CN103134806A - Inspecting device of substrate membrane-forming - Google Patents
Inspecting device of substrate membrane-forming Download PDFInfo
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- CN103134806A CN103134806A CN2012100133625A CN201210013362A CN103134806A CN 103134806 A CN103134806 A CN 103134806A CN 2012100133625 A CN2012100133625 A CN 2012100133625A CN 201210013362 A CN201210013362 A CN 201210013362A CN 103134806 A CN103134806 A CN 103134806A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
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- General Health & Medical Sciences (AREA)
- Immunology (AREA)
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- Electroluminescent Light Sources (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention discloses an inspecting device of substrate membrane-forming. The invention is composed of a device for inspecting whether the vertical and horizontal distances of film formation coated on the substrate surface and the edge portions are constant. Accordingly, the device can effectively check out undesirable distortion on the surface of the substrate which is difficult to identify by naked eye, while can prevent display defects caused by film formation distortion in the state of completion of the manufacture of LCD or OLED products in a processing chamber.
Description
Technical field
(for example the present invention relates to check film forming, polyimide) whether bad technology, this film forming is coated and is used in Organic Light Emitting Diode (Organic Light Emitting Diode, OLED) or on the surface of the substrate of liquid crystal display (hereinafter referred to as " substrate "), relate in particular to and to become film detection apparatus by the film forming that substrate surface is coated in measurement with the crooked bad substrate that the distance inspection between substrate edge part is coated the film forming of substrate surface.
Background technology
Thin-film transistor LCD device substantially by the lower basal plate that is used to form thin film transistor (TFT) and be used to form the upper substrate of color filter and flow into lower basal plate and upper substrate between liquid crystal consist of, the technique of making described liquid crystal indicator can be divided into thin film transistor (TFT) (TFT) operation, unit (cell) operation, these three parts of module operation.
Described TFT operation and semiconductor manufacturing process are closely similar, are a kind ofly thin film transistor (TFT) to be aligned to by repeatedly carrying out evaporation operation (deposition) and photo-mask process (photolithography) and etching work procedure the operation of making on substrate.
In described cell processes, form alignment film at TFT lower plate and the upper plate that is formed with color filter (Color filter), and orientation is scattered sept (Spacer), and is printed by sealing (seal) and fit for making after liquid crystal arranges on alignment film preferably.Utilize capillarity that Liquid crystal pour is arrived after fitting inner, then seal inlet, complete thus the manufacturing process for liquid crystal indicator.
Described module process is definite step that finally passes to user's product quality, paste Polarizer and mount drive integrated circult (Driver-IC) afterwards on the panel of completing, assembling printed circuit board (PCB) (Printed Circuit Board), thereby finally assemble back light unit and structural member, complete thus Liquid Crystal Module.
In addition, OLED is by making the unit evaporation organic substance between upper plate and lower glass sheet, this OLED has advantages of can be under lower voltage driven and can manufacture thinner slim, and have wider visual angle and a response speed faster, even therefore watch in a side, image quality can not change yet, and can residual image retention on picture yet, and this point is different from general LCD.
And, aspect small-sized picture, owing to having image quality and the simple manufacturing process that exceeds LCD, therefore have the remunerative price competitive power.
This OLED is for colored display mode, have three looks (red, green, blue) independent pixel mode, color conversion mode (CCM) and colour filter mode, and be divided into low Molecule OLEDs and macromolecule OLED according to the luminescent material that is used for display, be divided into type hand type of drive (passive matrix) and active type of drive (active matrix) according to type of drive.
And OLED compares LCD, PDP, and not only structurally simpler, thickness is thinner, but also have can be crooked characteristic, therefore make the prospect in market of flexible display brighter.
At this moment, in the technique of the substrate of making described LCD or OLED, for a plurality of film forming that coating is formed at described substrate surface, should fitly arrange according to its coating, if its arrangement generation is bad, have the bad problem of demonstration of substrate.
Namely; on the surface of substrate during coating film forming; level between the marginal portion of film forming and substrate and vertical range should be constant; but when coating forms film forming on the surface of substrate; the described film forming that often can occur to be coated with and the level of substrate edge part and vertical range crooked and and inconstant situation, and checked in the past that the crooked device of this film forming did not exist.
Summary of the invention
The present invention proposes in order to address the above problem, it is a kind of by producing whether constant device of the level that checks the film forming of coating substrate surface and substrate edge part and vertical range that its purpose is to provide, effectively check the crooked bad of the film forming coat substrate surface, and can prevent under the state of the manufacturing of completing LCD or OLED product through process chamber by this inspection, become film detection apparatus because becoming the uneven bad substrate of demonstration that causes of film location.
