CN103144036A - Grinding amount on-line monitoring device at ring-polishing stage and grinding amount on-line monitoring method - Google Patents
Grinding amount on-line monitoring device at ring-polishing stage and grinding amount on-line monitoring method Download PDFInfo
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- CN103144036A CN103144036A CN2012105915506A CN201210591550A CN103144036A CN 103144036 A CN103144036 A CN 103144036A CN 2012105915506 A CN2012105915506 A CN 2012105915506A CN 201210591550 A CN201210591550 A CN 201210591550A CN 103144036 A CN103144036 A CN 103144036A
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Abstract
The invention discloses a grinding amount on-line monitoring device at a ring-polishing stage and an on-line monitoring method. The on-line monitoring device comprises a white light source (1), a collimating mirror (2), a polarizer (3), a common beam splitter (4), a wide-spectrum polarized beam splitter prism (5), a dispersion compensating mirror (6), a reference reflecting mirror (7), an analyzer (8), a CCD (charge coupled device) (9) and a display screen (10); the method comprises the following steps: a, calibrating the grinding amount on-line monitoring device: changing the white light source in the grinding amount on-line monitoring device with a homogeneous light LED (lighting emitting diode) with known wave length, determining a proportionality coefficient C between fringe offset amount and light path variable quantity according to fringe spacing and a reading number on a graduated scale labeled on the display screen (10), and fixing the relation between white light fringe offset amount read on the graduated scale and practical grinding amount according to the proportionality coefficient, and b, actual measurement of grinding amount: changing the homogeneous light LED in the grinding amount on-line monitoring device with the white light source, rotating the polarizer (3) to adjust the relative light intensity between tested light and reference light, and monitoring white light center fringe offset amount during the ring-polishing process till the grinding amount meets the requirements. Grinding amount on-line monitoring can be realized according to the device and the method.
Description
Technical field:
The invention belongs to interference of light metering field, particularly a kind of method that can be used for the device of realizing the on-line monitoring stock removal on glass polishing machine and carry out the Real-Time Monitoring stock removal based on this device.
Background technology
The optical element of high-precision optical element, especially caliber high-precision is through overmolding, correct grinding with after just throwing operation, generally all adopts annular polishing (ring is thrown) or ring to throw and processes to complete final precise polished with the combination of numerical control.In the optical element process, ring throw be optical element surface by precision to a ultraprecise crucial step.
At present, the stock removal that domestic ring is thrown the stage detects all employing offline modes, and the ring throwing operation of workpiece detects operation with face shape and separates.The skilled worker encircles to throw to workpiece and is worked into certain phase, workpiece is taken off from glass polishing machine, utilize surface shape detection apparatus (for example digital interference instrument) to detect workpiece face shape, regulate the glass polishing machine parameter according to testing result and continue ring throwing processing, the ring that so hockets throws processing and face shape is detected until workpiece reaches processing request.
This off-line type face shape detection mode has following defective:
1. this detection mode makes ring throw processing to operator's experience dependence enhancing, and the automaticity of technique reduces.After recording workpiece face graphic data, the setting of stock removal and glass polishing machine parameter and the relation of ring throwing time depend on skilled worker's experience to a great extent, the through engineering approaches development of restriction technique.
2. this detection mode has reduced the stability of ring throwing crudy.Because eyeglass clamping attitude will cause face deformation, and that ring is thrown the attitude add the workpiece in man-hour is different during with detection, and testing result certainly will mislead the skilled worker and select the glass polishing machine parameter like this, has reduced the stability of workpiece crudy.
3. this detection mode has reduced the production efficiency of workpiece processing.Adopt off-line type to detect workpiece face shape, make and account for more than 50% of whole manufacturing process in its manufacturing cost and man-hour.
Therefore the detection of face shape is the bottleneck in heavy-calibre planar optical elements cold working flowline all the time.
Summary of the invention
The object of the present invention is to provide a kind of ring to throw stage stock removal on-Line Monitor Device and stock removal method of real-time.
