyro to be calibrated, outputting +.>t=t, 2T, … nT, fitting was performed.
According to one embodiment of the rapid calibration method of the triaxial MEMS gyroscope, a solution process obtains delay time of the gyroscope to be calibrated, and first obtains a proportionality coefficient Pi:
wherein omega is B (k) -a standard gyroscopic output signal;
ω M (k) -the measured gyro output signal;
n is the length of the sampling sequence;
calculating P according to formula (4) i Sequence, when P i >P i At the time of-1, the calculation is stopped to obtain { P } i In { P } i The delay time is:
τ=iT (5)
where T is the sampling frequency.
τ is the calculated gyro delay time value.
The method is used for the application occasions requiring testing and calibrating of the performance indexes of zero offset, noise, linearity and delay of the triaxial MEMS gyroscope, has good operability and practicality, and the effectiveness of the method is proved by the examples provided by the invention.
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FIG. 1 is a schematic diagram of the testing principle of the present invention;
reference numerals:
(1) standard top
(2) Gyroscope to be calibrated
Detailed Description
For the purposes of clarity, content, and advantages of the present invention, a detailed description of the embodiments of the present invention will be described in detail below with reference to the drawings and examples.
The invention aims to provide a method for rapidly calibrating a triaxial MEMS gyroscope, which comprises the following steps:
(1) And the directions of sensitive axes of the standard gyroscope and the gyroscope to be calibrated are adjusted, so that the directions of an X axis and a Y axis of the standard gyroscope and the gyroscope to be calibrated are basically consistent, and the direction of an antenna of a Z axis is basically consistent. Fixing a standard gyroscope and a gyroscope to be calibrated on a test tool, and placing the standard gyroscope and the gyroscope to be calibrated on a table top;
(2) The communication interfaces of the two gyroscopes are connected to the data solver circuit by a cable, and the data solver circuit is connected to the test computer by a cable. Starting a data resolving circuit and two gyroscopes, setting a sampling time interval T of output data of the gyroscopes through a test interface, and outputting the output in a stable state after the two gyroscopes are heated to be in thermal equilibrium;
(3) Recording data output of the two gyroscopes in the test time on the basis of the steps (1) and (2), and respectively calculating zero offset values of the gyroscopes to be calibrated according to a zero offset calculation formula (1);
wherein B is 0 -zero offset;
ω Mi -gyroscope output solution angular velocity;
(4) Noise is a measure of the degree of dispersion of the output angular velocity of the gyroscope about its mean value when the input angular velocity is zero. Based on the test data obtained in the step (3), respectively calculating the noise value of the gyroscope to be calibrated according to a noise calculation formula (2);
wherein B is s -noise;
-the output of the gyroscope to be calibrated calculates the average value of the angular velocity;
ω Bi -the standard gyroscope output solution angular velocity;
-the standard gyroscope output calculates an average value of the angular velocities;
(5) Starting a test on the basis of the steps (1) and (2), and under a static state, after the gyroscope is stably output for a period of time, manually applying angular motion excitation along the X direction of the gyroscope sensitive axis to a test tool, repeating for a plurality of times, and then standing; if so, sequentially applying angular motion excitation along the Y-axis direction and the Z-axis direction to the test tool, and recording data output of the standard gyroscope and the gyroscope to be calibrated in the whole test process by a test computer;
(6) And calculating linearity, wherein the linearity is used for representing the approaching degree of an actual curve output by the gyroscope and a fitting straight line, and the linearity is expressed by a formula (3). Fitting the fitted straight line by a least square method, and outputting an actual curve by using a standard gyroscope. Based on the test data obtained in the step (5), obtaining the linearity of the gyro to be calibrated according to a formula (3);
in the formula, deltaomega max -maximum deviation between the actual curve and the fitted line;
ω ran -maximum output angular velocity of the gyroscope.
Outputting standard gyroscopes in the calculation process(t=t, 2T, … nT) (wherein ω Bx (t)、ω By (t) and ω Bz (t) the angular velocities of the X axis, the Y axis and the Z axis respectively output by the standard gyroscope are used as the angular velocity input values of the gyroscope to be calibrated, and the least square method is applied to output +.>(t=t, 2T, … nT) (wherein ω Mx (t)、ω My (t) and ω Mz And (t) fitting the angular speeds of the X axis, the Y axis and the Z axis of the gyro output to be calibrated respectively.
