CN203134763U - Real-time cassette wafer detection device - Google Patents
Real-time cassette wafer detection device Download PDFInfo
- Publication number
- CN203134763U CN203134763U CN 201320032651 CN201320032651U CN203134763U CN 203134763 U CN203134763 U CN 203134763U CN 201320032651 CN201320032651 CN 201320032651 CN 201320032651 U CN201320032651 U CN 201320032651U CN 203134763 U CN203134763 U CN 203134763U
- Authority
- CN
- China
- Prior art keywords
- light source
- wafer
- film magazine
- erection column
- cassette
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Controlling Sheets Or Webs (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a real-time cassette wafer detection device used in a semiconductor equipment industry. The real-time cassette wafer detection device comprises a fixing plate, a left mounting column which is arranged on the fixing plate, is at one side of a cassette and has light source emitters, and a right mounting column which is arranged at a position corresponding to the left mounting column, is at another side of the cassette and has light source receivers, height of each corresponding set of the light source emitters and the light source receivers is equal to height of a corresponding wafer in the cassette, the light source receivers are connected with the data acquisition unit, and a front portion of the cassette is provided with a slide sheet detector. The real-time cassette wafer detection device can detect positions and quantity of the wafers in the cassette in real time, saves scanning time of a mechanical scanning device, improves wafer holding accuracy of a manipulator, improves wafer processing efficiency, further can detect wafer slipping of the wafers in the cassette and alarms.
Description
Technical field
The utility model relates to film magazine wafer real-time detection device in a kind of semiconductor equipment manufacturing.
Background technology
At semicon industry, many semiconductor equipments manufacturer is to the extracting of wafer in the film magazine and discharge the following two kinds of methods that adopt usually:
First kind: open film magazine system or the closed film magazine system scanning means by carrying, the wafer in the scanning film magazine uses software to calculate relevant position and the quantity of wafer in the film magazine then.The shortcoming of this mode is, need rescan when changing film magazine, if the scanning mistake occurs, need scan again, causes waste of time, thereby influences the working (machining) efficiency of wafer.
Second kind: the mode of employing wafer-scanning rod is obtained position and the quantity of wafer in the film magazine, when this requires at every turn the exchange film magazine, manipulator all will be changed end effector, change the wafer-scanning rod again, remove to obtain wafer information, such mode will cause the regular hour waste, simultaneously, manipulator also changes employing the rifle dish in exchange wafer-scanning rod, this will bring certain unsteadiness to equipment, thereby cause the generation of accident.
Summary of the invention
Technical problem to be solved in the utility model provides and a kind ofly can reduce effectively that manipulator grasps or discharge wafer and operate time of producing, increase the device security reliability, reduce the film magazine wafer real-time detection device that flase drop is surveyed.
The utility model adopts following technical scheme: a kind of film magazine wafer real-time detection device, its key technology is: it comprises fixed head, be located on the fixed head and be positioned at the left erection column that has the light source reflector and the corresponding right erection column that has the light source receiver that is arranged on the opposite side of film magazine with the position of left erection column of film magazine one side, the height that the light source reflector that each group is corresponding and light source receiver arrange respectively with corresponding film magazine on the height of wafer equate that the light source receiver is connected with data acquisition unit; Be provided with a slide plate detector in the dead ahead of described film magazine.
The bottom of described left erection column and right erection column respectively is provided with a position adjusting mechanism, and described position adjusting mechanism comprises adjustment double-screw bolt, the adjustment nut with the supporting setting of adjustment double-screw bolt, the adjustment bullet pad that is fixed on the fixed head and adjusts pad.
Described slide plate detector is 5-20mm apart from the film magazine distance, and described slide plate detector is reflective photoelectric sensor or correlation photoelectric sensor.
Film magazine is provided with 13-25 film trap, and correspondence is provided with 13-25 light source reflector and light source receiver respectively on left erection column and right erection column.
The beneficial effects of the utility model: after in the semiconductor equipment manufacturing, adopting the utility model, when manipulator grasps from film magazine and discharges wafer, by position and the quantity of obtaining wafer in the film magazine in real time, and an information that obtains passes to control unit by data acquisition unit, grasped rapidly by control unit control manipulator again or discharge wafer, the operate time that can effectively reduce manipulator extracting or release wafer like this and produce, improve the wafer working (machining) efficiency, increase stabilization of equipment performance.Whether the slide plate detector that arranges can detect has wafer to skid off in the film magazine, be used for reminding the user, increases the security reliability of equipment.This adjusting mechanism can be adjusted the upper-lower position of erection column to adapt to the position of wafer in the film magazine, and the equipment of preventing flase drop occurs and surveys.
