CN109746803B - High-efficient grinding mechanism of two bistrique of semiconductor crystal bar - Google Patents
High-efficient grinding mechanism of two bistrique of semiconductor crystal bar Download PDFInfo
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- CN109746803B CN109746803B CN201910236177.4A CN201910236177A CN109746803B CN 109746803 B CN109746803 B CN 109746803B CN 201910236177 A CN201910236177 A CN 201910236177A CN 109746803 B CN109746803 B CN 109746803B
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- 238000000227 grinding Methods 0.000 title claims abstract description 129
- 239000013078 crystal Substances 0.000 title claims abstract description 42
- 239000004065 semiconductor Substances 0.000 title claims abstract description 21
- 230000033001 locomotion Effects 0.000 claims abstract description 25
- 230000005540 biological transmission Effects 0.000 claims abstract description 17
- 230000000712 assembly Effects 0.000 claims abstract description 12
- 238000000429 assembly Methods 0.000 claims abstract description 12
- 230000008878 coupling Effects 0.000 claims abstract description 4
- 238000010168 coupling process Methods 0.000 claims abstract description 4
- 238000005859 coupling reaction Methods 0.000 claims abstract description 4
- 238000003825 pressing Methods 0.000 claims description 26
- 238000005192 partition Methods 0.000 claims description 20
- 210000000056 organ Anatomy 0.000 claims description 13
- 238000007789 sealing Methods 0.000 claims description 3
- 229910001651 emery Inorganic materials 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims description 2
- 230000000670 limiting effect Effects 0.000 description 12
- 238000000034 method Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
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Abstract
The invention discloses a high-efficiency grinding mechanism for a double grinding heads of a semiconductor crystal bar, which comprises two grinding feeding assemblies with the same structure, wherein the two grinding feeding assemblies are arranged in the same plane in an opposite and asymmetric manner, each grinding feeding assembly comprises a vertical movement assembly, a main shaft rotation assembly and a transverse feeding assembly, each main shaft rotation assembly comprises a main shaft rotation motor, a transmission shaft, a bearing box and a switching disc, one end of each transmission shaft is connected with the output end of the main shaft rotation motor through a coupling, the other end of each transmission shaft is connected with the switching disc, a grinding wheel is arranged on each switching disc, the main shaft rotation assembly can be arranged on the vertical movement assembly in an up-down sliding manner, and the vertical movement assembly can be arranged on the transverse feeding assembly in a back-and-forth sliding manner along the opposite direction of the two grinding feeding assemblies. The grinding mechanism can control the grinding wheel to move in the horizontal direction and the vertical direction, and realizes the round grinding and the OF surface grinding OF crystal bars with different diameters.
Description
Technical Field
The invention relates to the technical field of semiconductor crystal bar processing, in particular to a double-grinding-head efficient grinding mechanism for a semiconductor crystal bar.
Background
Before slicing a semiconductor crystal bar, the crystal bar needs to be subjected to rounding grinding and OF surface grinding (or V-groove grinding), and the grinding precision tolerance is required to be below 0.04 mm. The grinding positions OF the grinding wheels used when the semiconductor crystal bar is subjected to rounding grinding and the OF surface grinding are different, the upper edge OF the grinding wheel is used when the crystal bar is subjected to rounding grinding, and the center position OF the grinding wheel is used when the crystal bar is subjected to OF surface grinding, so that the grinding wheels are required to realize motion control OF two limit positions in the vertical direction; when crystal bars with different diameters are ground, the grinding wheel is required to realize front-back transverse feeding so as to meet the grinding requirements of the crystal bars with different diameters; the working space for grinding the crystal bar is filled with water mist, so that the grinding head and the whole grinding feeding mechanism are required to maintain good tightness, and components such as an outer cylinder, a motor, a guide rail and the like are isolated from the grinding working space. At present, the grinding efficiency of the grinding head arrangement of the existing grinding equipment in the industry is low, the maximum utilization value of the equipment cannot be exerted, meanwhile, the grinding transverse and vertical feeding precision is low, the grinding high-precision requirement cannot be met, and the manufacturing cost is high.
