CN105222765B - The temperature-compensation method and system of MEMS gyro - Google Patents
The temperature-compensation method and system of MEMS gyro Download PDFInfo
- Publication number
- CN105222765B CN105222765B CN201510600317.3A CN201510600317A CN105222765B CN 105222765 B CN105222765 B CN 105222765B CN 201510600317 A CN201510600317 A CN 201510600317A CN 105222765 B CN105222765 B CN 105222765B
- Authority
- CN
- China
- Prior art keywords
- temperature
- resonant frequency
- current
- driving
- change
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
- Micromachines (AREA)
Abstract
The temperature-compensation method and system of a kind of MEMS gyro, the method comprising the steps of：Obtain the current driving resonant frequency of driving closed-loop control system；Obtain the current angular velocity signal of detection closed-loop control system output；Obtain the current temperature value of detection control circuit；According to the current driving resonant frequency, the current temperature value, real-time temperature-compensating is carried out to the current angular velocity signal using preset temperature model, obtains the angular speed output signal after temperature-compensating.The embodiment of the present invention, reflect the temperature of gyroscope structure by driving resonant frequency, by detecting the current temperature value of control circuit come characterization circuit operating ambient temperature, so as to combine the variation relation in space-time temperature field accordingly, consider the temperature of gyroscope structure and the temperature of detection circuit simultaneously, real-time temperature-compensating is carried out to gyro, is effectively improved the precision of temperature-compensating, the temperature drift characteristic of gyro is improved, there is great application value.
Description
Technical field
The present invention relates to micromechanical gyro field, more particularly to a kind of temperature-compensation method of MEMS gyro, a kind of MEMS
The temperature compensation system of gyro.
Background technology
Micromechanical gyro is a kind of inertia device for being used for measuring angular speed, is had small, light-weight, low in energy consumption, anti-
Overload capacity is strong, the advantages that being easily integrated and is intelligent, and therefore, micromechanical gyro can be widely applied to vehicle traction control system
Fields, the relevant research such as system, driving stability system, camera stabilization system, aircraft systems stabilisation and military affairs receive the country
Outer concern and attention.The research of silicon-base micro-mechanical gyro starts from late 1980s, by more than two decades development
Through achieving significant achievement, You Duo companies or research institution are provided based on MEMS (Micro-Electro- at present
Mechanical Systems, MEMS) technology micromechanical gyro product, according to different performance indicators, Ke Yifen
For three grades：Inert stage, Tactics-level and angular speed grade.
MEMS gyro is either applied in military field or commercial field, is all inevitably related to some variations
Temperature environment, and the different time and space temperature field be MEMS gyro zero bias, scale factor performance drift main source.When
Between temperature field refer to that temperature changes over time, existence time gradient；Space temperature field refers to gyro gauge head structure and detection circuit
Between temperature gradient field；Space-time temperature field refer to simultaneously at any time with the combined temp gradient fields of spatial variations.Temperature change
Lead to the thermal mismatching between SOG technique MEMS gyro silicon and glass, thermal stress makes reading capacitance drift about.In addition, temperature becomes
The warm-up movement characteristic of gas in the Young's modulus of silicon materials and Vacuum Package cavity can be changed by changing, so as to cause resonant frequency and
Q values (quality factor) change.In addition, temperature change can also change detection control circuit in resistance value, capacitance and
The gain and phase shift of amplifier, so as to influence the stabilization of closed-loop system, lead to performance drift.At present, MEMS gyro zero bias and mark
It is more and more concerned to spend factor temperature drift, becomes research hotspot both domestic and external.
The one of which temperature-compensation method occurred at present is the driving resonant frequency using MEMS gyro as temperature sensing
Device carries out online scale factor and zero bias temperature compensation.Another kind is in ASCI (American Standard Code for
Information Interchange, ASCII) temperature sensor is designed on reading circuit, and
The temperature-compensating of gyro zero bias is carried out based on the circuit temperature detected.These compensation methodes all achieve certain compensation effect
Fruit, but all only individually consider the temperature of gyroscope structure or the temperature of detection circuit, due to meeting between detection circuit and gyroscope structure
There are temperature gradient, what the temperature of temperature sensor mainly reflected is the temperature of circuit rather than the temperature of gyroscope structure, and gyro
Driving resonant frequency only reflects the temperature of structure rather than the temperature of detection circuit, therefore the two is different, is only considered one-sided
Factor be difficult to obtain good compensation effect.
Invention content
Based on this, one of the embodiment of the present invention is designed to provide a kind of temperature-compensation method of MEMS gyro, this hair
The another object of bright embodiment is to provide a kind of temperature compensation system of MEMS gyro, can improve temperature-compensating precision.
In order to achieve the above objectives, the embodiment of the present invention uses following technical scheme：
A kind of temperature-compensation method of MEMS gyro, including step：
Obtain the current driving resonant frequency of driving closed-loop control system；
Obtain the current angular velocity signal of detection closed-loop control system output；
Obtain the current temperature value of detection control circuit；
According to the current driving resonant frequency, the current temperature value, anterior angle is worked as to described using preset temperature model
Speed signal carries out real-time temperature-compensating, obtains the angular speed output signal after temperature-compensating.
