CN103084944A - Polycrystalline silicon numerically controlled grinder - Google Patents

Polycrystalline silicon numerically controlled grinder Download PDF

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Publication number
CN103084944A
CN103084944A CN 201310021765 CN201310021765A CN103084944A CN 103084944 A CN103084944 A CN 103084944A CN 201310021765 CN201310021765 CN 201310021765 CN 201310021765 A CN201310021765 A CN 201310021765A CN 103084944 A CN103084944 A CN 103084944A
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CN
China
Prior art keywords
grinding
support
motor
mobile
clamping
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Pending
Application number
CN 201310021765
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Chinese (zh)
Inventor
权占群
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Dalian Linton NC Machine Co Ltd
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Dalian Linton NC Machine Co Ltd
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Application filed by Dalian Linton NC Machine Co Ltd filed Critical Dalian Linton NC Machine Co Ltd
Priority to CN 201310021765 priority Critical patent/CN103084944A/en
Publication of CN103084944A publication Critical patent/CN103084944A/en
Pending legal-status Critical Current

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Abstract

A polycrystalline silicon numerically controlled grinder comprises a machine base, grinding mechanisms and a movable screw rod which is arranged in the longitudinal direction. A screw nut which fits in with the movable screw rod is arranged in a screw nut seat through an axletree. The screw nut is connected with an output end of a movable motor through a transmission mechanism. The movable motor is fixed on the screw nut seat. A movable sliding table is fixedly connected with the screw nut seat. The movable sliding table is connected with the machine base in a sliding mode. A clamp body is connected with the movable sliding table. A left clamp head body is fixedly connected with the left end of the clamp body. The clamp body is provided with a clamping screw rod in a supporting mode. The clamping screw rod is connected with an output shaft of a clamping motor. A clamping screw nut which fits in with the clamping screw rod is connected with a right clamp head body. A left clamp head is connected with the left clamp head body in a rotating mode. A right clamp head is connected with the right clamp head body in the rotating mode. The left clamp head is connected with a rotating mechanism. The polycrystalline silicon numerically controlled grinder has the advantages of being simple in whole structure, flexible and reliable in movement, high in efficiency, accurate in size controlling, good in stability, and capable of reducing machining cost due to the fact that two groups of opposite side faces and chamfers of a workpiece are grinded after the workpiece is clamped once.

