CN103252845A - Two-way diamond wire silicon rod cutting machine - Google Patents
Two-way diamond wire silicon rod cutting machine Download PDFInfo
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- CN103252845A CN103252845A CN2012100376928A CN201210037692A CN103252845A CN 103252845 A CN103252845 A CN 103252845A CN 2012100376928 A CN2012100376928 A CN 2012100376928A CN 201210037692 A CN201210037692 A CN 201210037692A CN 103252845 A CN103252845 A CN 103252845A
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- wire storage
- buddha
- storage tube
- warrior attendant
- cutting
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Abstract
The invention provides a two-way diamond wire silicon rod cutting machine. The two-way diamond wire silicon rod cutting machine at least comprises a machine frame, a first wire storage cylinder, a second wire storage cylinder, a diamond wire and a tension monitoring device, wherein the machine frame is provided with a cutting working table, a plurality of guide wheels and two cutting roller; the first wire storage cylinder and the second wire storage cylinder are driven by a first motor and a second motor to rotate forwards or backwards; one end of the diamond wire is wound on the first wire storage cylinder in a single-layer mode and the other end of the diamond wire is wound on the second wire storage cylinder in a single-layer mode; the tension monitoring device is electrically connected with the first motor and the second motor; the diamond wire forms a cutting net between the two cutting rollers after being guided by the plurality of guide wheels to subject workpieces to cutting operations; the tension monitoring device is used for monitoring that when the diamond wire generates tension, the first motor or the second motor drives the first wire storage cylinder or the second wire storage cylinder to absorb the tension. The two-way diamond wire silicon rod cutting machine solves the problems that the tension stability is poor, the adjustment is inconvenient, the response speed is slow and the like of a device in the prior art. Besides, by utilizing the diamond wire, the material waste is avoided, and the problems that the workpieces are inconvenient to clean, the lapping slurry is difficult to recycle and the pollution to workpieces is severe are solved.
Description
Technical field
The present invention relates to a kind of multi-thread cutting technique, particularly relate to a kind of two-way Buddha's warrior attendant line silicon rod shear that adopts two storage silk cylinders.
Background technology
Multi-thread cutting technique is present more advanced silicon chip process technology in the world, and its principle is that the steel wire by a high-speed motion drives the cutting blade material that is attached on the steel wire hard brittle materials such as semiconductor are rubbed, thereby reaches the cutting purpose.Line cutting technology has been compared with traditional knife saw sheet, grinding wheel and interior circle cutting has the efficient height, production capacity height, precision advantages of higher.
In the cutting process to workpiece, steel wire is by the guiding of tens guide rollers, form a bracing cable net at the main line roller, and workpiece to be processed is realized the feeding of workpiece by the rise and fall of workbench, and compression pump effect under, be assemblied in grinding agent automatic spraying device on the equipment and grinding agent be sprayed to the cutting position of steel wire and workpiece, driving grinding agent by steel wire moves back and forth, utilize abrasive sand that workpiece is produced cutting, so that hard brittle materials such as semiconductor once are cut into hundreds of simultaneously, in above-mentioned operation, the effect of steel wire is very important, even if but best steel wire, its ductility and abrasion resistance also are limited, that is to say that steel wire can be tapered in driving the grinding agent reciprocating motion, until finally being broken.
In the prior art, common linear cutting equipment (lathe) all can design steel wire tension compensating mechanism, for remedying the ductility of steel wire in going and back running, for example, the shear of common single storage silk cylinder in the industry, it has adopted single wire storage tube and motor, and be combined with the tension compensating mechanism of line of cut, in order to overcome steel wire on a left side, the tension force that produces in the right motion, though right this kind cutting equipment has reduced the constructions cost of equipment because adopting single storage silk cylinder, so, the tension force of the generation of steel wire often can not be absorbed fully by its compensation arrangement in the shear of described single storage silk cylinder, thereby for the control of the tension force of steel wire, its less stable also is easy to cause steel wire to be broken or lax and have influence on cutting operation; Moreover its response speed is also very slow, and the adjusting difficulty of single storage silk cylinder is also bigger, and operating procedure is also quite loaded down with trivial details, has increased the technical difficulty of regulating.