A kind of temperature compensation system of MEMS gyro, including：It is arranged on the detection of gyro and the driving closed loop of control circuit
Control module, detection closed loop control module, temperature sensing circuit and temperature compensation module, the first of the temperature compensation module
Input terminal is connect with the output terminal of the driving closed loop control module, the output terminal of the second input terminal and the temperature sensing circuit
Connection, third input terminal are connect with the output terminal of the detection closed loop control module, defeated according to the driving closed loop control module
Current driving resonant frequency, the current temperature value of temperature sensing circuit input entered, using preset temperature model to described
The current angular velocity signal for detecting closed loop control module input carries out real-time temperature-compensating, obtains the angular speed after temperature-compensating
Output signal, and export the angular speed output signal.
According to the scheme of embodiment present invention as described above, since driving resonant frequency changes with temperature linearity,
Reflect the temperature of gyroscope structure by driving resonant frequency, by detecting the current temperature value of control circuit come characterization circuit work
Make environment temperature, so as to combine the variation relation in space-time temperature field accordingly, while consider the temperature of gyroscope structure and detection electricity
The temperature on road carries out real-time temperature-compensating to gyro, is effectively improved the precision of temperature-compensating, improves the temperature drift of gyro
Characteristic has great application value.
Description of the drawings
Fig. 1 is the simple principle schematic diagram of MEMS gyro driving closed-loop control system；
Fig. 2 is the simple principle schematic diagram of MEMS gyro detection closed-loop control system；
Fig. 3 is the flow diagram of the temperature-compensation method of MEMS gyro of the invention in one embodiment；
Fig. 4 is the flow principle schematic of temperature-compensating in a specific example；
Fig. 5 is the structure diagram of the temperature compensation system of MEMS gyro of the invention in one embodiment；
Fig. 6 is the MEMS gyro zero bias and temperature relation of the compensation schemes based on the present invention in a specific example
Contrast effect schematic diagram.
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention more comprehensible, with reference to the accompanying drawings and embodiments, to this
Invention is described in further detail.It should be appreciated that the specific embodiments described herein are only used to explain the present invention,
Do not limit protection scope of the present invention.
MEMS gyro applies the temperature in military field or commercial field, being all inevitably related to some variations
Spend environment, and different time-temperature fields and space temperature field be MEMS gyro zero bias and scale factor performance drift it is main come
Source.Time-temperature field refers to that temperature changes over time, existence time gradient；Space temperature field refers to gyro gauge head structure and detection
Temperature gradient field between circuit；Space-time temperature field refer to simultaneously at any time with the combined temp gradient fields of spatial variations.This hair
Bright embodiment refers to a kind of MEMS gyro temperature-compensation method based on space-time temperature field.
Brief analysis introduction is carried out to the temperature performance of MEMS gyro first.Fig. 1 drives closed-loop control for MEMS gyro
The simple principle schematic diagram of system.The target of driving closed-loop control is the driving resonance that actuating speed signal is controlled to be operated in gyro
At frequency, and resonance amplitude is stablized as possible.
In shown in Fig. 1, the transmission function G of gyro driven-moded(s) it is：
Wherein, s=jwR, for the Laplace operator of complex frequency domain, mdThe quality of mass block, ω are driven for MEMS gyrod、Qd
The respectively resonant frequency and quality factor at MEMS gyro driving end.
In addition, in shown in Fig. 1, kvfFor the conversion coefficient of driving voltage to power, kcvConversion system for detection capacitance to voltage
Number, LMS be adaptive least mean square algorithm, Cordic for sine wave generate algorithm, PI be proportional, integral control algolithm, phase
Benchmark and magnitude reference are determined by scan module.Due to PI closed-loop controls, the phase and amplitude signal that LMS solution tune obtains can reach
To stabilization, but due to detecting capacitance in detection circuit to the conversion coefficient k of voltagecvIt is affected by temperature larger, temperature change can be led
Cause the gain of reading circuit and phase that certain drift, therefore gyro actuating speed signal amplitude A occursvAlso it is affected.
Fig. 2 is the simple principle schematic diagram of MEMS gyro detection closed-loop control system.In shown in Fig. 2 ,-Ω (t) and q (t)
The angular speed and coupled signal respectively inputted, Ω0(t) and q0(t) be respectively open loop output angular speed and coupled signal.Fc、
FqAnd FbRespectively coriolis force, bonding force and dynamic balance feedback force, mPAv、KqfAnd KvfRespectively their force coefficient.youtFor
Displacement voltage exports, yi(t) and yq(t) it is respectively the angular speed output signal of closed-loop system and orthogonal coupled output signal.θ is
Demodulation phase angle, ms、mpRespectively detect quality and composite quality, ws、QsThe respectively resonant frequency and quality of gyro test side
The factor.