Description

The polysilicon block numerically control grinder
Technical field
The present invention relates to a kind of equipment of grinding work piece, particularly a kind of polysilicon block numerically control grinder.
Background technology
Present polysilicon side's grinding machine tool comprises support, symmetrical grinding head mechanism is arranged on support, only can carry out grinding to two relative sides of silicon side after silicon side on work stage one time clamp, carry out grinding and another two relative side grinding is needed manually again to load and unload silicon Fang Houzai.And the chamfering grinding of silicon side needs to carry out separately on silicon side's chamfering grinding equipment, and its method for grinding is identical with side grinding machine mode.The machine tool structure form is: Double-face horizontal configuration, and the feeding slide unit is arranged at lathe base, and grinding machine head is positioned at workbench both sides.The feeding slide unit is motor-driven reductor ball-screw-transmission, and main shaft adopts motor by belt transmission, and silicon side's fixture is installed on workbench (only has clamping function), cylinder clamping, silicon side's pneumatic means centering.On it, not only working (machining) efficiency is low, and the chip removal condition is poor and due to factor impacts such as silicon side's repetition clamps, this makes, and in process, probabilistic factor increases, and is difficult to effectively control well the stability of silicon side's machining accuracy and precision comprehensively.In addition, identical output will increase the quantity required of equipment, increase use cost.
Summary of the invention
The purpose of this invention is to provide that a kind of workpiece clamped one time can carry out grinding to two groups of relative sides and chamfering, overall structure is simple, flexible movements are reliable, efficient is high, size Control is accurate, the polysilicon block numerically control grinder of good stability, overcomes the deficiencies in the prior art.
Polysilicon block numerically control grinder of the present invention comprises support, is positioned at front side and posterior lateral at the middle part of support and is respectively equipped with symmetrical grinding mechanism, and grinding mechanism is arranged on the grinding slide unit; Longitudinal bracing has mobile leading screw above support, and the screw that matches with mobile leading screw is arranged in nut seat by bearing and the output shaft by transmission mechanism and mobile motor joins, and mobile motor is fixed on nut seat; Be fixedly connected with Mobile Slide with nut seat, between Mobile Slide and support for being slidably connected; Mobile Slide is connected with clamp body, the left end of clamp body is fixedly connected with left collet body, the clamp body upper support has the clamping leading screw, clamp the output shaft that leading screw connects clamping motor, the clamping screw and the right collet body that match with the clamping leading screw join, and left collet body and right collet body are rotatably connected to respectively left chuck and right chuck; Left chuck switches through actuation mechanism.
Polysilicon block numerically control grinder of the present invention, wherein said grinding mechanism comprises the grinding spindle that is fixed on the grinding slide unit, and power shaft and the grinding motor of grinding spindle join, and output shaft and mill join.
Polysilicon block numerically control grinder of the present invention, wherein said grinding slide unit is seated on the grinding track, the grinding track is fixed on grinding seat, and grinding seat is fixedly connected with support, is provided with the bolt and nut driving mechanism that joins with the grinding and feeding motor between grinding slide unit and grinding seat.
Polysilicon block numerically control grinder of the present invention is provided with line slideway between wherein said Mobile Slide and support.
Polysilicon block numerically control grinder of the present invention is equipped with rotary electric machine on wherein said clamp body, and rotary electric machine joins with the rotation decelerator, and the output shaft that rotates decelerator is connected with the rotating shaft of left chuck by transmission mechanism.
Polysilicon block numerically control grinder of the present invention, the left part of wherein said support are equipped with size detection mechanism and the workpiece of workpiece and locate adjusting mechanism.
Polysilicon block numerically control grinder overall structure of the present invention is simple, and flexible movements are reliable, and efficient is high, and size Control is accurate, and good stability can carry out grinding to two groups of workpiece relative sides and chamfering after the clamped one time workpiece, has reduced processing cost.
Description of drawings
Fig. 1 is the structural representation of the specific embodiment of the invention;
Fig. 2 is that K shown in Figure 1 is to schematic diagram.
The specific embodiment
As shown in Figure 1, 2: 21 is support, is positioned at front side and posterior lateral at the middle part of support 21 and is respectively equipped with symmetrical two couple totally four groups of grinding mechanisms, and grinding mechanism is arranged on grinding slide unit 23.Grinding mechanism comprises the grinding spindle 31 that is fixed on grinding slide unit 23, the power shaft of grinding spindle 31 and grinding motor 24 join, output shaft end is equipped with mill 32, and mill 32 is the plate-like emery wheel, and the termination of the termination of grinding motor 24 and grinding spindle 31 is bolted to connection.