In addition, the steel wire of available technology adopting often needs to cooperate grinding agent just can carry out cutting operation, not only increased the materials cost, also can cause follow-up cleaning to equipment and workpiece very inconvenient, and the recovery difficult of lapping liquid is very big, also relatively more serious to workpiece pollution, a real big problem for can not be ignored.
So, how a kind of linear cutting equipment is provided, to avoid above-described shortcoming, real is the present problem demanding prompt solution of dealer of association area.
Summary of the invention
The shortcoming of prior art the object of the present invention is to provide a kind of two-way Buddha's warrior attendant line silicon rod shear in view of the above, with solve equipment tension stability of the prior art poor, regulate inadequately facility and response speed waits problem slowly.
Another object of the present invention is to provide a kind of two-way Buddha's warrior attendant line silicon rod shear, big with cost, solution workpiece cleaning inconvenience, the lapping liquid recovery difficult that reduces materials, and the problem serious to workpiece contamination.
Reach other relevant purposes for achieving the above object, the invention provides a kind of two-way Buddha's warrior attendant line silicon rod shear, it is characterized in that, described two-way Buddha's warrior attendant line silicon rod shear comprises at least: frame, first wire storage tube, second wire storage tube, Buddha's warrior attendant line, and tension monitoring device.Described frame has the cutting work top for place work piece, is located at a plurality of directive wheels on the described frame, and two cutting rollers that are positioned at described cutting work top upside; Described first wire storage tube is arranged at described frame one side, and is connected with for driving described first wire storage tube in first motor of forward or counter-rotating; Described second wire storage tube is arranged at the opposite side of described frame and in the described first wire storage tube opposing parallel, and is connected with for driving described second wire storage tube in second motor of forward or counter-rotating; One of described Buddha's warrior attendant line end winding of single layer is in described first wire storage tube, its other end winding of single layer is in described second wire storage tube, described Buddha's warrior attendant line forms the cutting net via described a plurality of directive wheel guiding back between described two cutting rollers, described workpiece is carried out cutting operation; Described tension monitoring device is electrically connected at described first motor and second motor, in order to when the Buddha's warrior attendant line produces tension force, by described first motor or second motor-driven, first wire storage tube or second wire storage tube described tension force is absorbed.
In the present invention's the two-way Buddha's warrior attendant line silicon rod shear, described cutting roller relatively liftably is arranged at described frame, and when carrying out cutting operation, described cutting roller lowers that the workpiece that is placed on the cutting work top is cut.The top layer of described Buddha's warrior attendant line has diamond dust, need not cooperate grinding agent in cutting process.Described first wire storage tube is ureeling barrel, and described second wire storage tube is wire winding tube, in other words, when described first wire storage tube is rotated in the forward, the described second wire storage tube counter-rotating.Described tension monitoring device comprises tension pick-up.
As mentioned above, two-way Buddha's warrior attendant line silicon rod shear of the present invention adopts double filament storage canister to carry out retractable cable and be combined with the tension monitoring device technology, with solve equipment tension stability of the prior art poor, regulate inadequately facility and response speed waits problem slowly; Moreover, in the present invention's the two-way Buddha's warrior attendant line silicon rod shear, adopt the top layer to have the Buddha's warrior attendant line of diamond dust as line of cut, avoided the waste materials, solved the workpiece cleaning inconvenience, the lapping liquid recovery difficult is big, and the problem serious to workpiece contamination, and then improve the operational efficiency that product percent of pass has also improved equipment, namely effectively overcome various shortcoming of the prior art.
Description of drawings
Fig. 1 is shown as the wire principle schematic of two-way Buddha's warrior attendant line silicon rod shear of the present invention.
Fig. 2 is shown as the simplified structure schematic diagram of two-way Buddha's warrior attendant line silicon rod shear of the present invention.