The present invention has been made in view of the above problems.
Disclosure of Invention
The invention aims to provide a double-grinding-head efficient grinding mechanism for a semiconductor crystal bar, which can control a grinding wheel to move in the horizontal direction and the vertical direction so as to realize the round grinding and the OF surface grinding OF crystal bars with different diameters.
In order to achieve the above purpose, the present invention provides the following technical solutions:
the utility model provides a high-efficient grinding mechanism of two bistriques of semiconductor crystal bar, including two grinding feeding assemblies that the structure is the same, two grinding feeding assemblies are in the same plane in relative but asymmetric setting, the grinding feeding assembly includes vertical motion subassembly, main shaft rotating assembly and transverse feed subassembly, main shaft rotating assembly includes main shaft rotating electrical machines, the transmission shaft, bearing box and switching dish, the one end of transmission shaft passes through the coupling joint with the output of main shaft rotating electrical machines, the other end is connected with the switching dish, the cover is equipped with the bearing on the transmission shaft, transmission shaft and bearing are installed in the bearing box, install the emery wheel on the switching dish, the installation that main shaft rotating assembly can slide from top to bottom is on vertical motion subassembly, vertical motion subassembly can be followed the relative direction round trip sliding of two grinding feeding assemblies and is installed on transverse feed subassembly.
Preferably, the spindle rotating assembly further comprises a sliding support and a motor mounting seat, the bearing box is mounted in the sliding support, and the spindle rotating motor is mounted on the motor mounting seat.
Preferably, the transverse feeding assembly comprises a feeding body shell, a sliding plate and a transverse feeding motor, wherein first guide rails are arranged on the upper end face of the feeding body shell along the two sides of the length direction of the feeding body shell, a screw rod is arranged between the two first guide rails, the sliding plate is connected onto the first guide rails through a sliding block, the sliding plate is connected onto the screw rod through a screw rod nut seat, the output end of the transverse feeding motor is connected with one end of the screw rod, which is far away from the switching disc, and the vertical movement assembly is arranged on the sliding plate.
Preferably, the upper end face of the sliding plate is provided with a positioning shaft, and the lower end face of the vertical movement assembly is provided with a positioning hole matched with the positioning shaft.
Preferably, the vertical movement assembly comprises a locking cylinder, a feeding machine seat and two second guide rails, the locking cylinder is arranged at the upper end of the feeding machine seat, the front end of a piston rod of the locking cylinder penetrates through the upper end face of the feeding machine seat and is fixedly connected to the upper end face of a sliding support, the two second guide rails are vertically arranged on two sides of the vertical end face of the feeding machine seat, and the sliding support is connected to the second guide rails through sliding blocks.
Preferably, the main shaft rotating assembly further comprises an air cylinder connecting flange and an air cylinder connecting sleeve, the front end of a locking air cylinder piston rod is connected with the air cylinder connecting sleeve, and the air cylinder connecting sleeve is fixed on the upper end face of the sliding support through the air cylinder connecting flange.
Preferably, the two second guide rails are vertically arranged on two sides of the vertical end face, close to the adapter plate, of the feeding machine base, and the end face, close to the adapter plate, of the sliding support is connected with the second guide rails through sliding blocks.
Preferably, the upper end surface and the lower end surface of the motor mounting seat, which are close to one end of the adapter plate, are respectively provided with a limiting screw rod, and the upper end and the lower end of the feeding machine seat are respectively provided with a limiting bolt corresponding to the positions of the upper limiting screw rod and the lower limiting screw rod of the motor mounting seat.