Wherein, the transmission function G of the gyroscope during Fig. 2 is showns(s) it is as follows：
The transmission function of single order high-pass filter H (s) is as follows：
The transmission function of second-order low-pass filter L (s) is as follows：
The transmission function of G-PI controller P (s) is as follows：
Wherein, in above-mentioned formula (2)-(5), s=jwR, for the Laplace operator of complex frequency domain, ω1And ω3For G-PI
The pole frequency of controller, ω2For zero frequency.
By carrying out theory deduction to above-mentioned formula, the transmission function of the open loop of control system shown in Fig. 2 can be obtained
SFopen(s) as shown in following formula (6), the transmission function SF of closed loopclosed(s) as shown in following formula (7) and (8).
Dr(s)=- jmpAvkcv[ejθGs(jωR-jωd)H(jωR-jωd)-e-jθGs(jωR+jωd)H(jωR+jωd)]
L(jωR)P(jωR) (8)
It can be seen that the transmission function of the control system is extremely complex.It is carried out by the zero bias to gyro and scale factor
Analysis of Temperature Characteristics it is known that driving detection frequency and Resonance detector frequency change with temperature T, is similar to linear
Relationship, it is specific as follows to state shown in formula (9) and (10)：
And Q values and detection Q values is driven also to change with temperature, it is similar to non-linear relation.In addition, temperature change meeting
Change gain and the phase of detection circuit, therefore the force coefficient K of dynamic balance feedback forcevf, detection capacitance to voltage conversion coefficient
kcv, gyro actuating speed signal amplitude Av, demodulation phase angle θ etc. drifts about with temperature.If these structures and circuit
Temperature drift factor all take into account, the open loop angular speed transmission function of formula (6) and the closed loop angular speed transmission function of formula (7)
Serious degeneration occurs, it is complicated non-linear relation that temperature band, which comes scale factor and the influence of zero bias,.Based on this, the present invention is real
The compensation schemes of example offer are applied, consideration is space-time temperature profile effect, i.e., considers gyroscope structure and detection circuit simultaneously
Crucial temperature drift factor, carry out joint modeling and real-time compensation.
The flow diagram of the temperature-compensation method of MEMS gyro of the invention in one embodiment is shown in Fig. 3.Such as
Shown in Fig. 3, the method in the present embodiment includes step：
Step S301：Obtain the current driving resonant frequency of driving closed-loop control system；
Step S302：Obtain the current angular velocity signal of detection closed-loop control system output；
Step S303：Obtain the current temperature value of detection control circuit；
Step S304：According to the current driving resonant frequency, the current temperature value, using preset temperature model to institute
It states current angular velocity signal and carries out real-time temperature-compensating, obtain the angular speed output signal after temperature-compensating.
According to the scheme of embodiment present invention as described above, since driving resonant frequency changes with temperature linearity,
Reflect the temperature of gyroscope structure by driving resonant frequency, by detecting the current temperature value of control circuit come characterization circuit work
Make environment temperature, so as to combine the variation relation in space-time temperature field accordingly, while consider the temperature of gyroscope structure and detection electricity
The temperature on road carries out real-time temperature-compensating to gyro, is effectively improved the precision of temperature-compensating, improves the temperature drift of gyro
Characteristic has great application value.
It should be noted that above-mentioned current driving resonant frequency can be directly from the driving closed-loop control system of MEMS gyro
It is obtained in system, above-mentioned current angular velocity signal can directly be obtained from the driving closed-loop control system of MEMS gyro, specifically
Can be the angular speed output signal y in driving closed-loop control system shown in Fig. 2i(t), above-mentioned current temperature value can pass through
Set temperature sensor obtains in the detection of MEMS gyro and control circuit.For convenience of description, example shown in Fig. 3 is
To there is sequencing to illustrate, in actual techniques application, resonant frequency, current angular velocity signal, Current Temperatures are currently driven
The acquisition of value can be carried out at the same time, without limiting sequencing.
Since neural network has very strong generalization ability and non-linear mapping capability, the study available for uncertain system
Identification, the knowledge and experience got for PREDICTIVE CONTROL, therefore, the embodiment of the present invention can be come using neural network
Above-mentioned preset temperature model is modeled, and carries out temperature-compensating accordingly.Neural network algorithm mainly includes：BP(back
Propagation) neural network, RBF (radial direction base) neural network, self organizing neural network, Elman neural networks,
Hopfield neural networks etc. are widely used in PREDICTIVE CONTROL, system identification (including being fitted and classifying), Optimal Decision-making control
Deng.
In a specific example, following manner foundation may be used in above-mentioned preset temperature model：
The humid test of pre-determined number is obtained as a result, the humid test result is included under each temperature and rate temperature change
Gyro zero bias, scale factor, driving resonant frequency, driving resonant frequency time rate of change, the temperature value for detecting control circuit,
Detect the temperature value time rate of change of control circuit；
With under each temperature and rate temperature change driving resonant frequency, driving resonant frequency time rate of change, temperature value,
The matrix of temperature value time rate of change composition is input matrix, with gyro zero bias, the scale under each temperature and rate temperature change
The matrix of factor composition is the desired output collection of neural metwork training, carries out neural metwork training, determines the preset temperature mould
The weight matrix and threshold matrix of type；
According to the weight matrix, threshold matrix, the preset temperature model is established.