To achieve these goals, substrate of the present invention becomes film detection apparatus to comprise: inspecting stand; Lighting module is arranged in the lower end of described inspecting stand, to be used for when the substrate that is coated with film forming passes through described inspecting stand to described substrate radiation source; Camera model is arranged in the upper end of described lighting module, being used for when from described lighting module to the substrate radiation source, and the surface of the described substrate of shooting and transverse part edge and longitudinal part edge; And inspection unit, control the action of described lighting module and described camera model, and whether be respectively distance in normal range from the distance that the transverse part edge of the film forming of substrate surface and substrate and longitudinal part edge are coated in the image information inspection of being taken by described camera model.
And, the linescan cameras of described camera model for being used in the line scanning mode, the surface of mobile substrate and transverse part edge and longitudinal part edge being taken.
And described lighting module is any one in xenon lamp, Halogen lamp LED, high-frequency florescent lamp, light emitting diode illuminator.
And; described inspection unit is equipped with scrutiny program; this scrutiny program is used for after the image information of being taken by camera model calculates the distance at the transverse part edge of the film forming of coating substrate surface and substrate and longitudinal part edge; its calculated value and normal range reference value are compared calculating, whether normal or crooked bad to check.
And, stored the normal range reference value for the distance at the transverse part edge of the film forming of coating described substrate surface and substrate and longitudinal part edge in described detecting unit.
And, coat the distance at transverse part edge of the film forming of described substrate surface and substrate by the datum length of the every pixel of pixel count computing (multiplication) between the film forming measured from image information and transverse part edge is calculated, coat the distance at longitudinal part edge of the film forming of described substrate surface and substrate by to calculating from the datum length of the every pixel of pixel count computing (multiplication) between the film forming of image information mensuration and longitudinal part edge.
As mentioned above, the present invention is configured for checking whether constant device of the level of the film forming of coating substrate surface and substrate edge part and vertical range, can expect following effect by this device, namely effectively check out the crooked bad of the film forming of coating substrate surface that is difficult to the naked eye identify, prevent that simultaneously the demonstration that causes because film forming is crooked is bad under the state of the manufacturing of completing LCD or OLED product through process chamber.
Description of drawings
Fig. 1 illustrates the side view that becomes the structure of film detection apparatus as the substrate of embodiments of the invention;
Fig. 2 illustrates the vertical view that becomes the structure of film detection apparatus as the substrate of embodiments of the invention;
Fig. 3 is the skeleton diagram that illustrates as the image information of the substrate that is formed with film forming that is produced by camera model of embodiments of the invention;
Fig. 4 is the enlarged drawing as Fig. 3 of embodiments of the invention, is the enlarged drawing of marginal portion that is coated with the substrate of individual layer film forming;
Fig. 5 illustrates the block scheme that becomes the summary of film detection apparatus as the substrate of embodiments of the invention;
Fig. 6 is the enlarged drawing as the marginal portion of the substrate that is coated with the multilayer film forming of another embodiment of the present invention.
Symbol description:
10: inspecting stand 20: lighting module
30: camera model 40: inspection unit
100: substrate 101,101a, 101b: film forming
Embodiment
Below, illustrate referring to the drawings embodiments of the invention.
Fig. 1 illustrates the side view that becomes the structure of film detection apparatus as the substrate of embodiments of the invention, Fig. 2 illustrates the vertical view that becomes the structure of film detection apparatus as the substrate of embodiments of the invention, Fig. 3 is the skeleton diagram that illustrates as the image information of the substrate that is formed with film forming that is produced by camera model of embodiments of the invention, Fig. 4 is the enlarged drawing as Fig. 3 of embodiments of the invention, be the enlarged drawing of marginal portion that is coated with the substrate of individual layer film forming, Fig. 5 illustrates the block scheme that becomes the summary of film detection apparatus as the substrate of embodiments of the invention.
Referring to figs. 1 through Fig. 5, the substrate that embodiments of the invention provide becomes film detection apparatus to be arranged at be used to the inspecting stand 10 that drops into described substrate 100, be applied on described substrate 100 and when forming pattern with a plurality of film forming 101 that will comprise Kapton on the surface of substrate 100, check whether described film forming 101 is crooked, this lighting module 20, camera model 30 and the inspection unit 40 of the present invention includes.