Preferably, the grinding feeding device further comprises a circular organ cover and a baffle plate assembly for mutually isolating the grinding feeding assembly and the grinding working space, the baffle plate assembly comprises a baffle plate, a pressing plate and a sliding plate, rectangular holes are formed in the vertical direction of the inside of the baffle plate, the pressing plate is of a U-shaped structure, the opening of the pressing plate is vertically upward or downward, two ends of the horizontal direction of the pressing plate are respectively connected to the baffle plates on two sides of the horizontal direction of the rectangular holes, the sliding plate can be arranged between the pressing plate and the baffle plate in a vertical sliding mode, the pressing plate and the sliding plate are matched to completely cover the rectangular holes, the sliding plate is provided with the circular holes, one end of the bearing box, which is close to the switching disc, passes through the circular holes, the organ cover is sleeved on the bearing box between the baffle plate assembly and the switching disc, one end of the organ cover, which is close to the switching disc, is connected with the bearing box, and the other end of the organ cover is connected with the sliding plate.
Preferably, a sealing strip is arranged between the pressing plate and the partition plate.
Preferably, the end of the opposite end of the open end of the pressure plate is spaced from the bottom end of the "U" shaped opening of the pressure plate by a distance greater than the distance the slide plate slides upward.
Compared with the prior art, the invention has the following beneficial effects:
the invention provides a high-efficiency grinding mechanism for a double grinding head of a semiconductor crystal bar, wherein two grinding feeding assemblies of the grinding mechanism are arranged oppositely but asymmetrically; the grinding mechanism can accurately control the transverse feeding position OF the grinding wheel, realize grinding processing OF crystal bars with different diameters, and can realize motion control OF two limit positions OF the grinding wheel in the vertical direction, so that the grinding feeding assembly can carry out round grinding on the crystal bars and also can carry out OF surface grinding on the crystal bars; the grinding mechanism is provided with an organ cover and a partition plate, which can isolate the grinding working space and the grinding feed assembly from each other.
Drawings
In order to more clearly illustrate the novel embodiments or the technical solutions in the prior art, the drawings that are required in the description of the embodiments or the prior art will be briefly described below, it being obvious that the drawings described below are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a front view of the dual grater efficient grinding mechanism for semiconductor ingots according to the present invention.
Fig. 2 is a top view of the dual-grinding-head efficient grinding mechanism for semiconductor crystal bars of the present invention.
Fig. 3 is a schematic view of the grinding feed assembly of the present invention.
Fig. 4 is a schematic view of the structure of the infeed assembly of the present invention.
Fig. 5 is a schematic structural view of the spindle rotating assembly according to the present invention.
Fig. 6 is a schematic view of the structure of the vertical movement assembly of the present invention.
FIG. 7 is a schematic view of the structure of the separator assembly of the present invention.
In the figure: 1-vertical movement assembly, 2-main shaft rotation assembly, 3-transverse feeding assembly, 4-feeding body shell, 5-first guide rail, 6-positioning shaft, 7-slide plate, 8-screw nut seat, 9-transverse feeding motor, 10-organ cover, 11-cylinder connecting sleeve, 12-limit screw, 13-main shaft rotation motor, 14-adapter plate, 15-bearing box, 16-cylinder connecting flange, 17-sliding support, 18-motor mounting seat, 19-locking cylinder, 20-feeding machine seat, 21-second guide rail, 22-positioning hole, 23-limit bolt, 24-baffle, 25-pressing plate, 26-sliding plate and 27-circular hole.
Detailed Description
The invention aims at providing a high-efficiency grinding mechanism for double grinding heads OF a semiconductor crystal bar, which can control a grinding wheel to move in the horizontal direction and the vertical direction so as to realize the round grinding and the OF surface grinding OF crystal bars with different diameters.
In order to make the technical solution of the present application better understood by those skilled in the art, the technical solution of the present application will be clearly and completely described below with reference to the accompanying drawings. Based on the embodiments of the present application, other similar embodiments, which may be obtained by those of ordinary skill in the art without making any inventive effort, should fall within the scope of the present application.