Wherein, when carrying out neural metwork training, any neural network algorithm may be used to carry out, the present invention is real
Example is applied using BP neural network algorithm.
The principle schematic of preset temperature model provided in an embodiment of the present invention based on neural network can be such as Fig. 4 institutes
Show, as shown in figure 4, the compensation principle of the preset temperature model can be understood as the operation of three-layer neural network controller：Input
Layer, hidden layer, output layer.Wherein, X is input matrix, and Z and Y are respectively the output matrix of hidden layer and output layer.Meanwhile
Tansig and purelin functions are respectively the transmission function for being used as hidden layer and output layer.
Accordingly, above-mentioned preset temperature model can be expressed as Y=purelin (a2Z+b2), wherein, Z=tansig (a1X+
b1), X is represented by the current driving resonant frequency, driving resonant frequency time rate of change, the current temperature value, temperature value
The input matrix of time rate of change composition, a1、a2Represent weight matrix, b1、b2Represent threshold matrix, purelin represents linear and passes
Defeated function, tansig represent tanh S type functions, wherein, the driving resonant frequency time rate of change is according to described current
The driving resonant frequency and the resonant frequency sampling time is driven to determine that driving resonant frequency, last sampling obtain, the temperature
Angle value time rate of change is true according to the current temperature value, the temperature value of last sampling acquisition and temperature value sampling time
It is fixed.
Wherein, above-mentioned driving resonant frequency time rate of change is obtained according to current driving resonant frequency, last sampling
Resonant frequency and driving resonant frequency sampling time is driven to calculate and obtain, specific formula can be such as following formula (12) institute
Show：
dfd=(fd1-fd0)/Tsfd (12)
Wherein, dfdRepresent driving resonant frequency time rate of change, fd1Represent the current driving resonance frequency that present sample obtains
Rate, fd0Represent the driving resonant frequency that last sampling obtains, TsfdRepresent the driving resonant frequency sampling time.
Correspondingly, the temperature that above-mentioned temperature value time rate of change can also be obtained according to current temperature value, last sampling
Value and temperature value sampling time, which calculate, to be obtained, and specific calculation formula can be following formula (13):
dT=(T1-T0)/TsT (13)
Wherein, dTRepresent temperature value time rate of change, T1Represent the current temperature value that present sample obtains, T0Represent upper one
The temperature value that secondary sampling obtains, TsTRepresent the temperature value sampling time.
Wherein, above-mentioned driving resonant frequency sampling time TsfdWith temperature value sampling time TsTIt could be provided as identical, also may be used
To be set as differing.Under normal circumstances, resonant frequency sampling time T is drivensfdWith temperature value sampling time TsTIt is arranged to phase
With value.
Based on the model structure of above-mentioned preset temperature model, initial weight matrix a is being set1、a2With threshold matrix b1、
b2Later, it is possible to which neural network structure ginseng is carried out using Trainlm (Levenberg Marquardt algorithm) algorithm
Several training, and training performance is assessed using Minimum Mean Square Error Mse (Mean square error), specific training
And evaluation process may be used current existing mode and carry out.During learning training, decline according to error gradient steepest
The weight matrix a of principle, hidden layer and output layer1、a2With threshold matrix b1、b2Constantly it is adjusted until that training error ER is less than
Desired setting value training process is just completed.Training error ER can be determined by following formula (11).
ER=(Y-Ta)′×(Y-Ta)/2 (11)
Wherein, ER represents training error, and Y represents the output matrix of preset temperature model, which is mainly scale
The factor or zero bias output, TaRepresent the target output matrix being made of gyro zero bias and scale factor.
After the completion of neural metwork training, weight matrix a1、a2With threshold matrix b1、b2It is all determined, so as to complete
Temperature drift modeling process obtains final preset temperature model Y=purelin (a2Z+b2), Z=tansig (a1X+b1), this is default
In temperature model, weight matrix a1、a2With threshold matrix b1、b2Be via obtaining after the completion of above-mentioned neural metwork training as a result,
The preset temperature model can be used for real-time temperature-compensating.
Accordingly, in a specific example, the MEMS gyro temperature based on the modeling of space-time temperature field of the embodiment of the present invention
The main process of compensation method can be discussed further below：
First, it is tested by the repeated temperature of pre-determined number, obtains the humid test of pre-determined number as a result, these temperature are tried
It tests result and includes gyro zero bias, scale factor, driving resonant frequency, the driving resonant frequency at each temperature and rate temperature change
The data such as time rate of change, the temperature value for detecting control circuit, the temperature value time rate of change for detecting control circuit.
