CN103215634A - Mono-crystalline furnace multifunctional crystal bar taking machine - Google Patents
Mono-crystalline furnace multifunctional crystal bar taking machine Download PDFInfo
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- CN103215634A CN103215634A CN2012100170982A CN201210017098A CN103215634A CN 103215634 A CN103215634 A CN 103215634A CN 2012100170982 A CN2012100170982 A CN 2012100170982A CN 201210017098 A CN201210017098 A CN 201210017098A CN 103215634 A CN103215634 A CN 103215634A
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- crystal bar
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Abstract
The invention belongs to the technical field of metal smelting machines, and especially relates to a mono-crystalline furnace multifunctional crystal bar taking machine. Crystal bar taking machine jaws which can clamp a crystal bar are fixedly arranged on a crystal bar taking body stand in an equal distance mode to clamp the crystal bar from a furnace body; the upper end of a seed crystal rope is connected with a hoisting device, and the lower end of the seed crystal rope is connected with a crystal bar; a detachable crystal bar taking machine hoisting frame is arranged on the crystal bar taking body stand, the front end of the detachable crystal bar taking machine hoisting frame is provided with an open ring for hooking a crucible taking mechanism, a quartz crucible containing a silicon material is put in a graphite crucible, and the graphite crucible is put in the crucible taking mechanism and is sent to or out of a thermal field; and the crucible taking mechanism has an overall frame structure, and the upper end of the crucible taking mechanism is provided with a triangular handle having an open hook. The completion of crystal bar taking, material containing graphite and quartz crucible installing, and graphite and quartz crucible taking after crystal bar dismounting processing ending is realized on the same mono-crystalline furnace multifunctional crystal bar taking machine, so the machine has a plurality of functions, and a problem of the large work strength for the quartz and graphite crucible taking is solved.
Description
Technical field:
The multi-functional crystal bar car of getting of single crystal growing furnace belongs to smelting mechanical ﹠ electrical technology field, the particularly multi-functional crystal bar car of getting of single crystal growing furnace.
Background technology:
Single crystal growing furnace is that polysilicon is converted into the indispensable equipment in the silicon single crystal technological process, and silicon single crystal is the basic material in photovoltaic generation and the semicon industry.Silicon single crystal is as the critical support material of advanced information society, is one of most important monocrystal material in the world at present, and it is not only the major function material of development computer and unicircuit, also is the major function material that photovoltaic generation utilizes sun power.It is as follows that single crystal growing furnace is got the effect of crystal bar car: silicon single-crystal draw finish after, by getting the crystal bar car, clamp crystal bar and take out, can reduce the manual work time; The single crystal growing furnace that uses is got the crystal bar car at present, function singleness, and structure is dumb, complicated operation, crystal bar takes out difficulty.
Summary of the invention:
The multi-functional crystal bar car goal of the invention of getting of single crystal growing furnace of the present invention is: solve the single crystal growing furnace that uses at present and get crystal bar car function singleness, be implemented in same single crystal growing furnace and get quartz crucible and the plumbago crucible of finishing the installation charge on the crystal bar car, the dismounting crystal bar takes out graphite and quartz crucible after drawing and finishing, and solution is quartzy, plumbago crucible takes out problems such as working strength is big.
Single crystal growing furnace of the present invention is multi-functional to be got the crystal bar car and is achieved in that and contains upper furnace body, seed crystal rope, crystal bar, get the catching of crystal bar car, silicon material, quartz crucible, plumbago crucible, also by get crystal bar car raising legs, the crucible unloading device is formed; But the branch set a distances such as crystal bar car catching of getting of clamping crystal bar are fixedly mounted on to get and are used for the crystal bar that clamping withdraws from upper furnace body in the stand of crystal bar vehicle main body; The seed crystal rope is that many thin tungsten filaments screw and form, and the upper end connects lifting gear, and the lower end connects crystal bar; Dismountable crystal bar car raising legs of getting is installed in and gets in the stand of crystal bar vehicle main body, dismountable crystal bar car raising legs front end construction opening suspension ring of getting are used to articulate the crucible unloading device, the quartz crucible that holds the silicon material is placed in the plumbago crucible, and plumbago crucible is placed on sends or withdraw from thermal field in the crucible unloading device; The crucible unloading device is whole closed-in construction, and the triangle bale handle that has the opening hook is installed in the upper end, and upper furnace body is the Water-cooling Welding fitting.