(7) The delay is the time difference between the gyro signal output and the signal input, and τ when equation (4) is equal to or close to 1. Based on the test data obtained in the step (5), the delay time of the gyro to be calibrated is obtained according to the following solving process, and the proportionality coefficient Pi is firstly obtained:
wherein omega is B (k) -a standard gyroscopic output signal;
ω M (k) -the measured gyro output signal;
n is the sampling sequence length.
Calculating P according to formula (4) i Sequence, when P i >P i -1, stopping the calculation. Find { P } i In { P } i } min Corresponding i value, the delay time is τ=it (5)
Where T is the sampling frequency.
τ is the calculated gyro delay time value.
Referring to fig. 1, the quick calibration method according to the present invention is based on fixing a standard gyroscope and a gyroscope to be calibrated to two parallel reference leaning surfaces on a test fixture for testing. In this example, the standard gyroscope is a high-precision triaxial fiber optic gyroscope F, and the performance index of the fiber optic gyroscope F has the following requirements: the zero bias stability is smaller than 1 degree/h, the noise is smaller than 0.01 degree/s, the linearity of the scale factor is better than 50ppm, the bandwidth is not smaller than 150Hz, the delay time is smaller than 1ms, and the gyroscope to be calibrated is a certain brand of triaxial MEMS gyroscope M. The specific implementation steps are as follows:
(1) And the directions of sensitive axes of the fiber-optic gyroscope F and the MEMS gyroscope M are adjusted, so that the consistency of the X-axis and Y-axis pointing directions of the fiber-optic gyroscope F and the MEMS gyroscope M is ensured, and the Z-axis is pointed in the upward direction. Fixing two gyroscopes as shown in figure 1;
(2) Connecting a tested gyroscope, a data resolving circuit and a testing computer according to fig. 1, starting the data resolving circuit and the two gyroscopes, setting a sampling time interval T=1ms of output data of the gyroscopes, considering the control testing time to be 1min, and outputting the output in a stable state after the two gyroscopes are warmed up to be in thermal balance;
(3) Recording data output of two gyroscopes in test time on the basis of the steps (1) and (2), and respectively calculating zero offset values B in the directions of three sensitive axes of the MEMS gyroscope M according to a zero offset calculation formula (1) M0x 、B M0y And B is connected with M0z
(4) Based on the test data obtained in the step (3), respectively calculating noise values B in the directions of three sensitive axes of the MEMS gyroscope M according to a noise calculation formula (2) MSx 、B MSy And B is connected with MSz
(5) Starting a test on the basis of the steps (1) and (2), wherein during the test, angular movement along the X direction of the gyro sensitive axis is manually applied to the test tool for 5-10 s, and the test tool is stationary for 5-10 s; if the optical fiber gyroscope F and the MEMS gyroscope M are subjected to the test, and the optical fiber gyroscope F and the MEMS gyroscope M are subjected to the test;
(6) Based on the test data obtained in the step (5), the F output of the fiber-optic gyroscope is firstly obtainedOutput->By least square method with omega M (t) is the independent variable pair omega F Performing curve fitting between (t), and calculating the fitting curve and the actual output omega of the MEMS gyroscope M Maximum deviation omega between (t) Mmax (t). Delta is obtained according to the formula (3),
the linearity index of the MEMS gyroscope is obtained;
(7) Based on the test data obtained in step (5), according to the formula(4) Calculating Pi values of the fiber-optic gyroscope F, and taking i= … … 4 to obtain { P } 1 ,P 2 ,P 3 ,P 4 Minimum value P i If i=3, the delay time is 3T.
The method for rapidly calibrating the triaxial MEMS gyroscope is based on operation and data processing of the triaxial MEMS gyroscope and a triaxial high-precision reference gyroscope. The three-axis high-precision standard gyroscope is used as a standard gyroscope of the method, and the three-axis MEMS gyroscope is used as a gyroscope to be calibrated of the rapid calibration method. The invention relates to a method for rapidly calibrating a triaxial MEMS gyroscope, which is characterized in that the triaxial MEMS gyroscope is tested and rapidly calibrated, and the performance indexes of the obtained MEMS gyroscope comprise: zero bias, noise, linearity, and delay.
Compared with the prior art, the invention has the beneficial effects that:
1) The calibration of the triaxial Mems gyroscope can be realized without complex speed turntable test conditions, a level gauge and other test instruments and special precision tools;
2) And the performance evaluation of the three-axis Mems gyroscope is realized by synchronously measuring the same space vector by the standard gyroscope and the measured gyroscope, so that the installation alignment requirement is further simplified.