As shown in fig. 1,2 and 3, the efficient grinding mechanism for the double grinding heads of the semiconductor crystal bar provided in this specific embodiment comprises two grinding feeding assemblies with the same structure, wherein the two grinding feeding assemblies are opposite in the same plane but are asymmetrically arranged, so that when the crystal bar is subjected to rounding grinding, the grinding wheels on two sides can grind the crystal bar at the same time, the grinding efficiency can be doubled, meanwhile, the asymmetrical arrangement form on two sides can ensure that bars gradually enter and exit from a grinding state, and the stability and reliability of the grinding process are ensured. The grinding feed assembly includes a vertical motion assembly 1, a spindle rotation assembly 2, and an infeed assembly 3.
As shown in fig. 4, the infeed assembly 3 includes a feed body housing 4, a slide plate 7 and an infeed motor 9, the upper end surface of the feed body housing 4 is provided with first guide rails 5 along two sides of its length direction, a screw is provided between the two first guide rails 5, the slide plate 7 is connected to the first guide rails 5 through a slide block, and is connected to the screw through a screw nut seat 8, the output end of the infeed motor 9 is connected with one end of the screw far away from a turntable 14, the infeed motor 9 is disposed outside the feed body housing 4, and the slide plate 7 slides back and forth along the first guide rails 5 under the driving of the infeed motor 9 and the screw.
As shown in fig. 5, the spindle rotating assembly 2 includes a spindle rotating motor 13, a transmission shaft, a rotating disc 14, a sliding support 17, a bearing housing 15 and a motor mounting seat 18, one end of the transmission shaft is connected with an output end of the spindle rotating motor 13 through a coupling, the other end of the transmission shaft is connected with the rotating disc 14, a grinding wheel is mounted on the rotating disc 14, a bearing is sleeved on the transmission shaft, the bearing housing 15 is mounted in the sliding support 17, the transmission shaft and the bearing are mounted in the bearing housing 15, the spindle rotating motor 13 is mounted on the motor mounting seat 18, the spindle rotating motor 13 drives the grinding wheel mounted on the rotating disc 14 to rotate through the transmission shaft in the bearing housing 15, and the spindle rotating motor 13 can control the rotating speed of the grinding wheel.
As shown in fig. 6, the vertical movement assembly 1 comprises a locking cylinder 19, a feeding base 20 and two second guide rails 21, the locking cylinder 19 is arranged at the upper end of the feeding base 20, the main shaft rotation assembly 2 further comprises a cylinder connecting flange 16 and a cylinder connecting sleeve 11, the front end of a piston rod of the locking cylinder 19 penetrates through the upper end face of the feeding base 20 to be connected with the cylinder connecting sleeve 11, and the cylinder connecting sleeve 11 is fixed on the upper end face of the sliding support 17 through the cylinder connecting flange 16. The two second guide rails 21 are vertically installed on two sides of the vertical end surface of the feeding machine base 20, which is close to the adapter plate 14, the end surface of the sliding support 17, which is close to the adapter plate 14, is connected with the second guide rails 21 through sliding blocks, and the main shaft rotating assembly 2 slides up and down along the second guide rails 21 under the driving of the locking air cylinders 19.