The technical scheme that realizes the object of the invention is: a kind of ring is thrown stage stock removal on-Line Monitor Device, comprise white light source 1, collimating mirror 2, the polarizer 3, common spectroscope 4, wide spectrum polarizing Amici prism 5, dispersion compensation mirror 6, reference mirror 7, analyzer 8, CCD9 and display screen 10; Light channel structure is light source 1, collimating mirror 2, the polarizer 3, common spectroscope 4, wide spectrum polarizing Amici prism 5 along the light path direct of travel successively, and light beam is divided into two-way afterwards: the one tunnel through dispersion compensation mirror 6, reference mirror 7, is reference light; One the tunnel through workpiece, is test light, and this two-way light direction is mutually vertical; The former road of two-beam is returned afterwards, merges in wide spectrum Amici prism 5 outgoing and gets back to common spectroscope 4; Common spectroscope 4 planes, reflecting surface place and light path system optical axis are at 45 °, and leniently the synthetic light of spectrum polarizing Amici prism 5 outgoing in common spectroscope 4 reflecting surface reflections, goes out from analyzer 8 transmissions afterwards together, incides at last CCD9; CCD9 is connected with display screen 10, the output interference fringe.
Dispersion compensation device 6 adopts and the standard workpiece for the treatment of that grinder part thickness is identical and base material is identical.
Light source 1 is white light source or monochromatic light LED.
A kind of method of Real-Time Monitoring stock removal, step is as follows:
A) demarcate the stock removal on-Line Monitor Device; Change the white light source in the stock removal on-line equipment into wavelength known monochromatic light LED, determine proportionality coefficient C between striped side-play amount and change in optical path length amount according to the reading on the rule of mark on fringe spacing and display screen 10, determine the white light fringe side-play amount of reading on rule and the relation of practical grinding amount by this proportionality coefficient;
B) actual measurement stock removal: change the monochromatic light LED in the stock removal on-line equipment into white light source, the rotation polarizer 3 is regulated test light and reference light relative light intensity; Monitoring white light center striped side-play amount in ring throwing process is until till stock removal reaches requirement.
White light fringe side-play amount and practical grinding amount relation
δ=ΔL′/n
eC
Δ L ' is white light center striped side-play amount, n
eBe the white light equivalent refractive index, C is the proportionality coefficient between striped side-play amount and optical path difference variable quantity.
The method that detects in real time stock removal is: throwing is encircled to workpiece in the limit, the skew of limit inspection center's striped from the display screen.
The present invention compared with prior art, remarkable advantage is: realized that workpiece ring throws processing and synchronizeing that stock removal is monitored; Reduce the ring throwing to the dependence of technician's experience; Reduce the testing cost of workpiece sensing cost, especially large aperture workpiece; Set-up procedure is simple, and is convenient to operation.
Description of drawings
Fig. 1 is stock removal real-time monitoring device optical texture.
Fig. 2 is the definition for the treatment of the grinder part and waiting to grind the zone.
Fig. 3 is that the stock removal monitoring device is demarcated bar graph.
Fig. 4 is workpiece stock removal monitoring schematic diagram.
Fig. 5 is striped skew schematic diagram in ring throwing process.
The specific embodiment
The glass grinding quantitative response is the variable quantity of optical path difference in the stock removal monitoring device, and the variable quantity reaction of optical path difference is the side-play amount of striped, can reach the purpose of on-line monitoring stock removal by the side-play amount of monitoring striped, realize that this invention need comprise following content:
1. a kind of white light interference workpiece stock removal on-Line Monitor Device (hereinafter to be referred as the stock removal monitoring device) that can be used for glass polishing machine is provided.This device can be regulated the contrast of white-light fringe, also can eliminate the impact that dispersion causes white light interference.
2. a kind of stock removal on-line monitoring method based on the stock removal monitoring device is provided, comprises two steps:
A. adopt the monochromatic LED of known wavelength to demarcate the stock removal monitoring device, obtain the proportionate relationship between stock removal and striped side-play amount.
B. adopt white light as the light source monitoring target area of sensing device, ring is thrown workpiece and monitoring center's striped, and to mirror grinding, the center striped is offset due to glass polishing machine, till monitoring side-play amount stock removal reaches requirement.
Below in conjunction with accompanying drawing, the present invention is described in further detail.
