CN103172256A - Annealing device - Google Patents

Annealing device Download PDF

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Publication number
CN103172256A
CN103172256A CN2012105518817A CN201210551881A CN103172256A CN 103172256 A CN103172256 A CN 103172256A CN 2012105518817 A CN2012105518817 A CN 2012105518817A CN 201210551881 A CN201210551881 A CN 201210551881A CN 103172256 A CN103172256 A CN 103172256A
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pneumatic
cooling
board unit
entrance port
annealing device
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CN2012105518817A
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CN103172256B (en
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梁相熙
李基雄
金圣进
安珍荣
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AP Cells Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67115—Apparatus for thermal treatment mainly by radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Toxicology (AREA)
  • Optics & Photonics (AREA)
  • Recrystallisation Techniques (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

The invention provides an annealing device. The annealing device includes a bottom plate unit having an entrance port for a laser beam to pass through, a sealing unit fixed to the bottom plate unit to expand by means of pneumatic pressure, a top plate unit arranged on the bottom plate unit and is closely contacted with the sealing unit. The sealing unit can expand or retract by means of the pneumatic pressure to prevent the sealing unit from clamping on the top plate unit, so that the bottom plate unit can stably separate from the top plate unit.

Description

Annealing device
Technical field
The present invention relates to a kind of annealing device (annealing apparatus), and in particular, relate to a kind of sealing unit therein inflatable or shrink annealing device with sealing top board unit and bottom board unit by Pneumatic pressure.
Background technology
Usually, the rectangle glass with long limit and minor face is used as flat-panel display device, for example the substrate of organic light emitting diode display.
This glass substrate bears and comprises that cleaning, laser annealing, exposure and etched various manufacture craft are to create the substrate for flat-panel display device.
Anneal by annealing device.The upper surface that annealing device makes laser beam see through cavity is emitted to substrate so that this substrate junction crystallization.
At this moment, when laser beam is launched, be attached to the lower surface of transparent window (transparent window) from the particle of substrate generation.
Correlation technique of the present invention discloses in for the Korean Patent (announcements on March 28th, 2003) of the publication number 2003-0024995A of " Organnic electroluminescent device and the method for producing this device " at exercise question.
In the conventional annealing device, the sealing unit that is used for sealing is attached to top board unit and bottom board unit, therefore is difficult to separately top board unit and bottom board unit.
Therefore, need a kind of annealing device that overcomes this problem.
Summary of the invention
The present invention is used for solving this problem of this area, and one aspect of the present invention is to provide a kind of annealing device, in this annealing device, sealing unit expand by Pneumatic pressure or shrink keep the sealing between top board unit and bottom board unit and can not be stuck in the there.
According to a further aspect in the invention, annealing device comprises: bottom board unit, and described bottom board unit has the entrance port that laser beam sees through; Sealing unit, described sealing unit are fixed to described bottom board unit to expand by Pneumatic pressure; And the top board unit, described top board unit be placed on described bottom board unit and with described sealing unit close contact.
Described bottom board unit can comprise: base plate, and described backplane is at the upside of cavity and have described entrance port; And the sealing groove part, described sealing groove partly is formed at the upside place of described base plate and is adjacent to arrange with described entrance port.
Described bottom board unit can further comprise: cooling unit, described cooling unit are formed on described base plate and with described entrance port and are communicated with, thereby make cooling gas be supplied to the entrance port and discharge from described entrance port.
Described cooling unit can comprise: cooling tube, described cooling tube pass described base plate and are communicated with described entrance port; Cooling tank, described cooling tank are connected to described cooling tube and store described cooling gas; And cooling valve, described cooling valve is provided for described cooling tube and passes the amount of the described cooling gas of described cooling tube with adjusting.