Secondly, the above-mentioned humid test based on acquisition is as a result, the temperature drift model of the gyro zero bias and scale factor to foundation
(i.e. above-mentioned preset temperature model) carries out neural metwork training, can be by applying Matlab (MATrix when specifically carrying out
LABoratory, a kind of main high-tech computing environment for facing scientific algorithm, visualization and programming of interactive) software
Off-line training, while the correctness of the verification experimental verification model are carried out, constantly in real time correction model parameter a1、a2、b1、b2, obtain most
The parameter matrix a of whole neural network1、a2、b1、b2, so as to obtain above-mentioned preset temperature model.
Finally, based on preset temperature model obtained above, according to the current driving resonance frequency of driving closed-loop control system
Rate, the current temperature value for detecting control circuit determine driving resonant frequency time rate of change, temperature value time rate of change, then
With reference to current driving resonant frequency, current temperature value, driving resonant frequency time rate of change, temperature value time rate of change, to closing
The current angular velocity signal of ring control system carries out real-time temperature-compensating.Due to zero bias and scale factor be can be from angular speed
The gyro performance parameter extracted in output signal, so as to by angular velocity signal carry out real-time temperature-compensating namely
Real-time temperature-compensating has been carried out to MEMS gyro zero bias and scale factor.
Based on identical inventive concept, the embodiment of the present invention also provides a kind of temperature compensation system of MEMS gyro, in Fig. 5
Show the structure diagram of the temperature compensation system of the MEMS gyro in one embodiment.
As shown in figure 5, the temperature compensation system of the MEMS gyro provided in the present embodiment includes：It is arranged on the detection of gyro
And driving closed loop control module, detection closed loop control module, temperature sensing circuit and the temperature compensation module of control circuit, institute
State the first input end in of temperature compensation module1It is connect with the output terminal of the driving closed loop control module, the second input terminal in2
It is connect with the output terminal of the temperature sensing circuit, third input terminal in3Connect with the output terminal of the detection closed loop control module
It connects, is inputted according to the current driving resonant frequency of the driving closed loop control module input, the temperature sensing circuit current
Temperature value carries out temperature in real time using preset temperature model to the current angular velocity signal of the detection closed loop control module input
Degree compensation, obtains the angular speed output signal after temperature-compensating, and passes through output terminal out and export the angular speed output signal.
In a specific example, which passes through the conversion of DAC (digital-to-analogue conversion) module being connect with output terminal out
After exported.
Wherein, above-mentioned driving closed loop control module is corresponding with the driving closed-loop control system shown in above-mentioned Fig. 1, to
Realize the driving closed loop control process shown in Fig. 1, above-mentioned detection closed loop control module and above-mentioned detection closed loop shown in Fig. 2
Control system is corresponding, to realize detection closed loop control process shown in Fig. 2.
Wherein, temperature sensing circuit may include temperature sensor shown in Fig. 5 and the ADC that is attached thereto (modulus turns
Change) module, the output terminal connection of the input terminal of ADC module and temperature sensor, output terminal and the temperature compensation module the
Two input terminals connect.
In addition, as shown in figure 5, above-mentioned driving closed loop control module, the detection closed loop control module, the lattice temperature
Compensating module can be integrated in fpga chip, fpga chip can to it is above-mentioned it is current driving resonant frequency, current temperature value, when
Preceding angular velocity signal is sampled.Other each modules in shown in Fig. 5, such as with driving closed loop control module, detection closed loop control
DAC module, ADC module and reinforcing circuit, detection circuit that molding block connects etc., can be with the detection of existing MEMS gyro
It is and identical in control circuit.
In a specific example, above-mentioned preset temperature model is specifically as follows Y=purelin (a2Z+b2), wherein, Z=
tansig(a1X+b1), X is represented by currently driving resonant frequency, driving resonant frequency time rate of change, current temperature value, temperature
It is worth the input matrix of time rate of change composition, a1、a2Represent weight matrix, b1、b2Represent threshold matrix, purelin represents linear
Transfer function, tansig represent tanh S type functions, wherein, the driving resonant frequency time rate of change is according to working as forerunner
The driving resonant frequency and the resonant frequency sampling time is driven to determine that dynamic resonance frequency, last sampling obtain, the temperature
The temperature value and temperature value sampling time that value time rate of change is obtained according to current temperature value, last sampling determine.
Wherein, as described above, above-mentioned driving resonant frequency time rate of change is adopted according to current driving resonant frequency, last time
The driving resonant frequency and driving resonant frequency sampling time that sample obtains, which calculate, to be obtained, which can be in above-mentioned FPGA
It is completed in chip, specific formula can be as shown in following formula (12)：
dfd=(fd1-fd0)/Tsfd (12)
Wherein, dfdRepresent driving resonant frequency time rate of change, fd1Represent the current driving resonance frequency that present sample obtains
Rate, fd0Represent the driving resonant frequency that last sampling obtains, TsfdRepresent the driving resonant frequency sampling time.