Described lighting module 20 is any one in xenon lamp, Halogen lamp LED, high-frequency florescent lamp, light emitting diode illuminator, its lower end at described inspecting stand 10 is arranged along the Width that the incidence (length direction) with substrate 100 intersects vertically, and constitute when being coated with the described inspecting stand 10 of substrate process of film forming 101, to the surface irradiation light source of described substrate 100 from needless to say, also to the transverse part edge H of described substrate 100 and longitudinal part edge V radiation source.
Described camera model 30 is arranged in the upper end of described inspecting stand 10, its constitute to through the surface of the substrate 100 of described inspecting stand 10 from needless to say, after taking in the line scanning mode through the transverse part edge H of the substrate 100 of described inspecting stand 10 and longitudinal part edge V, this is offered described inspection unit 40.
Namely, described camera model 30 constitutes light source according to the surface that exposes to substrate 100 from described lighting module 20 from needless to say, according to expose to the transverse part edge H of substrate 100 and the light source of longitudinal part edge V from described lighting module 20, the surface of mobile base stage 100 from needless to say, is taken in the line scanning mode transverse part edge H and the longitudinal part edge V of mobile substrate 100.
Described inspection unit 40 is equipped with for ON/OFF and controls the control program of action of described lighting module 20 and camera model 30 from needless to say, also be equipped with for the transverse part edge H of the film forming 101 on the surface that is applied to substrate 100 from the image information inspection of being taken by described camera model 30 and substrate 100 and longitudinal part edge V whether belong to respectively distance in normal range apart from d1, d2, perhaps whether due to the crooked scrutiny program of keeping improper distance.
Namely, described inspection unit 40 from the image information of being taken by camera model 30 calculate respectively the film forming 101 of coating substrate 100 surfaces and substrate 100 transverse part edge H apart from d1 and with longitudinal part edge V apart from after d2, its calculated value and the normal range reference value that has stored are compared computing, whether crooked badly check thus.
At this moment, coat the film forming 101 on 100 surface of described substrate and substrate 100 transverse part edge H apart from d1 by the film forming 101 of measuring from image information and the datum lengths (for example 46 μ m) that the number of the pixel (Pixel) between transverse part edge H multiply by every pixel are calculated, coat 100 the film forming 101 on surface and calculating by the datum length (for example 46 μ m) that film forming 101 and the pixel count between longitudinal part edge V from image information mensuration be multiply by every pixel apart from d2 of longitudinal part edge V of described substrate.
As extremely shown in Figure 5 in Fig. 1, in the substrate that the embodiments of the invention that as above consist of provide becomes film detection apparatus, at first present dynasty's inspecting stand 10 sides drop into the surface when being coated with the substrate 100 of film forming 101, the action that 40 pairs of inspection units are arranged at the lighting module 20 of inspecting stand 10 is controlled from needless to say, also the action of the camera model 30 that is arranged at inspecting stand 10 is controlled.
That is, 40 pairs of described inspection units are fixedly installed on the action of camera model 30 of the upper end of described inspecting stand 10 and control from needless to say, also fixed and arranged are controlled in the action of the lighting module 20 of the strip of the lower end of described inspecting stand 10.Described lighting module 20 is to substrate 100 radiation sources through inspecting stand 10, and after the camera model 30 that is arranged in the upside of described inspecting stand 10 takes transverse part edge H and longitudinal part edge V through the substrate 100 of described inspecting stands 10, be sent to inspection unit 40.
After this, described inspection unit 40 drives scrutiny programs, whether crookedly detects the film forming 101 on the surface of coating substrate 100 from the image information of being taken by described camera model 30 thus.
Namely, described inspection unit 40 stored for the normal range reference value of distance d1 and for the information of the normal range reference value of distance d2 (at this, described normal range reference value is by each manufacturer Set arbitrarily separately, its reference value might be different), described is the distance of film forming 101 and the transverse part edge H of substrate 100 of coating the surface of substrate 100 apart from d1, and described is the distance of film forming 101 and the longitudinal part edge V of substrate 100 of coating the surface of described substrate 100 apart from d2.
Check the number of the pixel unit 40 through the operation (multiplication) from the image information captured by the camera module 30 is provided for measuring the lateral edges of the film 101 between a reference length H of each pixel (e.g., 46μm) calculated the distance d1 of the coated surface of the substrate 100 and the substrate 101 forming the lateral edge portions 100 of the H while the information from the image by the camera module 30 taken by the measurement of the film provided with the longitudinal portion 101 each pixel is an edge pixel number calculation between V (multiply) the reference length (e.g. 46μm) was applied to calculate the surface of the substrate 100 and the substrate 101 forming the longitudinal edges 100 of the distance V d2.