Description of drawings
Fig. 1 is the utility model overall structure schematic diagram;
Fig. 2 is the cross-sectional view of the utility model erection column inner light source reflector or light source receiver;
Fig. 3 is the utility model erection column position adjusting mechanism structural representation;
Fig. 4 is slide plate checkout gear position view;
Wherein: 1, left erection column, 2, light source receiver, 3, film magazine, 4, light beam, 5, light source reflector, 6, position adjusting mechanism, 7, wafer, 8, slide plate detector, 9, fixed head, 10, base, 11, right erection column, 12, light source receiver, 13, tutorial light, 14, holding wire, 15, adjustment pad, 16, adjustment bullet pad, 17, adjustment nut, 18, adjustment double-screw bolt.
Embodiment
Below in conjunction with the drawings and specific embodiments the utility model is described in more detail.
Referring to accompanying drawing 1, the utility model is installed left erection column 1 and right erection column 11 in the place ahead of film magazine 3, and left erection column 1 and right erection column 11 are fixing with fixed head 9, and fixed head 9 is placed on the base 10.Distance is greater than the size of wafer 7 between left side erection column 1 and the right erection column 11.
Referring to accompanying drawing 2, left side erection column 1 and one group of light source reflector 5 and light source receiver 2 are housed respectively above the right erection column 11, light source reflector 5 is made up of light source transmitting terminal 12, tutorial light 13 and holding wire 14, the concrete quantity of light source reflector 5 is decided on the quantity of film trap in the film magazine 3, be generally 13-25, light beam 4 can be blocked by wafer 7, but can not be blocked by film magazine 3.Light source receiver 2 is identical with the structure of light source reflector 5.
Light source reflector 5 produces light signal by power supply, passes to light source receiver 2 then, and light source receiver 2 is converted into the signal of telecommunication with light signal, by the amplifying circuit amplification voltage signal, is obtained relevant information by data acquisition unit again.By position and the quantity of obtaining wafer 7 in the film magazine 3 in real time, manipulator can remove to grasp and discharge wafer 7 rapidly.
Referring to accompanying drawing 3, left erection column 1 described in the utility model and right erection column 11 have position adjusting mechanism 6, and it is made of adjustment pad 15, adjustment bullet pad 16, adjustment nut 17, adjustment double-screw bolt 18.Can adjust the upper-lower position of left and right erection column by adjusting position adjusting mechanism 6 to adapt to the position of wafer 7 in the film magazine 3, the equipment of preventing flase drop occurs and surveys.
Referring to accompanying drawing 4, slide plate detector 8 described in the utility model is installed in the dead ahead of film magazine 3, exceeds film magazine 3 distances and is the 5-20 millimeter, it is made up of a reflective photoelectric sensor, whether in film magazine 3 have wafer 7 skid off, be used for reminding the user if can be used to detect, increase the security reliability of equipment.
The utility model has been realized the real-time detection of wafer 7 in the film magazine 3, and the information that obtains is passed to control unit, is grasped rapidly by control unit control manipulator or discharges wafer, reduces operate time, enhances productivity.
The course of work of the present utility model is as follows:
Behind the opening of device, light source reflector 5 sends light beam 4 because applying power supply.
If do not have to install the film magazine 3 that has wafer 7 at fixed head 9, then light source receiver 2 receives by light source reflector 5 and sends light beam 4 back generation photoelectric currents, received effective voltage signal by current-to-voltage converting circuit, voltage amplifier circuit by data acquisition unit again, then these signals are passed to control unit, control unit just can be made the information that does not have wafer 7 in the film magazine 3.
If at fixed head 9 film magazine 3 that has wafer 7 is installed, then wafer 7 will block the light beam 4 that light source reflector 5 sends, light source receiver 2 does not receive light signal just can not produce the signal of telecommunication, data acquisition unit does not just receive voltage signal yet, and control unit just can be made the information that wafer 7 is arranged in the film magazine 3.