Described cooling tube in the vertical direction is set to zigzag arrange (zigzag arrangement).
Described sealing groove part can comprise: insertion groove, described insertion groove are formed on described base plate; And mounting groove, described mounting groove is formed at the central part office of the lower surface of described insertion groove.
Described sealing unit can comprise: pneumatic seal, described pneumatic seal are inserted into described insertion groove and have the pneumatic compartment that is defined in described pneumatic seal; Connection sealing element, described connection sealing element protrudes downwards from the lower surface of described pneumatic seal; Positioning seals, described positioning seals laterally protrudes and is placed on described mounting groove from described connection sealing element; Inlet tube, described inlet tube pass described positioning seals and described connection sealing element and are communicated with described pneumatic compartment, thereby make pneumatic gas be supplied to described pneumatic compartment and discharge from described pneumatic compartment by described inlet tube; Pneumatic tank, described pneumatic tank are connected to described inlet tube and store described pneumatic gas; And pneumavalve, described pneumavalve is provided for described inlet tube and passes the amount of the described pneumatic gas of described inlet tube with adjusting.
Described sealing unit can comprise: retaining plate, described retaining plate are placed on the lower surface of described insertion groove and are arranged in the place, top of described positioning seals; And stationary member, described stationary member tightens in described insertion groove with fixing described retaining plate.
In annealing device according to the present invention, the described sealing unit that is provided to described bottom board unit expands by Pneumatic pressure or shrinks, to be attached to described top board unit or to discharge from described top board unit.Therefore, prevented that described sealing unit is stuck on described top board unit, thereby allowed described bottom board unit easily to separate with described top board unit.
In annealing device according to the present invention, described sealing unit expands and is attached to described top board unit with (uniformly) equably, and extraneous infringement can be avoided in the inside of described entrance port thus.
In annealing device according to the present invention, described sealing unit tightens in described sealing groove part, therefore can prevent that described sealing unit from departing from ideal position.
In annealing device according to the present invention, described cooling unit cooling entrance port be heated part, thereby prevent that the entrance port is overheated.
In annealing device according to the present invention, described cooling tube in the vertical direction is set to zigzag and arranges, thereby prevents that steam from passing through described entrance port and discharging.
Description of drawings
From the description of the embodiment that provides below in conjunction with respective drawings, above and other of the present invention aspect, feature and advantage will be more obvious, wherein:
Fig. 1 is the schematic diagram of annealing device according to an embodiment of the invention, and wherein the transparent window of top board unit covers the entrance port of bottom board unit;
Fig. 2 is the schematic diagram of annealing device according to an embodiment of the invention, and wherein sealing unit expands;
Fig. 3 is the schematic diagram of annealing device according to an embodiment of the invention, and wherein the transparent window of top board unit does not cover the entrance port of bottom board unit; And
Fig. 4 is the schematic diagram of annealing device according to an embodiment of the invention, and wherein sealing unit shrinks.
Embodiment
Below, exemplary embodiment of the present invention is described with reference to the accompanying drawings.It should be noted that: accompanying drawing is not accurate size and just to the convenience of describing and clear, the thickness of lines or the size of assembly may be exaggerated.The singulative that uses in this article " one (a) ", " one (an) " and " described (the) " also can comprise plural form, unless other clear restrictions are arranged.
In addition, term used herein defines on the basis of considering function of the present invention and can change according to user or operator's custom or purpose.Therefore, in should be according to the present invention, the content of all detailed descriptions obtains defining of term.
