CN103163714A - Microscope machine platform structure - Google Patents
Microscope machine platform structure Download PDFInfo
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- CN103163714A CN103163714A CN2011104112110A CN201110411211A CN103163714A CN 103163714 A CN103163714 A CN 103163714A CN 2011104112110 A CN2011104112110 A CN 2011104112110A CN 201110411211 A CN201110411211 A CN 201110411211A CN 103163714 A CN103163714 A CN 103163714A
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- wafer box
- microscope
- wafer
- bench structure
- work top
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Abstract
A microscope machine platform structure is used for placing wafers. A plurality of wafers are contained in a wafer box. The microscope machine platform structure comprises a work platform surface which can move up and down and a drive motor which can control the work platform surface to move up and down. A clamping groove for clamping the wafer box and a sensor which is used for sensing whether the wafer box is mounted on the work platform surface or not are arranged on the work platform surface. The microscope machine platform structure further comprises a fixing lock for locking the wafer box and the fixing lock rotate with the rotation of the drive motor. Due to the fact that the fixing lock is arranged to lock the wafer box, the fact that someone takes the wafer box from the work platform surface by mistake in the working process of a microscope can be prevented, and the fact that the wafers are damaged and other safety hidden dangers occur can be avoided.
Description
Technical field
The present invention relates to wafer and make the field, relate in particular to a kind of semiconductor detection microscope bench structure.
Background technology
Microscope is a kind of optical instrument that is made of one or more groups lens combination, is that the mankind enter atom-age sign.Microscope is for the instrument that amplifies small items, can be seen by people's naked eyes after making small items amplify.Microscope is classified according to micro-principle can be divided into optical microscope and electron microscope.
Optical microscope all is comprised of opticator, illumination section and mechanical part usually.Opticator is the most key undoubtedly, and it is comprised of eyepiece and object lens.The kind of optical microscope is a lot of at present, mainly contains bright field microscope (ordinary optical microscope), dark-field microscope, fluorescent microscope, phase microscope, laser scanning confocal microscope, polarizing microscope, Differential interference contrast microscope, inverted microscope.
Electron microscope has the basic structural feature similar to optical microscope, but it has amplification and the resolving power to object more much higher than optical microscope, and it as a kind of new light source, makes the object imaging with electron stream.The kind of electron microscope is a lot of at present, mainly contains transmission electron microscope, scanning electron microscope, analytic electron microscope, ultrahigh voltage electron microscope etc.
A kind of microscope of the prior art is in order to detect wafer.Microscope is provided with the microscope board and in order to the mechanical arm of grasping silicon wafer.Some wafers are housed in a wafer box, and this wafer box is fixed on the microscope board.The microscope bench structure comprises the work top that can move up and down and drives the CD-ROM drive motor that work top moves up and down.Work top is provided with in order to the draw-in groove of setting circle film magazine and induction wafer box whether be installed to inductor on work top.
In prior art, the principle of work of microscope board is: when proper testing, when the wafer box that installs wafer correctly holds in draw-in groove, inductor is sensed wafer box and correctly is installed on work top, can send induced signal, indicating equipment can normal running, at this moment, CD-ROM drive motor is rotated in the forward, and controls work top and descends; If the wafer box mistake is installed on work top, inductor can send alerting signal, represents that this moment equipment cannot normal running; After being completed, the CD-ROM drive motor reverse rotation is controlled work top and is risen.
But the inductor of this kind structure works when only wafer box being installed, and in the microscope course of work, if the people is for taking wafer box away, inductor can not send any alerting signal, and this problem is the defective of microscopical software.Wafer box is removed on the aftertable face does not have wafer box, operating personnel can relay a new wafer box after finding, but, wafer in wafer box is just being held by mechanical arm and is being detected before, after this wafer detects, mechanical arm can be put back to it in wafer box, but be a new wafer box this moment, this wafer box does not have vacancy to place for the wafer of last wafer box, after mechanical arm is placed by force, the imagination that wafer collides mutually can occur, not only damage wafer, and had certain potential safety hazard.
Therefore, for above-mentioned technical matters, be necessary to provide a kind of structure improved microscope bench structure that has, to overcome defects.