Wherein, each wafer 7 is corresponding the placement in the film trap all, and the corresponding a pair of light source reflector 5 of each film trap and light source receiver 2, therefore, control unit will be according to each useful signal to light source reflector 5 and light source receiver 2, determine whether each film trap has wafer 7, remove to control manipulator according to the information that obtains then, whether arrive corresponding film trap extracting or discharge wafer 7.
If film trap has deviation in the position of light source reflector 5 and light source receiver 2 and the film magazine 3, can adjust the position of left erection column 1 and right erection column 11 by position adjusting mechanism 6, light beam 4 can be blocked by the wafer 7 in the film magazine 3, realize the real-time detection of wafer 7 in the film magazine 3.
Wherein, being installed in the slide plate detector 8 in film magazine 3 dead aheads, whether in film magazine 3 have wafer 7 skid off, be used for reminding the user if can be used to detect, and increases the security reliability of equipment.
Adopt the utility model can effectively reduce the operate time of manipulator, enhance productivity.
Claims (4)
1. film magazine wafer real-time detection device, it is characterized in that: it comprises fixed head (9), be located at fixed head (9) and go up and be positioned at the left erection column (1) that has light source reflector (5) and the corresponding right erection column (11) that has light source receiver (2) that is arranged on the opposite side of film magazine (3) with the position of left erection column (1) of film magazine (3) one sides, the height that the light source reflector (5) that each group is corresponding and light source receiver (2) arrange respectively with corresponding film magazine (3) on the height of wafer (7) equal, light source receiver (8) is connected with data acquisition unit; Be provided with a slide plate detector (8) in the dead ahead of described film magazine (3).
2. a kind of film magazine wafer real-time detection device according to claim 1, it is characterized in that: the bottom of described left erection column (1) and right erection column (11) respectively is provided with a position adjusting mechanism (6), and described position adjusting mechanism comprises adjustment double-screw bolt (18), the adjustment nut (17) with the supporting setting of adjustment double-screw bolt (18), the adjustment bullet pad (16) that is fixed on the fixed head (9) and adjusts pad (15).
3. a kind of film magazine wafer real-time detection device according to claim 1 is characterized in that: described slide plate detector is 5-20mm apart from film magazine (3) distance, and described slide plate detector (8) is reflective photoelectric sensor (19) or correlation photoelectric sensor.
4. a kind of film magazine wafer real-time detection device according to claim 1, it is characterized in that: film magazine (3) is provided with 13-25 film trap, and correspondence is provided with 13-25 light source reflector (5) and light source receiver (2) respectively on left erection column (1) and right erection column (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320032651 CN203134763U (en) | 2013-01-22 | 2013-01-22 | Real-time cassette wafer detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320032651 CN203134763U (en) | 2013-01-22 | 2013-01-22 | Real-time cassette wafer detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203134763U true CN203134763U (en) | 2013-08-14 |
Family
ID=48942714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320032651 Expired - Fee Related CN203134763U (en) | 2013-01-22 | 2013-01-22 | Real-time cassette wafer detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203134763U (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106898559A (en) * | 2015-12-18 | 2017-06-27 | 有研半导体材料有限公司 | A kind of semiconductor crystal wafer film magazine particle detection technique |
| CN107799430A (en) * | 2016-08-29 | 2018-03-13 | 北京北方华创微电子装备有限公司 | Wafer position detection method |
| CN108461433A (en) * | 2018-04-17 | 2018-08-28 | 无锡市瑞达电子科技有限公司 | A kind of integrated circuit envelope survey automatic identification wafer box |
| CN109759819A (en) * | 2019-03-18 | 2019-05-17 | 江苏新智达新能源设备有限公司 | Wafer automatic installation apparatus |
| CN109990820A (en) * | 2019-04-04 | 2019-07-09 | 德淮半导体有限公司 | The correcting mechanism and its calibration method of sensor in ion implantation device |
