CN103182826B - 基板贴合方法 - Google Patents

基板贴合方法 Download PDF

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Publication number
CN103182826B
CN103182826B CN201210169597.3A CN201210169597A CN103182826B CN 103182826 B CN103182826 B CN 103182826B CN 201210169597 A CN201210169597 A CN 201210169597A CN 103182826 B CN103182826 B CN 103182826B
Authority
CN
China
Prior art keywords
substrate
substrate processing
unit
transport
laminating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201210169597.3A
Other languages
English (en)
Chinese (zh)
Other versions
CN103182826A (zh
Inventor
黄载锡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Hongyun fidelity Intellectual Property Consulting Co.,Ltd.
LIG ADP CO Ltd
Original Assignee
LIG ADP CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LIG ADP CO Ltd filed Critical LIG ADP CO Ltd
Priority to CN201610040130.7A priority Critical patent/CN105563993B/zh
Priority to CN201610039169.7A priority patent/CN105711228B/zh
Publication of CN103182826A publication Critical patent/CN103182826A/zh
Application granted granted Critical
Publication of CN103182826B publication Critical patent/CN103182826B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/10—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
    • B32B37/1018—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure using only vacuum
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/10—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2309/00—Parameters for the laminating or treatment process; Apparatus details
    • B32B2309/60—In a particular environment
    • B32B2309/68—Vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00—Electrical equipment
    • B32B2457/20—Displays, e.g. liquid crystal displays, plasma displays
    • B32B2457/202—LCD, i.e. liquid crystal displays
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Fluid Mechanics (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
CN201210169597.3A 2011-12-30 2012-05-28 基板贴合方法 Expired - Fee Related CN103182826B (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201610040130.7A CN105563993B (zh) 2011-12-30 2012-05-28 基板贴合装置
CN201610039169.7A CN105711228B (zh) 2011-12-30 2012-05-28 基板贴合方法及贴合单元

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2011-0147940 2011-12-30
KR1020110147940A KR20130078810A (ko) 2011-12-30 2011-12-30 기판합착방법

Related Child Applications (2)

Application Number Title Priority Date Filing Date
CN201610040130.7A Division CN105563993B (zh) 2011-12-30 2012-05-28 基板贴合装置
CN201610039169.7A Division CN105711228B (zh) 2011-12-30 2012-05-28 基板贴合方法及贴合单元

Publications (2)

Publication Number Publication Date
CN103182826A CN103182826A (zh) 2013-07-03
CN103182826B true CN103182826B (zh) 2016-03-30

Family

ID=48674390

Family Applications (3)

Application Number Title Priority Date Filing Date
CN201610039169.7A Expired - Fee Related CN105711228B (zh) 2011-12-30 2012-05-28 基板贴合方法及贴合单元
CN201610040130.7A Expired - Fee Related CN105563993B (zh) 2011-12-30 2012-05-28 基板贴合装置
CN201210169597.3A Expired - Fee Related CN103182826B (zh) 2011-12-30 2012-05-28 基板贴合方法

Family Applications Before (2)

Application Number Title Priority Date Filing Date
CN201610039169.7A Expired - Fee Related CN105711228B (zh) 2011-12-30 2012-05-28 基板贴合方法及贴合单元
CN201610040130.7A Expired - Fee Related CN105563993B (zh) 2011-12-30 2012-05-28 基板贴合装置

Country Status (3)

Country Link
KR (1) KR20130078810A (ko)
CN (3) CN105711228B (ko)
TW (1) TW201327626A (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109830617A (zh) * 2019-01-14 2019-05-31 深圳市华星光电半导体显示技术有限公司 贴合设备
CN110596921A (zh) * 2019-09-04 2019-12-20 深圳市联得自动化装备股份有限公司 液晶显示屏检测装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11326857A (ja) * 1998-05-13 1999-11-26 Toshiba Corp 基板の組立て装置及び組立て方法
JP3202718B2 (ja) * 1999-02-23 2001-08-27 鹿児島日本電気株式会社 表示装置製造用治具及びそれを用いた表示装置の製造方法
KR100510718B1 (ko) * 2002-02-04 2005-08-30 엘지.필립스 엘시디 주식회사 액정표시소자의 제조 장치
KR100884995B1 (ko) * 2002-06-12 2009-02-20 엘지디스플레이 주식회사 액정표시장치의 공정라인 및 이를 이용한 제조방법
JP4245138B2 (ja) * 2003-03-11 2009-03-25 富士通株式会社 基板貼合せ装置及び基板貼合せ方法
CN2916690Y (zh) * 2004-04-28 2007-06-27 鸿富锦精密工业（深圳）有限公司 基板贴合装置
KR101285442B1 (ko) * 2005-08-09 2013-07-12 아사히 가라스 가부시키가이샤 박판 유리 적층체 및 박판 유리 적층체를 이용한 표시장치의 제조 방법
US8691043B2 (en) * 2005-08-30 2014-04-08 Rockwell Collins, Inc. Substrate lamination system and method
CN1996550A (zh) * 2005-12-28 2007-07-11 上海广电Nec液晶显示器有限公司 基板贴合方法
JP2009282385A (ja) * 2008-05-23 2009-12-03 Nitto Denko Corp 光学表示装置の製造方法
KR101670098B1 (ko) * 2008-10-23 2016-10-27 아사히 가라스 가부시키가이샤 유리 기판 적층 장치 및 적층 유리 기판의 제조 방법
WO2011048979A1 (ja) * 2009-10-20 2011-04-28 旭硝子株式会社 ガラス積層体及びその製造方法、並びに表示パネルの製造方法及びその製造方法により得られる表示パネル
CN102173238A (zh) * 2010-12-29 2011-09-07 友达光电股份有限公司 真空压印装置、真空压合装置及层状光学组件的制造方法
KR101888158B1 (ko) * 2011-12-02 2018-08-14 엘지디스플레이 주식회사 평판표시소자의 박형 유리기판의 합착라인 및 합착방법

Also Published As

Publication number Publication date
CN103182826A (zh) 2013-07-03
CN105711228A (zh) 2016-06-29
CN105711228B (zh) 2018-10-16
TW201327626A (zh) 2013-07-01
CN105563993A (zh) 2016-05-11
CN105563993B (zh) 2018-06-05
KR20130078810A (ko) 2013-07-10

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Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C41 Transfer of patent application or patent right or utility model
TA01 Transfer of patent application right

Effective date of registration: 20160218

Address after: 224000 Jiangsu Province, Yancheng City Jiangsu south of Yancheng City District New River street, 9 century avenue, building 103, Gary Garden 1 room 104

Applicant after: LIG ADP Co.,Ltd.

Address before: 102400, Beijing, Changyang Town, Fangshan District Biguiyuan 3 commercial building 5, three -07

Applicant before: Beijing Hongyun fidelity Intellectual Property Consulting Co.,Ltd.

Effective date of registration: 20160218

Address after: 102400, Beijing, Changyang Town, Fangshan District Biguiyuan 3 commercial building 5, three -07

Applicant after: Beijing Hongyun fidelity Intellectual Property Consulting Co.,Ltd.

Address before: Gyeonggi Do, South Korea

Applicant before: LIGADP Co.,Ltd.

C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160330

Termination date: 20190528