Correspondingly, above-mentioned temperature value time rate of change can also be by fpga chip according to current temperature value, last sampling
The temperature value of acquisition and temperature value sampling time, which calculate, to be obtained, and specific calculation formula can be following formula (13)
dT=(T1-T0)/TsT (13)
Wherein, dTRepresent temperature value time rate of change, T1Represent the current temperature value that present sample obtains, T0Represent upper one
The temperature value that secondary sampling obtains, TsTRepresent the temperature value sampling time.
Wherein, above-mentioned driving resonant frequency sampling time TsfdWith temperature value sampling time TsTIt could be provided as identical, also may be used
To be set as differing.Due to being sampled by same fpga chip, under normal circumstances, driving resonant frequency is adopted
Sample time TsfdWith temperature value sampling time TsTIt is arranged to identical value.
The temperature-compensation method and system of MEMS gyro based on embodiment present invention as described above, Fig. 6 show one
The contrast effect schematic diagram of MEMS gyro zero bias and temperature relation in a specific example based on the embodiment of the present invention, can by Fig. 6
See, after scheme through the embodiment of the present invention carries out temperature-compensating, zero bias output voltage fluctuates between -0.005V and 0V,
Temperature drift characteristic of the zero bias entirely in warm range improves general 20 times, so as to also demonstrate proposition of the embodiment of the present invention based on space-time
The correctness and validity of the MEMS gyro compensation schemes of temperature field modeling.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, it is all considered to be the range of this specification record.
Embodiment described above only expresses the several embodiments of the present invention, and description is more specific and detailed, but simultaneously
It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that those of ordinary skill in the art are come
It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection of the present invention
Range.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (10)
1. a kind of temperature-compensation method of MEMS gyro, which is characterized in that including step：
Obtain the current driving resonant frequency of driving closed-loop control system；
Obtain the current angular velocity signal of detection closed-loop control system output；
Obtain the current temperature value of detection control circuit；
According to the current driving resonant frequency, the current temperature value, using preset temperature model to the current angular velocity
Signal carries out real-time temperature-compensating, obtains the angular speed output signal after temperature-compensating.
2. the temperature-compensation method of MEMS gyro according to claim 1, which is characterized in that the preset temperature model is
Y=purelin (a2Z+b2), wherein, Z=tansig (a1X+b1), X is represented by the current driving resonant frequency, driving resonance
The input matrix that frequency time change rate, the current temperature value, temperature value time rate of change form, a1、a2Represent weight square
Battle array, b1、b2Representing threshold matrix, purelin represents linear transmission function, and tansig represents tanh S type functions, wherein, institute
State the driving resonant frequency that driving resonant frequency time rate of change is obtained according to the current driving resonant frequency, last sampling
And the driving resonant frequency sampling time determines that the temperature value time rate of change is adopted according to the current temperature value, last time
The temperature value and temperature value sampling time that sample obtains determine.
3. the temperature-compensation method of MEMS gyro according to claim 2, which is characterized in that the driving resonant frequency is adopted
The sample time is identical with the temperature value sampling time.
4. the temperature-compensation method of the MEMS gyro according to claims 1 or 2 or 3, which is characterized in that the preset temperature
Model is established using following manner：
The humid test of pre-determined number is obtained as a result, the humid test result includes the top under each temperature and rate temperature change
Spiral shell zero bias, scale factor, driving resonant frequency, driving resonant frequency time rate of change, the temperature value for detecting control circuit, detection
The temperature value time rate of change of control circuit；
With driving resonant frequency, driving resonant frequency time rate of change, temperature value, the temperature under each temperature and rate temperature change
Be worth the matrix of time rate of change composition for input matrix, under each temperature and rate temperature change gyro zero bias, scale factor
The matrix of composition is the desired output collection of neural metwork training, carries out neural metwork training, determines the preset temperature model
Weight matrix and threshold matrix；
According to the weight matrix, threshold matrix, the preset temperature model is established.
5. the temperature-compensation method of MEMS gyro according to claim 4, which is characterized in that be less than in training error predetermined
During training error threshold value, judgement neural metwork training terminates, and the training error is determined by following formula：
ER=(Y-Ta)'×(Y-Ta)/2
Wherein, ER represents training error, and Y represents the output matrix of preset temperature model, TaIt represents by gyro zero bias and scale factor
The target output matrix of composition.
6. a kind of temperature compensation system of MEMS gyro, which is characterized in that including：It is arranged on detection and the control circuit of gyro
Drive closed loop control module, detection closed loop control module, temperature sensing circuit and temperature compensation module, the temperature-compensating mould
The first input end of block connect with the output terminal of the driving closed loop control module, the second input terminal and the temperature sensing circuit
Output terminal connection, third input terminal with it is described detection closed loop control module output terminal connect, according to it is described drive closed loop control
Current driving resonant frequency, the current temperature value of temperature sensing circuit input of molding block input, using preset temperature mould
Type carries out real-time temperature-compensating to the current angular velocity signal of the detection closed loop control module input, after obtaining temperature-compensating
Angular speed output signal, and export the angular speed output signal.