The simple declaration of element numbers:
11 frames
111 cutting work tops
112 columns
12 directive wheels
13 cutting rollers
131 godet rollers
132 sliding parts
14 first wire storage tubes
141 first motors
15 second wire storage tubes
151 second motors
16 Buddha's warrior attendant lines
17 tension monitoring devices
The specific embodiment
Below by specific instantiation explanation embodiments of the present invention, those skilled in the art can understand other advantages of the present invention and effect easily by the content that this specification discloses.The present invention can also be implemented or be used by other different concrete real mode, and the every details in this specification also can be based on different viewpoints and application, carries out various modifications or change under the spirit of the present invention not deviating from.
See also Fig. 1 and Fig. 2, Fig. 1 is shown as the wire principle schematic of two-way Buddha's warrior attendant line silicon rod shear of the present invention.Fig. 2 is shown as the simplified structure schematic diagram of two-way Buddha's warrior attendant line silicon rod shear of the present invention.Need to prove, the diagram that provides in the present embodiment only illustrates basic conception of the present invention in a schematic way, satisfy and only show the assembly relevant with two-way Buddha's warrior attendant line silicon rod shear of the present invention in graphic but not component count, shape and size drafting when implementing according to reality, kenel, quantity and the ratio of each assembly can be a kind of random change during its actual enforcement, and its assembly layout kenel also may be more complicated.
As shown in the figure, the invention provides a kind of two-way Buddha's warrior attendant line silicon rod shear, be used for workpiece 2 such as for example crystalline silicon are cut or block operation, in the present embodiment, described two-way Buddha's warrior attendant line silicon rod shear comprises at least: frame 11, the first wire storage tubes 14, the second wire storage tubes 15, Buddha's warrior attendant line 16, and tension monitoring device 17.
Described frame 11 has the cutting work top 111 for place work piece 2, is located at a plurality of directive wheels 12 on the described frame 11, and two cutting rollers 13 that are positioned at described cutting work top 111 upsides; In the present embodiment, described a plurality of directive wheels 12 are respectively guide roller, longitudinally guiding wheel and oblique directive wheel etc., do not show one by one in diagram, state clearly hereby.
Described frame 11 also includes four columns parallel to each other 112, described two cutting rollers 13 extend across by a sliding part 132 relative liftables and are located on the described column 11 2, when carrying out cutting operation, described cutting roller 13 lowers that the workpiece 2 that is placed on the cutting work top 111 is cut.In the concrete embodiment, the godet roller 131 that has corresponding described directive wheel 12 on the described cutting roller 13, more specifically, described godet roller 131 has one namely with cutting groove and a plurality of standby cutting groove (all not shown), described Buddha's warrior attendant line 16 is via 131 guiding of described godet roller and be wrapped in namely the using in the cutting groove of described cutting roller, in service repeatedly a silk phenomenon does not take place to jump to guarantee described Buddha's warrior attendant line 16.
Described first wire storage tube 14 is arranged at a side of described frame 11, and is connected with for driving described first wire storage tube 14 in first motor 141 of forward or counter-rotating; Described second wire storage tube 15 is arranged at the opposite side of described frame 11, and in described first wire storage tube, 14 opposing parallel, described second wire storage tube 15 is connected with for driving described second wire storage tube 15 in second motor 152 of forward or counter-rotating; In the present embodiment, when described first wire storage tube 14 was ureeling barrel, described second wire storage tube 15 was wire winding tube, in other words, when described first wire storage tube 14 is rotated in the forward, 15 counter-rotatings of described second wire storage tube.The present invention adopts double filament storage canister to carry out the technology of retractable cable, in cutting process, regulate easily, moreover, because during stressed being elongated, especially should extend the part that increases when long when described Buddha's warrior attendant line 16, can will extend a part of steel wire that increases by wire storage tube wherein batches, have good tension stability, and adjusting is very convenient, response speed is also very fast.