Summary of the invention
In view of this, the invention provides a kind of microscope bench structure, it is provided with the fixedly lock in order to the snap close wafer box, and this microscope bench structure has solved the problems of the prior art, can prevent microscope in the course of the work, have people's mistake that wafer box is taken from work top.
For achieving the above object, the invention provides following technical scheme:
A kind of microscope bench structure in order to placing wafer, some wafers are housed in a wafer box, the CD-ROM drive motor that described microscope bench structure comprises work top and controls described work top motion, described work top is provided with to hold the draw-in groove of described wafer box and responds to described wafer box whether be installed to inductor on described work top, described microscope bench structure also comprises pinning the fixedly lock of described wafer box, and described fixedly lock moves with the rotation of described CD-ROM drive motor.
Preferably, in above-mentioned microscope bench structure, described fixedly lock comprises two.
Preferably, in above-mentioned microscope bench structure, described microscope bench structure is provided with mounting groove, and described fixedly lock is arranged in described mounting groove and can moves in this mounting groove.
Preferably, in above-mentioned microscope bench structure, described fixedly lock is included in the installation portion of motion in described mounting groove and the limiting section that extends and move in order to limit described wafer box from described installation portion bending.
Preferably, in above-mentioned microscope bench structure, described wafer is installed between rear in wafer box and this wafer box and has the gap, and described limiting section is positioned at the gap when pinning wafer box.
Preferably, in above-mentioned microscope bench structure, when described CD-ROM drive motor was rotated in the forward, described work top descended, and described fixedly lock moves and pin described wafer box, and this wafer box can not move; During described CD-ROM drive motor reverse rotation, described work top rises, and described fixedly lock moves and unclamps described wafer box, and this wafer box can move.
Preferably, in above-mentioned microscope bench structure, described microscope bench structure is provided with the regulations and parameters that connects described fixedly lock and described CD-ROM drive motor.
Compared with prior art, the invention has the beneficial effects as follows:
(1) pin wafer box by arranging to fix, can prevent that microscope from having people's mistake that wafer box is taken from work top in the course of the work, can avoid damaging wafer and other potential safety hazards occurring.
(2) fixing lock directly is connected with CD-ROM drive motor by lever, and CD-ROM drive motor can be controlled fixing lock motion when controlling the work top motion, and a power source drives two part movement, has reduced the use part, and is simple in structure, saved cost.
When (3) fixing lock pinned wafer box, the limiting section of fixing lock was that in gap between wafer and wafer box, the planform of wafer box itself need not change, and takes full advantage of efficient resource and reaches goal of the invention, and is simple in structure, saved cost.
Description of drawings
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, the below will do to introduce simply to the accompanying drawing of required use in embodiment or description of the Prior Art, apparently, accompanying drawing relevant of the present invention in the following describes is only some embodiments of the present invention, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the schematic diagram of a kind of microscope bench structure in prior art;
Fig. 2 is the schematic diagram of microscope bench structure of the present invention;
Fig. 3 is the schematic diagram of another angle of microscope bench structure of the present invention.
1,1 ' work top; 2 CD-ROM drive motor; 3,3 ' draw-in groove; 4,4 ' inductor; 5 fixing locks; 51 installation portions; 52 limiting sections; 6 mounting grooves; 7 levers
Embodiment
See also shown in Figure 1ly, a kind of microscope bench structure of the prior art is in order to detect wafer.Microscope is provided with the mechanical arm in order to grasping silicon wafer.Some wafers are housed in a wafer box.This wafer box is fixed on the microscope bench structure.The microscope bench structure comprises the work top 1 that can move up and down ' and CD-ROM drive motor of driving work top 1 ' move up and down.Draw-in groove 3 in order to the setting circle film magazine of work top 1 ' be provided with ' and the induction wafer box whether be installed to work top 1 ' on inductor 4 '.
In prior art, the principle of work of microscope bench structure is: when proper testing, when the wafer box that installs wafer correctly holds draw-in groove 3 ' middle, inductor 4 ' sense wafer box correctly be installed to work top 1 ' on, can send induced signal, indicating equipment can normal running, at this moment, CD-ROM drive motor is rotated in the forward, and controls work top 1 ' decline; If the wafer box mistake be installed to work top 1 ' on, inductor 4 ' can send alerting signal represents that this moment equipment cannot normal running; After being completed, work top 1 ' rising is controlled in the CD-ROM drive motor reverse rotation.