The upper end surface and the lower end surface of the motor mounting seat 18, which are close to one end of the adapter plate 14, are respectively provided with a limiting screw rod 12, the upper end and the lower end of the feeding seat 20 are respectively provided with a limiting bolt 23 corresponding to the positions of the upper limiting screw rod 12 and the lower limiting screw rod 12 of the motor mounting seat 18, and the limiting screw rod 12 and the limiting bolt 23 are mutually matched, so that a limiting effect is achieved on the up-and-down sliding of the main shaft rotating assembly 2. Because the grinding wheel grinding positions used in the process OF carrying out the round grinding on the crystal bar are different from the grinding wheel grinding positions used in the process OF carrying out the OF surface grinding on the crystal bar, when the upper edge OF the grinding wheel is used for carrying out the round grinding on the crystal bar, the piston rod OF the locking cylinder 19 extends outwards, so that the main shaft rotating assembly 2 is driven to move downwards along the second guide rail 21 until the limit screw rod 12 at the lower end OF the motor mounting seat 18 is contacted with the limit screw rod 23 at the lower end OF the feeding seat 20, and the main shaft rotating assembly 2 reaches the lower limit position, so that the round grinding on the crystal bar by using the upper edge OF the grinding wheel is realized. When the center position OF the grinding wheel is used for performing OF surface grinding on the crystal bar, the piston rod OF the locking cylinder 19 is retracted back, so that the main shaft rotating assembly 2 is driven to move upwards along the second guide rail 21 until the limit screw 12 at the upper part OF the motor mounting seat 18 is contacted with the limit bolt 23 at the upper end OF the feeding seat 20, and the main shaft rotating assembly 2 reaches the upper limit position, so that the center position OF the grinding wheel is used for performing OF surface grinding on the crystal bar.
The upper end face of the sliding plate 7 is provided with a positioning shaft 6, the lower end face of the vertical movement assembly 1, namely the lower end face of the feeding machine base 20, is provided with a positioning hole 22 matched with the positioning shaft 6, the vertical movement assembly 1 is arranged on the sliding plate 7, the sliding plate 7 slides back and forth along the first guide rail 5 under the driving of the transverse feeding motor 9 and the screw rod, and then the vertical movement assembly 1 and the main shaft rotating assembly 2 can transversely move under the driving of the sliding plate 7, so that the transverse position of a grinding wheel is adjusted, crystal bars with different diameters are ground, and the transverse feeding position of the transverse feeding motor 9 can be accurately controlled.
In actual production, the crystal bar is ground under the flushing effect of water flow, so that the grinding working space and the grinding feeding assembly are required to be isolated from each other, and the semiconductor crystal bar double-grinding head efficient grinding mechanism further comprises the circular organ cover 10 and the partition plate assembly for isolating the grinding feeding assembly and the grinding working space from each other, wherein the partition plate assembly can completely isolate the grinding feeding assembly from the grinding working space, prevents the influence of water mist on each part of the grinding feeding assembly, and prolongs the service life of the grinding feeding assembly. As shown in fig. 7, the partition plate assembly includes a partition plate 24, a pressing plate 25 and a sliding plate 26, a rectangular hole is formed in the vertical direction inside the partition plate 24, the pressing plate 25 is in a "U" structure, the opening of the pressing plate 25 is vertically upward or downward, in this embodiment, the opening of the pressing plate 25 is vertically upward, two ends of the pressing plate 25 in the horizontal direction are respectively connected to the partition plate 24 on two sides of the rectangular hole in the horizontal direction, the lower end of the pressing plate 25 in the vertical direction is connected to the partition plate 24 on the lower side of the rectangular hole in the vertical direction, the distance between the end of the lower end of the pressing plate 25 in the vertical direction and the bottom end of the opening of the pressing plate 25 in the "U" shape is greater than the distance of the sliding plate 26 in the upward sliding direction, the sliding plate 26 is slidably arranged between the pressing plate 25 and the partition plate 24, the sliding plate 26 slides up and down along with the up-down movement of the spindle rotating assembly 2, a sealing strip is arranged between the pressing plate 25 and the partition plate 24, and the pressing plate 25 is matched with the sliding plate 26 to completely cover the rectangular hole, thereby ensuring the isolation effect of the partition plate assembly. The sliding plate 26 is provided with a circular hole 27, one end of the bearing box 15, which is close to the adapter plate 14, passes through the circular hole 27, the organ cover 10 is sleeved on the bearing box 15 between the baffle plate assembly and the adapter plate 14, one end of the organ cover 10, which is close to the adapter plate 14, is connected with the bearing box 15, and the other end of the organ cover 10 is connected with the sliding plate 26, so that the grinding working space and the grinding feeding assembly are isolated.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.