Grinding slide unit 23 is seated on grinding track 25 by the slide block of its below, grinding track 25 is fixed on grinding seat 26, grinding seat 26 is fixedly connected with support 21, is provided with the bolt and nut driving mechanism that joins with grinding and feeding motor 27 between grinding slide unit 23 and grinding seat 26.Can drive grinding slide unit 23 with respect to support 21 transverse shiftings by bolt and nut during 27 action of grinding and feeding motor.
Vertically by stent support, mobile leading screw 10 is arranged above support 21, the screw that matches with mobile leading screw 10 is arranged in nut seat 6 and by the output shaft of driving-belt 34 with mobile motor 4 by bearing and joins, and mobile motor 4 is fixed on nut seat 6.
Be fixedly connected with Mobile Slide 7 with nut seat 6, between Mobile Slide 7 and support 21 for being slidably connected, be that Mobile Slide 7 is seated in by slide block on the shifting sledge 33 that is fixedly connected with support 21, Mobile Slide 7 also can adopt the line slideway mode to be connected with support 21.Mobile Slide 7 is fixedly connected with clamp body 2, and the left end of clamp body 2 is fixedly connected with left collet body 12.Be supported with by link on clamp body 2 and clamp leading screw 5, clamp the output shaft that leading screw 5 connects clamping motor 1, clamping motor 1 is fixed on clamp body 2.The clamping screw 3 that matches with clamping leading screw 5 is fixedly connected with right collet body 30, and clamping motor 1 can drive and clamp leading screw 5 rotations, moves by clamping the screw 3 right collet bodies 30 of drive simultaneously.Left collet body 12 and right collet body 30 are connected with left chuck 8 and right chuck 29 by rotating shaft respectively.
The rotating shaft of left chuck 8 is joined by belt mechanism and rotation decelerator 11, rotates decelerator 11 and joins with the rotary electric machine 9 that is fixed on clamp body 2.
The left part of support 21 is equipped with size detection mechanism and the workpiece of workpiece and locates adjusting mechanism, comprise by rectilinear orbit and be connected to conveying sliding table 22 on support 21, be provided with the high wide detection of workpiece, detent mechanism 20 above conveying sliding table 22, workpiece by rear wide inspection cramping body 35 with front wide inspection cramping body 36 clampings and take out by sensor size and the height dimension that signal can be understood the relative two sides of workpiece, but wherein, wide inspection cramping body 35 and front wide inspection cramping body 36 have one with conveying sliding table 22 relative slidings and connect driving mechanism.in the wide detection of height, the top of detent mechanism 20 is provided with Workpiece length and detects and adjusting mechanism, comprise the gripper shoe 38 that is fixed on support 21, on gripper shoe 38, reductor is installed, detecting motor 16 is connected with the reductor input, the reductor output connects gear 15, vertical slide plate 18 is connected with gripper shoe 36 by line slideway, upper rack 14 and lower tooth bar 17 are installed on vertical slide plate 18, be fixedly connected with vertical slide plate 18 between two tooth bar terminations and riser 18 and be connected with right clamping plate 13 and left clamping plate 19 by connecting plate, but detecting motor 16 driven gears 15 rotates, drive simultaneously upper rack 14 and lower tooth bar 17 moves, thereby driving left clamping plate 19 and right clamping plate 13 can relatively move, the two ends of holding workpiece, understand the length of workpiece and make in the automatic accent of workpiece by encoder and system's computing.
Above-mentioned each related motor all joins with electric control gear,
The course of work is: by manually workpiece 28 being delivered to size detection mechanism and workpiece location adjusting mechanism, detect the width of the workpiece, be delivered to the adjusting mechanism place by conveying sliding table 22, in being detected height and the length dimension of workpiece and transferred by it.Be delivered to by conveying sliding table 22 and clamp (locating) position (fixture has moved to herein and waited for) in lathe, the screw that mobile motor 4 drives in nut seat 6 rotates, nut seat 6 moves along mobile leading screw 10 simultaneously, drive Mobile Slide 7, clamp body 2, left collet body 12 and left chuck 8 near workpiece 28 left ends (left end displacement), the action by clamping motor 1 pushes away right-hand member by right collet body 30 and right chuck 29 clamping work pieces 28(then).Then move to grinding area, drive 37 pairs of checkout gears workpiece opposite flank by grinding slide unit 23 and detect.Distribute grinding number of times (surplus) through system's computing, grinding motor 24 actions can be with movable grinding disc 32 to rotate, the a pair of side of simultaneously grinding (grinding divides slightly, essence) workpiece, another drives left chuck 8, workpiece 28, the 29 rear grindings of rotation of right chuck to the side by rotary electric machine 9, and it is also to determine to detect or grinding behind the position by rotating manner that the chamfering of workpiece 28 and opposite flank are detected.
Overall structure is simple, and flexible movements are reliable, and efficient is high, and size Control is accurate, and good stability can carry out grinding to two groups of workpiece relative sides and chamfering after the clamped one time workpiece, has reduced processing cost.

