CN108461433A - A kind of integrated circuit envelope survey automatic identification wafer box - Google Patents
A kind of integrated circuit envelope survey automatic identification wafer box Download PDFInfo
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- CN108461433A CN108461433A CN201810336364.5A CN201810336364A CN108461433A CN 108461433 A CN108461433 A CN 108461433A CN 201810336364 A CN201810336364 A CN 201810336364A CN 108461433 A CN108461433 A CN 108461433A
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- wafer box
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- side plate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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- Microelectronics & Electronic Packaging (AREA)
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- General Physics & Mathematics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Abstract
The invention discloses a kind of integrated circuits to seal survey automatic identification wafer box, the wafer box constitutes cube structure by top plate and bottom plate, left side plate and back shroud, disk slot is machined on left side plate, it is open before wafer box, disk slot is machined on left plate and right plate inner wall, there are three V-type detent mechanisms for the processing of bottom plate lower section；Push-down is installed to latch automatically structure on the bottom plate and side plate of the wafer box；Three are separately installed on the left side plate and back shroud of the wafer box slot card type shelves item；Automatic identification matrix is installed on the top plate of the wafer box.The present invention can avoid the manually influence to wafer cleanliness factor, reducing adjacent two wafer in wafer box simultaneously being capable of grazing is arrived in operation possibility, reduce scrappage, it realizes simultaneously and completes to carry a series of actions such as feeding by mechanical arm, reduce manpower, working efficiency is improved, the degree of automation is improved, to fundamentally improve the benefit of enterprise.
Description
Technical field
The invention belongs to semiconductor assembly and test fields, are related to the special equipment of semiconductor assembly and test flow, especially relate to
And a kind of integrated circuit seals survey automatic identification wafer box.
Background technology
In modern semiconductors Packaging Industry, the requirement to automation is higher and higher, and many artificial intelligence will replace originally
Assembly line employee, and the requirement to the cleanliness factor of production environment is more and more harsher.And due to human cost, consumptive material, fixation
Cost etc. is all increasing, and causes cost higher and higher, in order to mitigate the pressure of cost, it is desirable that loss is reduced, it is especially unnecessary
Loss.
Wafer box is wafer container, and wafer box traditional at present has the following problems：
One, at present in daily production process by manually extracting wafer come pushing lever, participate in can be for personnel excessive
Increase pollution in dustless space, and wafer can be due to artificial in the handling process of the transport of wafer box and board and board
The reason of cause wafer easily to deform, or skidding off to fall from wafer box leads to breakage.
Two, wafer current is in the process for no one of contacting damping with wafer box, if the personnel's strength put is excessive
Wafer and wafer box back shroud can be caused to have collision, have breakage so as to cause wafer, and two adjacent wafers are easy grazing
It arrives.
Three, full-automatic degree is not used in semiconductor packaging industry comprehensively at present, and there are what is manually carried to show
As general assembly line woman worker is more, and personnel's strength is limited, and piles the wafer box heavier-weight of wafer, and general woman worker lifts ratio
It is harder, it may appear that phenomena such as being not enough unable to lift or fall down due to strength in the handling process,
Invention content
The purpose of the present invention is to provide a kind of integrated circuits to seal survey automatic identification wafer box, avoids manually to crystalline substance
The influence of circle cleanliness factor, at the same reduce adjacent two wafer in wafer box can grazing is arrived in operation possibility, reduce
Scrappage, while realizing and completing to carry a series of actions such as feeding by mechanical arm, manpower is reduced, working efficiency is improved.