3) And the standard gyro data is used as a reference, so that the performance evaluation of the measured triaxial Mems gyro under the conditions of external field vibration and temperature change can be realized.
4) The method realizes the rapid measurement of parameters such as zero bias and zero bias stability of the gyroscope, white noise, delay and the like which influence the performance of the nacelle/cradle head.
The foregoing is merely a preferred embodiment of the present invention, and it should be noted that modifications and variations could be made by those skilled in the art without departing from the technical principles of the present invention, and such modifications and variations should also be regarded as being within the scope of the invention.

Claims (5)

1. The rapid calibration method of the triaxial MEMS gyroscope is characterized by comprising the following steps of:
(1) Adjusting the sensitive axis directions of the standard gyroscope and the gyroscope to be calibrated;
(2) Setting a sampling time interval T of output data of the gyroscope;
(3) Recording data output of the two gyroscopes in the test time, and respectively calculating zero offset values of the gyroscopes to be calibrated according to a zero offset calculation formula (1);
zero offset of gyroscope to be calibrated:
wherein B is 0 -zero offset;
ω Mi -gyroscope output resolution angular velocity
(4) Based on the test data obtained in the step (3), respectively calculating the noise value of the gyroscope to be calibrated according to a noise calculation formula (2);
the calculating of the noise value of the gyroscope to be calibrated comprises the following steps:
wherein B is s -noise;
-the output of the gyroscope to be calibrated calculates the average value of the angular velocity;
ω Bi -the standard gyroscope output solution angular velocity;
-average value of the angular velocity calculated from the standard gyroscope output
(5) Starting a test on the basis of the steps (1) and (2), and under a static state, after the gyroscope is stably output for a period of time, manually applying angular motion excitation along the X direction of the gyroscope sensitive axis to a test tool, repeating for a plurality of times, and then standing; if so, sequentially applying angular motion excitation along the Y-axis direction and the Z-axis direction to the test tool, and recording data output of the standard gyroscope and the gyroscope to be calibrated in the whole test process by a test computer;
(6) Calculating linearity, wherein the linearity is used for representing the approaching degree of an actual curve output by a gyroscope and a fitting straight line, the fitting straight line is fitted through a least square method, the actual curve is output by a standard gyroscope, and the linearity of the gyroscope to be calibrated is calculated based on the test data obtained in the step (5);
(7) And (3) solving the delay time of the gyro to be calibrated based on the test data obtained in the step (5).
2. The method for rapidly calibrating the three-axis MEMS gyroscope according to claim 1, wherein the directions of sensitive axes of the standard gyroscope and the gyroscope to be calibrated are adjusted, the directions of X axis and Y axis of the standard gyroscope and the gyroscope to be calibrated are consistent, the directions of the Z axis are the directions, the standard gyroscope and the gyroscope to be calibrated are fixed on a test tool, and the standard gyroscope and the gyroscope to be calibrated are placed on a table top.
3. The method for rapidly calibrating a three-axis MEMS gyroscope according to claim 1, wherein the communication interfaces of the two gyroscopes are connected to a data solver circuit by a cable, and the data solver circuit is connected to a test computer by a cable; and starting a data resolving circuit and the two gyroscopes, setting a sampling time interval T of output data of the gyroscopes through a test interface, and outputting the output in a stable state after the two gyroscopes are heated to be in thermal balance.
4. The method for rapidly calibrating a three-axis MEMS gyroscope according to claim 1, wherein the obtaining of the linearity of the gyroscope to be calibrated according to equation (3) comprises:
in the formula, deltaomega max -maximum deviation between the actual curve and the fitted line;
ω ran maximum output of gyroscopeAngular velocity;
outputting a standard gyroAs an angular velocity input value of the gyro to be calibrated, outputting +.>Fitting was performed.
5. The method for rapidly calibrating the three-axis MEMS gyroscope according to claim 1, wherein the solving process obtains the delay time of the gyroscope to be calibrated, and first obtains the proportionality coefficient Pi:
wherein omega is B (k) -a standard gyroscopic output signal;
ω M (k) -the measured gyro output signal;
n is the length of the sampling sequence;
calculating P according to formula (4) i Sequence, when P i >P i At the time of-1, the calculation is stopped to obtain { P } i In { P } i } min The corresponding i value, the delay time is:
τ=iT (5)
wherein, T is the sampling frequency;
τ is the calculated gyro delay time value.
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