Claims (6)

1. a polysilicon block numerically control grinder, comprise support (21), is positioned at front side and posterior lateral at the middle part of support (21) and is respectively equipped with symmetrical grinding mechanism, and grinding mechanism is arranged on grinding slide unit (23); It is characterized in that: longitudinal bracing has mobile leading screw (10) above support (21), the screw that matches with mobile leading screw (10) is arranged in nut seat (6) by bearing and the output shaft by transmission mechanism and mobile motor (4) joins, and mobile motor (4) is fixed on nut seat (6); Be fixedly connected with Mobile Slide (7) with nut seat (6), between Mobile Slide (7) and support (21) for being slidably connected; Mobile Slide (7) is connected with clamp body (2), the left end of clamp body (2) is fixedly connected with left collet body (12), clamp body (2) upper support has clamping leading screw (5), clamp the output shaft that leading screw (5) connects clamping motor (1), the clamping screw (3) that matches with clamping leading screw (5) joins with right collet body (30), and left collet body (12) and right collet body (30) are rotatably connected to respectively left chuck (8) and right chuck (29); Left chuck (8) switches through actuation mechanism.
2. according to claim 1 the polysilicon block numerically control grinder of stating, it is characterized in that: described grinding mechanism comprises the grinding spindle (31) that is fixed on grinding slide unit (23), the power shaft of grinding spindle (31) and grinding motor (24) join, and output shaft and mill (32) join.
3. according to claim 2 the polysilicon block numerically control grinder of stating, it is characterized in that: described grinding slide unit (23) is seated on grinding track (25), grinding track (25) is fixed on grinding seat (26), grinding seat (26) is fixedly connected with support (21), is provided with the bolt and nut driving mechanism that joins with grinding and feeding motor (27) between grinding slide unit (23) and grinding seat (26).
4. according to claim 3 the polysilicon block numerically control grinder of stating, is characterized in that: be provided with line slideway between described Mobile Slide (7) and support (21).
5. according to claim 4 the polysilicon block numerically control grinder of stating, it is characterized in that: rotary electric machine (9) is installed on described clamp body (2), rotary electric machine (9) joins with rotation decelerator (11), and the output shaft that rotates decelerator (11) is connected by the rotating shaft of transmission mechanism with left chuck (8).
6. according to claim 1 and 2 or 3 or 4 or 5 described polysilicon block numerically control grinders is characterized in that: the left part of described support (21) is equipped with size detection mechanism and the workpiece location adjusting mechanism of workpiece.
CN 201310021765 2013-01-22 2013-01-22 Polycrystalline silicon numerically controlled grinder Pending CN103084944A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201310021765 CN103084944A (en) 2013-01-22 2013-01-22 Polycrystalline silicon numerically controlled grinder

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Application Number Priority Date Filing Date Title
CN 201310021765 CN103084944A (en) 2013-01-22 2013-01-22 Polycrystalline silicon numerically controlled grinder

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CN103084944A true CN103084944A (en) 2013-05-08

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108000323A (en) * 2017-12-13 2018-05-08 无锡上机数控股份有限公司 A kind of round as a ball all-in-one machine of numerical control grinding surface chamfer
CN109746803A (en) * 2019-03-27 2019-05-14 青岛高测科技股份有限公司 A kind of double bistrique high efficient grinding mechanisms of semiconductor crystal bar
CN110524344A (en) * 2019-08-20 2019-12-03 青岛高测科技股份有限公司 It is a kind of for being ground the automation equipment and processing method of silicon rod plane and chamfering
CN111515817A (en) * 2020-04-30 2020-08-11 青岛高测科技股份有限公司 Silicon rod grinding and cutting integrated processing method

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108000323A (en) * 2017-12-13 2018-05-08 无锡上机数控股份有限公司 A kind of round as a ball all-in-one machine of numerical control grinding surface chamfer
CN108000323B (en) * 2017-12-13 2024-04-26 无锡上机数控股份有限公司 Numerical control face grinding chamfering and rounding integrated machine
CN109746803A (en) * 2019-03-27 2019-05-14 青岛高测科技股份有限公司 A kind of double bistrique high efficient grinding mechanisms of semiconductor crystal bar
CN109746803B (en) * 2019-03-27 2024-05-31 青岛高测科技股份有限公司 High-efficient grinding mechanism of two bistrique of semiconductor crystal bar
CN110524344A (en) * 2019-08-20 2019-12-03 青岛高测科技股份有限公司 It is a kind of for being ground the automation equipment and processing method of silicon rod plane and chamfering
CN110524344B (en) * 2019-08-20 2023-10-17 青岛高测科技股份有限公司 Automatic equipment and processing method for grinding plane and chamfer of silicon rod
CN111515817A (en) * 2020-04-30 2020-08-11 青岛高测科技股份有限公司 Silicon rod grinding and cutting integrated processing method
CN111515817B (en) * 2020-04-30 2021-07-16 青岛高测科技股份有限公司 Silicon rod grinding and cutting integrated processing method

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Application publication date: 20130508