JP2013138200A - Annealing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an annealing device which maintains the sealability without adhering and fastening a sealant for sealing to an upper plate part and a lower plate part.SOLUTION: An annealing device 1 includes: a lower plate part 10 where an incident port is formed so that a laser beam passes therethrough; a sealing part installed at the lower plate part fixing thereto and expanded by air pressure; and an upper plate part 30 placed on the lower plate part and adhering to the sealing part. In the annealing device, the sealing part is expanded or contracted with the air pressure. The expansion or contraction of the sealing part prevents the sealing part and the upper plate part from fastening to each other and smoothly separates the lower plate part from the upper plate part.

Description

  The present invention relates to an annealing device, and more particularly, to an annealing device in which a ceiling is expanded or contracted by air pressure to seal an upper plate portion and a lower plate portion.

  Generally, a rectangular glass substrate having a long side and a short side is used as a substrate of a flat panel display device such as an organic light emitting diode display (Organic Light Emitting Diode Display).

  Such a glass substrate is manufactured on a substrate of a flat panel display device through various processes such as a cleaning process, a laser annealing process, an exposure process, and an etching process.

  The annealing process is performed by an annealing apparatus. Such an annealing apparatus crystallizes the substrate by laser light incident from the upper surface of the chamber.

  At this time, the particles protruding from the substrate by the irradiation of the laser light adhere to the bottom surface of the transparent window.

  On the other hand, the background art of the present invention is disclosed in Patent Document 1 (published 2003.03.28, title of invention: organic electroluminescence device and method for producing the same).

Korea Application Publication No. 2003-0024995 Specification

  The conventional annealing apparatus has a problem that it is difficult to separate the upper plate portion from the lower plate portion because the sealing used for sealing is closely attached to the upper plate portion and the lower plate portion.

  Therefore, there is a need to improve this.

  The present invention has been made in order to improve the above-described problems. When the sealing is expanded or contracted by air pressure, the sealing is not fixed between the upper plate portion and the lower plate portion, and the sealing is performed. An object of the present invention is to provide an annealing device that maintains the sexiness.

  In order to achieve the above object, the present invention provides a lower plate portion in which an entrance is formed so that laser light can pass; a sealing portion fixedly installed on the lower plate portion and expanded by air pressure; And an upper plate portion placed on the lower plate portion and in close contact with the sealing portion.

  The lower plate part includes a lower plate disposed on the upper side of the chamber and formed with the incident port; and a sealing groove formed on the upper side of the lower plate and disposed near the incident port. Features.

  The lower plate part may further include a cooling part formed on the lower plate and communicating with the incident port and through which cooling gas enters and exits.

  The cooling unit includes a cooling pipe that penetrates the lower plate and communicates with the incident port; a cooling tank that is connected to the cooling pipe and stores a cooling gas; and a cooling pipe that is installed in the cooling pipe. A cooling valve for adjusting the amount of entry and exit.

  The cooling pipe is formed in a zigzag shape in the vertical direction.

  The sealing groove part includes an insertion groove part formed in the lower plate; and an installation groove part formed in the center of the bottom surface of the insertion groove part.

  The sealing part is inserted into the insertion groove part to form a pneumatic chamber; a pneumatic sealing that extends from a bottom surface of the pneumatic sealing and protrudes downward; and projects laterally from the coupling ceiling. A mounting ceiling formed and mounted in the installation groove; an inlet / outlet pipe penetrating through the mounting ceiling and the connection ceiling and communicating with the pneumatic chamber and allowing an air pressure gas to enter / exit; connected to the inlet / outlet pipe; A pneumatic tank in which pneumatic gas is stored; and a pneumatic valve that is installed in the inlet / outlet pipe and adjusts the amount of the pneumatic gas in and out.

  The sealing part further includes a fixing plate placed on the bottom surface of the insertion groove part and disposed on the upper side of the installation sealing part; and a fixing body screwed to the insertion groove part and fixing the fixing plate. It is characterized by.

  The annealing device according to the present invention is such that the sealing portion installed in the lower plate portion is expanded or contracted by air pressure, and is brought into close contact with the upper plate portion or released from the close contact state with the upper plate portion. Is not fixed to the upper plate portion, so that the separation between the lower plate portion and the upper plate portion is easy.

  The annealing device according to the present invention has an effect that the inside and outside of the entrance can be shielded because the sealing portion is uniformly adhered to the upper plate portion by expansion.

  The annealing device according to the present invention has an effect of preventing the separation of the sealing part by screwing the sealing part to the sealing groove part.

  The annealing apparatus according to the present invention has an effect of preventing the incident port from being overheated by cooling the heated portion of the incident port.

  The annealing apparatus according to the present invention has an effect of preventing moisture from being discharged to the incident port by forming the cooling pipe in a zigzag shape in the vertical direction.

It is a figure which shows roughly the state which the transparent window of the upper board part covered the entrance port of the lower board part in the annealing apparatus which concerns on one Example of this invention. It is a figure which shows roughly the expansion state of the sealing part in FIG. It is a figure which shows roughly the state which the transparent window of the upper board part does not cover the entrance of a lower board part in the annealing apparatus which concerns on one Example of this invention. It is a figure which shows schematically the contraction state of the sealing part in FIG.

  Hereinafter, embodiments of an annealing apparatus according to the present invention will be described with reference to the accompanying drawings. In such a process, the thickness of each line and the size of each component shown in the drawings may be exaggerated for the sake of clarity and convenience. Moreover, the term mentioned later is a term defined in consideration of the function in this invention, and this may change with the intention or practice of a user and an operator. Accordingly, such terms must be defined based on the content throughout this specification.

  FIG. 1 is a diagram schematically illustrating a state in which a transparent window of an upper plate portion covers an entrance of a lower plate portion in an annealing apparatus according to an embodiment of the present invention, and FIG. 2 is a diagram of a sealing portion in FIG. FIG. 3 is a diagram schematically showing an expanded state, and FIG. 3 is a diagram schematically showing a state where the transparent window of the upper plate portion does not cover the entrance of the lower plate portion in the annealing apparatus according to one embodiment of the present invention. FIG. 4 is a diagram schematically showing a contracted state of the sealing portion in FIG.

  1 to 4, the annealing apparatus 1 according to an embodiment of the present invention includes a lower plate part 10, a sealing part 20, and an upper plate part 30.

  An incident port 19 is formed in the lower plate portion 10 so that the laser beam passes, and the upper plate portion 30 is placed on the upper side of the lower plate portion 10.

  The sealing part 20 is fixedly installed on the lower plate part 10. Such a sealing part 20 is expanded by air pressure to seal a space between the lower plate part 10 and the upper plate part 30.

  The lower plate portion 10 according to the embodiment of the present invention includes a lower plate 11 and a sealing groove portion 12.

  The lower plate 11 covers the upper end of the chamber on which the substrate is placed. The lower plate 11 is formed with an incident port 19 through which laser light passes. At this time, the incident port 19 is formed in a rectangular hole shape so that a laser beam is projected.

  The sealing groove 12 is formed on the upper side surface of the lower plate 11. Such a sealing groove portion 12 is arranged so as to be close to the incident port 19. For example, the sealing groove portion 12 is circulated while being positioned on the outer side of the incident port 19.

  The lower plate part 10 according to the embodiment of the present invention further includes a cooling part 13. Such a cooling unit 13 is formed in the lower plate 11 and communicates with the incident port 19 to allow the cooling gas to enter and exit.

  The sealing groove 12 according to an embodiment of the present invention includes an insertion groove 121 and an installation groove 122.

  The insertion groove 121 is formed on the upper surface of the lower plate 11, and the installation groove 122 is formed at the center of the bottom surface of the insertion groove 121.

  Therefore, the distance from the upper surface of the lower plate 11 to the installation groove 122 is longer than the distance from the upper surface of the lower plate 11 to the insertion groove 121.

  The sealing unit 20 according to an embodiment of the present invention includes a pneumatic sealing 21, a connection sealing 22, a mounting sealing 23, an inlet / outlet pipe 24, a pneumatic tank 25 and a pneumatic valve 26.

  The pneumatic sealing 21 is inserted into the insertion groove 121. An air pressure chamber 29 is formed inside the air pressure sealing 21.

  The connection ceiling 22 extends from the bottom surface of the pneumatic sealing 21 and protrudes downward. The mounting ceiling 23 protrudes laterally from the connection ceiling 22 and is placed in the installation groove 122.

  At this time, the bottom surface of the mounting ceiling 23 and the bottom surface of the installation groove portion 122 can be maintained in a state of being joined by the adhesive substance.

  The inlet / outlet pipe 24 passes through the mounting ceiling 23 and the connection ceiling 22 and communicates with the pneumatic chamber 29. Such an inlet / outlet pipe 24 is connected to an air pressure tank 25 in which air pressure gas is stored while penetrating the lower plate 11.

  The inlet / outlet pipe 24 is provided with an air pressure valve 26 that adjusts the amount of air pressure gas in and out.

  Therefore, when the pneumatic tank 25 supplies pneumatic gas to the inlet / outlet pipe 24 and the inlet / outlet pipe 24 is opened by the pneumatic valve 26, the pneumatic gas is stored in the pneumatic chamber 29 via the inlet / outlet pipe 24, The pneumatic sealing 21 is expanded (see FIG. 2).

  When the pneumatic sealing 21 is expanded, the pneumatic sealing 21 is in close contact with the inner wall of the insertion groove 121 of the lower plate 11 and the bottom of the upper plate 30 to seal the incident port 19.

  On the other hand, when the pneumatic tank 25 sucks in the pneumatic gas, the pneumatic gas stored in the pneumatic chamber 29 is discharged through the inlet / outlet pipe 24, and the pneumatic sealing 21 is contracted (see FIG. 4).

  When the pneumatic sealing 21 is contracted, the contact state between the pneumatic sealing 21 and the upper plate portion 30 is released.

  The pneumatic sealing 21 is expanded during the annealing operation using laser light, and is repeatedly contracted when the annealing operation is completed, so that the pneumatic sealing 21 is adhered and fixed to the bottom surface of the upper plate portion 30. Can be prevented.

  The sealing unit 20 according to the embodiment of the present invention further includes a fixing plate 27 and a fixing body 28.

  The fixing plate 27 is placed on the bottom surface of the insertion groove 121. Such a fixing plate 27 covers a part of the upper side surface of the mounting ceiling 23.

  The fixed body 28 is screwed to the insertion groove 121 and fixes the fixing plate 27 to the insertion groove 121.

  Accordingly, since the upper end portion of the mounting ceiling 23 is locked to the fixing plate 27, the mounting ceiling 23 maintains the state where it is installed in the installation groove portion 122.

  The cooling unit 13 according to an embodiment of the present invention includes a cooling pipe 131, a cooling tank 132, and a cooling valve 133.

  The cooling pipe 131 passes through the lower plate 11 and communicates with the incident port 19. The cooling tank 132 is connected to the cooling pipe 131, and a cooling gas is stored in the cooling tank 132. For example, nitrogen is used as the cooling gas.

  The cooling valve 133 is installed in the cooling pipe 131, and adjusts the amount of cooling gas in and out by opening and closing the cooling pipe 131.

  At this time, the cooling pipe 131 is formed in a zigzag shape in the vertical direction. Thus, when the cooling pipe 131 is formed in a zigzag shape, it is possible to suppress the moisture formed in the cooling pipe 131 due to the temperature difference from being discharged to the incident port 19 through the cooling pipe 131.

  On the other hand, the upper plate portion 30 according to an embodiment of the present invention includes a transparent window 39 for transmitting laser light, and moves along a rail 38 formed on the upper side surface of the lower plate 11.

  Hereinafter, the operation of the annealing apparatus according to an embodiment of the present invention having the above-described structure will be described.

  A substrate for performing an annealing process is installed in the chamber, and a lower plate 11 is disposed in the upper part of the chamber. The lower plate 11 is formed with an incident port 19 for entering laser light.

  On the upper side surface of the lower plate 11, a sealing groove portion 12 surrounding the incident port 19 is formed. The sealing groove portion 12 includes an insertion groove portion 121 and an installation groove portion 122 that is recessed at the center point of the insertion groove portion 121.

  A pneumatic sealing 21 in which a pneumatic chamber 29 is formed is inserted into the insertion groove 121, and a mounting ceiling 23 extended from the pneumatic sealing 21 is inserted into the installation groove 122.

  The inlet / outlet pipe 24 communicates with the pneumatic chamber 29 through the mounting ceiling 23 and the connection ceiling 22 that connects the mounting ceiling 23 and the pneumatic sealing 21, and the pneumatic gas is pumped or sucked in the pneumatic tank 25. As a result, the pneumatic sealing 21 is expanded or contracted.

  At this time, the pneumatic valve 26 attached to the inlet / outlet pipe 24 adjusts the inlet / outlet amount of the pneumatic gas discharged or sucked through the inlet / outlet pipe 24.

  The cooling pipe 131 passes through the lower plate 11 and communicates with the incident port 19, and the cooling gas is pumped or sucked in the cooling tank 132 connected to the cooling pipe 131, whereby the cooling gas is introduced into the incident port 19. The cooling gas injected or distributed at the entrance 19 is discharged.

  On the upper side of the lower plate 11, the upper plate portion 30 that moves along the rail 38 is placed. A transparent window 39 is formed on the upper plate portion 30 to transmit the laser light.

  In the above state, when the upper plate portion 30 moves to the lower plate 11 so that the transparent window 39 is disposed on the vertical line of the entrance 19 for the annealing process (see FIG. 1), the pneumatic tank 25 The supplied pneumatic gas is injected into the pneumatic chamber 29 of the pneumatic ceiling 21, and the pneumatic ceiling 21 is expanded (see FIG. 2).

  Thus, when the pneumatic sealing 21 is brought into close contact with the bottom surface of the upper plate portion 30 due to expansion, the entrance 19 portion is sealed, and foreign matter inflow during the annealing process is blocked.

  At this time, when the incident port 19 is heated by the laser beam during the annealing process, the cooling fluid flows into the incident port 19 through the cooling pipe 131 and cools the heated portion.

  When the cooling of the incident port 19 is completed, the cooling gas distributed in the incident port 19 is discharged through the cooling pipe 131.

  On the other hand, when the foreign matter protruding from the substrate by the laser light incident through the incident port 19 adheres to the transparent window 39, the transmittance of the transparent window 39 is lowered.

  Therefore, when the annealing process is interrupted, the air pressure gas in the air pressure chamber 29 is discharged and the air pressure sealing 21 is contracted, so that the close contact between the air pressure sealing 21 and the upper plate portion 30 is released. (See FIG. 4).

  When the close contact between the pneumatic sealing 21 and the upper plate portion 30 is released in this way, the upper plate portion 30 is moved along the rail 38 to clean the transparent window 39 and the entrance 19 (see FIG. 3). ).

  Although the present invention has been described with reference to the embodiments shown in the drawings, this is merely illustrative and various modifications and equivalents will occur to those skilled in the art. It will be appreciated that the following embodiments are possible.

  Accordingly, the true technical protection scope of the present invention should be determined by the following claims.

10: Lower plate part, 11: Lower plate, 12: Sealing groove part, 13: Cooling part, 20: Sealing part, 21: Pneumatic sealing, 22: Connection sealing, 23: Mounting ceiling, 24: In / out pipe, 25: Pneumatic tank, 26: Pneumatic valve, 27: Fixed plate, 28: Fixed body, 29: Pneumatic chamber, 30: Upper plate, 38: Rail, 39: Transparent window

Claims (8)

A lower plate part in which an entrance is formed so that a laser beam can pass;
An annealing apparatus comprising: a sealing portion fixedly installed on the lower plate portion and inflated by air pressure; and an upper plate portion placed on the lower plate portion and in close contact with the sealing portion. The lower plate portion is
The apparatus according to claim 1, further comprising: a lower plate disposed on the upper side of the chamber and formed with the entrance; and a sealing groove formed on the upper side of the lower plate and disposed near the entrance. Annealing apparatus as described. The lower plate portion is
The annealing apparatus according to claim 2, further comprising a cooling unit formed in the lower plate and communicating with the incident port and through which cooling gas enters and exits. The cooling part is
A cooling pipe passing through the lower plate and communicating with the entrance;
4. The cooling tank according to claim 3, further comprising: a cooling tank that is connected to the cooling pipe and stores a cooling gas; and a cooling valve that is installed in the cooling pipe and adjusts an amount of the cooling gas in and out. Annealing equipment.   The annealing apparatus according to claim 4, wherein the cooling pipe is formed in a zigzag shape in a vertical direction. The sealing groove is
The annealing apparatus according to claim 2, further comprising: an insertion groove formed in the lower plate; and an installation groove formed in the center of the bottom surface of the insertion groove. The sealing part is
Pneumatic sealing inserted into the insertion groove and forming a pneumatic chamber;
A connecting sealing extended from the bottom of the pneumatic sealing and projecting downward;
A mounting ceiling that protrudes laterally from the connection ceiling and is mounted in the installation groove;
An inlet / outlet pipe penetrating through the mounting ceiling and the connection ceiling, and communicating with the pneumatic chamber, through which pneumatic gas enters and exits;
A pneumatic tank connected to the inlet / outlet pipe for storing a pneumatic gas; and a pneumatic valve installed in the inlet / outlet pipe for adjusting an amount of the pneumatic gas flowing in / out. Annealing apparatus described in 1. The sealing part is
A fixing plate placed on the bottom surface of the insertion groove and disposed above the installation ceiling; and a fixing body screwed to the insertion groove and fixing the fixing plate. The annealing apparatus according to claim 7.

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