One of described Buddha's warrior attendant line 16 end winding of single layer is in described first wire storage tube 14, its other end winding of single layer is in described second wire storage tube 15, concrete, described Buddha's warrior attendant line 16 forms the cutting net via described a plurality of directive wheels 12 guiding backs in 13 of described two cutting rollers, and described workpiece 2 is carried out cutting operation; What the present invention also it is important to point out that is, the cutting silk that the present invention's two-way Buddha's warrior attendant line silicon rod shear adopts has the Buddha's warrior attendant line 16 of diamond dust for the top layer, select for use this kind Buddha's warrior attendant line 16 in process, to avoid using the lapping liquid with abrasive sand, not only reduced the materials cost, also solved the workpiece cleaning inconvenience, the lapping liquid recovery difficult is big, and the problem serious to workpiece contamination.
Described tension monitoring device 17 is electrically connected at described first motor 141 and second motor 151, in order to when Buddha's warrior attendant line 15 produces tension force, by described first motor 141 or second motor 151 drives first wire storage tubes 14 or second wire storage tube 15 absorbs described tension force.In concrete embodiment, described tension monitoring device 17 is made up of a mechanical type tension force detection arm and the tension pick-up (all not shown) that is attached thereto, curtage signal by described sensor output reflection takeup tension size, and be combined with for example by power circuit, A/D converter or D/A converter, programmable controller PLC, calculating control systems such as communication interface send instruction to described first motor 141 or second motor 151, by described first motor 141 or second motor 151 drives first wire storage tubes 14 or second wire storage tube 15 sponges the tension force that produces, and then the equalization of strain of the Buddha's warrior attendant line 15 in the maintenance cutting operation, solved the normal steel wire tension instability that occurs in the former shear, easy fracture of wire, problems such as easy silk pressing.
In sum, two-way Buddha's warrior attendant line silicon rod shear of the present invention adopts double filament storage canister to carry out retractable cable and be combined with the tension monitoring device technology, with solve equipment tension stability of the prior art poor, regulate inadequately facility and response speed waits problem slowly; Moreover, in the present invention's the two-way Buddha's warrior attendant line silicon rod shear, adopt the top layer to have the Buddha's warrior attendant line of diamond dust as line of cut, avoided the waste materials, solved the workpiece cleaning inconvenience, the lapping liquid recovery difficult is big, and the problem serious to workpiece contamination, and then improve the operational efficiency that product percent of pass has also improved equipment, namely effectively overcome various shortcoming of the prior art and the tool high industrial utilization.
Above-described embodiment is illustrative principle of the present invention and effect thereof only, but not is used for restriction the present invention.Any personage who has the knack of this technology all can be under spirit of the present invention and category, and above-described embodiment is modified or changed.Therefore, have in the technical field under such as and know that usually the knowledgeable modifies or changes not breaking away from all equivalences of finishing under disclosed spirit and the technological thought, must be contained by claim described later.
Claims (7)
1. a two-way Buddha's warrior attendant line silicon rod shear is characterized in that, described two-way Buddha's warrior attendant line silicon rod shear comprises at least:
Frame has the cutting work top for place work piece, is located at a plurality of directive wheels on the described frame, and two cutting rollers that are positioned at described cutting work top upside;
First wire storage tube is arranged at described frame one side, and is connected with for driving described first wire storage tube in first motor of forward or counter-rotating;
Second wire storage tube is arranged at the opposite side of described frame and in the described first wire storage tube opposing parallel, and is connected with for driving described second wire storage tube in second motor of forward or counter-rotating;
Buddha's warrior attendant line, one end winding of single layer are in described first wire storage tube, and its other end winding of single layer is in described second wire storage tube, and described Buddha's warrior attendant line forms the cutting net via described a plurality of directive wheel guiding back between described two cutting rollers, described workpiece is carried out cutting operation; And
Tension monitoring device is electrically connected at described first motor and second motor, in order to when the Buddha's warrior attendant line produces tension force, by described first motor or second motor-driven, first wire storage tube or second wire storage tube described tension force is absorbed.
2. two-way Buddha's warrior attendant line silicon rod shear as claimed in claim 1, it is characterized in that: described cutting roller relatively liftably is arranged at described frame.