Fig. 1 is the schematic diagram of annealing device according to an embodiment of the invention, and wherein the transparent window of top board unit covers the entrance port of bottom board unit; Fig. 2 is the schematic diagram of annealing device according to an embodiment of the invention, and wherein sealing unit expands; Fig. 3 is the schematic diagram of annealing device according to an embodiment of the invention, and wherein the transparent window of top board unit does not cover the entrance port of bottom board unit; And Fig. 4 is the schematic diagram of annealing device according to an embodiment of the invention, and wherein sealing unit shrinks.
Referring to figs. 1 through Fig. 4, comprise according to the annealing device 1 of an embodiment: bottom board unit 10, sealing unit 20 and top board unit 30.
Bottom board unit 10 is formed with the entrance port 19 that laser beam can see through, and top board unit 30 is placed on base plate 10.
Sealing unit 20 is fixed to bottom board unit 10.Sealing unit 20 expands with the space between seal base unit 10 and top board unit 30 by Pneumatic pressure.
According to embodiments of the invention, bottom board unit 10 comprises base plate 11 and sealing groove part 12.
Base plate 11 covers the upside of the cavity that wherein is placed with substrate.The entrance port 19 that laser beam sees through is passed base plate 11 and is formed.Entrance port 19 is that the rectangular opening shape is so that laser beam can see through entrance port 19 emissions.
Sealing groove part 12 is formed on the upper surface of base plate 11.Sealing groove part 12 is arranged near entrance port 19.For example, sealing groove part 12 is positioned on the outside direction of entrance port 19, so that 12 circulations (circulated) of sealing slot part.
According to embodiments of the invention, bottom board unit 10 further comprises cooling unit 13.Cooling unit 13 is formed on base plate 11 and with entrance port 19 and is communicated with, thereby makes cooling gas be supplied to entrance port 19 and 19 discharges from the entrance port.
According to embodiments of the invention, sealing groove part 12 comprises insertion groove 121 and mounting groove 122.
Insertion groove 121 is formed on the upper surface of base plate 11, and mounting groove 122 is formed at the central part office of the lower surface of insertion groove 121.
Therefore, the distance from the upper surface of base plate 11 to insertion groove 121 is than the distance from the upper surface of base plate 11 to mounting groove 122.
According to the application's embodiment, sealing unit 20 comprises: pneumatic seal 21, connection sealing element 22, positioning seals 23, inlet tube 24, pneumatic tank 25 and pneumavalve 26.
Pneumatic seal 21 is inserted into insertion groove 121.Define pneumatic compartment 29 in pneumatic seal 21.
Connection sealing element 22 protrudes downwards from the lower surface of pneumatic seal 21, and positioning seals 23 laterally protrudes and is placed on mounting groove 122 from connection sealing element 22.
At this moment, the basal surface of the lower surface of positioning seals 23 and mounting groove 122 can keep bonded to each other by tackiness agent.
Inlet tube 24 passes positioning seals 23 and connection sealing element 22 and is communicated with pneumatic compartment 29.Inlet tube 24 passes base plate 11 and is connected to the pneumatic tank 25 that stores pneumatic gas.
Pneumavalve 26 is provided for inlet tube 24 and passes the amount of the pneumatic gas of inlet tube 24 with adjusting.
Therefore, when pneumatic tank 25 provided pneumatic gas to inlet tube 24 and inlet tube 24 to open by pneumavalve 26, pneumatic gas passes inlet tube 24 and pneumatic seal 21 is supplied to pneumatic compartment 29, thereby pneumatic compartment 29 expands (referring to Fig. 2).
Because pneumatic seal 21 expands, pneumatic seal 21 is attached to the lower surface of the inwall of insertion groove 121 of base plate 11 and top board unit 30 to be encapsulated into loophole 19.
Simultaneously, when pneumatic tank 25 suction pneumatic gas, pneumatic gas is discharged from pneumatic compartment 29 by inlet tube 24, thereby pneumatic seal 21 is shunk (referring to Fig. 4).
Because pneumatic seal is shunk, attached being released between pneumatic seal 21 and top board unit 30.
Utilize due to pneumatic seal 21 compartments laser beam annealing operation program and repeatedly expand and shrink, so prevented that pneumatic seal 21 is stuck on the lower surface of top board unit 30.
According to embodiments of the invention, sealing unit 20 further comprises retaining plate 27 and stationary member 28.
Retaining plate 27 is placed on the lower surface of insertion groove 121.The upper surface of retaining plate 27 partial coverage positioning seals 23.
Stationary member 28 tightens in insertion groove 121 so that retaining plate 27 is fixed to insertion groove 121.