7. the temperature compensation system of MEMS gyro according to claim 6, which is characterized in that the preset temperature model is
Y=purelin (a2Z+b2), wherein, Z=tansig (a1X+b1), X is represented by currently driving resonant frequency, driving resonant frequency
The input matrix that time rate of change, current temperature value, temperature value time rate of change form, a1、a2Represent weight matrix, b1、b2Table
Showing threshold matrix, purelin represents linear transmission function, and tansig represents tanh S type functions, wherein, the driving is humorous
Vibration frequency time rate of change is according to current driving resonant frequency, the driving resonant frequency of last sampling acquisition and driving resonance
The frequency sampling time determines, the temperature value time rate of change according to the temperature value that current temperature value, last sampling obtain with
And the temperature value sampling time determines.
8. the temperature compensation system of MEMS gyro according to claim 7, which is characterized in that the driving resonant frequency is adopted
The sample time is identical with the temperature value sampling time.
9. the temperature compensation system of MEMS gyro according to claim 7, which is characterized in that the driving closed-loop control mould
Block, the detection closed loop control module, the temperature compensation module are integrated in fpga chip.
10. the temperature compensation system of MEMS gyro according to claim 7, which is characterized in that the temperature sensing circuit
Including temperature sensor and ADC module, the input terminal of the ADC module connect with the output terminal of the temperature sensor, is defeated
Outlet is connect with the second input terminal of the temperature compensation module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510600317.3A CN105222765B (en) | 2015-09-18 | 2015-09-18 | The temperature-compensation method and system of MEMS gyro |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510600317.3A CN105222765B (en) | 2015-09-18 | 2015-09-18 | The temperature-compensation method and system of MEMS gyro |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105222765A CN105222765A (en) | 2016-01-06 |
| CN105222765B true CN105222765B (en) | 2018-06-12 |
Family
ID=54991856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510600317.3A Active CN105222765B (en) | 2015-09-18 | 2015-09-18 | The temperature-compensation method and system of MEMS gyro |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105222765B (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105892293B (en) * | 2016-04-06 | 2018-07-24 | 苏州大学 | A kind of silicon micro-gyroscope digital driving closed-loop control system |
| CN106500728B (en) * | 2016-10-26 | 2019-08-02 | 北京小鸟看看科技有限公司 | A kind of method for temperature drift compensation and device of gyroscope |
| CN106597852A (en) * | 2016-12-27 | 2017-04-26 | 中国船舶重工集团公司第七0五研究所 | MEMS gyroscope temperature compensation method based on RBF neural network |
| CN110186446B (en) * | 2019-06-27 | 2022-12-02 | 重庆芯力源科技有限公司 | North seeking instrument north seeking method based on MEMS gyroscope |
| CN110542437B (en) * | 2019-09-21 | 2020-12-29 | 中北大学 | Mechanical sensitivity self-compensation method for driving-detecting mode interchange micro-mechanical gyroscope |
| CN110986999B (en) * | 2019-11-04 | 2021-12-24 | 普宙飞行器科技（深圳）有限公司 | Gyroscope drift correction method, drift correction device, storage medium, electronic equipment and unmanned aerial vehicle |
| CN111006648B (en) * | 2019-11-05 | 2022-05-10 | 中国船舶重工集团公司第七一七研究所 | Temperature control optical fiber inertial navigation structure and design method thereof |
| CN114964195B (en) * | 2022-07-27 | 2022-10-11 | 中国船舶重工集团公司第七0七研究所 | Hemispherical resonant gyroscope angular velocity signal temperature compensation method |
| CN115877894B (en) * | 2023-02-13 | 2023-06-27 | 西安航天精密机电研究所 | System and method for controlling starting of liquid floating gyroscope for aerospace |
| CN116046026B (en) * | 2023-03-31 | 2023-06-16 | 中国船舶集团有限公司第七〇七研究所 | Fiber-optic gyroscope performance measurement method and system based on stress factors |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1549443A (en) * | 1999-11-02 | 2004-11-24 | ��ʿͨ�����ɷ�����˾ | Temperature compensation mechanism for a micromechanical ring resonator |
| CN102519617A (en) * | 2012-01-09 | 2012-06-27 | 北京理工大学 | Digitalized detection method for temperature information of micromechanical quartz gyroscope sensitive device |
| CN103256941A (en) * | 2013-04-19 | 2013-08-21 | 中国兵器工业集团第二一四研究所苏州研发中心 | Practical method of high order temperature compensation for MEMS (Micro Electro Mechanical Systems) gyroscope |
| CN103499345A (en) * | 2013-10-15 | 2014-01-08 | 北京航空航天大学 | Fiber-optic gyro temperature drift compensating method based on wavelet analysis and BP (back propagation) neutral network |
| CN103940427A (en) * | 2014-03-11 | 2014-07-23 | 哈尔滨工程大学 | Temperature error compensation method during MEMS inertial measurement unit cold start |