Then, described inspection unit 40 is the film forming 101 of coating the surface and the transverse part edge H of substrate 100 and comparing with the normal range reference value that has stored apart from d1, d2 of longitudinal part edge V that calculate, thus judgement coat the film forming 101 on described substrate 100 surfaces be form under crooked state coating or normally applied.
As an example, because pixel in the image information of being taken by described camera model 30 has the length of 46 μ m, therefore when being assumed to be in the image information of being taken by described camera model 30, between the transverse part edge H of substrate 100 and film forming 101 be 252 pixels apart from d1 the time, between the described transverse part edge H that calculates and film forming 101 is 252 pixels * 46 micron=11.592mm apart from d1, and whether that then confirms to calculate describedly belongs in the normal range reference value scope that has stored in described inspection unit 40 apart from d1 (d1=11.592mm).
And then, because pixel in the image information of being taken by described camera model 30 has the length of 46 μ m, therefore when being assumed to be in the image information of being taken by described camera model 30, between the longitudinal part edge V of substrate 100 and film forming 101 be 147 pixels apart from d2 the time, calculating between described longitudinal part edge V and film forming 101 is 147 pixels * 46 micron=6.762mm apart from d2, and whether that then confirms to calculate describedly belongs in the normal range reference value scope that has stored in described inspection unit 40 apart from d2 (d1=6.762mm).
Accordingly, when described inspection unit 40 is judged as from described comparative result calculate identical or close with reference value in normal range apart from d1, d2, be judged to be the applied one-tenth of film forming 101 on the surface of coating described substrate 100 without crooked and normal.
In addition, although in the embodiment of described Fig. 1 to Fig. 5 to film forming 101 with the surface of single coating in substrate 100, and the crooked bad situation that checks this individual layer film forming 101 is illustrated, but as other shown in Figure 6, described inspection unit 40 can also check out that with multi-layer coated this multilayer film forming 101,101a, 101b's is crooked bad during in described substrate 100 surperficial in film forming 101,101a, 101b.
Namely, as shown in Figure 6, when being coated with multilayer film forming 101,101a, 101b on substrate 100, described inspection unit 40 is according at first from transverse part edge H and longitudinal part edge V film forming 101b farthest from substrate 100, the minimum film forming 101b of size that namely coats the film forming on described substrate 100 surfaces begin to the order (101b → 101a → 101) of the film forming 101 of maximum calculate distance (d1 "; d2 ") (d1 ', d2 ') (d1, d2) get final product, this computing method embodiment with aforesaid Fig. 1 to Fig. 5 respectively are identical.
Above, although accompanying drawings substrate of the present invention become the technological thought of film detection apparatus,, this only exemplary illustration the embodiment of the best of the present invention, the present invention is not limited thereto.
Accordingly, the present invention is not limited to the preferred embodiment with above-mentioned feature, should know for the technician with common knowledge of technical field of the present invention, in the situation that do not break away from the purport of the present invention that claims are asked, anyone can carry out various distortion, and such change all belongs to the scope that claims are asked.
Claims (6)
1. a substrate becomes film detection apparatus, it is characterized in that, comprising:
Inspecting stand;
Lighting module is arranged in the lower end of described inspecting stand, to be used for when the substrate that is coated with film forming passes through described inspecting stand to described substrate radiation source;
Camera model is arranged in the upper end of described lighting module, being used for when from described lighting module to the substrate radiation source, and the surface of the described substrate of shooting and transverse part edge and longitudinal part edge; And
Inspection unit, control the action of described lighting module and described camera model, and whether be respectively distance in normal range from the distance that the transverse part edge of the film forming of substrate surface and substrate and longitudinal part edge are coated in the image information inspection of being taken by described camera model.
2. substrate as claimed in claim 1 becomes film detection apparatus, it is characterized in that, the linescan cameras of described camera model for being used in the line scanning mode, the surface of mobile substrate and transverse part edge and longitudinal part edge being taken.
3. substrate as claimed in claim 1 becomes film detection apparatus, it is characterized in that, described lighting module is any one in xenon lamp, Halogen lamp LED, high-frequency florescent lamp, light emitting diode illuminator.