To achieve the above object, the present invention provides the following technical solutions：
A kind of integrated circuit envelope survey automatic identification wafer box, the wafer box is by top plate and bottom plate, left side plate and rear cover
Plate constitutes cube structure, is machined with disk slot on left side plate, is open before wafer box；
Push-down is installed to latch automatically structure on the bottom plate and side plate of wafer box, the push-down latches structure packet automatically
It includes and positions fixed block, localization handspike, latch automatically and automatic locking determines block；The positioning fixed block is mounted on the bottom of wafer box
On plate, fixed by the bottom surface of bolt and bottom plate；One end of the localization handspike is connect with positioning fixed block, and the other end is in certainly
The dynamic lower section to latch；Automatic latch is embedded among the side plate of wafer box, is closely connect with the side plate of wafer box；It is described from
Dynamic lock fixed block blocks to latch automatically, and both ends are fixed by the side plate of bolt and wafer box；It is described to be latched automatically including bolt, lock
Piece, upper tapered end and lower lock head, the bolt is longitudinally arranged between the side plate and automatic locking of wafer box determine block, on the locking plate
It is connected to the surface of bolt from top to bottom, the spacing of the locking plate is equal to the width of the wafer access way on wafer box side plate,
The upper tapered end is connected to the upper end of bolt, and the width of the upper end is more than the width that automatic locking determines block, the lower lock head
It is connected to the lower end of bolt, detaches or contacts with localization handspike；
Three are separately installed on the left side plate and back shroud of wafer box slot card type shelves item；It is described to have slot card type shelves item
Including blend stop main body and fixing body, it is machined at least two fixation through-holes on the fixing body, passes through bolt and left plate, the right side
Side plate or back shroud are connected and fixed；Bumping post is connected in the blend stop main body, the quantity of the bumping post is on wafer box side plate
The quantity of disk slot adds one, offers parallel notch between the bumping post and bumping post, the quantity of notch on wafer box side plate
Disk slot quantity it is equal, the bottom edge of each notch is corresponding with each bottom edge of disk slot concordant, the width of notch with it is to be placed
The width of disk is equal；The bottom of each notch is machined with limit circular arc, three limit circular arcs having on slot card type shelves item with wait putting
The disk concentric set, and the radian for limiting circular arc is overlapped with the radian of disk to be placed；
Automatic identification matrix is installed, the automatic identification matrix includes top identification and crawl on the top plate of wafer box
Plate, lower section mounting plate and connecting pole；The lower section mounting plate is square, and is offered multiple mounting holes thereon, is passed through bolt
It is fixed on the center above the top plate of wafer box；The both ends of the connecting pole identify with top and capture plate, lower section respectively
The center of mounting plate connects；Top identification is square with crawl plate, the top identification with one jiao that captures plate at set
There are one automatic identification hole, the top identification and the midpoint of the four edges of crawl plate are respectively equipped with four circular mechanical arms
Capture hole, the vertical range in the center of circle and immediate top identification and the four edges for capturing plate in four mechanical arms crawl hole
It is equal respectively.
Preferably, it is described it is automatic latch be embedded in the side plate centre of wafer box after do not protrude from side plate with side plate without falling yet
Difference.
Preferably, the quantity that the automatic locking determines block is two, is located near the top and bottom to latch automatically.
Preferably, there are three V-type detent mechanism, localization handspikes installed therein one for processing below the bottom plate of the wafer box
In a V-type detent mechanism, shape and the V-type detent mechanism of localization handspike match, and can enter in V-type detent mechanism.
Preferably, described three have mounting height of the slot card type shelves item on left side plate and back shroud identical.
Preferably, the fixing body having on slot card type shelves item and fixation through-hole are vertical with bumping post, notch.
Preferably, described to there is the top side of each bumping post on slot card type shelves item or both sides to be machined with the guiding towards notch
Inclined-plane.
Preferably, the automatic identification hole is triangle.
Preferably, the top identification is machined with chamfering on four angles of crawl plate.
Preferably, the height of the connecting pole to ensure mechanical arm can be identified from top with capture plate and lower section mounting plate it
Between stretch into.
Compared with prior art, the beneficial effects of the invention are as follows：
One, the function of latching automatically is increased in wafer box, not only makes personnel on the fare of workshop so not manually
It manually goes to stir original lever, reduces manpower, while full automatic wafer may be implemented on the board of mechanical arm again
Extraction process even more improves production additionally, due to the probability for stirring the personnel of greatly reducing and wafer contacts for reducing personnel
The cleanliness factor of product.It is automatic to latch due to being that the principle of terrestrial gravitation is utilized to make, lift shipping it is defeated during wafer box
When the wafer of middle the inside will not be due to moving personnel firmly it is uneven or lift wafer box when accidentally lead to disk
Wafer in box is therefrom fallen, and has greatly reinforced the safety of wafer box.It not is outer additionally, due to automatic latch is used
The lever of connection, latch automatically in wafer box with the side plate of wafer box be seamlessly connected, so will not cause lifting or
It collides with wafer in transport.The mode for changing traditional wafer box lever can improve the efficiency of work, reduce personnel and crystalline substance
Round contact substantially increases the degree of automation.