In conjunction with Fig. 1, the invention provides a kind of stock removal on-Line Monitor Device.Optical texture comprises white light source 1, collimating mirror 2, the polarizer 3, spectroscope 4, wide spectrum polarizing Amici prism 5, dispersion compensation mirror 6, reference mirror 7, analyzer 8, CCD9, display screen 10.
Form collimated light from the white light of light source 1 outgoing through collimating mirror 2, incide the polarizer 3 and become linearly polarized light, gone out by common spectroscope 4 transmissions, wide spectrum polarizing Amici prism 5 is divided into two parts to light path: P light incides dispersion compensation mirror 5 and forms reference light with reference mirror 7, and S light incides ring throws workpiece formation test light.Wide spectrum polarizing Amici prism 5 is called reference arm with the optical texture that reference mirror 7 forms, and wide spectrum polarizing Amici prism 5 is called test arm with the optical texture that workpiece forms, and reference arm is mutually vertical with test arm.Because polarization state does not change reference light and test light is returned by original optical path, respectively through wide spectrum polarizing Amici prism 5 transmissions, reflection and go out, reflex to analyzer 8 by common spectroscope, common spectroscope 4 planes, reflecting surface place and light path system optical axis included angle are 45 °, the polarization direction angle of thoroughly shake direction and test light and the reference light of analyzer 8 is 45 °, common spectroscope 4 is called the collection light path with the optical texture that CCD9 forms, and it is mutually vertical with reference arm.The test light that goes out from analyzer 8 transmissions and reference light form interferes, and interference pattern is gathered by CCD9.
The characteristics of this device are: one, the test light reflecting interface treats that by water layer and workpiece flour milling forms, the reference light reflecting interface is comprised of dispersion compensation mirror 6 and standard reflection mirror 7, therefore in this system, reference light and test light difference in reflectivity are very large, can change by the rotation polarizer 3 relative light intensity of test light and reference light for this point, realized the reflectivity coupling of workpiece and reference mirror 7 under the white-light illuminating condition, cancel the polarization elements such as wave plate in conventional polarized interferometer, broken through the restriction that conventional polarized interferometer can only be applicable to monochromatic source; They are two years old, white light is broad spectrum light source, can produce dispersion in the thicker workpiece of base material, the dispersion compensation mirror 6 that adopts for this dot system is identical with the base material of workpiece, consistency of thickness, eliminate largely dispersion, make the interference signal contrast that the stock removal monitoring device collects not be subjected to dispersive influence.
In conjunction with Fig. 2, it is a polished heavy caliber minute surface that ring is thrown workpiece.Through corase grind, correct grinding, its surperficial face shape then need to be to mirror finish near processing request, and the A face is the non-burnishing surface of workpiece, and the B face is burnishing surface.
In conjunction with Fig. 3, it is the one group of bar graph that obtains from display screen device being carried out timing signal that the stock removal monitoring device is demarcated bar graph, and the rule in figure is labeled on display screen in advance.
In conjunction with Fig. 3, Fig. 4, it is a kind of method of utilizing stock removal on-Line Monitor Device Real-Time Monitoring stock removal that Fig. 5 the present invention also provides, and comprises the following steps:
Step 1: demarcate the stock removal on-Line Monitor Device.Change light source in Fig. 2 into wavelength monochromatic LED light source.Shown one group of striped as shown in Figure 3 on the display 10 that indicates rule.Rule from display 10 is read N fringe period separation delta L, and the proportionality coefficient C between striped side-play amount and change in optical path length amount can represent with following formula:
λ in formula
eIt is monochromatic LED light source effective wavelength.Do not change in reference mirror 7 inclination situations and change light source into white light, the stock removal on-Line Monitor Device is placed on workpiece A face, B face contact glass polishing machine mill, as shown in Figure 4.If center striped shifted by delta L ', as shown in Figure 5, this moment, stock removal can represent with following formula:
δ=ΔL′/n
eC (2)
N in formula
eBe the white light equivalent refractive index.
Step 2: actual measurement stock removal.The Real-Time Monitoring striped skew simultaneously of unlatching glass polishing machine, this moment, the stock removal corresponding to the striped side-play amount can calculate gained by (2) formula, stopped when stock removal reaches the throwing of requirement ring.