4. substrate as claimed in claim 1 becomes film detection apparatus; it is characterized in that; described inspection unit is equipped with scrutiny program; this scrutiny program is used for after the image information of being taken by camera model calculates the distance at the transverse part edge of the film forming of coating substrate surface and substrate and longitudinal part edge; its calculated value and normal range reference value are compared calculating, whether normal or crooked bad to check.
5. substrate as claimed in claim 4 becomes film detection apparatus, it is characterized in that, has stored the normal range reference value for the distance at the transverse part edge of the film forming of coating described substrate surface and substrate and longitudinal part edge in described detecting unit.
6. substrate as claimed in claim 5 becomes film detection apparatus, it is characterized in that, coating the distance at the transverse part edge of the film forming of described substrate surface and substrate calculates by the datum length that the pixel count between the film forming measured from image information and transverse part edge be multiply by every pixel
Coating the distance at the longitudinal part edge of the film forming of described substrate surface and substrate calculates by the datum length that the pixel count between the film forming measured from image information and longitudinal part edge be multiply by every pixel.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510667059.0A CN105388160A (en) | 2011-12-02 | 2012-01-13 | Inspecting method and inspecting unit of substrate |
| CN201610515785.5A CN106226312A (en) | 2011-12-02 | 2012-01-13 | Substrate becomes film detection apparatus |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2011-0128434 | 2011-12-02 | ||
| KR1020110128434A KR101231184B1 (en) | 2011-12-02 | 2011-12-02 | Permeable membrane inspecting device of glass |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510667059.0A Division CN105388160A (en) | 2011-12-02 | 2012-01-13 | Inspecting method and inspecting unit of substrate |
| CN201610515785.5A Division CN106226312A (en) | 2011-12-02 | 2012-01-13 | Substrate becomes film detection apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103134806A true CN103134806A (en) | 2013-06-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012100133625A Pending CN103134806A (en) | 2011-12-02 | 2012-01-13 | Inspecting device of substrate membrane-forming |
| CN201610515785.5A Withdrawn CN106226312A (en) | 2011-12-02 | 2012-01-13 | Substrate becomes film detection apparatus |
| CN201510667059.0A Pending CN105388160A (en) | 2011-12-02 | 2012-01-13 | Inspecting method and inspecting unit of substrate |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610515785.5A Withdrawn CN106226312A (en) | 2011-12-02 | 2012-01-13 | Substrate becomes film detection apparatus |
| CN201510667059.0A Pending CN105388160A (en) | 2011-12-02 | 2012-01-13 | Inspecting method and inspecting unit of substrate |
Country Status (2)
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| KR (1) | KR101231184B1 (en) |
| CN (3) | CN103134806A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105091843A (en) * | 2015-06-25 | 2015-11-25 | 深圳市华星光电技术有限公司 | Method for measuring film contraction |
| CN108120726A (en) * | 2017-12-30 | 2018-06-05 | 苏州宁林光电科技有限公司 | For the automatic detection device of soft board reinforcing piece |
| CN110709975A (en) * | 2017-05-03 | 2020-01-17 | 应用材料公司 | Image-based substrate mapper |
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| KR20010067653A (en) * | 2001-03-02 | 2001-07-13 | 김찬호 | Curing agent for allergic rhinitis and asthma, and the manufacturing method thereof |
| CN104112687A (en) * | 2014-06-24 | 2014-10-22 | 京东方科技集团股份有限公司 | Membrane edge detection method and membrane edge detection apparatus |
| CN107727654B (en) * | 2017-09-29 | 2019-12-24 | 绵阳京东方光电科技有限公司 | Film detection method, device and system |
| CN108896708A (en) * | 2018-05-31 | 2018-11-27 | 武汉华星光电技术有限公司 | Film detecting device and film detection method |
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| CN105091843A (en) * | 2015-06-25 | 2015-11-25 | 深圳市华星光电技术有限公司 | Method for measuring film contraction |
| CN105091843B (en) * | 2015-06-25 | 2018-01-23 | 深圳市华星光电技术有限公司 | A kind of method for measuring film contracting |
| CN110709975A (en) * | 2017-05-03 | 2020-01-17 | 应用材料公司 | Image-based substrate mapper |
| CN110709975B (en) * | 2017-05-03 | 2023-08-08 | 应用材料公司 | Image-based substrate mapper |
| CN108120726A (en) * | 2017-12-30 | 2018-06-05 | 苏州宁林光电科技有限公司 | For the automatic detection device of soft board reinforcing piece |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105388160A (en) | 2016-03-09 |
| CN106226312A (en) | 2016-12-14 |
| KR101231184B1 (en) | 2013-02-07 |
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