Two, slot card type shelves item has been increased in wafer box, more safer than original wafer box can more protect disk
Wafer in box, at the same shelves item improvement but also the product substantially reduced using manufacturer cost, improve the finished product of product
Rate, to fundamentally solve the problems, such as wafer breakage during wafer transport process and loading and unloading.Three of design simultaneously
Point location protects wafer, and 3 points are the most stable structures, the three-point fix that the present invention uses, and more balance and stability makes wafer
It can will not downward shift in each bar groove.
Three, automatic identification matrix is increased in wafer box, and the employee on the assembly line of workshop is not only made not have to utilize manpower
Extract, carry wafer box, reduce manpower, at the same mechanical arm can more accurately loading and unloading, can be to avoid artificial
Putting inaccuracy causes the mechanical arm of the grasping silicon wafer on board that cannot effectively grab wafer.Or crystalline substance of damaging in crawl
Circle.Simultaneously automatic identification matrix be used in lift or transport during wafer inside wafer box be not in unbalance stress
The either inadequate phenomenon of strength, which is not in the occurred collision of artificial extraction, causes wafer to damage, and has greatly reinforced wafer
Safety.It changes traditional wafer box personnel and lifts mode, it is possible to reduce the staff of producing line reduces human cost, improves
The efficiency of work, further increases product yield, to fundamentally improve the benefit of enterprise.
Description of the drawings
Fig. 1 is the vertical view of the present invention.
Fig. 2 is the upward view of the present invention.
Fig. 3 is the front view of the present invention.
Fig. 4 is the partial enlarged view of Fig. 2.
Fig. 5 is the front view to latch automatically.
Fig. 6 is the lateral plan to latch automatically.
Fig. 7 is the upward view of localization handspike.
Fig. 8 is the lateral plan of localization handspike.
Fig. 9 is the Section A-A figure of localization handspike.
Figure 10 is wafer box locking-in state schematic diagram.
Figure 11 is wafer box opening state schematic diagram.
Figure 12 is the perspective view for having slot card type shelves item.
Figure 13 is the stereogram for having slot card type shelves item.
Figure 14 is the front view for having slot card type shelves item.
Figure 15 is the left view for having slot card type shelves item.
Figure 16 is the stereogram of automatic identification matrix.
Figure 17 is the vertical view of automatic identification matrix.
Figure 18 is the front view of automatic identification matrix.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
As shown in Figure 1, Figure 2 and Figure 3, automatic identification wafer box of the invention is cube structure, including top plate 1, bottom plate
2, left plate 3, right plate 4 and back shroud 5 are open before wafer box, circle are machined on 4 inner wall of left plate 3 and right plate
Film trap 7, there are three the V-type detent mechanisms 8 for protruding from bottom plate 2 for 2 lower section processing of bottom plate.Pacify on the bottom plate 2 and right plate 4 of wafer box
Latch structure 100 automatically equipped with push-down, and the structure that latches automatically 100 is located at the wafer inlet in front of wafer box.Left plate 3,
Three are separately installed on right plate 4 and back shroud 5 has slot card type shelves item 200 with what disk slot exactly matched, there is slot card type shelves
Item 200 is located at the rear for the structure 100 that latches automatically, and three have mounting height of the slot card type shelves item 200 in wafer box that must ensure
Unanimously.1 top of top plate is equipped with automatic identification matrix 300.6 wafer to be placed.
As shown in figure 4, being equipped with positioning fixed block 101 on bottom plate 2, positioning fixed block 101 passes through bolt and 2 bottom of bottom plate
Connection, one end of localization handspike 102 are fixed with positioning fixed block 101, and the other end of localization handspike 102 is in automatic and latches 103
Lower section, being can be movable, and automatic 103 are latched for pushing.Automatic latch 103 is embedded among right plate 4, with right plate
4 close connections cannot protrusion can not have any drop.Upper and lower two automatic lockings determine block 104 for fixation automatic latch 103
Position in wafer box, prevents it from deviating.
As shown in Figure 5 and Figure 6, latch automatically 103 include bolt 31, locking plate 32, upper tapered end 33 and lower lock head 34.Bolt 31
It is longitudinally arranged between right plate 4 and two automatic lockings determine block 104；The table of bolt 31 is connected on locking plate 32 from top to bottom
Face, the distribution spacing of locking plate 32 are equal to the width of the wafer access way on right plate 4；Upper tapered end 33 is connected to the upper of bolt 31
The width at end, upper tapered end 33 is more than the width that automatic locking determines block 104；Lower lock head 34 is connected to the lower end of bolt 31, in not
It detaches or contacts with localization handspike 102 with when state.
As shown in Figure 7, Figure 8 and Figure 9, when wafer box uses in automation equipment, it is necessary to make itself positioning accurate
Standard, which just can guarantee, smoothly passes in and out wafer.Localization handspike 102 is mounted in one of bottom plate 2 V-type detent mechanism 8, in order to
Ensure that localization handspike 102 matches with V-type detent mechanism 8, is also designed to same V-type at 102 middle part of localization handspike, ensure that
The positioning accuracy of wafer box itself.When mechanism in automation equipment corresponds to three V-type detent mechanisms 8 of upper wafer box, so that it may
To push localization handspike 102.
As shown in Figure 10, it is the state of wafer box opening.As long as wafer box is prevented to be placed on desktop or corresponding board
On, localization handspike 102 is held up upwards, is entered in the V-type detent mechanism 8 of bottom plate 2 in the middle part of the V-type of localization handspike 102, positioning pushes away
The right end of bar 102 will hold up it is automatic latch 103 lower lock head 34, automatic will latch 103 it is whole jack up upwards, latch automatically
Locking plate 32 on 103 will not stop that the access way of wafer on right plate 4, wafer box just will present present open shape at this time
State, board push rod or mechanical arm can easily extract required wafer from wafer box, and can be accurate as requested
The wafer extracted in required a certain bar groove.
As shown in figure 11, it is the state of wafer box latching.As long as wafer box leaves board or desktop, localization handspike 102
Right end fallen due to gravity, similarly latching automatically 103 will fall, and latch automatically 103 upper tapered end 33
Can determine the limit of block 104 by automatic locking and fix the height of whereabouts, on the right side of the locking plate 32 on 103 that latches automatically has stopped at this time
The access way of wafer on plate 4 can make wafer box that the state lockked be presented, and the wafer in such wafer box will keep flat
Weighing apparatus will not be such that it is fallen from wafer box due to any outer force effect, at the same during board and board transport due to
The gravity work that makes to latch automatically will not similarly be such that wafer falls.
As shown in Figure 12, Figure 13, Figure 14 and Figure 15, it includes blend stop main body 210 and fixing body 211 to have slot card type shelves item, and two
Person is vertical, fixed there are two processing on fixing body 211 to use through-hole 212, passes through bolt and left plate 3, right plate 4 or back shroud 5
It is connected and fixed；It is connected with several bumping posts 213 in blend stop main body 210, the quantity of bumping post 213 is left plate 3, the circle on right plate 4
The quantity of film trap 7 adds one；Several parallel notches 214, the quantity and circle of notch 214 are offered between bumping post 213 and bumping post 213
The quantity of film trap 7 is equal, and the bottom edge of each notch 214 is corresponding with the bottom edge of each disk slot 7 concordant, the width of notch 214 with put
The width for the wafer 6 set is equal；The bottom of each notch 214 is machined with limit circular arc 215, three limits having on slot card type shelves item
Circular arc 215 and 6 concentric of wafer placed, and the radian for limiting circular arc 215 is overlapped with the radian for the wafer 6 placed.Gear
The top side of column 213 or both sides are machined with the guiding surface 216 towards notch, and effect is to ensure wafer during placement
It can slide on the position of notch 214.Have notch 214 on slot card type shelves item need with high accuracy with the left plate of wafer box
3, right plate 4 is identical, and the quantity width of notch 214 will be consistent with its, just arrives ensure wafer during placement in this way
It can accurately snap on the position of notch 214, while the position for having slot card type shelves item to install on back shroud 5 is even more important, removes
Have the function of screens, in addition also has the function of anticollision, prevent wafer from striking on the back shroud 5 of wafer box.Rear cover
The original function of plate 5 be exactly in order to prevent wafer fallen from wafer box and prevent breakage, and have slot card type shelves item on back shroud 5
It while even more in order to make wafer not drop out, can not more be contacted with the back shroud of metal quality, so that wafer is hit to breakage.
As shown in Figure 16, Figure 17 and Figure 18, automatic identification matrix is the appearance of a similar mushroom head, is divided into two up and down
Face, is top identification and crawl plate 303, lower section mounting plate 301 respectively, and the two is linked together by connecting pole 302.Pacify lower section
Loading board 301 is square, and offers multiple mounting holes 304 thereon, is bolted on the center of 1 top of top plate of wafer box
Position.Top is identified equally to be square with crawl plate 303, chamfering 307 is processed on square four angles, effect is unhairing
Thorn, keeps product not sharp, will not hurt user or damage mechanical arm.Top, which is identified, knows on crawl plate 303 there are one automatic
Other hole 305 and four mechanical arms capture hole 306.There are one mechanical arm identifiers in producing line robot, can pass through automatic identification square
Automatic identification hole 305 (delthyrium position) in battle array recognizes and the position of setting circle film magazine, on mechanical arm identifier there are one with
The formula that automatic identification hole 305 matches, for finding and identifying which is only automatic identification hole 305, so automatic identification
The precision position in hole 305 is particularly important.Mechanical arm identifier has recognized the automatic identification hole 305 on automatic identification matrix
Afterwards, mechanical arm will be set out, and two extractions of stretching, which are grabbed, stretches into diagonal two mechanical arms crawl hole 306 (round hole position) extraction
Wafer box completes the action for automatically extracting wafer box.Four mechanical arm crawl holes 306 of design are to facilitate mechanical arm can be never
Equidirectional crawl wafer box.
Automatic identification matrix work step example：Step 1, producing line robot are moved to according to terrestrial reference near wafer box, are led to
It crosses automatic identification camera system and scans the position steps 2 of automatic identification hole 305 of triangle, producing line robot according to scanning
The data obtained judge the position of wafer box, by the automatic identification matrix of the mechanical arm crawl present invention, lift wafer box
It is put into output bas line equipment material mouth up and down.After step 3, upper and lower wafer, producing line robot can equally pass through mechanical arm
The automatic identification matrix for capturing the present invention, lifts wafer box and is put into producing line mobile robot, be transmitted the work of wafer.
It can understand the above description of the embodiments is intended to facilitate those skilled in the art and apply this specially
Profit.Person skilled in the art obviously easily can make various modifications to these embodiments, and described herein
General Principle is applied in other embodiment without having to go through creative labor.Therefore, the present invention is not limited to implementations here
Example, those skilled in the art's announcement according to the present invention, improvement and modification made without departing from the scope of the present invention all should be
Within protection scope of the present invention.
Claims (10)
1. a kind of integrated circuit seals survey automatic identification wafer box, it is characterised in that：The wafer box is by top plate and bottom plate, left and right
Side plate and back shroud constitute cube structure, are machined with disk slot on left side plate, are open before wafer box；
Push-down is installed to latch automatically structure on the bottom plate and side plate of wafer box, the push-down structure that latches automatically includes fixed
Position fixed block, automatic latches and automatic locking determines block at localization handspike；The positioning fixed block is mounted on the bottom plate of wafer box
On, it is fixed by the bottom surface of bolt and bottom plate；One end of the localization handspike is connect with positioning fixed block, and the other end is in automatic
The lower section to latch；Automatic latch is embedded among the side plate of wafer box, is closely connect with the side plate of wafer box；It is described automatic
Lock fixed block blocks to latch automatically, and both ends are fixed by the side plate of bolt and wafer box；It is described to be latched automatically including bolt, lock
Piece, upper tapered end and lower lock head, the bolt is longitudinally arranged between the side plate and automatic locking of wafer box determine block, on the locking plate
It is connected to the surface of bolt from top to bottom, the spacing of the locking plate is equal to the width of the wafer access way on wafer box side plate,
The upper tapered end is connected to the upper end of bolt, and the width of the upper end is more than the width that automatic locking determines block, the lower lock head
It is connected to the lower end of bolt, detaches or contacts with localization handspike；
Three are separately installed on the left side plate and back shroud of wafer box slot card type shelves item；Described have the slot card type shelves item to include
Blend stop main body and fixing body are machined at least two fixation through-holes on the fixing body, pass through bolt and left plate, right plate