But, the inductor 4 of this kind structure ' work when only wafer box being installed, in the microscope course of work, if the people is for taking wafer box away, inductor can not send any alerting signal, and this problem is the defective of microscopical software.Wafer box be removed aftertable face 1 ' on there is no wafer box, operating personnel can relay a new wafer box after finding, but, wafer in wafer box is just being held by mechanical arm and is being detected before, after this wafer detects, mechanical arm can be put back to it in wafer box, but be a new wafer box this moment, this wafer box does not have vacancy to place for the wafer of last wafer box, after mechanical arm is placed by force, the imagination that wafer collides mutually can occur, not only damage wafer, and had certain potential safety hazard.
The invention discloses a kind of microscope bench structure, it is provided with the fixedly lock in order to the snap close wafer box, and this microscope bench structure has solved the problems of the prior art, can prevent microscope in the course of the work, has people's mistake that wafer box is taken from work top.
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is described in detail, obviously, described embodiment is only the present invention's part embodiment, rather than whole embodiment.Based on the embodiment in the present invention, the every other embodiment that those of ordinary skills obtain under the prerequisite of not making creative work belongs to the scope of protection of the invention.
See also Fig. 2 and shown in Figure 3, the microscope bench structure is in order to detect wafer.Microscope is provided with the mechanical arm in order to grasping silicon wafer.Some wafers are housed in a wafer box.This wafer box is fixed on the microscope bench structure.The microscope bench structure comprises the work top 1 that can move up and down and drives the CD-ROM drive motor 2 that work top 1 moves up and down.Work top 1 is provided with in order to the draw-in groove 3 of setting circle film magazine and induction wafer box whether be installed to inductor 4 on work top.When the wafer box that installs wafer correctly holds in draw-in groove 3, inductor 4 is sensed wafer box and correctly has been installed on work top 1, can send induced signal, indicating equipment can normal running, if the wafer box mistake is installed on work top 1, inductor 4 can send alerting signal, represents that equipment cannot normal running at this moment.
See also shown in Figure 2, in order to solve microscope bench structure of the prior art in the microscope course of work, if the people is for taking wafer box away, inductor 4 can not send the problem of any alerting signal, avoid damaging wafer and other potential safety hazards occur, the microscope bench structure of the embodiment of the present invention also is provided with to pin the fixedly lock 5 of wafer box, by being set, fixing lock 5 pins wafer box, can prevent that microscope from having people's mistake that wafer box is taken from work top 1 in the course of the work, can avoid damaging wafer and other potential safety hazards occurring.
Please continue to consult shown in Figure 2, fixing lock 5 comprises two.The microscope bench structure is provided with mounting groove 6, and fixing lock 5 is arranged on also can be in the interior motion of mounting groove 6 in mounting groove 6.Fixing lock 5 is included in the installation portion 51 of mounting groove 6 interior motions and the limiting section 52 that extends and move in order to limit wafer box from the installation portion bending.Wafer is installed between rear in wafer box and wafer box and has the gap, and limiting section 52 is positioned at the gap when pinning wafer box.So arrange, when fixing lock 5 pinned wafer box, the limiting section 52 of fixing lock 5 was that in gap between wafer and wafer box, the planform of wafer box itself need not change, and takes full advantage of efficient resource and reaches goal of the invention, and is simple in structure, saved cost.
During the work of the microscope bench structure of the embodiment of the present invention, CD-ROM drive motor 2 is rotated in the forward, and controls work top 1 and descends, and control fixing lock 5 and move, and makes fixing lock 5 pin wafer boxes, and wafer box can not move; During CD-ROM drive motor 2 reverse rotation, control work top 1 and rise, and control fixing lock 5 and move, make fixing lock 5 unclamp wafer box, wafer box can move.Simple to operate, convenient, can effectively avoid artificial mistake to take wafer box.
See also shown in Figure 3ly, fixing lock 5 is connected with CD-ROM drive motor 2 by lever 7 and with the rotation campaign of CD-ROM drive motor 2.So arrange, CD-ROM drive motor 2 can be controlled fixing lock 5 and move when control work top 1 moves up and down, and a power source drives two part movement, has reduced the use part, and is simple in structure, saved cost.