Therefore, owing to blocking the upper end of positioning seals 23 by retaining plate 27, described positioning seals 23 keeps being arranged in mounting groove 122.
According to embodiments of the invention, cooling unit 13 comprises cooling tube 131, cooling tank 132 and cooling valve 133.
Cooling tube 131 passes base plate 11 and is communicated with entrance port 19.Cooling tank 132 is connected to cooling tube 131 and stores cooling gas.For example, described cooling gas comprises nitrogen.
Cooling valve 133 is provided for cooling tube 131, open or closed cooling tube 131 to be adjusted in cooling tube 131 amount of the cooling gas that flows.
Cooling tube 131 in the vertical directions are set to zigzag and arrange.When cooling tube 131 is set to zigzag when arranging in this way, can prevent that due to temperature head the steam that produces is discharged in entrance port 19 in cooling tube 131.
According to embodiments of the invention, top board unit 30 comprises the transparent window 39 that laser beam sees through, and the track 38 on the upper surface that is formed at base plate 11 moves.
Now, will the operation of annealing device according to an embodiment of the invention be described.
When the substrate that will stand to anneal was contained in cavity, base plate 11 was placed on the top of cavity.Base plate 11 is formed with entrance port 19, and laser beam sees through this entrance port 19 emissions.
Sealing groove part 12 is formed on the upper surface of base plate 11 with around entrance port 19.The mounting groove 122 that sealing groove part 12 comprises insertion groove 121 and is formed at the central spot of insertion groove 121.
The pneumatic seal 21 that defines pneumatic compartment 29 in it is inserted in insertion groove 121, and the positioning seals 23 that extends from pneumatic seal 21 is inserted into mounting groove 122.
Inlet tube 24 passes positioning seals 23 and the connection sealing element 22 that is connected positioning seals 23 and pneumatic seal 21, to be communicated with pneumatic compartment 29, and pump or be inhaled into pneumatic tank 25 from pneumatic tank 25 along with pneumatic gas, pneumatic seal 21 expands or shrinks.
At this moment, being arranged on pneumavalve 26 on inlet tube 24 regulates and enters inlet tube 24 or from the amount of the pneumatic gas of inlet tube 24 suctions.
Cooling tube 131 passes base plate 11 being communicated with entrance port 19, and pumps in the cooling tank 132 that is connected to cooling tube 131 along with cooling gas or cooling tank 132 suctions from being connected to cooling tube 131, and cooling gas injects entrance port 19 or 19 discharges from the entrance port.
Top board unit 30 is placed on base plate 11 and along track 38 and moves.Top board unit 30 is with transparent window 39, and laser beam can see through transparent window 39 emissions.
Then, thereby when moving to bottom board unit 11, top board unit 30 make transparent window 39 be arranged in the vertical line (vertical line) of entrance port 19 for annealing process when upper (referring to Fig. 1), be provided to the pneumatic compartment 29 of pneumatic seal 21 from the pneumatic gas of pneumatic tank 25 supplies, make thus pneumatic seal 21 expansions (referring to Fig. 2).
In this way, when pneumatic seal 21 expanded and be attached to the lower surface of top board unit 30, entrance port 19 was closed, thereby can prevent that impurity is introduced into entrance port 19 at During Annealing.
Here, when laser beam heats was passed through in entrance port 19, cooling gas was supplied to entrance port 19 with the part that is heated of cooling entrance port 19 through cooling tube 132 at During Annealing.
By complete when cooling, the cooling gas that is distributed in entrance port 19 is discharged by cooling tube 131 when entrance port 19.
Simultaneously, when the impurity that produces from substrate by the laser beam that passes entrance port 19 emissions is attached to transparent window 39, reduced the transparency of transparent window.
Therefore, when stopping annealing, discharge the pneumatic gas in pneumatic compartment 29, so that pneumatic seal 21 shrinks, be released in attached (referring to Fig. 4) between pneumatic seal 21 and top board unit 30.
In this way, when attached being released between pneumatic seal 21 and top board unit 30, top board unit 30 moves with clean transparent window 39 and entrance port 19 (referring to Fig. 3) along track 38.
Although disclose some embodiment, it will be appreciated that, these embodiment that provide only are used for explaining, and in the situation that without prejudice to the spirit and scope of the present invention, can make various improvement, change and substitute.Scope of the present invention should limit by appended claim and its equivalent.