| CN110091340A (en) * | 2019-05-07 | 2019-08-06 | 芯导精密(北京)设备有限公司 | A kind of wafer pick-and-place manipulator |
| CN112038252A (en) * | 2020-09-10 | 2020-12-04 | 无锡卓海科技有限公司 | Signal fuzzy control filter for wafer detection device |
| CN112038279A (en) * | 2020-09-21 | 2020-12-04 | 芯导精密(北京)设备有限公司 | Wafer scanning device and scanning method |
-
2013
- 2013-01-22 CN CN 201320032651 patent/CN203134763U/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106898559A (en) * | 2015-12-18 | 2017-06-27 | 有研半导体材料有限公司 | A kind of semiconductor crystal wafer film magazine particle detection technique |
| CN107799430A (en) * | 2016-08-29 | 2018-03-13 | 北京北方华创微电子装备有限公司 | Wafer position detection method |
| CN107799430B (en) * | 2016-08-29 | 2021-10-15 | 北京北方华创微电子装备有限公司 | Wafer position detection method |
| CN108461433A (en) * | 2018-04-17 | 2018-08-28 | 无锡市瑞达电子科技有限公司 | A kind of integrated circuit envelope survey automatic identification wafer box |
| CN108461433B (en) * | 2018-04-17 | 2023-09-22 | 无锡市瑞达电子科技有限公司 | Automatic identification wafer box for integrated circuit sealing and testing |
| CN109759819A (en) * | 2019-03-18 | 2019-05-17 | 江苏新智达新能源设备有限公司 | Wafer automatic installation apparatus |
| CN109759819B (en) * | 2019-03-18 | 2024-06-04 | 江苏新智达新能源设备有限公司 | Automatic mounting device for wafer |
| CN109990820A (en) * | 2019-04-04 | 2019-07-09 | 德淮半导体有限公司 | The correcting mechanism and its calibration method of sensor in ion implantation device |
| CN110091340A (en) * | 2019-05-07 | 2019-08-06 | 芯导精密(北京)设备有限公司 | A kind of wafer pick-and-place manipulator |
| CN110091340B (en) * | 2019-05-07 | 2020-10-20 | 芯导精密(北京)设备有限公司 | Wafer picking and placing manipulator |
| CN112038252A (en) * | 2020-09-10 | 2020-12-04 | 无锡卓海科技有限公司 | Signal fuzzy control filter for wafer detection device |
| CN112038279A (en) * | 2020-09-21 | 2020-12-04 | 芯导精密(北京)设备有限公司 | Wafer scanning device and scanning method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203134763U (en) | Real-time cassette wafer detection device | |
| CN101702403A (en) | Film magazine wafer real-time detection device | |
| WO2018057085A1 (en) | Adaptive transmission power control for a lidar | |
| CN110073244A (en) | For determining the histogram reading method and circuit of the flight time of photon | |
| CN102692194B (en) | Bending piece detection device for battery piece | |
| EP3567629A3 (en) | Power amplifier modules including related systems, devices, and methods | |
| HK1070545A1 (en) | Detection of metal disturbance in a magnetic tracking system | |
| NO20051603L (en) | Mobile communication system and method for providing mobile device handover in wireless communication systems using radiant antennas | |
| GB2517236A (en) | Millimetre wave three dimensional holographic scan imaging apparatus and inspecting method thereof | |
| MY165076A (en) | Systems and methods of antenna orientation in a point-to-point wireless network | |
| CN104078402A (en) | Auxiliary device for mechanical arm position adjusting | |
| WO2019204376A1 (en) | Device and method for detecting a foreign object in a wireless power transfer system | |
| TW200428302A (en) | Vehicle detection system | |
| GB2579156A (en) | Methods and apparatus for the sensing, collecting, transmission, storage, and dissemination of high-resolution power grid electrical measurement data | |
| CN110487239A (en) | Boiler expansion on-line monitoring system | |
| CN102929123B (en) | Measurement system for start time difference between high-speed light signal acquisition equipment and high-speed electric signal acquisition equipment | |
| CN202057303U (en) | Wire sag monitoring device | |
| CN103354028A (en) | Intelligent height measuring device and method based on infrared curtain | |
| CN102175163B (en) | Lead sag monitoring device | |
| CN108982993A (en) | A kind of the action response time Auto-Test System and method of arc light protective device | |
| CN102494756A (en) | Single-light source distributed optical fiber micro-vibration sensing and positioning device | |
| CN102508393B (en) | Regulating module for flat camera mechanism | |
| CN104907690A (en) | Laser focus point locating device and method | |
| CN109814088B (en) | Large-view-field receiving device and large-view-field receiving method | |
| CN201444200U (en) | Object detector for mobile robot |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130814 Termination date: 20150122 |
|
| EXPY | Termination of patent right or utility model |