The present invention seeks to come the snap close wafer box by having added two fixing locks 5, and control moving forward and backward of fixing lock 5 by CD-ROM drive motor 2, move forward and backward to reach the purpose of pinning or unclamping wafer box by fixing lock 5.This CD-ROM drive motor 2 is arranged on the bottom of work top 1.
The principle of work of the microscope bench structure of the embodiment of the present invention is: when proper testing, when the wafer box that installs wafer correctly holds in draw-in groove 3, inductor 4 is sensed wafer box and correctly has been installed on work top, can send induced signal, and indicating equipment can normal running, at this moment, CD-ROM drive motor 2 is rotated in the forward, and controls work top 1 and descends, and control fixing lock 5 and move, make fixing lock 5 pin wafer box, wafer box can not move; When the wafer box mistake is installed on work top 1, inductor 4 can send alerting signal, represents that this moment equipment cannot normal running; In the equipment normal course of operation, when someone attempted to take wafer box from work top 1, the limiting section 52 on fixing lock 5 prevented the operator to take wafer box away, can effectively avoid wafer box arbitrarily to be moved, and avoids producing potential safety hazard; When being completed, during CD-ROM drive motor 2 reverse rotation, control work top 1 and rise, and control fixing lock 5 and move, make fixing lock 5 unclamp wafer box, wafer box can move.
Although fixedly lock construction is also arranged in prior art, but the fixedly lock that occurs in prior art is to use complicated software control, cost is high, the microscope bench structure of the embodiment of the present invention, fix lock 5 and connect CD-ROM drive motor 2 and fixing 5 the lever 7 of locking through increasing on work top 1, the defective of the fixing lock of software control can be solved, and potential safety hazard can be reduced.
The microscope that the microscope bench structure of the embodiment of the present invention relates to is OLYMPUS MX61 microscope.Fixedly lock is to use on OLYMPUS MX61 microscope.OLYMPUS MX61 microscope is used for semiconductor devices is detected.OLYMPUS MX61 microscope can be tackled the multiple observational technique of observing Fluirescence observation from the bright field, and when switching object lens, brightness aperture interlock can automatically adjust.These functions have realized quick comfortable inspection environment.
OLYMPUS MX61 microscope has following advantage:
1. large-scale objective table carries, and can be used for the 400*300mm crystal liquid substrate, and the 300mm wafer checks (MX61L) comprehensively;
2. adopt the transmitted light condenser of high NA, image is sharper keen;
3. many kinds of view modes, multiple lighting system, multiple accessories is to satisfy the different application requirement;
4. transmission and indirect illumination can use simultaneously, greatly improve the crystal liquid substrate observing effect.
Compared with prior art, the beneficial effect of the microscope bench structure of the embodiment of the present invention is:
(1) pin wafer box by arranging to fix, can prevent that microscope from having people's mistake that wafer box is taken from work top in the course of the work, can avoid damaging wafer and other potential safety hazards occurring.
(2) fixing lock directly is connected with CD-ROM drive motor by lever, and CD-ROM drive motor can be controlled fixing lock motion when controlling the work top motion, and a power source drives two part movement, has reduced the use part, and is simple in structure, saved cost.
When (3) fixing lock pinned wafer box, the limiting section of fixing lock was that in gap between wafer and wafer box, the planform of wafer box itself need not change, and takes full advantage of efficient resource and reaches goal of the invention, and is simple in structure, saved cost.
To those skilled in the art, obviously the invention is not restricted to the details of above-mentioned one exemplary embodiment, and in the situation that do not deviate from spirit of the present invention or essential characteristic, can realize the present invention with other concrete form.Therefore, no matter from which point, all should regard embodiment as exemplary, and be nonrestrictive, scope of the present invention is limited by claims rather than above-mentioned explanation, therefore is intended to include in the present invention dropping on the implication that is equal to important document of claim and all changes in scope.Any Reference numeral in claim should be considered as limit related claim.
In addition, be to be understood that, although this instructions is described according to embodiment, but be not that each embodiment only comprises an independently technical scheme, this narrating mode of instructions is only for clarity sake, those skilled in the art should make instructions as a whole, and the technical scheme in each embodiment also can through appropriate combination, form other embodiments that it will be appreciated by those skilled in the art that.