Claims (8)

1. annealing device comprises:
Bottom board unit, described bottom board unit has the entrance port that laser beam sees through;
Sealing unit, described sealing unit are fixed to described bottom board unit to expand by Pneumatic pressure; And
Top board unit, described top board unit be placed on described bottom board unit and with described sealing unit close contact.
2. annealing device according to claim 1, wherein, described bottom board unit comprises:
Base plate, described backplane is at the upside of cavity and have described entrance port; And
Sealing groove part, described sealing groove partly are formed at the upside place of described base plate and are adjacent to arrange with described entrance port.
3. annealing device according to claim 2, wherein, described bottom board unit further comprises:
Cooling unit, described cooling unit are formed on described base plate and with described entrance port and are communicated with, thereby make cooling gas be supplied to the entrance port and discharge from described entrance port.
4. annealing device according to claim 3, wherein, described cooling unit comprises:
Cooling tube, described cooling tube pass described base plate and are communicated with described entrance port;
Cooling tank, described cooling tank are connected to described cooling tube and store described cooling gas; And
Cooling valve, described cooling valve is provided for described cooling tube and passes the amount of the described cooling gas of described cooling tube with adjusting.
5. annealing device according to claim 4, wherein, described cooling tube in the vertical direction is set to zigzag and arranges.
6. annealing device according to claim 2, wherein, described sealing groove partly comprises:
Insertion groove, described insertion groove are formed on described base plate; And
Mounting groove, described mounting groove are formed at the central part office of the lower surface of described insertion groove.
7. annealing device according to claim 6, wherein, described sealing unit comprises:
Pneumatic seal, described pneumatic seal are inserted into described insertion groove and have the pneumatic compartment that is defined in described pneumatic seal;
Connection sealing element, described connection sealing element protrudes downwards from the lower surface of described pneumatic seal;
Positioning seals, described positioning seals laterally protrudes and is placed on described mounting groove from described connection sealing element;
Inlet tube, described inlet tube pass described positioning seals and described connection sealing element and are communicated with described pneumatic compartment, thereby make pneumatic gas be supplied to described pneumatic compartment and discharge from described pneumatic compartment by described inlet tube;
Pneumatic tank, described pneumatic tank are connected to described inlet tube and store described pneumatic gas; And
Pneumavalve, described pneumavalve are provided for described inlet tube and pass the amount of the described pneumatic gas of described inlet tube with adjusting.
8. annealing device according to claim 7, wherein, described sealing unit comprises:
Retaining plate, described retaining plate are placed on the lower surface of described insertion groove and are arranged in the place, top of described positioning seals; And
Stationary member, described stationary member tighten in described insertion groove with fixing described retaining plate.
CN201210551881.7A 2011-12-20 2012-12-18 Annealing device Active CN103172256B (en)

Applications Claiming Priority (2)

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KR10-2011-0138696 2011-12-20
KR1020110138696A KR101288992B1 (en) 2011-12-20 2011-12-20 Annealing device

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CN103172256A true CN103172256A (en) 2013-06-26
CN103172256B CN103172256B (en) 2015-05-13

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108878317A (en) * 2018-06-07 2018-11-23 云谷（固安）科技有限公司 A kind of laser anneal device and method

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US5976312A (en) * 1996-05-15 1999-11-02 Asm Japan K.K. Semiconductor processing apparatus
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KR20110003159A (en) * 2009-07-03 2011-01-11 에이피시스템 주식회사 Laser annealing apparatus having oxygen partial degassing module
CN102077322A (en) * 2008-06-30 2011-05-25 株式会社Ihi Laser annealing device

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Publication number Priority date Publication date Assignee Title
JPH0639270A (en) * 1992-02-12 1994-02-15 Balzers Ag Vacuum processing device
US5976312A (en) * 1996-05-15 1999-11-02 Asm Japan K.K. Semiconductor processing apparatus
JPH11111640A (en) * 1997-09-30 1999-04-23 Sanyo Electric Co Ltd Laser annealing apparatus
JP2003014125A (en) * 2001-06-29 2003-01-15 Fuji Kiko:Kk Opening part sealing structure of processing apparatus containing solution
CN102077322A (en) * 2008-06-30 2011-05-25 株式会社Ihi Laser annealing device
KR20110003159A (en) * 2009-07-03 2011-01-11 에이피시스템 주식회사 Laser annealing apparatus having oxygen partial degassing module

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108878317A (en) * 2018-06-07 2018-11-23 云谷（固安）科技有限公司 A kind of laser anneal device and method
CN108878317B (en) * 2018-06-07 2020-12-11 云谷（固安）科技有限公司 Laser annealing device and method

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Publication number Publication date
TWI462884B (en) 2014-12-01
TW201341323A (en) 2013-10-16
CN103172256B (en) 2015-05-13
KR20130071285A (en) 2013-06-28
KR101288992B1 (en) 2013-08-16
JP5555306B2 (en) 2014-07-23
JP2013138200A (en) 2013-07-11

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