CN103222191A - 宽带声耦合薄膜baw滤波器 - Google Patents

宽带声耦合薄膜baw滤波器 Download PDF

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Publication number
CN103222191A
CN103222191A CN2011800498577A CN201180049857A CN103222191A CN 103222191 A CN103222191 A CN 103222191A CN 2011800498577 A CN2011800498577 A CN 2011800498577A CN 201180049857 A CN201180049857 A CN 201180049857A CN 103222191 A CN103222191 A CN 103222191A
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China
Prior art keywords
filter
frequency
mode
electrode
filter according
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CN2011800498577A
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English (en)
Chinese (zh)
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约翰娜·麦陶斯
托马斯·彭萨拉
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VTT Technical Research Centre of Finland Ltd
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VTT Technical Research Centre of Finland Ltd
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Priority to CN201810521377.XA priority Critical patent/CN108988819A/zh
Publication of CN103222191A publication Critical patent/CN103222191A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/547—Notch filters, e.g. notch BAW or thin film resonator filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/564—Monolithic crystal filters implemented with thin-film techniques
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor
    • H03H9/568—Electric coupling means therefor consisting of a ladder configuration

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN2011800498577A 2010-10-14 2011-10-14 宽带声耦合薄膜baw滤波器 Pending CN103222191A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810521377.XA CN108988819A (zh) 2010-10-14 2011-10-14 宽带声耦合薄膜baw滤波器

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US39295510P 2010-10-14 2010-10-14
FI20106063A FI20106063A7 (fi) 2010-10-14 2010-10-14 Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin
FI20106063 2010-10-14
US61/392,955 2010-10-14
PCT/FI2011/050891 WO2012049372A1 (en) 2010-10-14 2011-10-14 Wide-band acoustically coupled thin-film baw filter

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201810521377.XA Division CN108988819A (zh) 2010-10-14 2011-10-14 宽带声耦合薄膜baw滤波器

Publications (1)

Publication Number Publication Date
CN103222191A true CN103222191A (zh) 2013-07-24

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Family Applications (2)

Application Number Title Priority Date Filing Date
CN2011800498577A Pending CN103222191A (zh) 2010-10-14 2011-10-14 宽带声耦合薄膜baw滤波器
CN201810521377.XA Pending CN108988819A (zh) 2010-10-14 2011-10-14 宽带声耦合薄膜baw滤波器

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Application Number Title Priority Date Filing Date
CN201810521377.XA Pending CN108988819A (zh) 2010-10-14 2011-10-14 宽带声耦合薄膜baw滤波器

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US (4) US9893712B2 (https=)
EP (1) EP2628246B1 (https=)
JP (1) JP5926735B2 (https=)
CN (2) CN103222191A (https=)
FI (1) FI20106063A7 (https=)
WO (1) WO2012049372A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110931922A (zh) * 2019-11-25 2020-03-27 武汉大学 一种基于压电双模态谐振器的双通带滤波器

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CN103929148B (zh) * 2013-01-11 2017-09-19 中兴通讯股份有限公司 一种低插损压电声波带通滤波器及实现方法
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Publication number Publication date
US10778186B2 (en) 2020-09-15
US20130278356A1 (en) 2013-10-24
CN108988819A (zh) 2018-12-11
US20210058066A1 (en) 2021-02-25
US9893712B2 (en) 2018-02-13
US20220407500A1 (en) 2022-12-22
EP2628246A1 (en) 2013-08-21
EP2628246B1 (en) 2023-05-10
JP2013539946A (ja) 2013-10-28
FI20106063L (fi) 2012-06-08
FI20106063A7 (fi) 2012-06-08
FI20106063A0 (fi) 2010-10-14
WO2012049372A1 (en) 2012-04-19
US12191843B2 (en) 2025-01-07
EP2628246A4 (en) 2014-06-18
JP5926735B2 (ja) 2016-05-25
US20180212589A1 (en) 2018-07-26
US11374551B2 (en) 2022-06-28

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