Claims (7)
1. microscope bench structure in order to placing wafer, some wafers are housed in a wafer box, the CD-ROM drive motor that described microscope bench structure comprises work top and controls described work top motion, described work top is provided with to hold the draw-in groove of described wafer box and responds to described wafer box whether be installed to inductor on described work top, it is characterized in that: described microscope bench structure also comprises pinning the fixedly lock of described wafer box, and described fixedly lock moves with the rotation of described CD-ROM drive motor.
2. microscope bench structure according to claim 1, it is characterized in that: described fixedly lock comprises two.
3. microscope bench structure according to claim 1, it is characterized in that: described microscope bench structure is provided with mounting groove, and described fixedly lock is arranged in described mounting groove and can moves in this mounting groove.
4. microscope bench structure according to claim 3, is characterized in that: the limiting section that described fixedly lock is included in the interior installation portion that moves of described mounting groove and extends and move in order to limit described wafer box from described installation portion bending.
5. microscope bench structure according to claim 4 is characterized in that: have the gap after described wafer is installed in wafer box with between this wafer box, be positioned at the gap during described limiting section pinning wafer box.
6. microscope bench structure according to claim 1 is characterized in that: when described CD-ROM drive motor was rotated in the forward, described work top descended, and described fixedly lock moves and pin described wafer box, and this wafer box can not move; During described CD-ROM drive motor reverse rotation, described work top rises, and described fixedly lock moves and unclamps described wafer box, and this wafer box can move.
7. microscope bench structure according to claim 1 is characterized in that: described microscope bench structure is provided with the regulations and parameters that connects described fixedly lock and described CD-ROM drive motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011104112110A CN103163714A (en) | 2011-12-09 | 2011-12-09 | Microscope machine platform structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011104112110A CN103163714A (en) | 2011-12-09 | 2011-12-09 | Microscope machine platform structure |
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| CN103163714A true CN103163714A (en) | 2013-06-19 |
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| CN2011104112110A Pending CN103163714A (en) | 2011-12-09 | 2011-12-09 | Microscope machine platform structure |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106526825A (en) * | 2015-10-22 | 2017-03-22 | 安徽超元半导体有限公司 | Microscope for wafer visual inspection |
| CN108461433A (en) * | 2018-04-17 | 2018-08-28 | 无锡市瑞达电子科技有限公司 | A kind of integrated circuit envelope survey automatic identification wafer box |
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| JP2004342662A (en) * | 2003-05-13 | 2004-12-02 | Olympus Corp | Semiconductor connecting apparatus |
| JP2007033972A (en) * | 2005-07-28 | 2007-02-08 | Nagase & Co Ltd | Structure for fixing petri dish including object to be observed on stage of inverted type microscope |
| CN101021489A (en) * | 2006-02-15 | 2007-08-22 | 奥林巴斯株式会社 | Visual inspection apparatus |
| CN101040203A (en) * | 2004-10-08 | 2007-09-19 | 株式会社尼康 | Microscope device |
| CN101673699A (en) * | 2009-09-03 | 2010-03-17 | 东莞宏威数码机械有限公司 | Carrying platform of substrate box |
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5038035A (en) * | 1988-08-05 | 1991-08-06 | Mitsubishi Jukogyo Kabushiki Kaisha | Automatic structure analyzing/processing apparatus |
| JP2004342662A (en) * | 2003-05-13 | 2004-12-02 | Olympus Corp | Semiconductor connecting apparatus |
| CN101040203A (en) * | 2004-10-08 | 2007-09-19 | 株式会社尼康 | Microscope device |
| JP2007033972A (en) * | 2005-07-28 | 2007-02-08 | Nagase & Co Ltd | Structure for fixing petri dish including object to be observed on stage of inverted type microscope |
| CN101021489A (en) * | 2006-02-15 | 2007-08-22 | 奥林巴斯株式会社 | Visual inspection apparatus |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106526825A (en) * | 2015-10-22 | 2017-03-22 | 安徽超元半导体有限公司 | Microscope for wafer visual inspection |
| CN108461433A (en) * | 2018-04-17 | 2018-08-28 | 无锡市瑞达电子科技有限公司 | A kind of integrated circuit envelope survey automatic identification wafer box |
| CN108461433B (en) * | 2018-04-17 | 2023-09-22 | 无锡市瑞达电子科技有限公司 | Automatic identification wafer box for integrated circuit sealing and testing |
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Application publication date: 20130619 |