3. two-way Buddha's warrior attendant line silicon rod shear as claimed in claim 1, it is characterized in that: the top layer of described Buddha's warrior attendant line has diamond dust.
4. two-way Buddha's warrior attendant line silicon rod shear as claimed in claim 1, it is characterized in that: described first wire storage tube is ureeling barrel.
5. two-way Buddha's warrior attendant line silicon rod shear as claimed in claim 4, it is characterized in that: described second wire storage tube is wire winding tube.
6. two-way Buddha's warrior attendant line silicon rod shear as claimed in claim 5 is characterized in that: when described first wire storage tube is rotated in the forward, and the described second wire storage tube counter-rotating.
7. two-way Buddha's warrior attendant line silicon rod shear as claimed in claim 1, it is characterized in that: described tension monitoring device comprises tension pick-up.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210037692.8A CN103252845B (en) | 2012-02-19 | 2012-02-19 | Two-way diamond wire silicon rod shear |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210037692.8A CN103252845B (en) | 2012-02-19 | 2012-02-19 | Two-way diamond wire silicon rod shear |
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| Publication Number | Publication Date |
|---|---|
| CN103252845A true CN103252845A (en) | 2013-08-21 |
| CN103252845B CN103252845B (en) | 2015-12-09 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210037692.8A Active CN103252845B (en) | 2012-02-19 | 2012-02-19 | Two-way diamond wire silicon rod shear |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104669455A (en) * | 2015-02-11 | 2015-06-03 | 无锡中硅新材料股份有限公司 | Wire net wiring structure of multi-wire cutting device |
| CN105936096A (en) * | 2016-06-23 | 2016-09-14 | 无锡上机数控股份有限公司 | Diamond line numerical control take-up and payoff device |
| CN105965708A (en) * | 2016-07-01 | 2016-09-28 | 河南鸿昌电子有限公司 | Method and device for cutting out semiconductor dies |
| CN108327104A (en) * | 2018-02-08 | 2018-07-27 | 宁波鄞州义旺电子科技有限公司 | A kind of integrated disk manufacturing equipment of semiconductor |
| CN110238912A (en) * | 2019-06-20 | 2019-09-17 | 江苏丽泽节能科技有限公司 | A kind of high efficiency soundproof plate cutting machine |
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| CN202412500U (en) * | 2012-02-19 | 2012-09-05 | 上海日进机床有限公司 | Diamond wire cutter with double wire storage rollers |
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Patent Citations (6)
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| JPS6362655A (en) * | 1986-09-03 | 1988-03-18 | Yasunaga Tekkosho:Kk | Wire tensile force controller for wire saw |
| JPH10119031A (en) * | 1996-10-22 | 1998-05-12 | Tokyo Seimitsu Co Ltd | Wire running controlling device of wire saw |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104669455A (en) * | 2015-02-11 | 2015-06-03 | 无锡中硅新材料股份有限公司 | Wire net wiring structure of multi-wire cutting device |
| CN105936096A (en) * | 2016-06-23 | 2016-09-14 | 无锡上机数控股份有限公司 | Diamond line numerical control take-up and payoff device |
| CN105965708A (en) * | 2016-07-01 | 2016-09-28 | 河南鸿昌电子有限公司 | Method and device for cutting out semiconductor dies |
| CN108327104A (en) * | 2018-02-08 | 2018-07-27 | 宁波鄞州义旺电子科技有限公司 | A kind of integrated disk manufacturing equipment of semiconductor |
| CN110238912A (en) * | 2019-06-20 | 2019-09-17 | 江苏丽泽节能科技有限公司 | A kind of high efficiency soundproof plate cutting machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103252845B (en) | 2015-12-09 |
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Effective date of registration: 20180531 Address after: 314400 4 buildings in No. 17, Shi Dai Road, Haining Economic Development Zone, Haining, Jiaxing, Zhejiang Patentee after: Haining Dijin science and Technology Co., Ltd. Address before: No. 1358, nine dry road, Si Jing Town, Songjiang District, Shanghai Patentee before: Shanghai Nissin Machine Tool Co., Ltd. |