Claims (6)
1. one kind is encircled throwing stage stock removal on-Line Monitor Device, it is characterized in that: comprise white light source [1], collimating mirror [2], the polarizer [3], common spectroscope [4], wide spectrum polarizing Amici prism [5], dispersion compensation mirror [6], reference mirror [7], analyzer [8], CCD[9] and display screen [10]; Light channel structure is light source [1], collimating mirror [2], the polarizer [3], common spectroscope [4], wide spectrum polarizing Amici prism [5] along the light path direct of travel successively, light beam is divided into two-way afterwards: the one tunnel through dispersion compensation mirror [6], reference mirror [7], is reference light; One the tunnel through workpiece, is test light, and this two-way light direction is mutually vertical; The former road of two-beam is returned afterwards, merges in wide spectrum Amici prism [5] outgoing and gets back to common spectroscope [4]; Common spectroscope [4] plane, reflecting surface place and light path system optical axis are at 45 °, and leniently the synthetic light of spectrum polarizing Amici prism [5] outgoing in the reflection of common spectroscope [4] reflecting surface, goes out from analyzer [8] transmission afterwards together, incides at last CCD[9]; CCD[9] be connected the output interference fringe with display screen [10].
2. ring according to claim 1 is thrown stage stock removal on-Line Monitor Device, and it is characterized in that: dispersion compensation device [6] adopts and the standard workpiece for the treatment of that grinder part thickness is identical and base material is identical.
3. ring according to claim 1 is thrown stage stock removal on-Line Monitor Device, and it is characterized in that: light source [1] is white light source or monochromatic light LED.
4. the method for a Real-Time Monitoring stock removal, is characterized in that, step is as follows:
A) demarcate the stock removal on-Line Monitor Device; Change the white light source in the stock removal on-line equipment into wavelength known monochromatic light LED, determine proportionality coefficient C between striped side-play amount and change in optical path length amount according to the reading on the rule of the upper mark of fringe spacing and display screen [10], determine the white light fringe side-play amount of reading on rule and the relation of practical grinding amount by this proportionality coefficient;
B) actual measurement stock removal: change the monochromatic light LED in the stock removal on-line equipment into white light source, the rotation polarizer [3] is regulated test light and reference light relative light intensity; Monitoring white light center striped side-play amount in ring throwing process is until till stock removal reaches requirement.
5. the method for Real-Time Monitoring stock removal according to claim 4, is characterized in that: white light fringe side-play amount and practical grinding amount relation
δ=ΔL′/n
eC
Δ L ' is white light center striped side-play amount, n
eBe the white light equivalent refractive index, C is the proportionality coefficient between striped side-play amount and optical path difference variable quantity.
6. the method for Real-Time Monitoring stock removal according to claim 4, it is characterized in that: the method that detects in real time stock removal is: throwing is encircled to workpiece in the limit, the skew of limit inspection center's striped from the display screen.
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| CN105182459A (en) * | 2015-07-13 | 2015-12-23 | 中国科学院上海光学精密机械研究所 | Meter-level large diameter polarizer full-band surface shape processing method |
| CN105277118A (en) * | 2015-11-27 | 2016-01-27 | 成都信息工程大学 | Laser wavelength correction-type corner reflector laser interferometer and wavelength correction method |
| CN106546178A (en) * | 2016-10-27 | 2017-03-29 | 华中科技大学 | The multi-layer transparent dielectric thickness measuring apparatus and method of confocal white light polarization interference |
| CN107234490A (en) * | 2016-03-28 | 2017-10-10 | 沈阳海默数控机床有限公司 | A kind of control device of method for grinding and groove mill |
| CN107883964A (en) * | 2017-11-13 | 2018-04-06 | 哈尔滨工业大学 | Ring throws in processing single-point movement locus detection means and the method detected using the device in workpiece ring |
| CN108177027A (en) * | 2017-12-13 | 2018-06-19 | 中国科学院上海光学精密机械研究所 | Flat-type optical element annular polishing face shape fine adjusting method |
| CN110595352A (en) * | 2019-11-13 | 2019-12-20 | 北京奥博泰测控技术有限公司 | Dispersion compensation method and measurement device for short-coherence Taman interference |
| WO2020135891A1 (en) * | 2018-12-25 | 2020-07-02 | 茂莱（南京）仪器有限公司 | Laser parallelism detector |
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