Or back shroud is connected and fixed；Bumping post is connected in the blend stop main body, the quantity of the bumping post is the disk on wafer box side plate
The quantity of slot adds one, and parallel notch, quantity and the circle on wafer box side plate of notch are offered between the bumping post and bumping post
The quantity of film trap is equal, and the bottom edge of each notch is corresponding with each bottom edge of disk slot concordant, the width of notch and disk to be placed
Width it is equal；The bottom of each notch is machined with limit circular arc, three limit circular arcs having on slot card type shelves item with it is to be placed
Disk concentric, and the radian for limiting circular arc is overlapped with the radian of disk to be placed；
Automatic identification matrix is installed on the top plate of wafer box, the automatic identification matrix include top identification with crawl plate, under
Square mounting plate and connecting pole；The lower section mounting plate is square, and is offered multiple mounting holes thereon, is bolted on
Center above the top plate of wafer box；The both ends of the connecting pole identify with top and capture plate, lower section mounting plate respectively
Center connection；Top identification is square with crawl plate, the top identification with one jiao that captures plate at set there are one
The midpoint of automatic identification hole, the top identification and the four edges of crawl plate is respectively equipped with four circular mechanical arms and captures
Hole, the center of circle and the identification of immediate top and the vertical range for the four edges for capturing plate in four mechanical arms crawl hole are distinguished
It is equal.
2. a kind of integrated circuit according to claim 1 seals survey automatic identification wafer box, it is characterised in that：It is described automatic
It latches and does not protrude from side plate after being embedded in the side plate centre of wafer box also with side plate without drop.
3. a kind of integrated circuit according to claim 1 seals survey automatic identification wafer box, it is characterised in that：It is described automatic
The quantity for locking fixed block is two, is located near the top and bottom to latch automatically.
4. a kind of integrated circuit according to claim 1 seals survey automatic identification wafer box, it is characterised in that：The disk
Processing is there are three V-type detent mechanism below the bottom plate of box, and in a localization handspike V-type detent mechanism installed therein, positioning pushes away
The shape of bar matches with V-type detent mechanism, can enter in V-type detent mechanism.
5. a kind of integrated circuit according to claim 1 seals survey automatic identification wafer box, it is characterised in that：Described three
There is mounting height of the slot card type shelves item on left side plate and back shroud identical.
6. a kind of integrated circuit according to claim 1 seals survey automatic identification wafer box, it is characterised in that：It is described to have slot
Fixing body and fixation through-hole on cassette shelves item is vertical with bumping post, notch.
7. a kind of integrated circuit according to claim 1 seals survey automatic identification wafer box, it is characterised in that：It is described to have slot
The top side of each bumping post on cassette shelves item or both sides are machined with the guiding surface towards notch.
8. a kind of integrated circuit according to claim 1 seals survey automatic identification wafer box, it is characterised in that：It is described automatic
Identifying hole is triangle.
9. a kind of integrated circuit according to claim 1 seals survey automatic identification wafer box, it is characterised in that：The top
Identification is machined with chamfering on four angles of crawl plate.
10. a kind of integrated circuit according to claim 1 seals survey automatic identification wafer box, it is characterised in that：The company
Connecing the height of column will ensure that mechanical arm can be stretched into from top identification between crawl plate and lower section mounting plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810336364.5A CN108461433B (en) | 2018-04-17 | 2018-04-17 | Automatic identification wafer box for integrated circuit sealing and testing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810336364.5A CN108461433B (en) | 2018-04-17 | 2018-04-17 | Automatic identification wafer box for integrated circuit sealing and testing |
Publications (2)
| Publication Number | Publication Date |
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| CN108461433A true CN108461433A (en) | 2018-08-28 |
| CN108461433B CN108461433B (en) | 2023-09-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201810336364.5A Active CN108461433B (en) | 2018-04-17 | 2018-04-17 | Automatic identification wafer box for integrated circuit sealing and testing |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114535213A (en) * | 2022-01-18 | 2022-05-27 | 中环领先半导体材料有限公司 | Protection method for large-size packaging sheet box after cleaning |
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| CN108461433B (en) | 2023-09-22 |
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