| CN104330095A (en) * | 2014-10-24 | 2015-02-04 | 中国兵器工业集团第二一四研究所苏州研发中心 | MEMS gyro temperature compensation method on basis of sectional fitting |
| CN104820757A (en) * | 2015-05-18 | 2015-08-05 | 中国电子科技集团公司第二十研究所 | Temperature drift property neural network modeling method of MEMS (Micro Electro Mechanical Systems) top on the basis of physical model |
| CN104819710A (en) * | 2015-05-21 | 2015-08-05 | 北京航空航天大学 | Resonant mode silicon micro-machined gyroscope with temperature compensation structure |
-
2015
- 2015-09-18 CN CN201510600317.3A patent/CN105222765B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1549443A (en) * | 1999-11-02 | 2004-11-24 | ��ʿͨ�����ɷ�����˾ | Temperature compensation mechanism for a micromechanical ring resonator |
| CN102519617A (en) * | 2012-01-09 | 2012-06-27 | 北京理工大学 | Digitalized detection method for temperature information of micromechanical quartz gyroscope sensitive device |
| CN103256941A (en) * | 2013-04-19 | 2013-08-21 | 中国兵器工业集团第二一四研究所苏州研发中心 | Practical method of high order temperature compensation for MEMS (Micro Electro Mechanical Systems) gyroscope |
| CN103499345A (en) * | 2013-10-15 | 2014-01-08 | 北京航空航天大学 | Fiber-optic gyro temperature drift compensating method based on wavelet analysis and BP (back propagation) neutral network |
| CN103940427A (en) * | 2014-03-11 | 2014-07-23 | 哈尔滨工程大学 | Temperature error compensation method during MEMS inertial measurement unit cold start |
| CN104330095A (en) * | 2014-10-24 | 2015-02-04 | 中国兵器工业集团第二一四研究所苏州研发中心 | MEMS gyro temperature compensation method on basis of sectional fitting |
| CN104820757A (en) * | 2015-05-18 | 2015-08-05 | 中国电子科技集团公司第二十研究所 | Temperature drift property neural network modeling method of MEMS (Micro Electro Mechanical Systems) top on the basis of physical model |
| CN104819710A (en) * | 2015-05-21 | 2015-08-05 | 北京航空航天大学 | Resonant mode silicon micro-machined gyroscope with temperature compensation structure |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105222765A (en) | 2016-01-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105222765B (en) | The temperature-compensation method and system of MEMS gyro | |
| Chong et al. | Temperature drift modeling of MEMS gyroscope based on genetic-Elman neural network | |
| CN103499345B (en) | A kind of Fiber Optic Gyroscope Temperature Drift compensation method based on wavelet analysis and BP neural network | |
| CN102519617B (en) | Digitalized detection method for temperature information of micromechanical quartz gyroscope sensitive device | |
| CN108120451A (en) | Based on silicon micro accerometer temperature-compensation method, the system for improving PSO optimization neural networks | |
| CN103256941B (en) | A kind of method that MEMS gyroscope is high-order temperature compensated | |
| CN106253893B (en) | A kind of High Accuracy Microcomputer compensated crystal oscillator | |
| CN105892293B (en) | A kind of silicon micro-gyroscope digital driving closed-loop control system | |
| CN103335814B (en) | Correction method for inclination angle measurement error data of experimental model in wind tunnel | |
| CN104535251A (en) | Temperature self-compensating method and measuring mode for double-resonator pressure sensor | |
| CN108469269B (en) | Resonance point testing system of broadband inertial reference stable platform | |
| CN103279038B (en) | Based on the gyroscope Sliding Mode Adaptive Control method of T-S fuzzy model | |
| CN105606845A (en) | Dual-mass-block high sensitivity silicon micro resonant accelerometer structure based on two-level micro-levers | |
| CN104503246B (en) | Indirect adaptive neural network sliding-mode control method for micro-gyroscope system | |
| CN108955727A (en) | A kind of fiber optic coils method of evaluating performance | |
| CN103529701A (en) | Method of global sliding mode control of neural network of micro-gyroscope | |
| CN106338918A (en) | Adaptive dynamic-surface double neural network control method of micro gyroscope | |
| CN112181002A (en) | Micro gyroscope double-recursion disturbance fuzzy neural network fractional order sliding mode control method | |
| CN106969785A (en) | Gyroscope self-calibrating device and method | |
| CN107860403B (en) | Linear output method of modal localization sensor | |
| CN114310911B (en) | Driving joint dynamic error prediction and compensation system and method based on neural network | |
| CN110570734A (en) | Portable comprehensive experiment box and method for measurement and control circuit | |
| CN103197558B (en) | Microgyroscope fuzzy self-adaptation control method based on T-S model | |
| CN104820757A (en) | Temperature drift property neural network modeling method of MEMS (Micro Electro Mechanical Systems) top on the basis of physical model | |
| CN102508503A (en) | Compensation method based on generalized inner module for eccentric torque of three-shaft inertially stabilized platform |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |