CN103225068A - Clamping fixture for film coating of end surfaces of semiconductor laser chips - Google Patents
Clamping fixture for film coating of end surfaces of semiconductor laser chips Download PDFInfo
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- CN103225068A CN103225068A CN2013101105684A CN201310110568A CN103225068A CN 103225068 A CN103225068 A CN 103225068A CN 2013101105684 A CN2013101105684 A CN 2013101105684A CN 201310110568 A CN201310110568 A CN 201310110568A CN 103225068 A CN103225068 A CN 103225068A
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- semiconductor laser
- guide rail
- clamping device
- tensioning member
- fixture
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Abstract
The invention discloses a clamping fixture for film coating of end surfaces of semiconductor laser chips. The clamping fixture comprises a fixing part two ends of which is respectively fixed with connecting shafts, wherein the fixing part is movably connected with a tensioning member through the connecting shafts and the springs are connected between the tensioning member and the fixing part. The clamping fixture further comprises an auxiliary installation tool which comprises a base, wherein the base is connected with a handle seat, the handle seat is provided with a leading screw, surface of the base is provided with a left guide rail and a right guide rail, a pull bar is connected between the left guide rail and a right guide rail, and the pull bar is connected with the leading screw. The fixture provided by the invention is simple and novel in design structure, easy to clean and maintain, and long in usage life, and the fixture can provide large quantity of clamp bars of the semiconductor laser chips which can be clamped by the fixture. According to the invention, clamping force of the fixture can be adjusted through adjusting a length of the springs, thereby preventing damaging products by excessive force, or clamping the products loosely because of insufficient clamping force caused by too small force.
Description
Technical field
The present invention relates to a kind of semiconductor laser chip end face evaporation optical thin film technology that is applied to, be specifically related to a kind of semiconductor laser chip end face coating clamping device.
Background technology
The existing anchor clamps that are applied in the similar technology are generally taked screw retention or torsion spring fixed mode, for reaching the purpose of the stripe laser chip of clamping some amount, inevitably have following shortcoming:
1, the anchor clamps structure is complicated, and cleaning and maintenance after being unfavorable for using cause precise decreasing fast, and work-ing life is not long.
2, take the mode of screw retention to have problems such as insecure, that screw thread weares and teares easily, become flexible easily.Take torsion spring fixed mode, there is the moment beyond the horizontal direction in anchor clamps inside.More than two kinds of fixed form conditions all can cause clamp bar insecure, bear the vibrations in the coating process incessantly, cause product loss.
3, can only simultaneously carry out plated film to certain of anchor clamps, as will carrying out twice assembling to chip, bigger to the chip damage to the two-sided plated film that carries out of chip.
4, chip is packed into relatively difficulty of anchor clamps personnel's technical ability is had relatively high expectations, thereby working efficiency is lower, and dress bar success ratio is not high, causes product loss easily.
5, clamp structure complexity, parts are more, and the accuracy requirement height of anchor clamps causes the anchor clamps cost higher.
Summary of the invention
Technical problem to be solved by this invention is for providing a kind of semiconductor laser chip end face coating clamping device, and it is simple in structure, and is practical and convenient, and is easy to clean and safeguard long service life.
The invention provides a kind of semiconductor laser chip end face coating clamping device, comprise mounting block, the two ends of described mounting block are fixed with two coupling shafts respectively, and described mounting block is connected with tensioning member by two coupling shafts, is connected with spring between described tensioning member and the mounting block.
Further, be connected with the spring backing pin between described spring and the mounting block, also be provided with the spring backing pin between described spring and the tensioning member.
Further, also comprise auxiliary dress bar instrument, described auxiliary dress bar instrument comprises pedestal, described base-plates surface is provided with left rail and the right guide rail that is parallel to each other, and be connected with pull bar between left rail and the right guide rail, described pull bar is connected with rotary handle, and the top of described left rail and right guide rail has inside projection, colludes by projection and draws tensioning member.
Further, be connected with latch with axle by copper sheathing between described pull bar and the rotary handle.
Further, described pedestal is arranged on the base.
Further, have rectangular recess on the surface of described pedestal, be provided with glass block in this rectangular recess.
The advantage that the present invention has is:
The project organization of clamp body provided by the invention is simply novel, be easy to clean and safeguard, long service life, and but the clamp bar quantity of the semiconductor laser chip of the clamp body clamping that can provide is many, stripe-geometry semiconductor laser chip with the length * wide * thick 20mm * 300um of being * 120um is an example, and can assemble quantity is 15 ~ 70.And the present invention can adapt to different size stripe-geometry semiconductor laser chip, length requirement 8mm ~ 28mm.Width requirement 200um ~ 2000 μ m.After finishing the dress bar, two end face tops of chip nothing is blocked, and can adapt to any type of coating equipment.Can once adorn bar, the two sides plated film need not repetition dismounting chip, reduces the damage to chip.
The present invention can also adjust the clamp dynamics by adjusting spring length, avoids dynamics to cross the macrolesion product, or the too small and tight product of the not enough folder of holding force of dynamics.
The present invention also takes special-purpose auxiliary dress bar instrument to come the non-productive operation personnel to adorn bar, operating method is simple, the general operation employee can learn to use in 15 minutes, can skillfully operate in 4 hours, require low to personnel's technical ability, improve working efficiency and quality, reduced the product loss that causes because of misoperation.
The present invention simplifies the anchor clamps manufacture difficulty, can take line cutting once shaped mode to process, and assembling is simple, easily arrives higher overall precision, has reduced the anchor clamps cost.
Description of drawings
Fig. 1: plated film clamping device stereographic map provided by the invention;
Fig. 2: plated film clamping device vertical view provided by the invention;
Fig. 3: plated film clamping device front view provided by the invention;
Fig. 4: auxiliary dress bar instrument stereographic map provided by the invention;
Fig. 5: auxiliary dress bar instrument vertical view provided by the invention;
Fig. 6: auxiliary dress bar instrument front view provided by the invention;
Fig. 7: plated film clamping device provided by the invention and auxiliary dress bar instrument cooperate synoptic diagram.
Among the figure:
100-plated film clamping device;
101-spring backing pin; 102-mounting block;
103-spring; 104-tensioning member;
105-coupling shaft;
200-auxiliary dress bar instrument;
201-pedestal; 202-left rail;
203-pull bar; 204-copper sheathing;
205-rotary handle; 206-the second screw;
207-base; 208-the first screw;
209-right guide rail; 210-steady brace;
211-axle latch; 212-glass block.
Embodiment
The invention will be further described below in conjunction with the drawings and specific embodiments, can be implemented so that those skilled in the art can better understand the present invention also, but illustrated embodiment is not as a limitation of the invention.
The invention provides a kind of semiconductor laser chip end face coating clamping device, this plated film clamping device 100 comprises spring backing pin 101, mounting block 102, spring 103, tensioning member 104 and coupling shaft 105 as Fig. 1, Fig. 2 and shown in Figure 3.
The two ends of described mounting block 102 are fixed with two coupling shafts 105 respectively, and pivot bush unit is in a side of two coupling shafts 105 respectively at the two ends of described tensioning member 104, and the tensioning member 104 after the socket can slide on two coupling shafts 105.Adopt spring 103 to connect between described mounting block 102 and the tensioning member 104, being preferably in the outside, two ends of mounting block 102, tensioning member 104 connection coupling shafts 105 adopts two springs 103 to connect respectively, and be provided with spring backing pin 101 between spring 103 and mounting block 102, the tensioning member 104, tie down spring 103 by spring backing pin 101, so just formed plated film clamping device 100.Plated film clamping device 100 is the center with coupling shaft 105, and its tensioning member 104 can slide along coupling shaft 105 front and back on coupling shaft 105, and the quantity of control filling bar-shaped semiconductor chip relies on spring 103 to produce the strength that clamps chip.
The present invention also provides a kind of cooperation plated film clamping device 100 employed auxiliary dress bar instruments 200, as Fig. 4, Fig. 5 and shown in Figure 6, comprise pedestal 201, left rail 202, pull bar 203, copper sheathing 204, rotary handle 205, second screw 206, base 207, first screw 208, right guide rail 209, steady brace 210, axle latch 211, glass block 212.Described second screw 206 adopts the M2 hexagon socket cap head screw, and described first screw 208 adopts the M3 hexagon socket cap head screw.
The back side of described pedestal 201 is connected with base 207 by first screw 208, and pedestal 201 places on the base 207.The two ends on described pedestal 201 surfaces are respectively arranged with left rail 202, right guide rail 209 by second screw 206 and steady brace 210, left rail 202, right guide rail 209 are parallel to each other, and vertically be connected with pull bar 203 between left rail 202, the right guide rail 209, and pull bar 203 is positioned at the middle part of left rail 202, right guide rail 209, the top of left rail 202, right guide rail 209 has projection, the projection of two side rails inwardly in opposite directions so that catch on tensioning member 104.Copper sheathing 204 is fixed in the box-shaped protruding part on the pedestal 201.Rotary handle 205 is connected on the pedestal 201 by copper sheathing 204.And the axle of described rotary handle 205 passes among copper sheathing 204, be connected with pull bar 203, axle is fixed on the axle of rotary handle 205 with latch 211, and the position is between copper sheathing 204 and the pull bar 203 and presses close to the place of copper sheathing 204, is used for limiting the position of rotary handle 205.By rotation rotary handle 205, drive pull bar 203 and move, and then drive the left rail 202 at pull bar two ends, 209 slips of right guide rail.The top of left rail 202, right guide rail 209 can be arranged with the two ends of the tensioning member 104 of plated film clamping device 100, as shown in Figure 5, fixing between the mounting block 102 of plated film clamping device 100 and the pedestal 201 simultaneously, for example can block motionless by the projection on catch or the pedestal 201, and then can be by the slip pulling tensioning member 104 of left and right rail, and then the distance between control mounting block 102 and the tensioning member 104, so that clamp semi-conductor chip.Have rectangular recess on the surface of pedestal 201, glass block 212 is put into this rectangular recess.The size of glass block 212 is consistent with rectangular recess, and thickness is than the big 0.5mm of the degree of depth of groove, and surfacing is smooth.During use, the upper surface of glass block 212 contacts with the lower surface of mounting block 102 with tensioning member 104, contacts with the end face of semi-conductor chip.Slick glass planar both had been convenient to tensioning member 104 and had been slided, and can not cause damage to the end face of semi-conductor chip again.
During use, as shown in Figure 7, plated film clamping device 100 is positioned on the auxiliary dress bar instrument 200.Before mounting block 102 placed raised points on the pedestal 201, with tensioning member 104 place left rail 202 and right guide rail 209 collude the folding place after, plated film clamping device 100 can be fixed.Rotate counterclockwise screw mandrel 205 then, mounting block in the plated film clamping device 100 102 and tensioning member 104 can be separated into 15mm.In the opening of mounting block 102 and tensioning member 104, arrange the stripe-geometry semiconductor laser chip of some amount, slowly clockwise rotate screw mandrel 205 then, spring 103 in the plated film clamping device 100 will shrink gradually, drive tensioning member 104 and bounce back automatically, until clamping central stripe-geometry semiconductor laser chip with fixing 102.Take off plated film clamping device 100 then, complete operation.
The project organization of clamp body provided by the invention is simply novel, is easy to clean and safeguard that can reach 3-5 work-ing life.The present invention takes the flexible mode that clamps of spring horizontal direction to clamp the stripe-geometry semiconductor laser chip, the spring shrinkage direction is limited by two coupling shafts that are parallel to each other 105, the moment direction is complete and keep the required direction of chip clamped condition always, and clamp bar is firm.The present invention, does not fall the bar situation and takes place at the running examination of coating equipment inside through repeatedly.
But the clamp bar quantity of the semiconductor laser chip of the clamp body clamping that the present invention can provide is many, is example with the stripe-geometry semiconductor laser chip of the length * wide * thick 20mm * 300um of being * 120um, and can assemble quantity is 15 ~ 70.And the present invention can adapt to different size stripe-geometry semiconductor laser chip, length requirement 8mm ~ 28mm.Width requirement 200um ~ 2000um.After finishing the dress bar, do not have in the 100 ° of angles in two end face tops of chip and block, can adapt to any type of coating equipment.Can once adorn bar, the two sides plated film need not repetition dismounting chip, reduces the damage to chip.
The present invention can also adjust the clamp dynamics by adjusting spring length, avoids dynamics to cross the macrolesion product, or the too small and tight product of the not enough folder of holding force of dynamics.
The present invention also takes special-purpose auxiliary dress bar instrument to come the non-productive operation personnel to adorn bar, operating method is simple, the general operation employee can learn to use in 15 minutes, can skillfully operate in 4 hours, require low to personnel's technical ability, improve working efficiency and quality, reduced the product loss that causes because of misoperation.
The present invention simplifies the anchor clamps manufacture difficulty, can take line cutting once shaped mode to process, and assembling is simple, easily arrives higher overall precision, has reduced the anchor clamps cost.
The above embodiment is the preferred embodiment that proves absolutely that the present invention lifts, and protection scope of the present invention is not limited thereto.Being equal to that those skilled in the art are done on basis of the present invention substitutes or conversion, all within protection scope of the present invention.Protection scope of the present invention is as the criterion with claims.
Claims (6)
1. semiconductor laser chip end face coating clamping device, it is characterized in that, comprise mounting block, the two ends of described mounting block are fixed with two coupling shafts respectively, described mounting block is connected with tensioning member by two coupling shafts, is connected with spring between described tensioning member and the mounting block.
2. semiconductor laser chip end face coating clamping device according to claim 1 is characterized in that, is connected with the spring backing pin between described spring and the mounting block, also is provided with the spring backing pin between described spring and the tensioning member.
3. semiconductor laser chip end face coating clamping device according to claim 2, it is characterized in that, also comprise auxiliary dress bar instrument, described auxiliary dress bar instrument comprises pedestal, described base-plates surface is provided with left rail and the right guide rail that is parallel to each other, and is connected with pull bar between left rail and the right guide rail, and described pull bar is connected with rotary handle, the top of described left rail and right guide rail has inside projection, colludes by projection and draws tensioning member.
4. semiconductor laser chip end face coating clamping device according to claim 3 is characterized in that, is connected with latch with axle by copper sheathing between described pull bar and the rotary handle.
5. semiconductor laser chip end face coating clamping device according to claim 4 is characterized in that described pedestal is arranged on the base.
6. semiconductor laser chip end face coating clamping device according to claim 5 is characterized in that having rectangular recess on the surface of described pedestal, is provided with glass block in this rectangular recess.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013101105684A CN103225068A (en) | 2013-04-01 | 2013-04-01 | Clamping fixture for film coating of end surfaces of semiconductor laser chips |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013101105684A CN103225068A (en) | 2013-04-01 | 2013-04-01 | Clamping fixture for film coating of end surfaces of semiconductor laser chips |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103225068A true CN103225068A (en) | 2013-07-31 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013101105684A Pending CN103225068A (en) | 2013-04-01 | 2013-04-01 | Clamping fixture for film coating of end surfaces of semiconductor laser chips |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104037617A (en) * | 2014-06-17 | 2014-09-10 | 中国科学院半导体研究所 | Coating film holder for blocking free coating film of laser device |
| CN105296951A (en) * | 2015-10-20 | 2016-02-03 | 中国科学院长春光学精密机械与物理研究所 | Adjustable-type optical coating fixture |
| CN105428779A (en) * | 2015-11-30 | 2016-03-23 | 上海宇航系统工程研究所 | Clamping and connection mechanism for membrane boundary |
| CN107132594A (en) * | 2017-04-28 | 2017-09-05 | 武汉锐晶激光芯片技术有限公司 | A kind of heap bar machines, its fixture and the heap bar methods using heap bar machines |
| CN111170008A (en) * | 2020-01-17 | 2020-05-19 | 佛山普瑞威尔科技有限公司 | Chip sorting and discharging device |
| CN111501042A (en) * | 2020-06-02 | 2020-08-07 | 海南师范大学 | Edge-emitting semiconductor laser chip cavity surface coating clamp |
| CN114045460A (en) * | 2021-10-27 | 2022-02-15 | 海南师范大学 | Medium-far infrared semiconductor laser cavity surface metal film coating clamp |
| CN115274541A (en) * | 2022-07-28 | 2022-11-01 | 陕西理工大学 | Clamping fixture for end face coating of semiconductor laser chip |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2411874Y (en) * | 2000-01-05 | 2000-12-27 | 胜利石油管理局孤东采油厂 | Crank pin puller of beam unit |
| CN202166674U (en) * | 2011-08-12 | 2012-03-14 | 秦皇岛开发区海纳电测仪器有限责任公司 | Locating clamping tray for mutual inductor |
-
2013
- 2013-04-01 CN CN2013101105684A patent/CN103225068A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2411874Y (en) * | 2000-01-05 | 2000-12-27 | 胜利石油管理局孤东采油厂 | Crank pin puller of beam unit |
| CN202166674U (en) * | 2011-08-12 | 2012-03-14 | 秦皇岛开发区海纳电测仪器有限责任公司 | Locating clamping tray for mutual inductor |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104037617A (en) * | 2014-06-17 | 2014-09-10 | 中国科学院半导体研究所 | Coating film holder for blocking free coating film of laser device |
| CN105296951A (en) * | 2015-10-20 | 2016-02-03 | 中国科学院长春光学精密机械与物理研究所 | Adjustable-type optical coating fixture |
| CN105428779A (en) * | 2015-11-30 | 2016-03-23 | 上海宇航系统工程研究所 | Clamping and connection mechanism for membrane boundary |
| CN105428779B (en) * | 2015-11-30 | 2018-04-06 | 上海宇航系统工程研究所 | A kind of membrane boundary clamping connection mechanism |
| CN107132594A (en) * | 2017-04-28 | 2017-09-05 | 武汉锐晶激光芯片技术有限公司 | A kind of heap bar machines, its fixture and the heap bar methods using heap bar machines |
| CN111170008A (en) * | 2020-01-17 | 2020-05-19 | 佛山普瑞威尔科技有限公司 | Chip sorting and discharging device |
| CN111170008B (en) * | 2020-01-17 | 2021-11-05 | 云道图(山东)智能技术有限公司 | Chip sorting and discharging device |
| CN111501042A (en) * | 2020-06-02 | 2020-08-07 | 海南师范大学 | Edge-emitting semiconductor laser chip cavity surface coating clamp |
| CN111501042B (en) * | 2020-06-02 | 2023-09-01 | 海南师范大学 | Edge-emitting semiconductor laser chip cavity surface coating clamp |
| CN114045460A (en) * | 2021-10-27 | 2022-02-15 | 海南师范大学 | Medium-far infrared semiconductor laser cavity surface metal film coating clamp |
| CN115274541A (en) * | 2022-07-28 | 2022-11-01 | 陕西理工大学 | Clamping fixture for end face coating of semiconductor laser chip |
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Application publication date: 20130731 |