Claims (6)
1. The utility model provides a high-efficient grinding mechanism of two bistriques of semiconductor crystal bar, a serial communication port, including two grinding feeding assemblies that the structure is the same, two grinding feeding assemblies are in the coplanar relative but asymmetric setting, grinding feeding assembly includes vertical motion subassembly (1), main shaft rotating assembly (2) and transverse feed subassembly (3), main shaft rotating assembly (2) include main shaft rotating electrical machines (13), the transmission shaft, bearing housing (15) and switching dish (14), the output of transmission shaft and main shaft rotating electrical machines (13) passes through the shaft coupling, the other end is connected with switching dish (14), the cover is equipped with the bearing on the transmission shaft, transmission shaft and bearing are installed in bearing housing (15), install the emery wheel on switching dish (14), main shaft rotating assembly (2) slidable up and down installs on vertical motion subassembly (1), vertical motion subassembly (1) can be along the installation on transverse feed subassembly (3) of the direction that two grinding feeding assemblies are relative back and forth;
The main shaft rotating assembly (2) further comprises a sliding support (17) and a motor mounting seat (18), the bearing box (15) is mounted in the sliding support (17), and the main shaft rotating motor (13) is mounted on the motor mounting seat (18);
The transverse feeding assembly (3) comprises a feeding body shell (4), a sliding plate (7) and a transverse feeding motor (9), wherein first guide rails (5) are arranged on two sides of the upper end face of the feeding body shell (4) along the length direction of the feeding body shell, a screw rod is arranged between the two first guide rails (5), the sliding plate (7) is connected to the first guide rails (5) through the sliding block and is connected to the screw rod through a screw rod nut seat (8), the output end of the transverse feeding motor (9) is connected with one end of the screw rod, far away from a switching disc (14), and the vertical movement assembly (1) is arranged on the sliding plate (7);
A positioning shaft (6) is arranged on the upper end surface of the sliding plate (7), and a positioning hole (22) matched with the positioning shaft (6) is arranged on the lower end surface of the vertical movement assembly (1);
The vertical movement assembly (1) comprises a locking air cylinder (19), a feeding machine seat (20) and two second guide rails (21), wherein the locking air cylinder (19) is arranged at the upper end of the feeding machine seat (20), the front end of a piston rod of the locking air cylinder (19) penetrates through the upper end face of the feeding machine seat (20) to be fixedly connected onto the upper end face of a sliding support (17), the two second guide rails (21) are vertically arranged on two sides of the vertical end face of the feeding machine seat (20), and the sliding support (17) is connected onto the second guide rails (21) through sliding blocks.
2. The efficient grinding mechanism for the semiconductor crystal bar double grinding heads according to claim 1, wherein the main shaft rotating assembly (2) further comprises a cylinder connecting flange (16) and a cylinder connecting sleeve (11), the front end of a piston rod of the locking cylinder (19) is connected with the cylinder connecting sleeve (11), and the cylinder connecting sleeve (11) is fixed on the upper end face of the sliding support (17) through the cylinder connecting flange (16).
3. The efficient grinding mechanism for the double grinding heads of the semiconductor crystal bars according to claim 2, wherein two second guide rails (21) are vertically installed on two sides of a vertical end face, close to the rotating disc (14), of the feeding base (20), and the end face, close to the rotating disc (14), of the sliding support (17) is connected with the second guide rails (21) through sliding blocks.
4. A semiconductor crystal bar double grinding head efficient grinding mechanism according to claim 2 or 3, characterized in that the upper and lower end surfaces of the motor mounting seat (18) close to one end of the adapter plate (14) are respectively provided with a limit screw (12), and the upper and lower ends of the feeding seat (20) are respectively provided with limit bolts (23) corresponding to the positions of the upper and lower limit screws (12) of the motor mounting seat (18).