After crystal bar is shaped,, during the temperature that is cooled to take out,, by the seed crystal rope crystal bar is put into the relative position of getting the catching of crystal bar car then, by getting fixedly crystal bar of crystal bar car catching with angle of upper furnace body rotation at the upper furnace body internal cooling; Cut off being connected of seed crystal rope and crystal bar, promptly crystal bar can be taken out; By getting rotating mechanism rotation crystal bar to 90 degree of crystal bar car, crystal bar is placed on the frock car then; The crucible unloading device is enclosed within on the plumbago crucible, the hook of crucible unloading device is connected with the hook of getting crystal bar car raising legs, under the drive of getting crystal bar car raising legs, crucible unloading device, plumbago crucible, quartz crucible and excess silicon material can be taken out together.
The multi-functional beneficial effect of getting the crystal bar car of single crystal growing furnace of the present invention is: realized getting at same single crystal growing furnace and finished the quartz getting crystal bar, charge is installed and plumbago crucible, dismounting crystal bar on the crystal bar car and draw and finish back taking-up graphite and quartz crucible, the many usefulness of one car have solved quartzy plumbago crucible and have taken out the big problem of working strength.
Description of drawings:
Accompanying drawing 1 is the multi-functional crystal bar car clamping taking-up crystal bar synoptic diagram of getting of single crystal growing furnace.
Accompanying drawing 2 is that multi-functional the getting of single crystal growing furnace hung crucible unloading device synoptic diagram when the crystal bar car is installed graphite and quartz crucible.
Among the figure: body of heater 1, seed crystal rope 2, crystal bar 3, get crystal bar car catching 4, silicon material 7, quartz crucible 8, plumbago crucible 9, get crystal bar car raising legs 5, crucible unloading device 6.
Embodiment:
The multi-functional crystal bar car of getting of single crystal growing furnace of the present invention contains upper furnace body 1, seed crystal rope 2, crystal bar 3, gets crystal bar car catching 4, silicon material 7, quartz crucible 8, plumbago crucible 9, also by get crystal bar car raising legs 5, crucible unloading device 6 is formed; But crystal bar car catching 4 set a distances such as branch such as grade of getting of clamping crystal bar are fixedly mounted on to get and are used for the crystal bar 3 that clamping withdraws from upper furnace body 1 in the stand of crystal bar vehicle main body; Seed crystal rope 2 forms for many thin tungsten filaments screw, and the upper end connects lifting gear, and the lower end connects crystal bar 3; Dismountable crystal bar car raising legs 5 of getting is installed in and gets in the stand of crystal bar vehicle main body, dismountable crystal bar car raising legs 5 front end construction opening suspension ring of getting are used to articulate crucible unloading device 6, the quartz crucible 8 that holds silicon material 7 is placed in the plumbago crucible 9, and plumbago crucible 9 is placed in the crucible unloading device 6; Crucible unloading device 6 is whole closed-in construction, and the triangle bale handle that has the opening hook is installed in the upper end; Upper furnace body 1 is the Water-cooling Welding fitting.
Claims (3)
1. the multi-functional crystal bar car of getting of single crystal growing furnace, contain upper furnace body (1), seed crystal rope (2), crystal bar (3), get crystal bar car catching (4), silicon material (7), quartz crucible (8), plumbago crucible (9), it is characterized in that: also by get crystal bar car raising legs (5), crucible unloading device (6) is formed; But crystal bar car catching (4) the five equilibrium set a distance of getting of clamping crystal bar is fixedly mounted on to get and is used for the crystal bar (3) that clamping withdraws from upper furnace body (1) in the stand of crystal bar vehicle main body; Seed crystal rope (2) forms for many thin tungsten filaments screw, and the upper end connects lifting gear, and the lower end connects crystal bar (3); Dismountable crystal bar car raising legs (5) of getting is installed in and gets in the stand of crystal bar vehicle main body, dismountable crystal bar car raising legs (5) front end construction opening suspension ring of getting are used to articulate crucible unloading device (6), the quartz crucible (8) that holds silicon material (7) is placed in the plumbago crucible (9), and plumbago crucible (9) is placed in the crucible unloading device (6) and sends or withdraw from thermal field to.
2. according to the described line butt of claim 1 machine inlet wire outgoing line device, it is characterized in that: crucible unloading device (6) is whole closed-in construction, and the triangle bale handle that has the opening hook is installed in the upper end.
3. according to the described line butt of claim 1 machine inlet wire outgoing line device, it is characterized in that: upper furnace body (1) is the Water-cooling Welding fitting.
Priority Applications (1)
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CN2012100170982A CN103215634A (en) | 2012-01-19 | 2012-01-19 | Mono-crystalline furnace multifunctional crystal bar taking machine |
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CN2012100170982A CN103215634A (en) | 2012-01-19 | 2012-01-19 | Mono-crystalline furnace multifunctional crystal bar taking machine |
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Citations (10)
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JPH09227281A (en) * | 1996-02-28 | 1997-09-02 | Sumitomo Sitix Corp | Device for pulling up single crystal |
JP2006298669A (en) * | 2005-04-18 | 2006-11-02 | Daiichi Kiden:Kk | Apparatus for producing silicon crystal |
CN201326028Y (en) * | 2008-12-25 | 2009-10-14 | 锦州日鑫硅材料有限公司 | Bar fetching car of single crystal furnace |
US20090279996A1 (en) * | 2008-04-30 | 2009-11-12 | Japan Super Quartz Corporation | Crucible lift device and method for taking-out crucible |
CN201459282U (en) * | 2009-04-16 | 2010-05-12 | 上海汉虹精密机械有限公司 | Device for assembling and disassembling crystal bar |
CN101824655A (en) * | 2010-04-29 | 2010-09-08 | 杭州富通半导体设备科技有限公司 | Door-opening type stick-withdrawing vehicle of single crystal furnace |
CN101892516A (en) * | 2010-06-25 | 2010-11-24 | 上海汉虹精密机械有限公司 | Cantilever type crucible hoisting and transporting mechanism |
CN201695109U (en) * | 2010-04-29 | 2011-01-05 | 杭州富通半导体设备科技有限公司 | Opening door single-crystal furnace crystal bar take-out vehicle |
CN102206853A (en) * | 2011-05-20 | 2011-10-05 | 浙江星宇能源科技有限公司 | Method for taking monocrystal bar out of monocrystal furnace |
CN202450185U (en) * | 2012-01-19 | 2012-09-26 | 宁夏日晶新能源装备股份有限公司 | Multifunctional crystal bar taking vehicle for single crystal furnace |
-
2012
- 2012-01-19 CN CN2012100170982A patent/CN103215634A/en active Pending
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09227281A (en) * | 1996-02-28 | 1997-09-02 | Sumitomo Sitix Corp | Device for pulling up single crystal |
JP2006298669A (en) * | 2005-04-18 | 2006-11-02 | Daiichi Kiden:Kk | Apparatus for producing silicon crystal |
US20090279996A1 (en) * | 2008-04-30 | 2009-11-12 | Japan Super Quartz Corporation | Crucible lift device and method for taking-out crucible |
CN201326028Y (en) * | 2008-12-25 | 2009-10-14 | 锦州日鑫硅材料有限公司 | Bar fetching car of single crystal furnace |
CN201459282U (en) * | 2009-04-16 | 2010-05-12 | 上海汉虹精密机械有限公司 | Device for assembling and disassembling crystal bar |
CN101824655A (en) * | 2010-04-29 | 2010-09-08 | 杭州富通半导体设备科技有限公司 | Door-opening type stick-withdrawing vehicle of single crystal furnace |
CN201695109U (en) * | 2010-04-29 | 2011-01-05 | 杭州富通半导体设备科技有限公司 | Opening door single-crystal furnace crystal bar take-out vehicle |
CN101892516A (en) * | 2010-06-25 | 2010-11-24 | 上海汉虹精密机械有限公司 | Cantilever type crucible hoisting and transporting mechanism |
CN102206853A (en) * | 2011-05-20 | 2011-10-05 | 浙江星宇能源科技有限公司 | Method for taking monocrystal bar out of monocrystal furnace |
CN202450185U (en) * | 2012-01-19 | 2012-09-26 | 宁夏日晶新能源装备股份有限公司 | Multifunctional crystal bar taking vehicle for single crystal furnace |
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Application publication date: 20130724 |