5. The efficient grinding mechanism for the semiconductor crystal bar double grinding heads according to claim 4, further comprising a circular organ cover (10) and a partition plate assembly for mutually isolating the grinding feed assembly and the grinding working space, wherein the partition plate assembly comprises a partition plate (24), a pressing plate (25) and a sliding plate (26), rectangular holes are formed in the vertical direction inside the partition plate (24), the pressing plate (25) is of a U-shaped structure, an opening of the pressing plate (25) is vertically upward or downward, two ends of the pressing plate (25) in the horizontal direction are respectively connected to the partition plate (24) on two sides of the rectangular holes, the sliding plate (26) can be arranged between the pressing plate (25) and the partition plate (24) in a vertical sliding mode, the pressing plate (25) and the sliding plate (26) are matched to completely cover the rectangular holes, the sliding plate (26) is provided with a circular hole (27), one end of a bearing box (15) close to a switching disc (14) penetrates through the circular hole (27), the organ cover (10) is sleeved on the bearing box (15) between the partition plate assembly and the switching disc (14), two ends of the organ cover (10) close to the switching disc (14) are respectively connected to one end of the organ cover (14), which is connected to the other end of the bearing box (26).
6. The efficient grinding mechanism for the double grinding heads of the semiconductor crystal bars according to claim 5, wherein a sealing strip is arranged between the pressing plate (25) and the partition plate (24).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910236177.4A CN109746803B (en) | 2019-03-27 | 2019-03-27 | High-efficient grinding mechanism of two bistrique of semiconductor crystal bar |
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| CN201910236177.4A CN109746803B (en) | 2019-03-27 | 2019-03-27 | High-efficient grinding mechanism of two bistrique of semiconductor crystal bar |
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| CN109746803B true CN109746803B (en) | 2024-05-31 |
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| CN110434725B (en) * | 2019-09-12 | 2024-05-03 | 黄石华旦机械制造有限公司 | Crankcase stator foot grinding device |
| CN115229599A (en) * | 2022-08-09 | 2022-10-25 | 首钢智新迁安电磁材料有限公司 | Grinding machine and rolling production line |
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| CN202934444U (en) * | 2012-10-17 | 2013-05-15 | 宁夏日晶新能源装备股份有限公司 | Grinding head feeding mechanism of numerical control polycrystal double end face grinding machine |
| CN203171371U (en) * | 2013-01-22 | 2013-09-04 | 大连连城数控机器股份有限公司 | Polycrystalline silicon block numerical control grinder |
| CN103084944A (en) * | 2013-01-22 | 2013-05-08 | 大连连城数控机器股份有限公司 | Polycrystalline silicon numerically controlled grinder |
| CN206277264U (en) * | 2016-11-25 | 2017-06-27 | 浙江晶盛机电股份有限公司 | A kind of Multi-function grinding power head device for silicon single crystal rod drum sanding equipment |
| CN207448182U (en) * | 2017-10-17 | 2018-06-05 | 浙江晶鸿精密机械制造有限公司 | A kind of multifunction dynamic bistrique for silicon single crystal rod drum sanding equipment |
| CN208614476U (en) * | 2018-07-05 | 2019-03-19 | 青岛高测科技股份有限公司 | A kind of grinding mechanism for grinding machine |
| CN108637801A (en) * | 2018-08-01 | 2018-10-12 | 中北大学 | A kind of ultrasonic vibration aided grinding device and its application |
| CN208556901U (en) * | 2018-08-01 | 2019-03-01 | 中北大学 | A kind of ultrasonic vibration aided grinding device |
| CN209737283U (en) * | 2019-03-27 | 2019-12-06 | 青岛高测科技股份有限公司 | High-efficient grinding mechanism of two bistriques of semiconductor crystal bar |
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